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Pinheiro T, Morais M, Silvestre S, Carlos E, Coelho J, Almeida HV, Barquinha P, Fortunato E, Martins R. Direct Laser Writing: From Materials Synthesis and Conversion to Electronic Device Processing. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2402014. [PMID: 38551106 DOI: 10.1002/adma.202402014] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/06/2024] [Revised: 03/18/2024] [Indexed: 04/25/2024]
Abstract
Direct Laser Writing (DLW) has been increasingly selected as a microfabrication route for efficient, cost-effective, high-resolution material synthesis and conversion. Concurrently, lasers participate in the patterning and assembly of functional geometries in several fields of application, of which electronics stand out. In this review, recent advances and strategies based on DLW for electronics microfabrication are surveyed and outlined, based on laser material growth strategies. First, the main DLW parameters influencing material synthesis and transformation mechanisms are summarized, aimed at selective, tailored writing of conductive and semiconducting materials. Additive and transformative DLW processing mechanisms are discussed, to open space to explore several categories of materials directly synthesized or transformed for electronics microfabrication. These include metallic conductors, metal oxides, transition metal chalcogenides and carbides, laser-induced graphene, and their mixtures. By accessing a wide range of material types, DLW-based electronic applications are explored, including processing components, energy harvesting and storage, sensing, and bioelectronics. The expanded capability of lasers to participate in multiple fabrication steps at different implementation levels, from material engineering to device processing, indicates their future applicability to next-generation electronics, where more accessible, green microfabrication approaches integrate lasers as comprehensive tools.
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Affiliation(s)
- Tomás Pinheiro
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Maria Morais
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Sara Silvestre
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Emanuel Carlos
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - João Coelho
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Henrique V Almeida
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Pedro Barquinha
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Elvira Fortunato
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
| | - Rodrigo Martins
- i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal
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Bischoff K, Esen C, Hellmann R. Preparation of Dispersed Copper(II) Oxide Nanosuspensions as Precursor for Femtosecond Reductive Laser Sintering by High-Energy Ball Milling. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:2693. [PMID: 37836334 PMCID: PMC10574695 DOI: 10.3390/nano13192693] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/20/2023] [Revised: 09/25/2023] [Accepted: 09/30/2023] [Indexed: 10/15/2023]
Abstract
This contribution demonstrates and discusses the preparation of finely dispersed copper(II) oxide nanosuspensions as precursors for reductive laser sintering (RLS). Since the presence of agglomerates interferes with the various RLS sub-processes, fine dispersion is required, and oversized particles must be identified by a measurement methodology. Aside from the established method of scanning electron microscopy for imaging individual dried particles, this work applies the holistic and statistically more significant laser diffraction in combination with dynamic image analysis in wet dispersion. In addition to direct ultrasonic homogenization, high-energy ball milling is introduced for RLS, to produce stable nanosuspensions with a high fine fraction, and, above all, the absence of oversize particles. Whereas ultrasonic dispersion stagnates at particle sizes between 500 nm and 20 μm, even after 8 h, milled suspension contains a high proportion of finest particles with diameters below 100 nm, no agglomerates larger than 1 μm and a trimodal particle size distribution with the median at 50 nm already, after 100 min of milling. The precursor layers produced by doctor blade coating are examined for their quality by laser scanning microscopy. The surface roughness of such a dry film can be reduced from 1.26 μm to 88 nm by milling. Finally, the novel precursor is used for femtosecond RLS, to produce homogeneous, high-quality copper layers with a sheet resistance of 0.28Ω/sq and a copper mass concentration of 94.2%.
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Affiliation(s)
- Kay Bischoff
- Applied Laser and Photonics Group, University of Applied Sciences Aschaffenburg, Würzburger Straße 45, 63743 Aschaffenburg, Germany
| | - Cemal Esen
- Applied Laser Technologies, Ruhr University Bochum, Universitätsstraße 150, 44801 Bochum, Germany;
| | - Ralf Hellmann
- Applied Laser and Photonics Group, University of Applied Sciences Aschaffenburg, Würzburger Straße 45, 63743 Aschaffenburg, Germany
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Mamom J, Ratanadecho P, Mingmalairak C, Rungroungdouyboon B. Humidity-Sensing Mattress for Long-Term Bedridden Patients with Incontinence-Associated Dermatitis. MICROMACHINES 2023; 14:1178. [PMID: 37374763 DOI: 10.3390/mi14061178] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/16/2023] [Revised: 05/26/2023] [Accepted: 05/30/2023] [Indexed: 06/29/2023]
Abstract
Designing new medical devices with advanced humidity sensors is of great significance for patients with incontinence-associated dermatitis (IAD). The primary goal of this study is to test the humidity-sensing mattress system for patients with IAD in clinical settings. The design of the mattress is set at 203 cm, with 10 × 3 sensors, dimensions of 19 × 32 cm, and a weighted bearing of 200 kg. The main sensors consist of a humidity-sensing film, a thin-film electrode (6 × 0.1 mm), and a glass substrate (500 nm). The sensitivity of the test mattress system showed that the resistance-humidity sensor was at a temperature of 35 °C (V0 = 30 V, V0 = 350 mV), with slope at 1.13 V/fF, f = 1 MHz, 20-90% RH, and a response time of 20 s at 2 μm. In addition, the humidity sensor reached 90% RH, with a response time of less than 10 s, a magnitude of 107-104 Ω, 1 mol%, CrO1.5, and FO1.5, respectively. This design is not only a simple, low-cost medical sensing device, but also opens a new pathway for developing humidity-sensing mattresses in the field of flexible sensors, wearable medical diagnostic devices, and health detection.
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Affiliation(s)
- Jinpitcha Mamom
- Department of Adult Nursing and the Aged, Faculty of Nursing, Thammasat University, Pathum Thani 12121, Thailand
| | - Phadungsak Ratanadecho
- Center of Excellence in Electromagnetic Energy Utilization in Engineering, Department of Mechanical Engineering, Faculty of Engineering, Thammasat University, Pathum Thani 12120, Thailand
| | - Chatchai Mingmalairak
- Department of Surgery, Faculty of Medicine, Thammasat University, Pathum Thani 12120, Thailand
| | - Bunyong Rungroungdouyboon
- Center of Excellence in Creative Engineering Design and Development, Faculty of Engineering, Thammasat University, Pathum Thani 12121, Thailand
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Niu G, Wang Z, Xue Y, Yan J, Dutta A, Chen X, Wang Y, Liu C, Du S, Guo L, Zhou P, Cheng H, Yang L. Pencil-on-Paper Humidity Sensor Treated with NaCl Solution for Health Monitoring and Skin Characterization. NANO LETTERS 2023; 23:1252-1260. [PMID: 36584409 DOI: 10.1021/acs.nanolett.2c04384] [Citation(s) in RCA: 8] [Impact Index Per Article: 8.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/17/2023]
Abstract
Although flexible humidity sensors are essential for human health monitoring, it is still challenging to achieve high sensitivity and easy disposal with simple, low-cost fabrication processes. This study presents the design and fabrication of highly reliable hand-drawn interdigital electrodes from pencil-on-paper treated with NaCl solution for highly sensitive hydration sensors working over a wide range of relative humidity (RH) levels from 5.6% to 90%. The applications of the resulting flexible humidity sensor go beyond the monitoring of respiratory rate and proximity to characterizations of human skin types and evaluations of skin barrier functions through insensible sweat measurements. The sensor array can also be integrated with a diaper to result in smart diapers to alert for an early diaper change. The design and fabrication strategies presented in this work could also be leveraged for the development of wearable, self-powered, and recyclable sensors and actuators in the future.
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Affiliation(s)
- Guangyu Niu
- Department of Architecture and Art, Hebei University of Technology, Tianjin, 300130, China
| | - Zihan Wang
- State Key Laboratory for Reliability and Intelligence of Electrical Equipment, Hebei Key Laboratory of Smart Sensing and Human-Robot Interaction, School of Mechanical Engineering, Hebei University of Technology, Tianjin 300401, China
| | - Ye Xue
- State Key Laboratory of Reliability and Intelligence of Electrical Equipment, School of Health Sciences and Biomedical Engineering, Hebei University of Technology, Tianjin 300130, China
| | - Jiayi Yan
- State Key Laboratory for Reliability and Intelligence of Electrical Equipment, Hebei Key Laboratory of Smart Sensing and Human-Robot Interaction, School of Mechanical Engineering, Hebei University of Technology, Tianjin 300401, China
| | - Ankan Dutta
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Xue Chen
- State Key Laboratory of Reliability and Intelligence of Electrical Equipment, Key Laboratory of Bioelectromagnetics and Neuroengineering of Hebei Province, School of Electrical Engineering, Hebei University of Technology, Tianjin 300130, China
| | - Ya Wang
- State Key Laboratory for Reliability and Intelligence of Electrical Equipment, Hebei Key Laboratory of Smart Sensing and Human-Robot Interaction, School of Mechanical Engineering, Hebei University of Technology, Tianjin 300401, China
| | - Chaosai Liu
- State Key Laboratory for Reliability and Intelligence of Electrical Equipment, Hebei Key Laboratory of Smart Sensing and Human-Robot Interaction, School of Mechanical Engineering, Hebei University of Technology, Tianjin 300401, China
| | - Shuaijie Du
- State Key Laboratory of Reliability and Intelligence of Electrical Equipment, Key Laboratory of Bioelectromagnetics and Neuroengineering of Hebei Province, School of Electrical Engineering, Hebei University of Technology, Tianjin 300130, China
| | - Langang Guo
- State Key Laboratory for Reliability and Intelligence of Electrical Equipment, Hebei Key Laboratory of Smart Sensing and Human-Robot Interaction, School of Mechanical Engineering, Hebei University of Technology, Tianjin 300401, China
| | - Peng Zhou
- Tianjin Tianzhong Yimai Technology Development Co. Ltd., Tianjin 300384, China
| | - Huanyu Cheng
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Li Yang
- State Key Laboratory of Reliability and Intelligence of Electrical Equipment, School of Health Sciences and Biomedical Engineering, Hebei University of Technology, Tianjin 300130, China
- Tianjin Tianzhong Yimai Technology Development Co. Ltd., Tianjin 300384, China
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Shi S, Liang J, Qu C, Chen S, Sheng B. Ramie Fabric Treated with Carboxymethylcellulose and Laser Engraved for Strain and Humidity Sensing. MICROMACHINES 2022; 13:1309. [PMID: 36014231 PMCID: PMC9414723 DOI: 10.3390/mi13081309] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/21/2022] [Revised: 08/11/2022] [Accepted: 08/11/2022] [Indexed: 05/08/2023]
Abstract
Wearable fabric sensors have attracted enormous attention due to their huge potential in human health and activity monitoring, human-machine interaction and the Internet of Things (IoT). Among natural fabrics, bast fabric has the advantage of high strength, good resilience and excellent permeability. Laser engraving, as a high throughput, patternable and mask-free method, was demonstrated to fabricate fabric sensors. In this work, we developed a simplified, cost-effective and environmentally friendly method for engraving ramie fabric (a kind of bast fabric) directly by laser under an ambient atmosphere to prepare strain and humidity sensors. We used carboxymethylcellulose (CMC) to pretreat ramie fabric before laser engraving and gained laser-carbonized ramie fabrics (LCRF) with high conductivity (65 Ω sq-1) and good permeability. The strain and humidity sensors had high sensitivity and good flexibility, which can be used for human health and activity monitoring.
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Affiliation(s)
- Shangxuan Shi
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Jiao Liang
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Chenkai Qu
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Shangbi Chen
- Shanghai Aerospace Control Technology Institute, Shanghai 200233, China
| | - Bin Sheng
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
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