Micro-LEGO for MEMS

Liquid Metal Patterning and Unique Properties for Next-Generation Soft Electronics

Room-temperature liquid metal (LM)-based electronics is expected to bring advancements in future soft electronics owing to its conductivity, conformability, stretchability, and biocompatibility. However, various difficulties arise when patterning LM because of its rheological features such as fluidity and surface tension. Numerous attempts are made to overcome these difficulties, resulting in various LM-patterning methods. An appropriate choice of patterning method based on comprehensive understanding is necessary to fully utilize the unique properties. Therefore, the authors aim to provide thorough knowledge about patterning methods and unique properties for LM-based future soft electronics. First, essential considerations for LM-patterning are investigated. Then, LM-patterning methods-serial-patterning, parallel-patterning, intermetallic bond-assisted patterning, and molding/microfluidic injection-are categorized and investigated. Finally, perspectives on LM-based soft electronics with unique properties are provided. They include outstanding features of LM such as conformability, biocompatibility, permeability, restorability, and recyclability. Also, they include perspectives on future LM-based soft electronics in various areas such as radio frequency electronics, soft robots, and heterogeneous catalyst. LM-based soft devices are expected to permeate the daily lives if patterning methods and the aforementioned features are analyzed and utilized.

Contact Printing of Multilayered Thin Films with Shape Memory Polymers

This study describes a method for transfer printing microarrays of multilayered organic-inorganic thin films using shape memory printing stamps and microstructured donor substrates. By applying the films on the microstructured donor substrates during physical vapor deposition and modulating the interfacial adhesion using a shape memory elastomer during printing, this method achieves (1) high lateral and feature-edge resolution and (2) high transfer efficiency from the donor to the receiver substrate. For demonstration, polyurethane-acrylate stamps and silicon/silicon oxide donor substrates were used in the large-area transfer printing of organic-inorganic thin-film stacks with micrometer lateral dimensions and sub-200 nm thickness.

Surface Adaptable and Adhesion Controllable Dry Adhesive with Shape Memory Polymer

Gecko foot consist of numerous micro/nano hierarchical hairs and exhibit a high adhesion onto various surfaces by the "van der Waals force". The gecko, despite its mighty adhesion, can travel efficiently with a rapid adhesion switching given that the end of hair in the gecko foot is slanted in one direction. Herein, we report a shape memory polymer (SMP)-based switchable dry adhesive (SSA), inspired by gecko foot, having tremendous surface adaptability and adhesion switching capability. The SSA shows not only high adhesion to the various surfaces (approximately 332.8 kPa) but also easy detachment (nearly 3.73 kPa) due to the characteristic of SMP, which can reversibly recover from a deformed shape to its initial shape. On the basis of the novel adhesion switching property, we suggest the SSA-applied advanced glass transfer system as a feasible application. This experiment confirms that an ultra-thin and light glass film is transferred easily and sustainably, and we believe that the SSA might be a breakthrough and a powerful alternative for not only conventional dry adhesive but also the next-level transfer systems. This article is protected by copyright. All rights reserved.

Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems

Direct transfer of pre-patterned device-grade nano-to-microscale materials highly benefits many existing and potential, high performance, heterogeneously integrated functional systems over conventional lithography-based microfabrication. We present, in combined theory and experiment, a self-delamination-driven pattern transfer of a single crystalline silicon thin membrane via well-controlled interfacial design in liquid media. This pattern transfer allows the usage of an intermediate or mediator substrate where both front and back sides of a thin membrane are capable of being integrated with standard lithographical processing, thereby achieving deterministic assembly of the thin membrane into a multi-functional system. Implementations of these capabilities are demonstrated in broad variety of applications ranging from electronics to microelectromechanical systems, wetting and filtration, and metamaterials.

Additive Manufacturing of Micro-Electro-Mechanical Systems (MEMS)

Recently, additive manufacturing (AM) processes applied to the micrometer range are subjected to intense development motivated by the influence of the consolidated methods for the macroscale and by the attraction for digital design and freeform fabrication. The integration of AM with the other steps of conventional micro-electro-mechanical systems (MEMS) fabrication processes is still in progress and, furthermore, the development of dedicated design methods for this field is under development. The large variety of AM processes and materials is leading to an abundance of documentation about process attempts, setup details, and case studies. However, the fast and multi-technological development of AM methods for microstructures will require organized analysis of the specific and comparative advantages, constraints, and limitations of the processes. The goal of this paper is to provide an up-to-date overall view on the AM processes at the microscale and also to organize and disambiguate the related performances, capabilities, and resolutions.

Dual Adaptation of a Flexible Shape Memory Polymer Adhesive

A shape memory polymer (SMP) adhesive forms a conformal and hermetic contact with a target surface at the soft, rubbery state and provides a high-strength dry adhesion at the rigid, glassy state. In particular, recent SMP adhesive studies show SMP's ability to adhere to various rough and even underwater yet rigid surfaces. However, achieving and retaining the strong adhesion on flexible target surfaces such as common fabrics has not been reported since a flexible target surface would easily be peeled off from an SMP adhesive, which is too rigid to accommodate the target surface flexing. Here, we introduce the dual adaptation of an SMP adhesive composed of a thin SMP layer and a backing fabric, which involves the shape adaptation to make a strong adhesive contact and the flexure adaptation to tolerate a target surface flexing. To discover the criteria for optimizing both shape and flexure adaptations, we present the theoretical rationale as well as the computational and experimental studies in this work. Based on the findings here, we design a thin SMP adhesive and demonstrate its dry and underwater adhesive performances on common clothes to highlight its potential applications.