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Carlotti M, Mattoli V. Functional Materials for Two-Photon Polymerization in Microfabrication. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2019; 15:e1902687. [PMID: 31402578 DOI: 10.1002/smll.201902687] [Citation(s) in RCA: 72] [Impact Index Per Article: 14.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/23/2019] [Revised: 07/23/2019] [Indexed: 05/23/2023]
Abstract
Direct laser writing methods based on two-photon polymerization (2PP) are powerful tools for the on-demand printing of precise and complex 3D architectures at the micro and nanometer scale. While much progress was made to increase the resolution and the feature size throughout the years, by carefully designing a material, one can confer specific functional properties to the printed structures thus making them appealing for peculiar and novel applications. This Review summarizes the state-of-the-art of functional resins and photoresists used in 2PP, discussing both the range of material functions available and the methods used to prepare them, highlighting advantages and disadvantages of different classes of materials in achieving certain properties.
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Affiliation(s)
- Marco Carlotti
- Istituto Italiano di Tecnologia, Centre for Micro-BioRobotics, Viale Rinaldo Piaggio 34, 56025, Pontedera, Pisa, Italy
| | - Virgilio Mattoli
- Istituto Italiano di Tecnologia, Centre for Micro-BioRobotics, Viale Rinaldo Piaggio 34, 56025, Pontedera, Pisa, Italy
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Wu ZL, Qi YN, Yin XJ, Yang X, Chen CM, Yu JY, Yu JC, Lin YM, Hui F, Liu PL, Liang YX, Zhang Y, Zhao MS. Polymer-Based Device Fabrication and Applications Using Direct Laser Writing Technology. Polymers (Basel) 2019; 11:E553. [PMID: 30960537 PMCID: PMC6473384 DOI: 10.3390/polym11030553] [Citation(s) in RCA: 22] [Impact Index Per Article: 4.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/30/2019] [Revised: 03/11/2019] [Accepted: 03/13/2019] [Indexed: 12/20/2022] Open
Abstract
Polymer materials exhibit unique properties in the fabrication of optical waveguide devices, electromagnetic devices, and bio-devices. Direct laser writing (DLW) technology is widely used for micro-structure fabrication due to its high processing precision, low cost, and no need for mask exposure. This paper reviews the latest research progresses of polymer-based micro/nano-devices fabricated using the DLW technique as well as their applications. In order to realize various device structures and functions, different manufacture parameters of DLW systems are adopted, which are also investigated in this work. The flexible use of the DLW process in various polymer-based microstructures, including optical, electronic, magnetic, and biomedical devices are reviewed together with their applications. In addition, polymer materials which are developed with unique properties for the use of DLW technology are also discussed.
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Affiliation(s)
- Zhen-Lin Wu
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.
| | - Ya-Nan Qi
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.
| | - Xiao-Jie Yin
- State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Science, Beijing 100083, China.
- Henan Shi-Jia Photons Technology Co., Ltd., Hebi 458030, China.
| | - Xin Yang
- Department of Electrical and Electronics Engineering, School of Engineering, Cardiff University, Cardiff CF10 3AT, UK.
| | - Chang-Ming Chen
- College of Electronic Science and Engineering, Jilin University State Key Laboratory of Integrated Optoelectronics, JLU Region, Changchun 130012, China.
| | - Jing-Ying Yu
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.
| | - Jia-Chen Yu
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.
| | - Yu-Meng Lin
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.
| | - Fang Hui
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.
| | - Peng-Li Liu
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.
| | - Yu-Xin Liang
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.
| | - Yang Zhang
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.
| | - Ming-Shan Zhao
- School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.
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Pan D, Cai Z, Ji S, Fan S, Wang P, Lao Z, Yang L, Ni J, Wang C, Li J, Hu Y, Wu D, Chen S, Chu J. Microtubes with Complex Cross Section Fabricated by C-Shaped Bessel Laser Beam for Mimicking Stomata That Opens and Closes Rapidly. ACS APPLIED MATERIALS & INTERFACES 2018; 10:36369-36376. [PMID: 30226741 DOI: 10.1021/acsami.8b11173] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
This article presents a new method for fabricating complex cross-sectional microtubes with a high aspect ratio at micro/nanoscale. The microtubes are directly written in a photoresist using a femtosecond pulsed laser combined with a spatial light modulator (SLM). A new method for generating a C-shaped Bessel beam by modifying the Bessel beams with a SLM is reported for the first time. Using this gap-ring-shaped light field, microtubes with special cross section (trefoil-shaped, clover-shaped, spiral, etc.) have been first achieved through two-photo polymerization rapidly. The microtube wall can reach about 800 nm and the diameter of the gap-ring structure is only a few micrometers. As a demonstration, artificial stomata were manufactured with the same size as actual plants stomata consisting of gap-ring microtubes. This artificial stomata can mimic the function of the real stomata with rapid opening and closing, demonstrating its ability to trap and release microparticles regulated by rinse solvent.
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