Widely separated optical Kerr parametric oscillation in AlN microrings

Advancing on-chip Kerr optical parametric oscillation towards coherent applications covering the green gap

Optical parametric oscillation (OPO) in Kerr microresonators can efficiently transfer near-infrared laser light into the visible spectrum. To date, however, chromatic dispersion has mostly limited output wavelengths to >560 nm, and robust access to the whole green light spectrum has not been demonstrated. In fact, wavelengths between 532 nm and 633 nm, commonly referred to as the "green gap", are especially challenging to produce with conventional laser gain. Hence, there is motivation to extend the Kerr OPO wavelength range and develop reliable device designs. Here, we experimentally show how to robustly access the entire green gap with Kerr OPO in silicon nitride microrings pumped near 780 nm. Our microring geometries are optimized for green-gap emission; in particular, we introduce a dispersion engineering technique, based on partially undercutting the microring, which not only expands wavelength access but also proves robust to variations in resonator dimensions. Using just four devices, we generate >150 wavelengths evenly distributed throughout the green gap, as predicted by our dispersion simulations. Moreover, we establish the usefulness of Kerr OPO to coherent applications by demonstrating continuous frequency tuning (>50 GHz) and narrow optical linewidths (<1 MHz). Our work represents an important step in the quest to bring nonlinear nanophotonics and its advantages to the visible spectrum.

On-chip Kerr parametric oscillation with integrated heating for enhanced frequency tuning and control

Nonlinear microresonators can convert light from chip-integrated sources into new wavelengths within the visible and near-infrared spectrum. For most applications, such as the interrogation of quantum systems with specific transition wavelengths, tuning the frequency of converted light is critical. Nonetheless, demonstrations of wavelength conversion have mostly overlooked this metric. Here, we apply efficient integrated heaters to tune the idler frequency produced by the Kerr optical parametric oscillation in a silicon nitride microring across a continuous 1.5 terahertz range. Finally, we suppress idler frequency noise between DC and 5 kHz by several orders of magnitude using feedback to the heater drive.

Threshold and Laser Conversion in Nanostructured-Resonator Parametric Oscillators

We explore optical parametric oscillation (OPO) in nanophotonic resonators, enabling arbitrary, nonlinear phase matching and nearly lossless control of energy conversion. Such pristine OPO laser converters are determined by nonlinear light-matter interactions, making them both technologically flexible and broadly reconfigurable. We utilize a nanostructured inner-wall modulation in the resonator to achieve universal phase matching for OPO-laser conversion, but coherent backscattering also induces a counterpropagating pump laser. This depletes the intraresonator optical power in either direction, increasing the OPO threshold power and limiting laser-conversion efficiency, the ratio of optical power in target signal and idler frequencies to the pump. We develop an analytical model of this system that emphasizes an understanding of optimal laser-conversion and threshold behaviors, and we use the model to guide experiments with nanostructured-resonator OPO laser-conversion circuits, fully integrated on chip and unlimited by group-velocity dispersion. Our Letter demonstrates the fundamental connection between OPO laser-conversion efficiency and the resonator coupling rate, subject to the relative phase and power of counterpropagating pump fields. We achieve (40±4)  mW of on-chip power, corresponding to (41±4)% conversion efficiency, and discover a path toward near-unity OPO laser-conversion efficiency.

Octave-spanning tunable infrared parametric oscillators in nanophotonics

Widely tunable coherent sources are desirable in nanophotonics for a multitude of applications ranging from communications to sensing. The mid-infrared spectral region (wavelengths beyond 2 μm) is particularly important for applications relying on molecular spectroscopy. Among tunable sources, optical parametric oscillators typically offer some of the broadest tuning ranges; however, their implementations in nanophotonics have been limited to narrow tuning ranges in the infrared or to visible wavelengths. Here, we surpass these limits in dispersion-engineered periodically poled lithium niobate nanophotonics and demonstrate ultrawidely tunable optical parametric oscillators. Using 100 ns pulses near 1 μm, we generate output wavelengths tunable from 1.53 μm to 3.25 μm in a single chip with output powers as high as tens of milliwatts. Our results represent the first octave-spanning tunable source in nanophotonics extending into the mid-infrared, which can be useful for numerous integrated photonic applications.

Hyperparametric Oscillation via Bound States in the Continuum

Optical hyperparametric oscillation based on the third-order nonlinearity is one of the most significant mechanisms to generate coherent electromagnetic radiation and produce quantum states of light. Advances in dispersion-engineered high-Q microresonators allow for generating signal waves far from the pump and decrease the oscillation power threshold to submilliwatt levels. However, the pump-to-signal conversion efficiency and absolute signal power are low, fundamentally limited by parasitic mode competition and attainable cavity intrinsic Q to coupling Q ratio, i.e., Q_{i}/Q_{c}. Here, we use Friedrich-Wintgen bound states in the continuum (BICs) to overcome the physical challenges in an integrated microresonator-waveguide system. As a result, on-chip coherent hyperparametric oscillation is generated in BICs with unprecedented conversion efficiency and absolute signal power. This work not only opens a path to generate high-power and efficient continuous-wave electromagnetic radiation in Kerr nonlinear media but also enhances the understanding of a microresonator-waveguide system-an elementary unit of modern photonics.

High-performance Kerr microresonator optical parametric oscillator on a silicon chip

Optical parametric oscillation (OPO) is distinguished by its wavelength access, that is, the ability to flexibly generate coherent light at wavelengths that are dramatically different from the pump laser, and in principle bounded solely by energy conservation between the input pump field and the output signal/idler fields. As society adopts advanced tools in quantum information science, metrology, and sensing, microchip OPO may provide an important path for accessing relevant wavelengths. However, a practical source of coherent light should additionally have high conversion efficiency and high output power. Here, we demonstrate a silicon photonics OPO device with unprecedented performance. Our OPO device, based on the third-order (χ⁽³⁾) nonlinearity in a silicon nitride microresonator, produces output signal and idler fields widely separated from each other in frequency ( > 150 THz), and exhibits a pump-to-idler conversion efficiency up to 29 % with a corresponding output idler power of > 18 mW on-chip. This performance is achieved by suppressing competitive processes and by strongly overcoupling the output light. This methodology can be readily applied to existing silicon photonics platforms with heterogeneously-integrated pump lasers, enabling flexible coherent light generation across a broad range of wavelengths with high output power and efficiency.

Kerr optical parametric oscillation in a photonic crystal microring for accessing the infrared

Continuous wave optical parametric oscillation (OPO) provides a flexible approach for accessing mid-infrared wavelengths between 2 µm and 5 µm, but operation at these wavelengths has not yet been integrated into silicon nanophotonics. Typically, a Kerr OPO uses a single transverse mode family for pump, signal, and idler modes, and relies on a delicate balance to achieve normal (but close-to-zero) dispersion near the pump and the requisite higher-order dispersion needed for phase- and frequency-matching. Within integrated photonics platforms, this approach results in two major problems. First, the dispersion is very sensitive to geometry, so that small fabrication errors can have a large impact. Second, the device is susceptible to competing nonlinear processes near the pump. In this Letter, we propose a flexible solution to infrared OPO that addresses these two problems by using a silicon nitride photonic crystal microring (PhCR). The frequency shifts created by the PhCR bandgap enable OPO that would otherwise be forbidden. We report an intrinsic optical quality factor up to (1.2 ± 0.1)×10⁶ in the 2-µm band, and use a PhC ring to demonstrated an OPO with a threshold dropped power in the cavity of (90 ± 20) mW, with the pump wavelength at 1998 nm, and the signal and idler wavelengths at 1937 nm and 2063 nm, respectively. We further discuss how to extend the OPO spectral coverage in the mid-infrared. These results establish the PhCR OPO as a promising route for integrated laser sources in the infrared.

Conversion Efficiency in Kerr-Microresonator Optical Parametric Oscillators: From Three Modes to Many Modes

Optical parametric oscillation in a Kerr nonlinear microresonator can generate coherent laser light with frequencies that are widely separated from the pump frequency, allowing, for example, visible light to be generated using a near-infrared pump. To be practically useful, the pump-to-signal conversion efficiency must be far higher than what has been demonstrated in microresonator-based oscillators with widely-separated output frequencies. To address this challenge, here we theoretically and numerically study parametric oscillations in Kerr nonlinear microresonators, revealing an intricate solution space that arises from an interplay of nonlinear processes. As a start, we use a three-mode approximation to derive an efficiency-maximizing relation between pump power and frequency mismatch. However, realistic devices, such as integrated microring resonators, support far more than three modes. Hence, a more accurate model that includes the entire modal landscape is necessary to determine potential inefficiencies arising from unwanted competing nonlinear processes. To this end, we numerically simulate the Lugiato-Lefever Equation that accounts for the full spectrum of nonlinearly-coupled resonator modes. We observe and characterize two nonlinear phenomena linked to parametric oscillations in multi-mode resonators: Mode competition and cross phase modulation-induced modulation instability. Both processes may impact conversion efficiency. Finally, we show how to increase the conversion efficiency to ≈ 25 % by tuning the microresonator loss rates. Our analysis will guide microresonator designs that aim for high conversion efficiency and output power.

Efficient chip-based optical parametric oscillators from 590 nm to 1150 nm

Optical parametric oscillators are widely used to generate coherent light at frequencies not accessible by conventional laser gain. However, chip-based parametric oscillators operating in the visible spectrum have suffered from pump-to-signal conversion efficiencies typically less than 0.1 %. Here, we demonstrate efficient optical parametric oscillators based on silicon nitride photonics that address frequencies between 260 THz (1150 nm) and 510 THz (590 nm). Pumping silicon nitride microrings near 385 THz (780 nm) yields monochromatic signal and idler waves with unprecedented output powers in this wavelength range. We estimate on-chip output powers (separately for the signal and idler) between 1 mW and 5 mW and conversion efficiencies reaching ≈15 %. Underlying this improved performance is our development of pulley waveguides for broadband near-critical coupling, which exploits a fundamental connection between the waveguide-resonator coupling rate and conversion efficiency. Finally, we find that mode competition reduces conversion efficiency at high pump powers, thereby constraining the maximum realizable output power. Our work proves that optical parametric oscillators built with integrated photonics can produce useful amounts of visible laser light with high efficiency.

Photonic Crystal Optical Parametric Oscillator

We report a new class of Optical Parametric Oscillators, based on a 20μm-long semiconductor Photonic Crystal Cavity and operating at Telecom wavelengths. Because the confinement results from Bragg scattering, the optical cavity contains a few modes, approximately equispaced in frequency. Parametric oscillation is reached when these high Q modes are thermally tuned into a triply resonant configuration, whereas any other parametric interaction is strongly suppressed. The lowest pump power threshold is estimated to 50 - 70μW. This source behaves as an ideal degenerate Optical Parametric Oscillator addressing the needs in the field of quantum optical circuits, paving the way to the dense integration of highly efficient nonlinear sources of squeezed light or entangled photons pairs.

Ultraviolet to mid-infrared supercontinuum generation in single-crystalline aluminum nitride waveguides

We demonstrate ultrabroadband supercontinuum generation from ultraviolet to mid-infrared wavelengths in single-crystalline aluminum nitride waveguides. Tunable dispersive waves are observed at the mid-infrared regime by precisely controlling the waveguide widths. In addition, ultraviolet light is generated through cascaded second-harmonic generation in the modal phase-matched waveguides. Numerical simulation indicates a high degree of coherence of the generated spectrum at around the telecom pump and two dispersive waves. Our results establish a reliable path for multiple octave supercontinuum comb generation in single-crystalline aluminum nitride to enable applications including precision frequency metrology and spectroscopy.

Coupler-induced phase matching of resonant hyperparametric scattering

We show that an evanescent field coupler can break the symmetry of a high quality factor monolithic ring microcavity, enabling generation of strongly nondegenerate frequency harmonics involving a few mode families that are orthogonal in an unperturbed microcavity. Using this property, we explain observed experimental generation of frequency combs in magnesium fluoride whispering gallery mode resonators characterized with strong normal group velocity dispersion.

A universal frequency engineering tool for microcavity nonlinear optics: multiple selective mode splitting of whispering-gallery resonances

Whispering-gallery microcavities have been used to realize a variety of efficient parametric nonlinear optical processes through the enhanced light-matter interaction brought about by supporting multiple high quality factor and small modal volume resonances. Critical to such studies is the ability to control the relative frequencies of the cavity modes, so that frequency matching is achieved to satisfy energy conservation. Typically this is done by tailoring the resonator cross-section. Doing so modifies the frequencies of all of the cavity modes, that is, the global dispersion profile, which may be undesired, for example, in introducing competing nonlinear processes. Here, we demonstrate a frequency engineering tool, termed multiple selective mode splitting (MSMS), that is independent of the global dispersion and instead allows targeted and independent control of the frequencies of multiple cavity modes. In particular, we show controllable frequency shifts up to 0.8 nm, independent control of the splitting of up to five cavity modes with optical quality factors ≳ 105, and strongly suppressed frequency shifts for untargeted modes. The MSMS technique can be broadly applied to a wide variety of nonlinear optical processes across different material platforms, and can be used to both selectively enhance processes of interest and suppress competing unwanted processes.

On-chip optical parametric oscillation into the visible: generating red, orange, yellow, and green from a near-infrared pump

The on-chip generation of coherent, single-frequency laser light that can be tuned across the visible spectrum would help enable a variety of applications in spectroscopy, metrology, and quantum science. Recently, third-order optical parametric oscillation (OPO) in a microresonator has shown great promise as an efficient and scalable approach towards this end. However, considering visible light generation, so far only red light at < 420 THz (near the edge of the visible band) has been reported. In this work, we overcome strong material dispersion at visible wavelengths and demonstrate on-chip OPO in a Si3N4 microresonator covering >130 THz of the visible spectrum, including red, orange, yellow, and green wavelengths. In particular, using an input pump laser that is scanned 5 THz in the near-infrared from 386 THz to 391 THz, the OPO output signal is tuned from the near-infrared at 395 THz to the visible at 528 THz, while the OPO output idler is tuned from the near-infrared at 378 THz to the infrared at 254 THz. The widest signal-idler separation of 274 THz is more than an octave in span and is the widest demonstrated for a nanophotonic OPO to date. More generally, our work shows how nonlinear nanophotonics can transform light from readily accessible compact near-infrared lasers to targeted visible wavelengths of interest.