Large-range and high-precision autofocus method based on an annular DOE for a laser direct writing system

Autofocusing of laser lithography through the crosshair projection method

In laser direct writing lithography, there is not any image information from the sample surface, which makes it difficult to find the position of the focal plane. To overcome the problem, an autofocusing through the crosshair projection method is proposed in this work. The crosshair on the reticle is inserted into the lighting path and imaged onto the sample surface. The addition of the crosshair projection increases the image information from the sample surface, meeting the requirement for the image information in focusing and improving the focusing environment. Furthermore, this work presents what we believe to be a new division of the focusing curve based on the range of the perpendicular feature extracted from the crosshair projection during the focusing process. The perpendicular feature can be extracted from the crosshair projection in the focusing zone but not in the flat zone. Compared with the traditional division, this new division enables the use of the perpendicular feature to directly determine the zone of the current sample position and to find the focusing zone during the focusing process. This can completely filter out the interference of local fluctuations in the flat zone, greatly facilitating the sample focusing. The autofocusing process was designed based on this division, and experiments were carried out accordingly. The focusing accuracy is about 0.15 µm, which is in the range of the depth of focus of the optical system. The results show that the proposed method provides a good solution to achieve accurate focusing based on the crosshair projection image from the sample surface in laser lithography.

Dual-mode LiDAR SoC with an on-chip interframe filter and common optical platform design for keystone correction and auto-focus

This paper presents an innovative methodology that incorporates direct time-of-flight technology into intelligent sensing for projectors, along with a lightweight, dual-mode optically integrated LiDAR system. The proposed LiDAR system-on-chip, which utilizes a single-photon avalanche diode and time to digital converter with 0.13 µm bipolar CMOS DMOS technology, integrates an on-chip interframe filter, a common optical platform design, and a lightweight keystone correction assist algorithm. This comprehensive integration enables the system to achieve a measurement range of 11 m with 1% relative precision (simulations indicate the potential to achieve 30 m) in auto-focus mode. Additionally, it facilitates high frame-per-second keystone correction within a range of ±30∘ with an error of ±2∘ under illumination conditions of 20 klux.

Rectangular Amplitude Mask-Based Auto-Focus Method with a Large Range and High Precision for a Micro-LED Wafer Defects Detection System

Auto-focus technology plays an important role in the Micro-LED wafer defects detection system. How to accurately measure the defocus amount and the defocus direction of the Micro-LED wafer sample in a large linear range is one of the keys to realizing wafer defects detection. In this paper, a large range and high-precision auto-focus method based on a rectangular amplitude mask is proposed. A rectangular amplitude mask without a long edge is used to modulate the shape of the incident laser beams so that the spot shape distribution of the reflected laser beam on the sensor changes with the defocus amount of the wafer sample. By calculating the shape of the light spots, the defocus amount and the defocus direction can be obtained at the same time. The experimental results show that under the 20× microscopy objective, the linear range of the auto-focus system is 480 μm and the accuracy can reach 1 μm. It can be seen that the automatic focusing method proposed in this paper has the advantages of large linear range, high accuracy, and compact structure, which can meet the requirements of the Micro-LED wafer defects detection equipment.

An autofocusing method for dynamic surface-enhanced Raman spectroscopy detection realized by optimized hill-climbing algorithm with long time stable hotspots

In the manual dynamic surface-enhanced Raman spectroscopy (D-SERS) detection process, it is difficult to focus on sample drop due to the constantly changing hotspot and easy judgment method. In this paper, we proposed an automatic focusing method based on long time stable hotspot with aid of optimization of hill-climbing algorithm and achieved on a designed device. First, set up a high temperature accelerating evaporation process to obtain hotspot and then cool to a low temperature rapidly to maintain it. Then, the spectral intensity was used as a focus of feedback signal in optimized hill-climbing algorithm to drive the sample stage to move up and down to adjust the depth of the laser on the samples to realize automatic focusing. As a result, the hotspot can be maintained for 5 min, and the autofocusing result can be achieved within 9 s, while the sensitivity was improved with two orders of magnitude in D-SERS detection of crystal violet (CV) compared with manual focusing.