Imaging with a Commercial Electron Backscatter Diffraction (EBSD) Camera in a Scanning Electron Microscope: A Review

Imaging Threading Dislocations and Surface Steps in Nitride Thin Films Using Electron Backscatter Diffraction

Extended defects, like threading dislocations, are detrimental to the performance of optoelectronic devices. In the scanning electron microscope, dislocations are traditionally imaged using diodes to monitor changes in backscattered electron intensity as the electron beam is scanned over the sample, with the sample positioned so the electron beam is at, or close to the Bragg angle for a crystal plane/planes. Here, we use a pixelated detector instead of single diodes, specifically an electron backscatter diffraction (EBSD) detector. We present postprocessing techniques to extract images of dislocations and surface steps, for a nitride thin film, from measurements of backscattered electron intensities and intensity distributions in unprocessed EBSD patterns. In virtual diode (VD) imaging, the backscattered electron intensity is monitored for a selected segment of the unprocessed EBSD patterns. In center of mass (COM) imaging, the position of the center of the backscattered electron intensity distribution is monitored. Additionally, both methods can be combined (VDCOM). Using both VD and VDCOM, images of only threading dislocations, or dislocations and surface steps can be produced, with VDCOM images exhibiting better signal-to-noise. The applicability of VDCOM imaging is demonstrated across a range of nitride semiconductor thin films, with varying surface step and dislocation densities.

Challenges encountered in the transfer of atorvastatin tablet manufacturing - commercial batch-based production as a basis for small-scale continuous tablet manufacturing tests

As is the case with batch-based tableting processes, continuous tablet manufacturing can be conducted by direct compression or with a granulation step such as dry or wet granulation included in the production procedure. In this work, continuous manufacturing tests were performed with a commercial tablet formulation, while maintaining its original material composition. Challenges were encountered with the feeding performance of the API during initial tests which required designing different powder pre-blend compositions. After the pre-blend optimization phase, granules were prepared with a roller compactor. Tableting was conducted with the granules and an additional brief continuous direct compression run was completed with some ungranulated mixture. The tablets were assessed with off-line tests, applying the quality requirements demanded for the batch-manufactured product. Chemical maps were obtained by Raman mapping and elemental maps by scanning electron microscopy with energy-dispersive X-ray spectroscopy. Large variations in both tablet weights and breaking forces were observed in all tested samples, resulting in significant quality complications. It was suspected that the API tended to adhere to the process equipment, accounting for the low API content in the powder mixture and tablets. These results suggest that this API or the tablet composition was unsuitable for manufacturing in a continuous line; further testing could be continued with different materials and changes in the process.

An EBSD camera as a tool to characterise in-plane magnetisation vectors on Fe-Si (001) surface

Previous studies have shown that type-II magnetic-domain contrasts are caused by differences in the backscattering yields of magnetic domains of opposite magnetisation. Imaging the magnetic domains when the magnetisation vectors in the opposite-magnetisation domains are perpendicular to the tilt axis of the specimen has been considered difficult, because of the lack of change in the backscattering yields between the domains. An alternative way to obtain the type-II magnetic-domain contrasts is to utilise the difference in the exit angular distribution of the backscattered electrons from different magnetic domains. In this study, it is found that an electron backscatter diffraction (EBSD) camera can be used to obtain the type-II magnetic-domain contrasts caused by the above two mechanisms simultaneously. We verify this by distinguishing all four possible in-plane magnetisation vectors on a Fe-Si (001) surface without a sample rotation, using an EBSD detector as an array of electron detectors. The change in contrast between the magnetic domains, with respect to the location of a virtual electron detector, can provide information on the directions of the magnetisation vectors. A method to suppress the topographic contrast superimposed on the magnetic-domain contrast is also demonstrated.

Kikuchi pattern simulations of backscattered and transmitted electrons

We discuss a refined simulation approach which treats Kikuchi diffraction patterns in electron backscatter diffraction (EBSD) and transmission Kikuchi diffraction (TKD). The model considers the result of two combined mechanisms: (a) the dynamical diffraction of electrons emitted coherently from point sources in a crystal and (b) diffraction effects on incoherent diffuse intensity distributions. Using suitable parameter settings, the refined simulation model allows to reproduce various thickness- and energy-dependent features which are observed in experimental Kikuchi diffraction patterns. Excess-deficiency features are treated by the effect of gradients in the incoherent background intensity. Based on the analytical two-beam approximation to dynamical electron diffraction, a phenomenological model of excess-deficiency features is derived, which can be used for pattern matching applications. The model allows to approximate the effect of the incident beam geometry as a correction signal for template patterns which can be reprojected from pre-calculated reference data. As an application, we find that the accuracy of fitted projection centre coordinates in EBSD and TKD can be affected by changes in the order of 10 - 3 - 10 - 2 if excess-deficiency features are not considered in the theoretical model underlying a best-fit pattern matching approach. Correspondingly, the absolute accuracy of simulation-based EBSD strain determination can suffer from biases of a similar order of magnitude if excess-deficiency effects are neglected in the simulation model.

Approximant-based orientation determination of quasicrystals using electron backscatter diffraction

Orientation mapping of quasicrystalline materials is demonstrated using crystalline approximant structures in the technique of electron backscatter diffraction (EBSD). The approximant-based orientations are symmetrised according to the rotational point group of the quasicrystal, including the visualization of orientation maps using proper colour keys for quasicrystal symmetries. Alternatively, approximant-based orientation data can also be treated using pseudosymmetry post-processing options in the EBSD system software, which enables basic grain size estimations. Approximant-based orientation analyses are demonstrated for icosahedral and decagonal quasicrystals.

An investigation into experimental in situ scanning electron microscope (SEM) imaging at high temperature

This paper presents an investigation into high temperature imaging of metals through the use of a novel heat stage for in situ Scanning Electron Microscopy (SEM). The results obtained demonstrate the benefits and challenges of SEM imaging at elevated temperatures of up to 850 °C using Secondary Electron (SE) and Electron Backscatter Diffraction (EBSD) detectors. The data collected using the heat stage demonstrate good beam, vacuum, and detector stability at high temperatures without the need for shielding or detector modification owing to the heat stage geometry. SE imaging highlighted one possible application: carrying out thermal etching, a process in which surface grooves form along a material's grain boundaries during heating in situ. The data suggest that using the heat stage to perform imaging during the process gives a more accurate representation of a material's microstructure at temperature than examining the thermally etched specimen after cooling. This study also highlights some of the challenges of high temperature in situ EBSD imaging in both steel and nickel at a variety of temperatures and time scales. In particular, the data demonstrate the effect of surface roughness on EBSD imaging and how microstructural changes during heating may affect this. Additionally, the ease with which a material can be imaged using EBSD at temperature may be affected by the material's magnetic properties. For the first time, it is shown that at temperatures close to the Curie temperature of ferromagnetic materials, in this case Nickel, there is a loss of EBSD image quality. Quality was regained when temperatures were further increased. Despite these challenges, good quality EBSD scans were produced, further highlighting the benefits of in situ testing for providing information on grain boundaries, orientations, and phase change at elevated temperatures.

Improving the imaging capability of an on-axis transmission Kikuchi detector

Transmission Kikuchi Diffraction (TKD) in the scanning electron microscope has been developing at a fast pace since its introduction less than a decade ago. The recently presented on-axis detector configuration, with its optimized geometry, has significantly increased the signal yield and facilitated the acquisition of STEM images in bright field (BF) and dark field (DF) mode, in addition to the automated orientation mapping of nanocrystalline electron transparent samples. However, the physical position of the integrated imaging system, located outside the detector screen, requires its movement in order to combine high resolution STEM images with high resolution orientation measurements. The difference between the two positions makes it impossible to acquire optimal signals simultaneously, leading to challenges when investigating site-specific nanocrystalline microstructures. To eliminate this drawback, a new imaging capability was added at the centre of the on-axis TKD detector, thus enabling acquisition of optimal quality BF images and orientation maps without detector movement. The advantages brought about by this new configuration are presented and the associated limitations are discussed.

Deactivation of E. coli in water using Fe3+-saturated montmorillonite impregnated filter paper

In areas with high exposure to pathogen contaminated water and lack the economic means for water treatment, low cost and convenient point-of-use drinking water disinfection materials/devices are essential. Using a simple craft paper making method, Fe³⁺-saturated montmorillonite impregnated filter paper was constructed to filter live Escherichia coli (E. coli)-spiked water. The Scanning Electron Microscopic images of the E. coli cells in contact with the Fe³⁺-saturated montmorillonite impregnated filter paper showed: 1) Fe³⁺-saturated montmorillonite particles were uniformly coated on the cellulose paper fiber, creating large mineral surface for cell contact; and 2) E. coli cell membrane was dehydrated and damaged, resulting cell deactivation upon contacting with the Fe³⁺-saturated montmorillonite particles impregnated in the paper. The E. coli cells passing through the Fe³⁺-saturated montmorillonite impregnated filter paper were not viable as further confirmed by the microfluidic dielectrophoresis analysis. They remained non-viable at room temperature even after 5 days, as shown by the results from both the Colony Counting test and the Colilert test. More than 99.5% deactivation efficiency was achieved when the ratio of the volume of the E. coli contaminated water to the mass of Fe³⁺-saturated montmorillonite was maintained at <1:1.5 (mL/mg). The Fe³⁺-saturated montmorillonite impregnated filter paper maintained ~74% E. coli deactivation efficiency even after the 8th consecutive use. About 0.52 mg Fe³⁺, which is bioavailable, could be leached into the water for every 2 L E coli-contaminated water that is treated with the filter paper. The treated water could therefore provide iron supplement to a person at a level within the range of the FDA recommended human daily intake of iron. The results from this study has clearly demonstrated promising potential of using the Fe³⁺-saturated montmorillonite impregnated filter paper for low cost (~$0.07/L treated water for this study) and convenient point-of-use drinking water disinfection.

Phase-Contrast and Dark-Field Imaging

Very early, in 1896, Wilhelm Conrad Röntgen, the founding father of X-rays, attempted to measure diffraction and refraction by this new kind of radiation, in vain. Only 70 years later, these effects were measured by Ulrich Bonse and Michael Hart who used them to make full-field images of biological specimen, coining the term phase-contrast imaging. Yet, another 30 years passed until the Talbot effect was rediscovered for X-radiation, giving rise to a micrograting based interferometer, replacing the Bonse–Hart interferometer, which relied on a set of four Laue-crystals for beam splitting and interference. By merging the Lau-interferometer with this Talbot-interferometer, another ten years later, measuring X-ray refraction and X-ray scattering full-field and in cm-sized objects (as Röntgen had attempted 110 years earlier) became feasible in every X-ray laboratory around the world. Today, now that another twelve years have passed and we are approaching the 125th jubilee of Röntgen’s discovery, neither Laue-crystals nor microgratings are a necessity for sensing refraction and scattering by X-rays. Cardboard, steel wool, and sandpaper are sufficient for extracting these contrasts from transmission images, using the latest image reconstruction algorithms. This advancement and the ever rising number of applications for phase-contrast and dark-field imaging prove to what degree our understanding of imaging physics as well as signal processing have advanced since the advent of X-ray physics, in particular during the past two decades. The discovery of the electron, as well as the development of electron imaging technology, has accompanied X-ray physics closely along its path, both modalities exploring the applications of new dark-field contrast mechanisms these days. Materials science, life science, archeology, non-destructive testing, and medicine are the key faculties which have already integrated these new imaging devices, using their contrast mechanisms in full. This special issue “Phase-Contrast and Dark-field Imaging” gives us a broad yet very to-the-point glimpse of research and development which are currently taking place in this very active field. We find reviews, applications reports, and methodological papers of very high quality from various groups, most of which operate X-ray scanners which comprise these new imaging modalities.