Stretchable Piezoelectric Power Generators Based on ZnO Thin Films on Elastic Substrates

Thin Film Piezoelectric Nanogenerator Based on (100)-Oriented Nanocrystalline AlN Grown by Pulsed Laser Deposition at Room Temperature

In wearable or implantable biomedical devices that typically rely on battery power for diagnostics or operation, the development of flexible piezoelectric nanogenerators (NGs) that enable mechanical-to-electrical energy harvesting is finding promising applications. Here, we present the construction of a flexible piezoelectric nanogenerator using a thin film of room temperature deposited nanocrystalline aluminium nitride (AlN). On a thin layer of aluminium (Al), the AlN thin film was grown using pulsed laser deposition (PLD). The room temperature grown AlN film was composed of crystalline columnar grains oriented in the (100)-direction, as revealed in images from transmission electron microscopy (TEM) and X-ray diffraction (XRD). Fundamental characterization of the AlN thin film by piezoresponse force microscopy (PFM) indicated that its electro-mechanical energy conversion metrics were comparable to those of c-axis oriented AlN and zinc oxide (ZnO) thin films. Additionally, the AlN-based flexible piezoelectric NG was encapsulated in polyimide to further strengthen its mechanical robustness and protect it from some corrosive chemicals.

Tuning the Porosity of Piezoelectric Zinc Oxide Thin Films Obtained from Molecular Layer-Deposited "Zincones"

Porous zinc oxide (ZnO) thin films were synthesized via the calcination of molecular layer-deposited (MLD) "zincone" layers. The effect of the MLD process temperature (110 °C, 125 °C) and of the calcination temperature (340 °C, 400 °C, 500 °C) on the chemical, morphological, and crystallographic properties of the resulting ZnO was thoroughly investigated. Spectroscopic ellipsometry reveals that the thickness of the calcinated layers depends on the MLD temperature, resulting in 38-43% and 52-56% of remaining thickness for the 110 °C and 125 °C samples, respectively. Ellipsometric porosimetry shows that the open porosity of the ZnO thin films depends on the calcination temperature as well as on the MLD process temperature. The maximum open porosity of ZnO derived from zincone deposited at 110 °C ranges from 14.5% to 24%, rising with increasing calcination temperature. Compared with the 110 °C samples, the ZnO obtained from 125 °C zincone yields a higher porosity for low calcination temperatures, namely 18% for calcination at 340 °C; and up to 24% for calcination at 500 °C. Additionally, the porous ZnO thin films were subjected to piezoelectric measurements. The piezoelectric coefficient, d₃₃, was determined to be 2.8 pC/N, demonstrating the potential of the porous ZnO as an, e.g., piezoelectric sensor or energy harvester.

Graphene/Silver Nanowires/Graphene Sandwich Composite for Stretchable Transparent Electrodes and Its Fracture Mechanism

Polycrystalline graphene grown by chemical vapor deposition (CVD) is characterized by line defects and disruptions at the grain boundaries and nucleation sites. This adversely affects the stretchability and conductivity of graphene, which limits its applications in the field of flexible, stretchable, and transparent electrodes. We demonstrate a composite electrode comprised of a graphene/silver nanowires (AgNWs)/graphene sandwich structure on a polydimethylsiloxane substrate to overcome this limitation. The sandwich structure exhibits high transparency (>90%) and excellent conductivity improvement of the graphene layers. The use of AgNWs significantly suppresses the conductivity loss resulting from stretching. The mechanism of the suppression of the conductivity loss was investigated using scanning electron microscopy, atomic force microscopy, and lateral force microscopy. The results suggest that the high surface friction of the sandwich structure causes a sliding effect between the graphene layers would produce low crack or hole formation to maintain the conductivity. In addition to acting as conductive layers, the top and bottom graphene layers can also protect the AgNWs from oxidation, thereby enabling maintenance of the electrical performance of the electrodes over a prolonged period. We also confirmed the applicability of the sandwich structure electrode to the human body, such as on the wrist, finger, and elbow.