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Torkashvand Z, Shayeganfar F, Ramazani A. Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices. MICROMACHINES 2024; 15:175. [PMID: 38398905 PMCID: PMC10890696 DOI: 10.3390/mi15020175] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/04/2023] [Revised: 12/27/2023] [Accepted: 12/28/2023] [Indexed: 02/25/2024]
Abstract
The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles.
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Affiliation(s)
- Ziba Torkashvand
- Department of Physics and Energy Engineering, Amirkabir University of Technology, Tehran 15875-4413, Iran; (Z.T.); (F.S.)
| | - Farzaneh Shayeganfar
- Department of Physics and Energy Engineering, Amirkabir University of Technology, Tehran 15875-4413, Iran; (Z.T.); (F.S.)
| | - Ali Ramazani
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
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Gershman IS, Fox-Rabinovich G, Gershman E, Mironov AE, Endrino JL, Podrabinnik P. The Conditions Necessary for the Formation of Dissipative Structures in Tribo-Films on Friction Surfaces That Decrease the Wear Rate. ENTROPY (BASEL, SWITZERLAND) 2023; 25:e25050771. [PMID: 37238526 DOI: 10.3390/e25050771] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/08/2023] [Revised: 04/13/2023] [Accepted: 05/07/2023] [Indexed: 05/28/2023]
Abstract
Tribo-films form on surfaces as a result of friction and wear. The wear rate is dependent on the frictional processes, which develop within these tribo-films. Physical-chemical processes with negative entropy production enhance reduction in the wear rate. Such processes intensively develop once self-organization with dissipative structure formation is initiated. This process leads to significant wear rate reduction. Self-organization can only occur after the system loses thermodynamic stability. This article investigates the behavior of entropy production that results in the loss of thermodynamic stability in order to establish the prevalence of friction modes required for self-organization. Tribo-films with dissipative structures form on the friction surface as a consequence of a self-organization process, resulting in an overall wear rate reduction. It has been demonstrated that a tribo-system begins to lose its thermodynamic stability once it reaches the point of maximum entropy production during the running-in stage.
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Affiliation(s)
- Iosif S Gershman
- Joint Stock Company Railway Research Institute, Moscow 3rd Mytischinskaya Street 10, 107996 Moscow, Russia
| | - German Fox-Rabinovich
- Department of Mechanical Engineering, McMaster Manufacturing Research Institute (MMRI), McMaster University, Hamilton, ON L8S 4L8, Canada
| | - Eugeniy Gershman
- LLC «TransTriboLogic», Skolkovo Innovation Center, Bulvar Bolshoy 42 Build. 1, Office 337, 121205 Moscow, Russia
| | - Alexander E Mironov
- Joint Stock Company Railway Research Institute, Moscow 3rd Mytischinskaya Street 10, 107996 Moscow, Russia
| | - Jose Luis Endrino
- Department of Engineering, Universidad Loyola Andalucia, Av de las Universidades s/n, 41704 Seville, Spain
| | - Pavel Podrabinnik
- Laboratory of Electric Currents Assisted Sintering Technologies, Moscow State University of Technology "STANKIN", Vadkovsky Lane 3a, 127055 Moscow, Russia
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Fox-Rabinovich G, Gershman IS, Yamamoto K, Dosbaeva J, Veldhuis S. Effect of the Adaptive Response on the Wear Behavior of PVD and CVD Coated Cutting Tools during Machining with Built Up Edge Formation. NANOMATERIALS 2020; 10:nano10122489. [PMID: 33322353 PMCID: PMC7764160 DOI: 10.3390/nano10122489] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/27/2020] [Revised: 12/07/2020] [Accepted: 12/08/2020] [Indexed: 11/16/2022]
Abstract
The relationship between the wear process and the adaptive response of the coated cutting tool to external stimuli is demonstrated in this review paper. The goal of the featured case studies is to achieve control over the behavior of the tool/workpiece tribo-system, using an example of severe tribological conditions present under machining with intensive built-up edge (BUE) formation. The built-ups developed during the machining process are dynamic structures with a dual role. On one hand they exhibit protective functions but, on the other hand, the process of built-up edge formation is similar to an avalanche. Periodical growth and breakage of BUE eventually leads to tooltip failure and catastrophe of the entire tribo-system. The process of BUE formation is governed by the stick-slip phenomenon occurring at the chip/tool interface which is associated with the self-organized critical process (SOC). This process could be potentially brought under control through the engineered adaptive response of the tribo-system, with the goal of reducing the scale and frequency of the occurring avalanches (built-ups). A number of multiscale frictional processes could be used to achieve this task. Such processes are associated with the strongly non-equilibrium process of self-organization during friction (nano-scale tribo-films formation) as well as physical-chemical and mechanical processes that develop on a microscopic scale inside the coating layer and the carbide substrate. Various strategies for achieving control over wear behavior are presented in this paper using specific machining case studies of several hard-to-cut materials such as stainless steels, titanium alloy (TiAl6V4), compacted graphitic iron (CGI), each of which typically undergoes strong built-up edge formation. Various categories of hard coatings deposited by different physical vapor deposition (PVD) and chemical vapor deposition (CVD) methods are applied on cutting tools and the results of their tribological and wear performance studies are presented. Future research trends are outlined as well.
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Affiliation(s)
- German Fox-Rabinovich
- Department of Mechanical Engineering, McMaster Manufacturing Research Institute (MMRI), McMaster University, Hamilton, ON L8S 4L8 Canada; (J.D.); (S.V.)
- Correspondence:
| | - Iosif S. Gershman
- Joint Stock Company Railway Research Institute, Moscow State Technological University “Stankin” (MSTU “STANKIN”), 127994 Moscow, Russia;
| | - Kenji Yamamoto
- Applied Physics Research Laboratory, Kobe Steel Ltd., 1-5-5 Takatsuda-dai, Nishi-ku, Kobe, Hyogo 651-2271, Japan;
| | - Julia Dosbaeva
- Department of Mechanical Engineering, McMaster Manufacturing Research Institute (MMRI), McMaster University, Hamilton, ON L8S 4L8 Canada; (J.D.); (S.V.)
| | - Stephen Veldhuis
- Department of Mechanical Engineering, McMaster Manufacturing Research Institute (MMRI), McMaster University, Hamilton, ON L8S 4L8 Canada; (J.D.); (S.V.)
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Sputtering Physical Vapour Deposition (PVD) Coatings: A Critical Review on Process Improvement and Market Trend Demands. COATINGS 2018. [DOI: 10.3390/coatings8110402] [Citation(s) in RCA: 78] [Impact Index Per Article: 13.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
Abstract
Physical vapour deposition (PVD) is a well-known technology that is widely used for the deposition of thin films regarding many demands, namely tribological behaviour improvement, optical enhancement, visual/esthetic upgrading, and many other fields, with a wide range of applications already being perfectly established. Machining tools are, probably, one of the most common applications of this deposition technique, sometimes used together with chemical vapour deposition (CVD) in order to increase their lifespan, decreasing friction, and improving thermal properties. However, the CVD process is carried out at higher temperatures, inducing higher stresses in the coatings and substrate, being used essentially only when the required coating needs to be deposited using this process. In order to improve this technique, several studies have been carried out optimizing the PVD technique by increasing plasma ionization, decreasing dark areas (zones where there is no deposition into the reactor), improving targets use, enhancing atomic bombardment efficiency, or even increasing the deposition rate and optimizing the selection of gases. These studies reveal a huge potential in changing parameters to improve thin film quality, increasing as well the adhesion to the substrate. However, the process of improving energy efficiency regarding the industrial context has not been studied as deeply as required. This study aims to proceed to a review regarding the improvements already studied in order to optimize the sputtering PVD process, trying to relate these improvements with the industrial requirements as a function of product development and market demand.
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Baptista A, Silva F, Porteiro J, Míguez J, Pinto G, Fernandes L. On the Physical Vapour Deposition (PVD): Evolution of Magnetron Sputtering Processes for Industrial Applications. ACTA ACUST UNITED AC 2018. [DOI: 10.1016/j.promfg.2018.10.125] [Citation(s) in RCA: 63] [Impact Index Per Article: 10.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
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Effect of Built-Up Edge Formation during Stable State of Wear in AISI 304 Stainless Steel on Machining Performance and Surface Integrity of the Machined Part. MATERIALS 2017; 10:ma10111230. [PMID: 29068405 PMCID: PMC5706177 DOI: 10.3390/ma10111230] [Citation(s) in RCA: 25] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/04/2017] [Revised: 10/21/2017] [Accepted: 10/23/2017] [Indexed: 11/17/2022]
Abstract
During machining of stainless steels at low cutting -speeds, workpiece material tends to adhere to the cutting tool at the tool-chip interface, forming built-up edge (BUE). BUE has a great importance in machining processes; it can significantly modify the phenomenon in the cutting zone, directly affecting the workpiece surface integrity, cutting tool forces, and chip formation. The American Iron and Steel Institute (AISI) 304 stainless steel has a high tendency to form an unstable BUE, leading to deterioration of the surface quality. Therefore, it is necessary to understand the nature of the surface integrity induced during machining operations. Although many reports have been published on the effect of tool wear during machining of AISI 304 stainless steel on surface integrity, studies on the influence of the BUE phenomenon in the stable state of wear have not been investigated so far. The main goal of the present work is to investigate the close link between the BUE formation, surface integrity and cutting forces in the stable sate of wear for uncoated cutting tool during the cutting tests of AISI 304 stainless steel. The cutting parameters were chosen to induce BUE formation during machining. X-ray diffraction (XRD) method was used for measuring superficial residual stresses of the machined surface through the stable state of wear in the cutting and feed directions. In addition, surface roughness of the machined surface was investigated using the Alicona microscope and Scanning Electron Microscopy (SEM) was used to reveal the surface distortions created during the cutting process, combined with chip undersurface analyses. The investigated BUE formation during the stable state of wear showed that the BUE can cause a significant improvement in the surface integrity and cutting forces. Moreover, it can be used to compensate for tool wear through changing the tool geometry, leading to the protection of the cutting tool from wear.
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Investigation of Coated Cutting Tool Performance during Machining of Super Duplex Stainless Steels through 3D Wear Evaluations. COATINGS 2017. [DOI: 10.3390/coatings7080127] [Citation(s) in RCA: 27] [Impact Index Per Article: 3.9] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
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Fox-Rabinovich GS, Gershman IS, Yamamoto K, Aguirre MH, Covelli D, Arif T, Aramesh M, Shalaby MA, Veldhuis S. Surface/interface phenomena in nano-multilayer coating under severing tribological conditions. SURF INTERFACE ANAL 2016. [DOI: 10.1002/sia.6196] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
Affiliation(s)
- G. S. Fox-Rabinovich
- Department of Mechanical Engineering; McMaster University; 1280 Main St. W Hamilton Ontario L8S 4L7 Canada
| | - I. S. Gershman
- Joint Stock Company ‘Railway Research Institute’; 3rd Mytischinskaya str. 10 Moscow 107996 Russia
| | - K. Yamamoto
- Materials Research Laboratory; Kobe Steel Ltd., 1-5-5 Takatsuda-dai, Nishi-ku Kobe Hyogo 651-2271 Japan
| | - M. H. Aguirre
- LMA-Laboratory of Advanced Microscopy, at INA-Institute of Nanocience of Aragón; University of Zaragoza; Edificio I + D. Campus Rio Ebro.C/Mariano Esquillor, s/n 50018 Zaragoza Spain
- Department of Physics Condensed Matter; University of Zaragoza; Zaragoza Spain
| | - D. Covelli
- Biointerfaces Institute; McMaster University; ETB 422, 1280 Main St West Hamilton Ontario L8S 0A3 Canada
| | - T. Arif
- Department of Mechanical Engineering; McMaster University; 1280 Main St. W Hamilton Ontario L8S 4L7 Canada
| | - M. Aramesh
- Department of Mechanical Engineering; McMaster University; 1280 Main St. W Hamilton Ontario L8S 4L7 Canada
| | - M. A. Shalaby
- Department of Mechanical Engineering; McMaster University; 1280 Main St. W Hamilton Ontario L8S 4L7 Canada
| | - S. Veldhuis
- Department of Mechanical Engineering; McMaster University; 1280 Main St. W Hamilton Ontario L8S 4L7 Canada
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