A Performance-Enhanced Liquid Metal-Based Microheater with Parallel Ventilating Side-Channels

A Novel Flexible Liquid Metal Microheater with a Textured Structure

In this paper, we propose a novel liquid metal microheater utilizing a textured structure. This microheater effectively solves the problem of the liquid metal in the PDMS flow channel fracturing at a certain temperature and significantly increases the maximum operating temperature that can be achieved by the current liquid metal microheater. Experimental results demonstrate that this new structured microheater can achieve a maximum operating temperature exceeding 300 °C. To explain the performance improvement and the reasons behind liquid metal fracture, corresponding experiments were conducted, and explanations were provided based on the experimental results. Subsequently, we verified the mechanical flexibility of the microheater and found that it exhibits excellent tensile and bending resistance. Finally, utilizing its good mechanical flexibility, the microheater was successfully attached to the side wall of a cup, resulting in the boiling of water.

Stretchable Conductors Fabricated by Stencil Lithography and Centrifugal Force-Assisted Patterning of Liquid Metal

Embedding liquid metals (LMs) into an elastomer is emerging as a promising strategy for stretchable conductors. Existing manufacturing techniques are struggling between spatial resolution and process complexity and are limited to chemically resistant substrates. Here, we report on a hybrid process combining stencil lithography and centrifugal force-assisted patterning of liquid metal for the development of LM-based stretchable conductors. The selective wetting behavior of oxide-removed eutectic gallium-indium (EGaIn) on metal patterns defined by stencil lithography enables micrometer scale LM patterns on an elastomeric substrate. Stencil lithography allows for defining metal regions without harsh chemical treatments, making it suitable for a wide range of substrates. Microscale LM patterns are achieved by efficiently removing the excess material by the centrifugal forces experienced from spinning the substrate. The proposed approach allows for the creation of LM patterns with a line width as small as 2 μm on a stretchable poly(dimethylsiloxane) (PDMS) substrate. The electrical measurement results show that the fabricated EGaIn devices can endure 40% mechanical strain over several thousands of cycles. Furthermore, a stencil design using microbridges is proposed to address the mechanical stability issue in stencil lithography. An EGaIn conductor with a serpentine structure and an interdigitated capacitor are fabricated and characterized. The results demonstrate that the patterned serpentine conductors retain their functionality with applied mechanical strain up to 80%. The performance of the interdigitated capacitors upon applied strain is in good agreement with the theoretical estimation. Finally, we demonstrate our approach also on poly(octamethylene maleate (anhydride) citrate) (POMaC) substrates to broaden the use of the proposed method to not only flexible and stretchable but also biodegradable substrates, opening a way for in vivo transient microsystem engineering. The work presented here provides a versatile and reliable approach for manufacturing stretchable conductors.

Microheater: material, design, fabrication, temperature control, and applications-a role in COVID-19

Heating plays a vital role in science, engineering, mining, and space, where heating can be achieved via electrical, induction, infrared, or microwave radiation. For fast switching and continuous applications, hotplate or Peltier elements can be employed. However, due to bulkiness, they are ineffective for portable applications or operation at remote locations. Miniaturization of heaters reduces power consumption and bulkiness, enhances the thermal response, and integrates with several sensors or microfluidic chips. The microheater has a thickness of ~ 100 nm to ~ 100 μm and offers a temperature range up to 1900℃ with precise control. In recent years, due to the escalating demand for flexible electronics, thin-film microheaters have emerged as an imperative research area. This review provides an overview of recent advancements in microheater as well as analyses different microheater designs, materials, fabrication, and temperature control. In addition, the applications of microheaters in gas sensing, biological, and electrical and mechanical sectors are emphasized. Moreover, the maximum temperature, voltage, power consumption, response time, and heating rate of each microheater are tabulated. Finally, we addressed the specific key considerations for designing and fabricating a microheater as well as the importance of microheater integration in COVID-19 diagnostic kits. This review thereby provides general guidelines to researchers to integrate microheater in micro-electromechanical systems (MEMS), which may pave the way for developing rapid and large-scale SARS-CoV-2 diagnostic kits in resource-constrained clinical or home-based environments.

A Study of Dielectrophoresis-Based Liquid Metal Droplet Control Microfluidic Device

This study presents a dielectrophoresis-based liquid metal (LM) droplet control microfluidic device. Six square liquid metal electrodes are fabricated beneath an LM droplet manipulation pool. By applying different voltages on the different electrodes, a non-uniform electric field is formed around the LM droplet, and charges are induced on the surface of the droplet accordingly, so that the droplet could be driven inside the electric field. With a voltage of ±1000 V applied on the electrodes, the LM droplets are driven with a velocity of 0.5 mm/s for the 2.0 mm diameter ones and 1.0 mm/s for the 1.0 mm diameter ones. The whole chip is made of PDMS, and microchannels are fabricated by laser ablation. In this device, the electrodes are not in direct contact with the working droplets; a thin PDMS film stays between the electrodes and the driven droplets, preventing Joule heat or bubble formation during the experiments. To enhance the flexibility of the chip design, a gallium-based alloy with melting point of 10.6 °C is used as electrode material in this device. This dielectrophoresis (DEP) device was able to successfully drive liquid metal droplets and is expected to be a flexible approach for liquid metal droplet control.