Plasma Etching Behavior of YOF Coating Deposited by Suspension Plasma Spraying in Inductively Coupled CHF3/Ar Plasma

Fabrication, Microstructure and Plasma Resistance Behavior of Y-Al-Si-O (YAS) Glass-Ceramics Coated on Alumina Ceramics

This study investigates the fabrication, microstructural characteristics and plasma resistance of Y-Al-Si-O (YAS) glass-ceramics coated on alumina ceramics. YAS frits were initially prepared using a melt-quenching method, then homogenously milled and coated onto alumina ceramics. The melt-coating process was conducted at 1650 °C for 1 h. The composition and microstructure of the glass frits and coatings were thoroughly characterized using X-ray diffraction, scanning electron microscopy, and energy-dispersive X-ray spectroscopy. These analyses revealed a dense microstructure with a polycrystalline structure predominantly composed of Y3Al5O12 (YAG) phase and a minor phase of Y2Si2O7. The YAS coatings on alumina revealed a dense layer with strong adhesion to the substrate. Subsequently, the coatings underwent C4F6/Ar/O2 plasma treatment for 1 h. Plasma exposure tests demonstrated that the YAS-coated alumina exhibited significantly better etching resistance compared to uncoated alumina, with minimal surface damage observed on the YAS coating, confirming its protective properties against plasma. The superior plasma resistance of YAS coatings is attributed to the predominance of its YAG phase. This research offers a more stable and cost-efficient solution for protecting ceramics in demanding plasma environments.

Effect of Interlayer on Flatness and Adhesion of Aerosol-Deposited Yttrium Oxide Coating

In this study, Y2O3 coating is used as an interlayer between Al2O3 substrate and a ceramic coating; this is in order to minimize the morphological distortion produced by a single deposition of the ceramic coating on the Al2O3 substrate, which is performed using the aerosol method. The interlayer coating, which comprises the Y2O3 phase, is deposited on the Al2O3 substrate using an e-beam evaporator. The crystal structure of the powder that was used to process the coating is identified as cubic Y2O3. In contrast, the crystal structure of the top-coating layer and interlayer indicates the presence of two kinds of Y2O3 phases, which possess cubic and monoclinic structures. The single Y2O3 coating without an interlayer exhibits microcracks around the interface between the coating and the substrate, which can be attributed to the stress that occurs during aerosol deposition. In contrast, no cracks are found in the aerosol-deposited Y2O3 coating and interlayer, which show a desirable microstructure. The single Y2O3 coating and the Y2O3 coating with an interlayer exhibit similar hardness and elastic modulus values. Nevertheless, the Y2O3 coating with an interlayer exhibits a higher level of adhesion than the single Y2O3 coating, with a value of 14.8 N compared to 10.2 N.

Improvement of Yttrium Oxyfluoride Coating with Modified Precursor Solution for Laser-Induced Hydrothermal Synthesis

In the semiconductor manufacturing process, the inner walls of the equipment are coated with yttrium-based oxides for etch resistance against plasma exposure. Yttrium oxyfluoride (YOF) particle synthesis and coating methods have been actively studied owing to their high erosion resistance compared to Y2O3 and Al2O3. Owing to the formation of a rough and porous coating layer by thermal spray-coating, the coating layer disintegrates, as the etching process has been conducted for a long time. Laser-induced synthesis and coating technology offer several advantages, including simplified process steps, ease of handling, and formation of a dense coating layer on the target material. In this study, YOF was coated on an aluminum substrate using a modified precursor solution. The NaF and HMTA were added to the precursor solution, resulting in enhanced synthetic reactivity and stabilizing the oxides. The material coated on the surface was analyzed based on the characteristics of composition, chemical bonding, and phase identification. We found that the coating properties can be improved by using an appropriate combination of modified precursor solutions and laser parameters. Therefore, the findings in this study are expected to be utilized in the field of coating technology.

An Overview of Thermal Plasma Arc Systems for Treatment of Various Wastes in Recovery of Metals

Thermal plasma systems are being used for the recovery of metals from complex waste and minerals. The latter contain multiphase metals in various forms that are extremely tedious to separate. Thermal plasma arc melts the waste and minerals for qualitative plasma products for powder industries. In this overview, we briefly report a description of the various thermal plasma systems and their uses in recovering metal from metal-containing materials in the form of waste or minerals. Various plasma arc systems, such as transferred, nontransferred, and extended arc, have enabled the development of an efficient and environmentally friendly way to recover valuable metals from industrial wastes such as red mud and minerals such as ilmenite.

Effect of the Dispersion State in Y5O4F7 Suspension on YOF Coating Deposited by Suspension Plasma Spray

The stable Y5O4F7 suspension for dense yttrium oxyfluoride (YOF) coating by suspension plasma spraying (SPS) was developed. Electrostatically and electrosterically stabilized aqueous Y5O4F7 suspensions were prepared and compared with a commercially available Y5O4F7 suspension without dispersant. The wettability and dispersibility of the Y5O4F7 suspensions were evaluated in terms of the zeta potential, average particle size, and size distribution with electrophoretic light scattering (ELS) and dynamic light scattering (DLS). The viscosity was measured and the sedimentation was tested to examine the fluidity and stability of the Y5O4F7 suspensions. When electrostatic (BYK-154) and electrosteric (BYK-199) dispersants were added to the Y5O4F7 suspension, the isoelectric point (IEP) of Y5O4F7 particles in the suspension shifted to lower pH. The zeta potential of both of electrostatically and electrosterically stabilized Y5O4F7 suspensions were higher than ±40 mV at pH of 8.6, respectively, which were much higher than of the Y5O4F7 suspension without dispersant. Meanwhile, the average particle size of the electrosterically stabilized Y5O4F7 suspension was much smaller than that of the electrostatically stabilized one. The electrosteric stabilization had a great effect on improving the wettability and dispersibility of the Y5O4F7 suspension. The coating rate of the electrosterically stabilized Y5O4F7 suspension was the highest among the three tested suspensions. In addition, the YOF coating deposited with the electrosterically stabilized Y5O4F7 suspension had the highest hardness and the lowest porosity.