High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35-50nm

High reflectance ta-C coatings in the extreme ultraviolet

The extreme ultraviolet (EUV) reflectance of amorphous tetrahedrally coordinated carbon films (ta-C) prepared by filtered cathodic vacuum arc was measured in the 30-188-nm range at near normal incidence. The measured reflectance of films grown with average ion energies in the ~70-140-eV range was significantly larger than the reflectance of a C film grown with average ion energy of ~20 eV and of C films deposited by sputtering or evaporation. The difference is attributed to a large proportion of sp3 atom bonding in the ta-C film. This high reflectance is obtained for films deposited onto room-temperature substrates. The reflectance of ta-C films is higher than the standard single-layer coating materials in the EUV spectral range below 130 nm. A self-consistent set of optical constants of ta-C films was obtained with the Kramers-Krönig analysis using ellipsometry measurements in the 190-950 nm range and the EUV reflectance measurements. These optical constants allowed calculating the EUV reflectance of ta-C films at grazing incidence for applications such as free electron laser mirrors.

Tabletop single-shot extreme ultraviolet Fourier transform holography of an extended object

We demonstrate single and multi-shot Fourier transform holography with the use of a tabletop extreme ultraviolet laser. The reference wave was produced by a Fresnel zone plate with a central opening that allowed the incident beam to illuminate the sample directly. The high reference wave intensity allows for larger objects to be imaged compared to mask-based lensless Fourier transform holography techniques. We obtain a spatial resolution of 169 nm from a single laser pulse and a resolution of 128 nm from an accumulation of 20 laser pulses for an object ~11x11μm(2) in size. This experiment utilized a tabletop extreme ultraviolet laser that produces a highly coherent ~1.2 ns laser pulse at 46.9 nm wavelength.

Collimation of dense plasma jets created by low-energy laser pulses and studied with soft x-ray laser interferometry

The physical mechanisms driving the collimation of dense plasma jets created by low-energy ( approximately 0.6 J) laser pulse irradiation of triangular grooves were studied for different target materials using soft-x-ray interferometry and hydrodynamic code simulations. The degree of collimation of jets created by irradiating C, Al, Cu, and Mo targets at intensities of I=1x10(12) W cm(-2) with 120 ps laser pulses was observed to increase significantly with the atomic number. Radiation cooling is found to be the cause of the increased collimation, while the main effect of the increase in mass is to slow the jet evolution.

Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm

A new type of multilayer coatings with narrowband reflection properties and peaked in the approximately 50- 92 nm spectral range has been developed. Multilayers are based on Yb, Al, and SiO films and they have been prepared by thermal evaporation. Efficient multilayers based on Yb and Al, with an SiO protective layer were prepared, but they developed a dendrite structure, which was attributed to the reactivity between Al and Yb. Multilayers based on Yb and Al, with both SiO protective and barrier layers, resulted in efficient reflective filters, with no observable dendrite growth. The peak reflectance of aged multilayers was of the order of approximately 0.20, with bandwidths in the range of 12 to 22 nm FWHM.

Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light

Magnesium/silicon carbide (Mg/SiC) multilayers have been fabricated with normal incidence reflectivity in the vicinity of 40% to 50% for wavelengths in the 25 to 50 nm wavelength range. However many applications, for example solar telescopes and ultrafast studies using high harmonic generation sources, desire larger bandwidths than provided by high reflectivity Mg/SiC multilayers. We investigate introducing a third material, Scandium, to create a tri-material Mg/Sc/SiC multilayer allowing an increase the bandwidth while maintaining high reflectivity.

Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications

We report on the performance, structure and stability of periodic multilayer films containing silicon carbide (SiC) and aluminum (Al) layers designed for use as reflective coatings in the extreme ultraviolet (EUV). We find that SiC/Al multilayers prepared by magnetron sputtering have low stress, good temporal and thermal stability, and provide good performance in the EUV, particularly for applications requiring a narrow spectral bandpass, such as monochromatic solar imaging. Transmission electron microscopy reveals amorphous SiC layers and polycrystalline Al layers having a strong <111> texture, and relatively large roughness associated with the Al crystallites. Fits to EUV reflectance measurements also indicate large interface widths, consistent with the electron microscopy results. SiC/Al multilayers deposited by reactive sputtering with nitrogen comprise Al layers that are nearly amorphous and considerably smoother than films deposited nonreactively, but no improvements in EUV reflectance were obtained.

Measurement of dysprosium optical constants in the 2-830 eV spectral range using a transmittance method, and compilation of the revised optical constants of lanthanum, terbium, neodymium, and gadolinium

The optical constants beta, delta of the complex refractive index (ñ = 1-delta+ibeta) of Dy were obtained in the 2-830 eV energy range using a novel transmittance method. Si/W/Dy/W films were deposited by dc-magnetron sputtering on Si photodiode substrates, and the transmittance was characterized using synchrotron radiation. The extinction coefficients beta of Dy and the transmittance of a Si capping layer and two W interface barrier layers as functions of energy were solved simultaneously using a nonlinear optimization routine. The measured transmittances of the capping and barrier layers were primarily used as indicators for any flaws in the transmittance results. The dispersion coefficients delta of Dy were calculated using the Kramers-Kronig integral, and a complete set of beta values required for this integral was obtained by combining the present data with data from the literature. Sum rule tests on Dy show some deficiencies in the present data, which may be attributed to lower film density compared with the bulk value. Similar procedures were applied to previously measured transmittances of B4C/La, Si/Tb, Si/Nd, and Si/Gd films, where B4C or Si were used as capping layers on those reactive rare-earth films. The improved sets of transmittance values of B(4)C and Si capping layers were used as input in the optimization routine to solve for more accurate beta values of La, Tb, Nd, and Gd. The revised optical constants of these materials, tested for consistency with partial sum rules, are also reported.

Explosion of xenon clusters driven by intense femtosecond pulses of extreme ultraviolet light

The explosions of large xenon clusters irradiated by intense, femtosecond extreme ultraviolet pulses at a wavelength of 38 nm have been studied. Using high harmonic generation from a 35 fs laser, clusters have been irradiated by extreme ultraviolet pulses at intensity approaching 10;{11} W/cm;{2}. Charge states up to Xe8+ are observed, states well above those produced by single atom illumination, indicating that plasma continuum lowering is important. Furthermore, the kinetic energy distribution of the exploding ions is consistent with a quasineutral hydrodynamic expansion, rather than a Coulomb explosion.

Dynamics of a dense laboratory plasma jet investigated using soft x-ray laser interferometry

The formation and evolution of a collisional aluminum plasma jet created by optical laser irradiation of triangular grooves with pulses of 120ps duration at an intensity of 1x10(12)W cm(-2) were studied with experiments and simulations. Series of high-contrast soft x-ray laser interferograms obtained with a 46.9nm laser mapped the plasma density evolution of an initially narrow plasma jet that expands along the symmetry plane and evolves into a broader plasma plume with significant side lobes. Two-dimensional simulations performed using the radiation hydrodynamic code HYDRA reveal that the jet formation is initiated by accelerated material ablated from the vertex and is augmented by the continual sequential arrival of wall material along the symmetry plane, where it collides and is redirected outward. Radiative cooling is identified as an important process in maintaining the collimation of the jet. These results demonstrate that well collimated collisional plasma jets with parameters in a range of interest can be generated with low-energy laser pulses (<1J) , opening the possibility of studying relevant plasma phenomena in a small laboratory setting.

Determination of optical constants of scandium films in the 20-1000 eV range

The transmittance of thin films of Sc deposited by evaporation in ultrahigh vacuum conditions has been investigated in the 20-1000 eV spectral range. Transmittance measurements were performed in situ on Sc layers that were deposited over grids coated with a C support film. Transmittance measurements were used to obtain the extinction coefficient of Sc films at each individual photon energy investigated. These data, along with the data available in the literature for the rest of the spectrum, were used to obtain the refractive index of Sc by means of the Kramers-Krönig analysis. Sum-rule tests indicated an acceptable consistency of the data.

Prediction and observation of tin and silver plasmas with index of refraction greater than one in the soft x-ray range

We present the calculated prediction and the experimental confirmation that doubly ionized Ag and Sn plasmas can have an index of refraction greater than one for soft x-ray wavelengths. Interferometry experiments conducted using a capillary discharge soft x-ray laser operating at a wavelength of confirm that in few times ionized laser-created plasmas of these elements the anomalous dispersion from bound electrons can dominate the free electron contribution, making the index of refraction greater than one. The results confirm that bound electrons can strongly influence the index of refraction of numerous plasmas over a broad range of soft x-ray wavelengths confirming recent observations. The understanding of index of refraction at short wavelengths will become even more essential during the next decade as x-ray free electron lasers will become available to probe a wider variety of plasmas at higher densities and shorter wavelengths.

Dynamics and fragmentation of van der Waals clusters: (H2O)n, (CH3OH)n, and (NH3)n upon ionization by a 26.5eV soft x-ray laser

A tabletop soft x-ray laser is applied for the first time as a high energy photon source for chemical dynamics experiments in the study of water, methanol, and ammonia clusters through time of flight mass spectroscopy. The 26.5 eV/photon laser (pulse time duration of approximately 1 ns) is employed as a single photon ionization source for the detection of these clusters. Only a small fraction of the photon energy is deposited in the cluster for metastable dissociation of cluster ions, and most of it is removed by the ejected electron. Protonated water, methanol, and ammonia clusters dominate the cluster mass spectra. Unprotonated ammonia clusters are observed in the protonated cluster ion size range 2< or =n< or =22. The unimolecular dissociation rate constants for reactions involving loss of one neutral molecule are calculated to be (0.6-2.7)x10(4), (3.6-6.0)x10(3), and (0.8-2.0)x10(4) s(-1) for the protonated water (9< or =n< or =24), methanol (5< or =n< or =10), and ammonia (5< or =n< or =18) clusters, respectively. The temperatures of the neutral clusters are estimated to be between 40 and 200 K for water clusters (10< or =n< or =21), and 50-100 K for methanol clusters (6< or =n< or =10). Products with losses of up to five H atoms are observed in the mass spectrum of the neutral ammonia dimer. Large ammonia clusters (NH(3))(n) (n>3) do not lose more than three H atoms in the photoionization/photodissociation process. For all three cluster systems studied, single photon ionization with a 26.5 eV photon yields near threshold ionization. The temperature of these three cluster systems increases with increasing cluster size over the above-indicated ranges.

SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging

Narrowband SiC/Tb and Si/Tb multilayers are fabricated with as much as a 23% normal-incidence reflectance near a 60 nm wavelength and spectral bandpass (FWHM) values of 9.4 and 6.5 nm, respectively. The structural properties of the films are investigated using extreme ultraviolet and x-ray reflectometry and transmission electron microscopy. Thermal stability is investigated in films annealed to as high as 300 degrees C. Because of their superior thermal stability, relatively high reflectance, and narrower spectral bandpass, Si/Tb multilayers are identified as optimal candidates for solar physics imaging applications, where the peak response can be tuned to important emission lines such as O v near 63.0 nm and Mg x near 61.0 nm. We describe our experimental procedures and results, discuss the implications of our findings, and outline prospects for improved performance.

Terbium-based extreme ultraviolet multilayers

We have fabricated periodic multilayers that comprise either Si/Tb or SiC/Tb bilayers, designed to operate as narrowband reflective coatings near 60 nm wavelength in the extreme ultraviolet (EUV). We find peak reflectance values in excess of 20% near normal incidence. The spectral bandpass of the best Si/Tb multilayer was measured to be 6.5 nm full width at half-maximum (FWHM), while SiC/Tb multilayers have a more broad response, of order 9.4 nm FWHM. Transmission electron microscopy analysis of Si/Tb multilayers reveals polycrystalline Tb layers, amorphous Si layers, and relatively large asymmetric amorphous interlayers. Thermal annealing experiments indicate excellent stability to 100 degrees C (1 h) for Si/Tb. These new multilayer coatings have the potential for use in normal incidence instrumentation in a region of the EUV where efficient narrowband multilayers have not been available until now. In particular, reflective Si/Tb multilayers can be used for solar physics applications where the coatings can be tuned to important emission lines such as O V near 63.0 nm and Mg X near 61.0 nm.

Nanoimaging with a compact extreme-ultraviolet laser

Images with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a free-standing imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.

Optical properties of scandium films in the far and the extreme ultraviolet

The optical properties of thin Sc films deposited in ultrahigh-vacuum conditions have been investigated in the 6.7-174.4-nm spectral range. We measured transmittance and multiangle reflectance in situ in the 53.6-174.4 nm spectral range and used these measurements to obtain the complex refractive index of a Sc film at every individual wavelength investigated. Transmittance measurements were made of Sc samples that were deposited over grids coated with a support C film. The transmittance and the extinction coefficient of Sc films at wavelengths shorter than 30 nm were measured ex situ. The ex situ samples were protected with an additional top C film before their removal from vacuum. To our knowledge, these are the first optical measurements of Sc films reported in the spectral ranges cited.

Damage to extreme-ultraviolet Sc/Si multilayer mirrors exposed to intense 46.9-nm laser pulses

The damage threshold and damage mechanism of extreme-ultraviolet Sc/Si multilayer mirror coatings are investigated with focused nanosecond pulses at 46.9-nm radiation from a compact capillary-discharge laser. Damage threshold fluences of approximately 0.08 J/cm2 are measured for coatings deposited on both borosilicate glass and Si substrates. The use of scanning and transmission electron microscopy and small-angle x-ray diffraction techniques reveals the thermal nature of the damage mechanism. The results are relevant to the use of newly developed high-flux extreme-ultraviolet sources in applications.

Efficient method for the determination of extreme-ultraviolet optical constants in reactive materials: application to scandium and titanium

The chemical reaction of a sample with atmospheric gases causes a significant error in the determinantion of the complex refractive index n = 1 - delta + ibeta in the extreme-ultraviolet region. The protection of samples removes this effect but hampers the interpretation of measurements. To overcome this difficulty, we derive the exact dependences on film thickness of the reflectivity and transmissivity of a protected film. These dependences greatly simplify the determination of delta and beta when the spectra of several films with different thickness and identical protection are measured. They also allow the verification of the delta(omega) obtained from the Kramers-Kronig relation and even make the Kramers-Kronig method unnecessary in many cases. As a practical application, the optical constants of Sc and Ti are determined at h omega = 18-70 eV and 18-99 eV, respectively. The essential feature of our experimental technique is deposition of a film sample directly on a silicon photodiode that allows easy operation with both thin (approximately 10-nm) and thick (approximately 100-nm) films. The comparison of calculated reflectivities of Si-Sc multilayers with the measured values shows the high accuracy of the determined delta(omega) and beta(omega).

Two-dimensional effects in laser-created plasmas measured with soft-x-ray laser interferometry

Soft-x-ray laser interferograms of laser-created plasmas generated at moderate irradiation intensities (1 x 10(11)-7 x 10(12) W cm(-2)) with lambda=1.06 microm light pulses of approximately 13-ns-FWHM (full width at half maximum) duration and narrow focus (approximately 30 microm) reveal the unexpected formation of an inverted density profile with a density minimum on axis and distinct plasma sidelobes. Model simulations show that this strong two-dimensional hydrodynamic behavior is essentially a universal phenomena that is the result of plasma radiation induced mass ablation and cooling in the areas surrounding the focal spot.

Generation and focusing of submilliwatt-average-power 50-nm pulses by the fifth harmonic of a KrF laser

We demonstrate generation and focusing of 49.7-nm pulses with an average power of 0.1 mW at 200 Hz and with a pulse energy of >1 microJ at 10 Hz by the fifth harmonic of a femtosecond KrF laser. The fifth harmonic is selected and focused with a concave Sc/Si multilayer mirror to a diameter of 2microm, resulting in a peak intensity of 0.5 TW/cm(2), which will make extreme-ultraviolet nonlinear optics feasible. A novel single-shot linear in situ method of spot-size measurement by use of self-trapped exciton luminescence is also demonstrated.

Sub-quarter-wave multilayer coatings with high reflectance in the extreme ultraviolet

Multilayer coatings with a small number of layers were designed and prepared to provide an increase in normal-incidence reflectance in the extreme ultraviolet compared with the reflectance of available single-layer coatings, namely, SiC, B4C, and Ir. Multilayers were designed to produce coatings with the highest possible reflectance at 91.2 and at 58.4 nm. At these wavelengths all the materials absorb radiation strongly, but still a reflectance enhancement can be obtained by means of sub-quarter-wave multilayer coatings with two or more different materials. Sub-quarter-wave multilayer coatings based on Al, MgF2, diamondlike carbon, B4C, SiC, and Ir showed higher reflectance than single-layer coatings of SiC and B4C not only at the target wavelength but in a wide band ranging from 50 nm to the 121.6-nm H Lyman-alpha line. Multilayer coatings suffered some reflectance degradation over time. However, after approximately 80-100 days of aging in a desiccator, the reflectance for the multilayer coatings was greater than for the single-layer coatings.

Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38-nm wavelength

A Sc-Si multilayer coating was applied to a replica of the 3600 groove/mm grating, developed for the SO82A spectroheliograph that flew on the Skylab mission, for the purpose of enhancing the normal-incidence efficiency in the extreme-ultraviolet region. The efficiency, measured at an angle of incidence of 6 degrees with synchrotron radiation, had a maximum value of 7.2% at a wavelength of 38 nm and was a factor of 3 higher than the efficiency of the gold-coated Skylab grating. The measured efficiency of the Sc-Si grating was in good agreement with the efficiency calculated by use of the modified integral method.

Dense plasma diagnostics with an amplitude-division soft-x-ray laser interferometer based on diffraction gratings

We report the demonstration of an amplitude-division soft-x-ray interferometer that can be used to generate high-contrast interferograms at the wavelength of any of the saturated soft-x-ray lasers (5.6-46.9 nm) that are available at present. The interferometer, which utilizes grazing-incidence diffraction gratings as beam splitters in a modified Mach-Zehnder configuration, was used in combination with a tabletop 46.9-nm laser to probe a large-scale (~2.7-mm-long) laser-created plasma.

Focusing of a tabletop soft-x-ray laser beam and laser ablation

We focused the beam of a high-repetition-rate capillary-discharge tabletop laser operating at a wavelength of 46.9 nm, using a spherical Si/Sc multilayer mirror. The energy densities significantly exceeded the thresholds for the ablation of metals. Single-shot laser ablation patterns were used in combination with ray-tracing computations to characterize the focused beam. The radiation intensity within the 2-mum -diameter central region of the focal spot was estimated to be approximately 10(11)W/cm(2), with a corresponding energy density of ~100 J/cm(2).

Soft-x-ray laser interferometry of a pinch discharge using a tabletop laser

We have used a tabletop soft-x-ray laser and a wave-front division interferometer to probe the plasma of a pinch discharge. A very compact capillary discharge-pumped Ne-like Ar laser emitting at 46.9 nm was combined with a wave division interferometer based on Lloyd's mirror and Sc-Si multilayer-coated optics to map the electron density in the cathode region of the discharge. This demonstration of the use of tabletop soft-x-ray laser in plasma interferometry could lead to the widespread use of these lasers in the diagnostics of dense plasmas.

Soft-x-ray laser interferometry of a plasma with a tabletop laser and a Lloyd's mirror

We report what is believed to be the first demonstration of soft-x-ray interferometry of a plasma with a tabletop soft-x-ray laser. A Lloyd's mirror interferometer was used in combination with a very compact lambda = 46.9 nm capillary-discharge-pumped laser to map the electron density in the cathode region of a pinch plasma.