Integrated microwave acousto-optic frequency shifter on thin-film lithium niobate

Quantum and coherent signal transmission on a single-frequency channel via the electro-optic serrodyne technique

Fiber-optical networks are well established to accommodate global data traffic via coherent information transmission. The next generation of telecommunications will require the integration of quantum information into fiber-optic networks, e.g., for quantum key distribution. A promising and scalable route to enable quantum networking is encoding quantum information into the frequency of photons. While the cointegration of frequency-entangled photons with coherent information transmission is achieved via spectral multiplexing, more resource-efficient approaches are required. In this work, we introduce and experimentally demonstrate a transceiver concept that enables the transmission of coherent and frequency-entangled photons over a single-frequency channel. Our concept leverages the serrodyne technique via electro-optic phase modulation leading to very different dynamics for entangled and coherent photons. This enables temporal multiplexing of the respective signals. We demonstrate the preservation of entanglement over the channel in the presence of coherent light. Our approach reveals a strong potential for efficient bandwidth use in hybrid networks.

Poling-assisted hydrofluoric acid wet etching of thin-film lithium niobate

Thin-film lithium niobate (TFLN) has been extensively investigated for a wide range of applications due to continuous advancements in its fabrication methods. The recent emergence of high-fidelity ferroelectric domain poling of TFLN provides an opportunity for achieving a precise pattern control of ferroelectric domains and a subsequent pattern transfer to the TFLN layer using hydrofluoric acid (HF). In this work, we present, to the best of our knowledge, the first demonstration of z-cut TFLN microdisks using a poling-assisted HF wet etching approach. By applying intense electric fields, we are able to induce a domain inversion in the TFLN with a designed microdisk pattern. A HF solution is subsequently utilized to transfer the inverted domain pattern to the TFLN layer with the selective etching of -z LN, ultimately revealing the microdisks.

Silicon-Lattice-Matched Boron-Doped Gallium Phosphide: A Scalable Acousto-Optic Platform

The compact size, scalability, and strongly confined fields in integrated photonic devices enable new functionalities in photonic networking and information processing, both classical and quantum. Gallium phosphide (GaP) is a promising material for active integrated photonics due to its high refractive index, wide bandgap, strong nonlinear properties, and large acousto-optic figure of merit. This study demonstrates that silicon-lattice-matched boron-doped GaP (BGaP), grown at the 12-inch wafer scale, provides similar functionalities as GaP. BGaP optical resonators exhibit intrinsic quality factors exceeding 25,000 and 200,000 at visible and telecom wavelengths, respectively. It further demonstrates the electromechanical generation of low-loss acoustic waves and an integrated acousto-optic (AO) modulator. High-resolution spatial and compositional mapping, combined with ab initio calculations, indicate two candidates for the excess optical loss in the visible band: the silicon-GaP interface and boron dimers. These results demonstrate the promise of the BGaP material platform for the development of scalable AO technologies at telecom and provide potential pathways toward higher performance at shorter wavelengths.

Optomechanical ring resonator for efficient microwave-optical frequency conversion

Phonons traveling in solid-state devices are emerging as a universal excitation for coupling different physical systems. Phonons at microwave frequencies have a similar wavelength to optical photons in solids, enabling optomechanical microwave-optical transduction of classical and quantum signals. It becomes conceivable to build optomechanical integrated circuits (OMIC) that guide both photons and phonons and interconnect photonic and phononic devices. Here, we demonstrate an OMIC including an optomechanical ring resonator (OMR), where  co-resonant infrared photons and GHz phonons induce significantly enhanced interconversion. The platform is hybrid, using wide bandgap semiconductor gallium phosphide (GaP) for waveguiding and piezoelectric zinc oxide (ZnO) for phonon generation. The OMR features photonic and phononic quality factors of >1 × 105 and 3.2 × 103, respectively. The optomechanical interconversion between photonic modes achieved an internal conversion efficiency [Formula: see text] and a total device efficiency [Formula: see text] at a low acoustic pump power of 1.6 mW. The efficient conversion in OMICs enables microwave-optical transduction for quantum information and microwave photonics applications.

Frequency-angular resolving LiDAR using chip-scale acousto-optic beam steering

Thanks to its superior imaging resolution and range, light detection and ranging (LiDAR) is fast becoming an indispensable optical perception technology for intelligent automation systems including autonomous vehicles and robotics1-3. The development of next-generation LiDAR systems critically needs a non-mechanical beam-steering system that scans the laser beam in space. Various beam-steering technologies4 have been developed, including optical phased array5-8, spatial light modulation9-11, focal plane switch array12,13, dispersive frequency comb14,15 and spectro-temporal modulation16. However, many of these systems continue to be bulky, fragile and expensive. Here we report an on-chip, acousto-optic beam-steering technique that uses only a single gigahertz acoustic transducer to steer light beams into free space. Exploiting the physics of Brillouin scattering17,18, in which beams steered at different angles are labelled with unique frequency shifts, this technique uses a single coherent receiver to resolve the angular position of an object in the frequency domain, and enables frequency-angular resolving LiDAR. We demonstrate a simple device construction, control system for beam steering and frequency domain detection scheme. The system achieves frequency-modulated continuous-wave ranging with an 18° field of view, 0.12° angular resolution and a ranging distance up to 115 m. The demonstration can be scaled up to an array realizing miniature, low-cost frequency-angular resolving LiDAR imaging systems with a wide two-dimensional field of view. This development represents a step towards the widespread use of LiDAR in automation, navigation and robotics.

Wafer-scale heterogeneous integration of thin film lithium niobate on silicon-nitride photonic integrated circuits with low loss bonding interfaces

Silicon nitride (Si₃N₄) is a versatile waveguide material platform for CMOS foundry-based photonic integrated circuits (PICs) with low loss and high-power handling. The range of applications enabled by this platform is significantly expanded with the addition of a material with large electro-optic and nonlinear coefficients such as lithium niobate. This work examines the heterogeneous integration of thin-film lithium-niobate (TFLN) on silicon-nitride PICs. Bonding approaches are evaluated based on the interface used (SiO₂, Al₂O₃ and direct) to form hybrid waveguide structures. We demonstrate low losses in chip-scale bonded ring resonators of 0.4 dB/cm (intrinsic Q = 8.19 × 10⁵). In addition, we are able to scale the process to demonstrate bonding of full 100-mm TFLN wafers to 200-mm Si₃N₄ PIC wafers with high layer transfer yield. This will enable future integration with foundry processing and process design kits (PDKs) for applications such as integrated microwave photonics and quantum photonics.

Lithium niobate photonics: Unlocking the electromagnetic spectrum

Lithium niobate (LN), first synthesized 70 years ago, has been widely used in diverse applications ranging from communications to quantum optics. These high-volume commercial applications have provided the economic means to establish a mature manufacturing and processing industry for high-quality LN crystals and wafers. Breakthrough science demonstrations to commercial products have been achieved owing to the ability of LN to generate and manipulate electromagnetic waves across a broad spectrum, from microwave to ultraviolet frequencies. Here, we provide a high-level Review of the history of LN as an optical material, its different photonic platforms, engineering concepts, spectral coverage, and essential applications before providing an outlook for the future of LN.

High-Q Thin-Film Lithium Niobate Microrings Fabricated with Wet Etching

Thin-film lithium niobate (TFLN) has been widely used in electro-optic modulators, acoustic--optic modulators, electro-optic frequency combs, and nonlinear wavelength converters owing to the excellent optical properties of lithium niobate. The performance of these devices is highly dependent on the fabrication quality of TFLN. Although state-of-the-art TFLN microrings with an intrinsic quality factor (Q-factor) exceeding 1 × 10⁷ have been realized by inductively coupled plasma-reactive ion etching (ICP-RIE) and chemical mechanical polishing (CMP), ICP-RIE has moderate throughput, moderate reproducibility, and high cost in etching TFLN, while CMP features moderate throughput and low cost in etching TFLN. Here, a wet etching method for TFLN, leading to the fabrication of a micro-racetrack with an intrinsic Q-factor of over 9.27 × 10⁶ is developed. The suitability of this method to fabricate a narrow coupling gap between the bus waveguide and microring enables the coupling conditions of the microring to be customized. This method features a high throughput, a high reproducibility, and a low cost in etching TFLN, showing the potential to boost the mass production of integrated LN photonic devices with high fidelity and affordability dramatically.

Electrically induced adiabatic frequency conversion in an integrated lithium niobate ring resonator

Changing the frequency of light outside the laser cavity is essential for an integrated photonics platform, especially when the optical frequency of the on-chip light source is fixed or challenging to be tuned precisely. Previous on-chip frequency conversion demonstrations of multiple GHz have limitations of tuning the shifted frequency continuously. To achieve continuous on-chip optical frequency conversion, we electrically tune a lithium niobate ring resonator to induce adiabatic frequency conversion. In this work, frequency shifts of up to 14.3 GHz are achieved by adjusting the voltage of an RF control. With this technique, we can dynamically control light in a cavity within its photon lifetime by tuning the refractive index of the ring resonator electrically.

Efficient acousto-optic modulation using a microring resonator on a thin-film lithium niobate-chalcogenide hybrid platform

This Letter presents the first, to the best of our knowledge, thin-film lithium niobate-chalcogenide based microring acousto-optic modulator where an interdigital transducer and a chalcogenide strip waveguide are integrated on X-cut thin-film lithium niobate. The microring resonator exhibits a high loaded quality factor of 5 × 10⁵. The developed hybrid acousto-optic modulator with an interaction length of 120 µm demonstrates an effective half-wave voltage of only 1.74 V, which corresponds to a voltage-length product of 0.02 V•cm. The performance of the acousto-optic modulator demonstrated on the unsuspended thin-film lithium niobate-chalcogenide waveguide platform is on par with that obtained from an acoustic cavity assisted homogeneous lithium niobate counterpart.

Acousto-optic modulators integrated on-chip

Acousto-optic devices that use radio frequency mechanical waves to manipulate light are critical components in many optical systems. Here, the researchers bring acousto-optic devices on-chip and make them more efficient for integrated photonic circuits.

Proposal for collinear integrated acousto-optic tunable filters featuring ultrawide tuning ranges and multi-band operations

Integrated optical tunable filters are key components for a wide spectrum of applications, including optical communications and interconnects, spectral analysis, and tunable light sources, among others. Compared with their thermo-optic counterparts, integrated acousto-optic (AO) tunable filters provide a unique approach to achieve superior performance, including ultrawide continuous tuning ranges of hundreds of nm, low power consumption of sub-mW and fast tuning speed of sub-µs. Based on suspended one-dimensional (1D) AO waveguides in the collinear configuration, we propose and theoretically investigate an innovative family of integrated AO tunable filters (AOTFs) on thin-film lithium niobate. The AO waveguides perform as tunable wavelength-selective narrow-band polarization rotators, where highly efficient conversion between co-propagating TE₀ and TM₀ modes is enabled by the torsional acoustic A₁ mode, which can be selectively excited by a novel antisymmetric wavefront interdigital transducer. Furthermore, we systematically and quantitatively explore the possibilities of exciting modulated acoustic waves, which contain multiple frequency components, along the AO waveguide to achieve independently reconfigurable multi-band operations, with tunable time-variant spectral shapes. By incorporating a complete set of ultrawide-band polarization-handling components, we have proposed and theoretically investigated several representative monolithic AOTF configurations, featuring different arrangements of single or cascaded identical AO waveguides. One of the present AOTF designs exhibits a theoretical linewidth of ∼8 nm (∼4 nm), a sidelobe suppression ratio of ∼75 dB, and theoretically no excess loss at the center wavelength of 1550 nm (1310 nm), with an ultrawide tuning range of 1.25-1.65 µm (from O-band to L-band), a fast tuning speed of 0.14 µs, and a low power consumption of a few mW.

Light Modulation in Silicon Photonics by PZT Actuated Acoustic Waves

Tailoring the interaction between light and sound has opened new possibilities in photonic integrated circuits (PICs) that range from achieving quantum control of light to high-speed information processing. However, the actuation of sound waves in Si PICs usually requires integration of a piezoelectric thin film. Lead zirconate titanate (PZT) is a promising material due to its strong piezoelectric and electromechanical coupling coefficient. Unfortunately, the traditional methods to grow PZT on silicon are detrimental for photonic applications due to the presence of an optical lossy intermediate layer. In this work, we report integration of a high quality PZT thin film on a silicon-on-insulator (SOI) photonic chip using an optically transparent buffer layer. We demonstrate acousto-optic modulation in silicon waveguides with the PZT actuated acoustic waves. We fabricate interdigital transducers (IDTs) on the PZT film with a contact photolithography and electron-beam lithography to generate the acoustic waves in MHz and GHz ranges, respectively. We obtain a V _π L ∼ 3.35 V·cm at 576 MHz from a 350 nm thick gold (Au) IDT with 20 finger-pairs. After taking the effect of mass-loading and grating reflection into account, we measured a V _π L ∼ 3.60 V·cm at 2 GHz from a 100 nm thick aluminum (Al) IDT consisting of only four finger-pairs. Thus, without patterning the PZT film nor suspending the device, we obtained figures-of-merit comparable to state-of-the-art modulators based on SOI, making it a promising candidate for a broadband and efficient acousto-optic modulator for future integration.

Highly efficient acousto-optic modulation using nonsuspended thin-film lithium niobate-chalcogenide hybrid waveguides

A highly efficient on-chip acousto-optic modulator is as a key component and occupies an exceptional position in microwave-to-optical conversion. Homogeneous thin-film lithium niobate is preferentially employed to build the suspended configuration for the acoustic resonant cavity, with the aim of improving the modulation efficiency of the device. However, the limited cavity length and complex fabrication recipe of the suspended prototype restrain further breakthroughs in modulation efficiency and impose challenges for waveguide fabrication. In this work, based on a nonsuspended thin-film lithium niobate-chalcogenide glass hybrid Mach-Zehnder interferometer waveguide platform, we propose and demonstrate a built-in push-pull acousto-optic modulator with a half-wave-voltage-length product V_πL as low as 0.03 V cm that presents a modulation efficiency comparable to that of a state-of-the-art suspended counterpart. A microwave modulation link is demonstrated using our developed built-in push-pull acousto-optic modulator, which has the advantage of low power consumption. The nontrivial acousto-optic modulation performance benefits from the superior photoelastic property of the chalcogenide membrane and the completely bidirectional participation of the antisymmetric Rayleigh surface acoustic wave mode excited by the impedance-matched interdigital transducer, overcoming the issue of low modulation efficiency induced by the incoordinate energy attenuation of acoustic waves applied to the Mach-Zehnder interferometer with two arms in traditional push-pull acousto-optic modulators.

Single-frequency integrated laser on erbium-doped lithium niobate on insulator

The erbium-doped lithium niobate on insulator (Er:LNOI) platform has great promise in the application of telecommunication, microwave photonics, and quantum photonics, due to its excellent electro-optic, piezo-electric, nonlinear nature, as well as the gain characteristics in the telecommunication C-band. Here, we report a single-frequency Er:LNOI integrated laser based on a dual-cavity structure. Facilitated by the Vernier effect and gain competition, the single-frequency laser can operate stably at 1531 nm wavelength with a 1484 nm pump laser. The output laser has a power of 0.31 µW, a linewidth of 1.2 MHz, and a side mode suppression ratio of 31 dB. Our work allows the direct integration of this laser source with existing LNOI components and paves the way for a fully integrated LNOI system.

Visible light photonic integrated Brillouin laser

Narrow linewidth visible light lasers are critical for atomic, molecular and optical (AMO) physics including atomic clocks, quantum computing, atomic and molecular spectroscopy, and sensing. Stimulated Brillouin scattering (SBS) is a promising approach to realize highly coherent on-chip visible light laser emission. Here we report demonstration of a visible light photonic integrated Brillouin laser, with emission at 674 nm, a 14.7 mW optical threshold, corresponding to a threshold density of 4.92 mW μm^-2, and a 269 Hz linewidth. Significant advances in visible light silicon nitride/silica all-waveguide resonators are achieved to overcome barriers to SBS in the visible, including 1 dB/meter waveguide losses, 55.4 million quality factor (Q), and measurement of the 25.110 GHz Stokes frequency shift and 290 MHz gain bandwidth. This advancement in integrated ultra-narrow linewidth visible wavelength SBS lasers opens the door to compact quantum and atomic systems and implementation of increasingly complex AMO based physics and experiments.

Superconducting acousto-optic phase modulator

We report the development of a superconducting acousto-optic phase modulator fabricated on a lithium niobate substrate. A titanium-diffused optical waveguide is placed in a surface acoustic wave resonator, where the electrodes for mirrors and an interdigitated transducer are made of a superconducting niobium titanium nitride thin film. The device performance is evaluated as a substitute for the current electro-optic modulators, with the same fiber coupling scheme and comparable device size. Operating the device at a cryogenic temperature (T = 8 K), we observe the length-half-wave-voltage (length-Vπ) product of 1.78 V·cm. Numerical simulation is conducted to reproduce and extrapolate the performance of the device. An optical cavity with mirror coating on the input/output facets of the optical waveguide is tested for further enhancement of the modulation efficiency. A simple extension of the current device is estimated to achieve an efficient modulation with Vπ = 0.27 V.

Study of Type II SPDC in Lithium Niobate for High Spectral Purity Photon Pair Generation

Recent advances of high-quality lithium niobate (LN) on insulator technology have revitalized the progress of novel chip-integrated LN-based photonic devices and accelerated application research. One of the promising technologies of interest is the generation of entangled photon pairs based on spontaneous parametric down-conversion (SPDC) in LNs. In this paper, we investigated, theoretically and numerically, Type II SPDC in two kinds of LNs—undoped and 5-mol% MgO doped LNs. In each case, both non-poled and periodically poled crystals were considered. The technique is based on the SPDC under Type II extended phase matching, where the phase matching and the group velocity matching are simultaneously achieved between interacting photons. The proposed approach has not yet been reported for LNs. We discussed all factors required to generate photon pairs in LNs, in terms of the beam propagation direction, the spectral position of photons, and the corresponding effective nonlinearities and walk-offs. We showed that the spectral positions of the generated photon pairs fall into the mid-infrared region with high potential for free-space quantum communication, spectroscopy, and high-sensitivity metrology. The joint spectral analyses showed that photon pairs can be generated with high purities of 0.995–0.999 with proper pump filtering.

Stable tuning of photorefractive microcavities using an auxiliary laser

Cavity nonlinear optics enables intriguing physical phenomena to occur at micro- or nano-scales with modest input powers. While this enhances capabilities in applications such as comb generation, frequency conversion, and quantum optics, undesired nonlinear effects including photorefraction and thermal bistability are exacerbated. In this Letter, we propose and demonstrate a highly effective method of achieving cavity stabilization using an auxiliary laser for controlling photorefraction in a z-cut periodically poled lithium niobate (LN) microcavity system. Our numerical study accurately models the photorefractive effect under high input powers, guiding future analyses and development of LN microcavity systems.