Oxidation ruled transition from normal to anomalous periodic structures with femtosecond laser irradiation on Cr/Si films

Regulating Morphology and Composition of Laser-Induced Periodic Structures on Titanium Films with Femtosecond Laser Wavelength and Ambient Environment

Recently, highly uniform thermochemical laser-induced periodic surface structures (TLIPSS) have attracted significant research attention due to their practical applicability for upscalable fabrication of periodic surface morphologies important for surface functionalization, diffraction optics, sensors, etc. When processed by femtosecond (fs) laser pulses in oxygen-containing environments, TLIPSS are formed on the material surface as parallel protrusions upon local oxidation in the maxima of the periodic intensity pattern coming from interference of the incident and scattered waves. From an application point of view, it is important to control both the TLIPSS period and nanoscale morphology of the formed protrusions that can be expectedly achieved by scalable shrinkage of the laser-processing wavelength as well as by varying the ambient environment. However, so far, the fabrication of uniform TLIPSS was reported only for near-IR wavelength in air. In this work, TLIPSS formation on the surface of titanium (Ti) films was systematically studied using near-IR (1026 nm), visible (513 nm) and UV (256 nm) wavelengths revealing linear scalability of the protrusion period versus the fs-laser wavelength. By changing the ambient environment from air to vacuum (10⁻² atm) and pressurized nitrogen gas (2.5 atm) we demonstrate tunability of the composition and morphology of the Ti TLIPSS protrusions. In particular, Raman spectroscopy revealed formation of TiN together with dominating TiO₂ (rutile phase) in the TLIPSS protrusions produced in the nitrogen-rich atmosphere.

Ten Open Questions about Laser-Induced Periodic Surface Structures

Laser-induced periodic surface structures (LIPSS) are a simple and robust route for the nanostructuring of solids that can create various surface functionalities featuring applications in optics, medicine, tribology, energy technologies, etc. While the current laser technologies already allow surface processing rates at the level of m2/min, industrial applications of LIPSS are sometimes hampered by the complex interplay between the nanoscale surface topography and the specific surface chemistry, as well as by limitations in controlling the processing of LIPSS and in the long-term stability of the created surface functions. This Perspective article aims to identify some open questions about LIPSS, discusses the pending technological limitations, and sketches the current state of theoretical modelling. Hereby, we intend to stimulate further research and developments in the field of LIPSS for overcoming these limitations and for supporting the transfer of the LIPSS technology into industry.

Thermochemical Laser-Induced Periodic Surface Structures Formation by Femtosecond Laser on Hf Thin Films in Air and Vacuum

Thermochemical laser-induced periodic surface structures (TLIPSS) are a relatively new type of periodic structures formed in the focal area of linear polarized laser radiation by the thermally stimulated reaction of oxidation. The high regularity of the structures and the possibility of forming high-ordered structures over a large area open up possibilities for the practical application for changing the optical and physical properties of materials surface. Since the mechanism of formation of these structures is based on a chemical oxidation reaction, an intriguing question involves the influence of air pressure on the quality of structure formation. This paper presents the results on the TLIPSS formation on a thin hafnium film with fs IR laser radiation at various ambient air pressures from 4 Torr to 760 Torr. Despite the decrease in the oxygen content in the ambient environment by two orders of magnitude, the formation of high-ordered TLIPSS (dispersion in the LIPSS orientation angle δθ < 5°) with a period of ≈700 nm occurs within a wide range of parameters variation (laser power, scanning speed). This behavior of TLIPSS formation is in agreement with experimental data obtained earlier on the study of the kinetics of high-temperature oxidation of hafnium at various oxygen pressures.