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Wide Bandwidth Silicon Nitride Strip-Loaded Grating Coupler on Lithium Niobate Thin Film. CRYSTALS 2022. [DOI: 10.3390/cryst12010070] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/04/2023]
Abstract
In this research, a vertical silicon nitride strip-loaded grating coupler on lithium niobate thin film was proposed, designed, and simulated. In order to improve the coupling efficiency and bandwidth, the parameters such as the SiO2 cladding layer thickness, grating period, duty cycle, fiber position, and fiber angle were optimized and analyzed. The alignment tolerances of the grating coupler parameters were also calculated. The maximum coupling efficiency and the −3 dB bandwidth were optimized to 33.5% and 113 nm, respectively. In addition, the grating coupler exhibited a high alignment tolerance.
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Xu Q, Shao Y, Piao R, Chen F, Wang X, Yang X, Wong W, Pun EY, Zhang D. A Theoretical Study on Rib‐Type Photonic Wires Based on LiNbO
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Thin Film on Insulator. ADVANCED THEORY AND SIMULATIONS 2019. [DOI: 10.1002/adts.201900115] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
Affiliation(s)
- Qing Xu
- Department of Opto‐electronics and Information EngineeringSchool of Precision Instruments and Opto‐electronics EngineeringKey Laboratory of Optoelectronic Information Science & Technology (Ministry of Education)Tianjin University Tianjin 300072 China
| | - Yan‐Xue Shao
- Department of Opto‐electronics and Information EngineeringSchool of Precision Instruments and Opto‐electronics EngineeringKey Laboratory of Optoelectronic Information Science & Technology (Ministry of Education)Tianjin University Tianjin 300072 China
| | - Rui‐Qi Piao
- Department of Opto‐electronics and Information EngineeringSchool of Precision Instruments and Opto‐electronics EngineeringKey Laboratory of Optoelectronic Information Science & Technology (Ministry of Education)Tianjin University Tianjin 300072 China
| | - Feng Chen
- Department of Opto‐electronics and Information EngineeringSchool of Precision Instruments and Opto‐electronics EngineeringKey Laboratory of Optoelectronic Information Science & Technology (Ministry of Education)Tianjin University Tianjin 300072 China
| | - Xiao Wang
- Department of Opto‐electronics and Information EngineeringSchool of Precision Instruments and Opto‐electronics EngineeringKey Laboratory of Optoelectronic Information Science & Technology (Ministry of Education)Tianjin University Tianjin 300072 China
| | - Xiao‐Fei Yang
- Department of Opto‐electronics and Information EngineeringSchool of Precision Instruments and Opto‐electronics EngineeringKey Laboratory of Optoelectronic Information Science & Technology (Ministry of Education)Tianjin University Tianjin 300072 China
| | - Wing‐Han Wong
- Department of Electronic EngineeringState Key Laboratory of Terahertz and Millimeter WavesCity University of Hong Kong Hong Kong China
| | - Edwin Yue‐Bun Pun
- Department of Electronic EngineeringState Key Laboratory of Terahertz and Millimeter WavesCity University of Hong Kong Hong Kong China
| | - De‐Long Zhang
- Department of Opto‐electronics and Information EngineeringSchool of Precision Instruments and Opto‐electronics EngineeringKey Laboratory of Optoelectronic Information Science & Technology (Ministry of Education)Tianjin University Tianjin 300072 China
- Department of Electronic EngineeringState Key Laboratory of Terahertz and Millimeter WavesCity University of Hong Kong Hong Kong China
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Huang Z, Lu H, Xiong H, Li Y, Chen H, Qiu W, Guan H, Dong J, Zhu W, Yu J, Luo Y, Zhang J, Chen Z. Fano Resonance on Nanostructured Lithium Niobate for Highly Efficient and Tunable Second Harmonic Generation. NANOMATERIALS (BASEL, SWITZERLAND) 2019; 9:E69. [PMID: 30621302 PMCID: PMC6359311 DOI: 10.3390/nano9010069] [Citation(s) in RCA: 20] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/13/2018] [Revised: 12/29/2018] [Accepted: 12/31/2018] [Indexed: 11/17/2022]
Abstract
Second harmonic generation (SHG) is an important nonlinear process which is critical for applications, such as optical integrated circuit, nonlinear microscopy, laser, etc. Many challenges remain in the improvement of nonlinear conversion efficiency, since the typical value is of only 10-5 in nanostructures. Here, we theoretically demonstrate a periodic structure consisting of a lithium niobate (LN) bar and an LN disk, on a nanoscale (~300 nm) thin-film platform, which is proposed for a highly efficient SHG. By breaking the structure symmetry, a Fano resonance with a high Q, up to 2350 and a strong optical field enhancement reaching forty-two folds is achieved, which yields a high conversion efficiency, up to 3.165 × 10-4. In addition to its strong second harmonic (SH) signal, we also demonstrate that by applying only 0.444 V on the planar electrode configurations of the nanostructured LN, the wavelength of SH can be tuned within a 1 nm range, while keeping its relatively high conversion efficiency. The proposed structure with the high nonlinear conversion efficiency can be potentially applied for a single-molecule fluorescence imaging, high-resolution nonlinear microscopy and active compact optical device.
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Grants
- 61705089, 61775084, 61705087, 61505069, 61475066, 61405075 National Natural Science Foundation of China
- 2015A03036046, 2016TQ03X962, 2016A030310098, 2016A030311019 Natural Science Foundation of Guangdong Province
- J-GFZX0205010501.12, GFZX0205010501.24-J National Major Project of China
- 201607010134,201704030105, 201605030002, 201604040005 Science & Technology Project of Guangzhou
- 55560307 Rail Transit Healthy Operation Cooperative Innovation Center of Zhuhai
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Affiliation(s)
- Zhijin Huang
- Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, JinanUniversity, Guangzhou 510632, China.
| | - Huihui Lu
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Jinan University, Guangzhou 510632, China.
| | - Hanqing Xiong
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Jinan University, Guangzhou 510632, China.
| | - Yang Li
- Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, JinanUniversity, Guangzhou 510632, China.
| | - Huajiang Chen
- Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, JinanUniversity, Guangzhou 510632, China.
| | - Wentao Qiu
- Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, JinanUniversity, Guangzhou 510632, China.
| | - Heyuan Guan
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Jinan University, Guangzhou 510632, China.
| | - Jiangli Dong
- Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, JinanUniversity, Guangzhou 510632, China.
| | - Wenguo Zhu
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Jinan University, Guangzhou 510632, China.
| | - Jianhui Yu
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Jinan University, Guangzhou 510632, China.
| | - Yunhan Luo
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Jinan University, Guangzhou 510632, China.
| | - Jun Zhang
- Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, JinanUniversity, Guangzhou 510632, China.
| | - Zhe Chen
- Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Jinan University, Guangzhou 510632, China.
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Wu R, Wang M, Xu J, Qi J, Chu W, Fang Z, Zhang J, Zhou J, Qiao L, Chai Z, Lin J, Cheng Y. Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness. NANOMATERIALS 2018; 8:nano8110910. [PMID: 30404137 PMCID: PMC6265866 DOI: 10.3390/nano8110910] [Citation(s) in RCA: 62] [Impact Index Per Article: 10.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/05/2018] [Revised: 10/27/2018] [Accepted: 11/02/2018] [Indexed: 01/07/2023]
Abstract
In this paper, we develop a technique for realizing multi-centimeter-long lithium niobate on insulator (LNOI) waveguides with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides was determined with an atomic force microscope to be 0.452 nm. The approach is compatible with other surface patterning technologies, such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits.
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Affiliation(s)
- Rongbo Wu
- State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
- University of Chinese Academy of Sciences, Beijing 100049, China.
| | - Min Wang
- State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
- XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China.
| | - Jian Xu
- State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
- XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China.
| | - Jia Qi
- State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
- University of Chinese Academy of Sciences, Beijing 100049, China.
| | - Wei Chu
- State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
- XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China.
| | - Zhiwei Fang
- State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
- XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China.
| | - Jianhao Zhang
- State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
- University of Chinese Academy of Sciences, Beijing 100049, China.
| | - Junxia Zhou
- State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
- XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China.
| | - Lingling Qiao
- State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
| | - Zhifang Chai
- State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
- XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China.
| | - Jintian Lin
- State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
| | - Ya Cheng
- State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
- State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.
- XXL-The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China.
- Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, Shanxi, China.
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Li G, Chen Y, Jiang H, Chen X. Broadband sum-frequency generation using d 33 in periodically poled LiNbO 3 thin film in the telecommunications band. OPTICS LETTERS 2017; 42:939-942. [PMID: 28248336 DOI: 10.1364/ol.42.000939] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/14/2023]
Abstract
We demonstrate the first, to the best of our knowledge, type-0 broadband sum-frequency generation (SFG) based on single-crystal periodically poled LiNbO3 (PPLN) thin film. The broad bandwidth property was largely tuned from mid-infrared region to the telecommunications band by engineering the thickness of PPLN from bulk crystal to nanoscale. It provides SFG a solution with both broadband and high efficiency by using the highest nonlinear coefficient d33 instead of d31 in type-I broadband SFG or second-harmonic generation. The measured 3 dB upconversion bandwidth is about 15.5 nm for a 4 cm long single crystal at 1530 nm wavelength. It can find applications in chip-scale spectroscopy, quantum information processing, LiNbO3-thin-film-based microresonator and optical nonreciprocity devices, etc.
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Li S, Cai L, Wang Y, Jiang Y, Hu H. Waveguides consisting of single-crystal lithium niobate thin film and oxidized titanium stripe. OPTICS EXPRESS 2015; 23:24212-24219. [PMID: 26406627 DOI: 10.1364/oe.23.024212] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
Strip-loaded waveguides were fabricated by the direct oxidation of a titanium film based on the single-crystal lithium niobate. The method avoided the surface roughness problems that are normally introduced during dry etching of waveguide sidewalls. Propagation modes of the composite strip waveguide were analyzed by a full-vectorial finite difference method. The minimum dimensions of the propagation modes were calculated to be 0.7 μm(2) and 1.1 μm(2) for quasi-TM mode and quasi-TE mode at 1550 nm when the thickness of the LN layer and TiO(2) strip was 660 nm and 95 nm, respectively. The optical intensity was as high as 93% and was well confined in the LN layer for quasi-TM polarization. In this experiment, the propagation losses for the composite strip waveguide with 6 μm wide TiO(2) were 14 dB/cm for quasi-TM mode and 5.8 dB/cm for quasi-TE mode, respectively. The compact hybrid structures have the potential to be utilized for compact photonic integrated devices.
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Cai L, Wang Y, Hu H. Low-loss waveguides in a single-crystal lithium niobate thin film. OPTICS LETTERS 2015; 40:3013-3016. [PMID: 26125355 DOI: 10.1364/ol.40.003013] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
We report low-loss channel waveguides in a single-crystal LiNbO(3) thin film achieved using the annealed proton exchange process. The simulation indicated that the mode size of the α phase channel waveguide could be as small as 1.2 μm(2). Waveguides with several different widths were fabricated, and the 4 μm-wide channel waveguide exhibited a mode size of 4.6 μm(2). Its propagation loss was accurately evaluated to be as low as 0.6 dB/cm at 1.55 μm. The single-crystal lattice structure in the LiNbO(3) thin film was preserved by a moderate annealed proton exchange process (5 min of proton exchange at 200°C, followed by 3 h annealing at 350°C), as revealed by measuring the extraordinary refractive index change and x ray rocking curve. A longer proton exchange time followed by stronger annealing would destroy the crystal structure and induce a high loss in the channel waveguides.
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Cai L, Han SLH, Hu H. Waveguides in single-crystal lithium niobate thin film by proton exchange. OPTICS EXPRESS 2015; 23:1240-1248. [PMID: 25835882 DOI: 10.1364/oe.23.001240] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
The proton exchanged (PE) planar and channel waveguides in a 500 nm thick single-crystal lithium niobate thin film (lithium niobate on insulator, LNOI) were studied. The mature PE technique and strong confinement of light in the LN single-crystal thin film were used. The single mode and cut-off conditions of the channel waveguides were obtained by finite difference simulation. The results showed that the single mode channel waveguide would form if the width of the PE region was between 0.75 μm and 2.1 μm in the β(4) phase. The channel waveguide in LNOI had a much smaller mode size than that in the bulk material due to the high-refractive-index contrast. The mode size reached as small as 0.6 μm(2). in simulation. In the experiment, the refractive index and phase transition after PE in LNOI were analyzed using the prism coupling method and X-ray diffraction. Three different width waveguides (5 μm, 7 μm and 11 μm) were optically characterized. Near-field intensity distribution showed that their mode sizes were 3.3 μm(2).,5 μm(2). and 7 μm(2). The propagation losses were evaluated to be about 16 dB/cm, 12 dB/cm and 11 dB/cm, respectively. The results indicate that PE is a promising method for building more complicated photonic integrated circuits in single-crystal LN thin film.
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