Rapid Laser Manufacturing of Microfluidic Devices from Glass Substrates

Targeted Cancer Therapy-on-A-Chip

Targeted cancer therapy (TCT) is gaining increased interest because it reduces the risks of adverse side effects by specifically treating tumor cells. TCT testing has traditionally been performed using two-dimensional (2D) cell culture and animal studies. Organ-on-a-chip (OoC) platforms have been developed to recapitulate cancer in vitro, as cancer-on-a-chip (CoC), and used for chemotherapeutics development and testing. This review explores the use of CoCs to both develop and test TCTs, with a focus on three main aspects, the use of CoCs to identify target biomarkers for TCT development, the use of CoCs to test free, un-encapsulated TCTs, and the use of CoCs to test encapsulated TCTs. Despite current challenges such as system scaling, and testing externally triggered TCTs, TCToC shows a promising future to serve as a supportive, pre-clinical platform to expedite TCT development and bench-to-bedside translation.

Navigating the future: Microfluidics charting new routes in drug delivery

Microfluidics has emerged as a transformative force in the field of drug delivery, offering innovative avenues to produce a diverse range of nano drug delivery systems. Thanks to its precise manipulation of small fluid volumes and its exceptional command over the physicochemical characteristics of nanoparticles, this technology is notably able to enhance the pharmacokinetics of drugs. It has initiated a revolutionary phase in the domain of drug delivery, presenting a multitude of compelling advantages when it comes to developing nanocarriers tailored for the delivery of poorly soluble medications. These advantages represent a substantial departure from conventional drug delivery methodologies, marking a paradigm shift in pharmaceutical research and development. Furthermore, microfluidic platformsmay be strategically devised to facilitate targeted drug delivery with the objective of enhancing the localized bioavailability of pharmaceutical substances. In this paper, we have comprehensively investigated a range of significant microfluidic techniques used in the production of nanoscale drug delivery systems. This comprehensive review can serve as a valuable reference and offer insightful guidance for the development and optimization of numerous microfluidics-fabricated nanocarriers.

In-situ multicore fibre-based pH mapping through obstacles in integrated microfluidic devices

Microfluidic systems with integrated sensors are ideal platforms to study and emulate processes such as complex multiphase flow and reactive transport in porous media, numerical modeling of bulk systems in medicine, and in engineering. Existing commercial optical fibre sensing systems used in integrated microfluidic devices are based on single-core fibres, limiting the spatial resolution in parameter measurements in such application scenarios. Here, we propose a multicore fibre-based pH system for in-situ pH mapping with tens of micrometer spatial resolution in microfluidic devices. The demonstration uses custom laser-manufactured glass microfluidic devices (called further micromodels) consisting of two round ports. The micromodels comprise two lintels for the injection of various pH buffers and an outlet. The two-port system facilitates the injection of various pH solutions using independent pressure pumps. The multicore fibre imaging system provides spatial information about the pH environment from the intensity distribution of fluorescence emission from the sensor attached to the fibre end facet, making use of the cores in the fibre as independent measurement channels. As proof-of-concept, we performed pH measurements in micromodels through obstacles (glass and rock beads), showing that the particle features can be clearly distinguishable from the intensity distribution from the fibre sensor.

Organ-on-a-Chip for Drug Screening: A Bright Future for Sustainability? A Critical Review

Globalization has raised concerns about spreading diseases and emphasized the need for quick and efficient methods for drug screening. Established drug efficacy and toxicity approaches have proven obsolete, with a high failure rate in clinical trials. Organ-on-a-chip has emerged as an essential alternative to outdated techniques, precisely simulating important characteristics of organs and predicting drug pharmacokinetics more ethically and efficiently. Although promising, most organ-on-a-chip devices are still manufactured using principles and materials from the micromachining industry. The abusive use of plastic for traditional drug screening methods and device production should be considered when substituting technologies so that the compensation for the generation of plastic waste can be projected. This critical review outlines recent advances for organ-on-a-chip in the industry and estimates the possibility of scaling up its production. Moreover, it analyzes trends in organ-on-a-chip publications and provides suggestions for a more sustainable future for organ-on-a-chip research and production.

Low-Viscosity Polydimethylsiloxane Resin for Facile 3D Printing of Elastomeric Microfluidics

Microfluidics is a rapidly advancing technology with expansive applications but has been restricted by slow, laborious fabrication techniques for polydimethylsiloxane (PDMS)-based devices. Currently, 3D printing promises to address this challenge with high-resolution commercial systems but is limited by a lack of material advances in generating high-fidelity parts with micron-scale features. To overcome this limitation, a low-viscosity, photopolymerizable PDMS resin was formulated with a methacrylate-PDMS copolymer, methacrylate-PDMS telechelic polymer, photoabsorber, Sudan I, photosensitizer, 2-isopropylthioxanthone, and a photoinitiator, 2,4,6-trimethyl benzoyl diphenylphosphine oxide. The performance of this resin was validated on a digital light processing (DLP) 3D printer, an Asiga MAX X27 UV. Resin resolution, part fidelity, mechanical properties, gas permeability, optical transparency, and biocompatibility were investigated. This resin produced resolved, unobstructed channels as small as 38.4 (±5.0) µm tall and membranes as thin as 30.9 (±0.5) µm. The printed material had an elongation at break of 58.6% ± 18.8%, Young's modulus of 0.30 ± 0.04 MPa, and was highly permeable to O₂ (596 Barrers) and CO₂ (3071 Barrers). Following the ethanol extraction of the unreacted components, this material demonstrated optical clarity and transparency (>80% transmission) and viability as a substrate for in vitro tissue culture. This paper presents a high-resolution, PDMS 3D-printing resin for the facile fabrication of microfluidic and biomedical devices.

Microfluidic Organ-on-A-chip: A Guide to Biomaterial Choice and Fabrication

Organ-on-A-chip (OoAC) devices are miniaturized, functional, in vitro constructs that aim to recapitulate the in vivo physiology of an organ using different cell types and extracellular matrix, while maintaining the chemical and mechanical properties of the surrounding microenvironments. From an end-point perspective, the success of a microfluidic OoAC relies mainly on the type of biomaterial and the fabrication strategy employed. Certain biomaterials, such as PDMS (polydimethylsiloxane), are preferred over others due to their ease of fabrication and proven success in modelling complex organ systems. However, the inherent nature of human microtissues to respond differently to surrounding stimulations has led to the combination of biomaterials ranging from simple PDMS chips to 3D-printed polymers coated with natural and synthetic materials, including hydrogels. In addition, recent advances in 3D printing and bioprinting techniques have led to the powerful combination of utilizing these materials to develop microfluidic OoAC devices. In this narrative review, we evaluate the different materials used to fabricate microfluidic OoAC devices while outlining their pros and cons in different organ systems. A note on combining the advances made in additive manufacturing (AM) techniques for the microfabrication of these complex systems is also discussed.

The Impact of Wettability on Dynamic Fluid Connectivity and Flow Transport Kinetics in Porous Media

Usually, models describing flow and transport for sub-surface engineering processes at the Darcy-scale do not take into consideration the effects of pore-scale flow regimes and fluid connectivity on average flow functions. In this article, we investigate the impact of wettability on pore-scale flow regimes. We show that fluid connectivity at the pore scale has a significant impact on average flow kinetics and therefore its contribution should not be ignored. Immiscible two-phase flow simulations were performed in a two-dimensional model of a Berea sandstone rock for wettability conditions ranging from moderately water-wet to strongly oil-wet. The simulation results show that wettability has a strong impact on invading fluid phase connectivity, which subsequently influences flow transport resistance. The effect of invading-phase connectivity and ganglion dynamics (GD) on two-phase displacement kinetics was also investigated. It was found that invading phase connectivity decreases away from the neutrally wet (intermediate wet) state. This study provides evidence that GD accelerate fluid flow transport kinetics during immiscible displacement processes. Lastly, the impact of wettability on fluid displacement efficiency and residual saturations was investigated. Maximum displacement efficiency occurred at the neutrally wet state.

Time-efficient fabrication method for 3D-printed microfluidic devices

Recent developments in 3D-printing technology have provided a time-efficient and inexpensive alternative to the fabrication of microfluidic devices. At present, 3D-printed microfluidic systems face the challenges of post-processing, non-transparency, and being time consuming, limiting their practical application. In this study, a time-efficient and inexpensive fabrication method was developed for 3D-printed microfluidic devices. The material for 3D-printed microfluidic chips is Dowsil 732, which is used as a sealant or encapsulant in various industries. The curing time and surface hydrophobicity of the materials were evaluated. The results indicated that the surface of Dowsil 732 is hydrophilic. An optimization model of the direct ink writing method is proposed to establish a time-efficient and accurate fabrication method for microfluidic devices. The results indicate that the optimization model can effectively describe the change trend between printing speed, printing pressure, and channel wall accuracy, and the model accuracy rate exceeds 95%. Three examples-a micromixer, concentration gradient generator, and droplet generator-were printed to demonstrate the functionality and feasibility of the fabrication method.

Immuno-biosensor on a chip: a self-powered microfluidic-based electrochemical biosensing platform for point-of-care quantification of proteins

The realization of true point-of-care (PoC) systems profoundly relies on integrating the bioanalytical assays into "on-chip" fluid handing platforms, with autonomous performance, reproducible functionality, and capacity in scalable production. Specifically for electrochemical immuno-biosensing, the complexity of the procedure used for ultrasensitive protein detection using screen-printed biosensors necessitates a lab-centralized practice, hindering the path towards near-patient use. This work develops a self-powered microfluidic chip that automates the entire assay of electrochemical immuno-biosensing, enabling controlled and sequential delivery of the biofluid sample and the sensing reagents to the surface of the embedded electrochemical biosensor. Without any need for active fluid handling, this novel sample-to-result testing kit offers antibody-antigen immunoreaction within 15 min followed by the subsequent automatic washing, redox probe delivery, and electrochemical signal recording. The redox molecules ([Fe(CN)₆]^3-/4-) are pre-soaked and dried in fiber and embedded inside the chip. The dimensions of the fluidic design and the parameters of the electrochemical bioassay are optimized to warrant a consistent and reproducible performance of the autonomous sensing device. The uniform diffusion of the dried redox into the injected solution and its controlled delivery onto the biosensor are modeled via a two-phase flow computational fluid dynamics simulation, determining the suitable time for electrochemical signal measurement from the biosensor. The microfluidic chip performs well with both water-based fluids and human plasma with the optimized sample volume to offer a proof-of-concept ultrasensitive biosensing of SARS-CoV-2 nucleocapsid proteins spiked in phosphate buffer saline within 15 min. The on-chip N-protein biosensing demonstrates a linear detection range of 10 to 1000 pg mL^-1 with a limit of detection of 3.1 pg mL^-1. This is the first self-powered microfluidic-integrated electrochemical immuno-biosensor that promises quantitative and ultrasensitive PoC biosensing. Once it is modified for its design and dimensions, it can be further used for autonomous detection of one or multiple proteins in diverse biofluid samples.

Manufacturing of Microfluidic Devices with Interchangeable Commercial Fiber Optic Sensors

In situ measurements are highly desirable in many microfluidic applications because they enable real-time, local monitoring of physical and chemical parameters, providing valuable insight into microscopic events and processes that occur in microfluidic devices. Unfortunately, the manufacturing of microfluidic devices with integrated sensors can be time-consuming, expensive, and “know-how” demanding. In this article, we describe an easy-to-implement method developed to integrate various “off-the-shelf” fiber optic sensors within microfluidic devices. To demonstrate this, we used commercial pH and pressure sensors (“pH SensorPlugs” and “FOP-MIV”, respectively), which were “reversibly” attached to a glass microfluidic device using custom 3D-printed connectors. The microfluidic device, which serves here as a demonstrator, incorporates a uniform porous structure and was manufactured using a picosecond pulsed laser. The sensors were attached to the inlet and outlet channels of the microfluidic pattern to perform simple experiments, the aim of which was to evaluate the performance of both the connectors and the sensors in a practical microfluidic environment. The bespoke connectors ensured robust and watertight connection, allowing the sensors to be safely disconnected if necessary, without damaging the microfluidic device. The pH SensorPlugs were tested with a pH 7.01 buffer solution. They measured the correct pH values with an accuracy of ±0.05 pH once sufficient contact between the injected fluid and the measuring element (optode) was established. In turn, the FOP-MIV sensors were used to measure local pressure in the inlet and outlet channels during injection and the steady flow of deionized water at different rates. These sensors were calibrated up to 140 mbar and provided pressure measurements with an uncertainty that was less than ±1.5 mbar. Readouts at a rate of 4 Hz allowed us to observe dynamic pressure changes in the device during the displacement of air by water. In the case of steady flow of water, the pressure difference between the two measuring points increased linearly with increasing flow rate, complying with Darcy’s law for incompressible fluids. These data can be used to determine the permeability of the porous structure within the device.

Short-Pulse Laser-Assisted Fabrication of a Si-SiO2 Microcooling Device

Thermal management is one of the main challenges in the most demanding detector technologies and for the future of microelectronics. Microfluidic cooling has been proposed as a fully integrated solution to the heat dissipation problem in modern high-power microelectronics. Traditional manufacturing of silicon-based microfluidic devices involves advanced, mask-based lithography techniques for surface patterning. The limited availability of such facilities prevents widespread development and use. We demonstrate the relevance of maskless laser writing to advantageously replace lithographic steps and provide a more prototype-friendly process flow. We use a 20 W infrared laser with a pulse duration of 50 ps to engrave and drill a 525 μm-thick silicon wafer. Anodic bonding to a SiO2 wafer is used to encapsulate the patterned surface. Mechanically clamped inlet/outlet connectors complete the fully operational microcooling device. The functionality of the device has been validated by thermofluidic measurements. Our approach constitutes a modular microfabrication solution that should facilitate prototyping studies of new concepts for co-designed electronics and microfluidics.

Microfabricated Devices for Confocal Microscopy on Biological Samples

Microfabricated devices have found applications in a range of biomedical research problems in recent years, with thousands of research papers published and multiple commercial devices now available. This chapter is intended to provide an overview of the available options for devices compatible with confocal microscopy, including an overview of fabrication techniques and some examples of device use. Although there are times when off-the-shelf devices are well suited for the problem at hand, in some cases customized devices are necessary or more convenient. Protocols for researchers who wish to make their own devices are outlined below; although fabricating templates for devices requires some specialized equipment, making PDMS or hydrogel devices from templates can be done in a standard laboratory setting.

Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications

Laser has been demonstrated to be a mature and versatile tool that presents great flexibility and applicability for the precision engineering of a wide range of materials over other established micromachining techniques. Past decades have witnessed its rapid development and extensive applications ranging from scientific researches to industrial manufacturing. Transparent hard materials remain several major technical challenges for conventional laser processing techniques due to their high hardness, great brittleness, and low optical absorption. A variety of hybrid laser processing technologies, such as laser-induced plasma-assisted ablation, laser-induced backside wet etching, and etching assisted laser micromachining, have been developed to overcome these barriers by introducing additional medium assistance or combining different process steps. This article reviews the basic principles and characteristics of these hybrid technologies. How these technologies are used to precisely process transparent hard materials and their recent advancements are introduced. These hybrid technologies show remarkable benefits in terms of efficiency, accuracy, and quality for the fabrication of microstructures and functional devices on the surface of or inside the transparent hard substrates, thus enabling widespread applications in the fields of microelectronics, bio-medicine, photonics, and microfluidics. A summary and outlook of the hybrid laser technologies are also highlighted.

Fabrication and Applications of Microfluidic Devices: A Review

Microfluidics is a relatively newly emerged field based on the combined principles of physics, chemistry, biology, fluid dynamics, microelectronics, and material science. Various materials can be processed into miniaturized chips containing channels and chambers in the microscale range. A diverse repertoire of methods can be chosen to manufacture such platforms of desired size, shape, and geometry. Whether they are used alone or in combination with other devices, microfluidic chips can be employed in nanoparticle preparation, drug encapsulation, delivery, and targeting, cell analysis, diagnosis, and cell culture. This paper presents microfluidic technology in terms of the available platform materials and fabrication techniques, also focusing on the biomedical applications of these remarkable devices.

Hemp-Based Microfluidics

Hemp is a sustainable, recyclable, and high-yield annual crop that can be used to produce textiles, plastics, composites, concrete, fibers, biofuels, bionutrients, and paper. The integration of microfluidic paper-based analytical devices (µPADs) with hemp paper can improve the environmental friendliness and high-throughputness of µPADs. However, there is a lack of sufficient scientific studies exploring the functionality, pros, and cons of hemp as a substrate for µPADs. Herein, we used a desktop pen plotter and commercial markers to pattern hydrophobic barriers on hemp paper, in a single step, in order to characterize the ability of markers to form water-resistant patterns on hemp. In addition, since a higher resolution results in densely packed, cost-effective devices with a minimized need for costly reagents, we examined the smallest and thinnest water-resistant patterns plottable on hemp-based papers. Furthermore, the wicking speed and distance of fluids with different viscosities on Whatman No. 1 and hemp papers were compared. Additionally, the wettability of hemp and Whatman grade 1 paper was compared by measuring their contact angles. Besides, the effects of various channel sizes, as well as the number of branches, on the wicking distance of the channeled hemp paper was studied. The governing equations for the wicking distance on channels with laser-cut and hydrophobic side boundaries are presented and were evaluated with our experimental data, elucidating the applicability of the modified Washburn equation for modeling the wicking distance of fluids on hemp paper-based microfluidic devices. Finally, we validated hemp paper as a substrate for the detection and analysis of the potassium concentration in artificial urine.

Experimental Analysis of Laser Micromachining of Microchannels in Common Microfluidic Substrates

Laser micromachining technique offers a promising alternative method for rapid production of microfluidic devices. However, the effect of process parameters on the channel geometry and quality of channels on common microfluidic substrates has not been fully understood yet. In this research, we studied the effect of laser system parameters on the microchannel characteristics of Polydimethylsiloxane (PDMS), polymethyl methacrylate (PMMA), and microscope glass substrate—three most widely used materials for microchannels. We also conducted a cell adhesion experiment using normal human dermal fibroblasts on laser-machined microchannels on these substrates. A commercial CO₂ laser system consisting of a 45W laser tube, circulating water loop within the laser tube and air cooling of the substrate was used for machining microchannels in PDMS, PMMA and glass. Four laser system parameters—speed, power, focal distance, and number of passes were varied to fabricate straight microchannels. The channel characteristics such as depth, width, and shape were measured using a scanning electron microscope (SEM) and a 3D profilometer. The results show that higher speed produces lower depth while higher laser power produces deeper channels regardless of the substrate materials. Unfocused laser machining produces wider but shallower channels. For the same speed and power, PDMS channels were the widest while PMMA channels were the deepest. Results also showed that the profiles of microchannels can be controlled by increasing the number of passes. With an increased number of passes, both glass and PDMS produced uniform, wider, and more circular channels; in contrast, PMMA channels were sharper at the bottom and skewed. In rapid cell adhesion experiments, PDMS and glass microchannels performed better than PMMA microchannels. This study can serve as a quick reference in material-specific laser-based microchannel fabrications.

Review of Microfluidic Devices and Imaging Techniques for Fluid Flow Study in Porous Geomaterials

Understanding transport phenomena and governing mechanisms of different physical and chemical processes in porous media has been a critical research area for decades. Correlating fluid flow behaviour at the micro-scale with macro-scale parameters, such as relative permeability and capillary pressure, is key to understanding the processes governing subsurface systems, and this in turn allows us to improve the accuracy of modelling and simulations of transport phenomena at a large scale. Over the last two decades, there have been significant developments in our understanding of pore-scale processes and modelling of complex underground systems. Microfluidic devices (micromodels) and imaging techniques, as facilitators to link experimental observations to simulation, have greatly contributed to these achievements. Although several reviews exist covering separately advances in one of these two areas, we present here a detailed review integrating recent advances and applications in both micromodels and imaging techniques. This includes a comprehensive analysis of critical aspects of fabrication techniques of micromodels, and the most recent advances such as embedding fibre optic sensors in micromodels for research applications. To complete the analysis of visualization techniques, we have thoroughly reviewed the most applicable imaging techniques in the area of geoscience and geo-energy. Moreover, the integration of microfluidic devices and imaging techniques was highlighted as appropriate. In this review, we focus particularly on four prominent yet very wide application areas, namely “fluid flow in porous media”, “flow in heterogeneous rocks and fractures”, “reactive transport, solute and colloid transport”, and finally “porous media characterization”. In summary, this review provides an in-depth analysis of micromodels and imaging techniques that can help to guide future research in the in-situ visualization of fluid flow in porous media.

A Primer on Microfluidics: From Basic Principles to Microfabrication

Microfluidic systems enable manipulating fluids in different functional units which are integrated on a microchip. This chapter describes the basics of microfluidics, where physical effects have a different impact compared to macroscopic systems. Furthermore, an overwiew is given on the microfabrication of these systems. The focus lies on clean-room fabrication methods based on photolithography and soft lithography. Finally, an outlook on advanced maskless micro- and nanofabrication methods is given. Special attention is paid to laser structuring processes.

Maskless, rapid manufacturing of glass microfluidic devices using a picosecond pulsed laser

Conventional manufacturing of glass microfluidic devices is a complex, multi-step process that involves a combination of different fabrication techniques, typically photolithography, chemical/dry etching and thermal/anodic bonding. As a result, the process is time-consuming and expensive, in particular when developing microfluidic prototypes or even manufacturing them in low quantity. This report describes a fabrication technique in which a picosecond pulsed laser system is the only tool required to manufacture a microfluidic device from transparent glass substrates. The laser system is used for the generation of microfluidic patterns directly on glass, the drilling of inlet/outlet ports in glass covers, and the bonding of two glass plates together in order to enclose the laser-generated patterns from the top. This method enables the manufacturing of a fully-functional microfluidic device in a few hours, without using any projection masks, dangerous chemicals, and additional expensive tools, e.g., a mask writer or bonding machine. The method allows the fabrication of various types of microfluidic devices, e.g., Hele-Shaw cells and microfluidics comprising complex patterns resembling up-scaled cross-sections of realistic rock samples, suitable for the investigation of CO₂ storage, water remediation and hydrocarbon recovery processes. The method also provides a route for embedding small 3D objects inside these devices.

Facile Method for Fabricating Microfluidic Chip Integrated with Microwell Arrays for Cell Trapping

With the development of biomedical technology, personalized diagnosis and treatment at the single-cell level are becoming more important in the medical field. As one of the most powerful tools, microfluidic chips have shown significant potential for various applications related to cell separation, cell proliferation, and cell behavior analysis. However, fabricating microfluidic devices requires complicated procedures and high-cost equipment. In this study, an optofluidic maskless lithography method was proposed for rapid fabrication of microfluidic devices integrated with microwells. Through the use of this approach, microwells can be on-line designed and the exposure patterns can be modulated. Single or multi polystyrene microspheres were successfully trapped by using the designed microwells. The capture of MCF-7 cells and cell arrays indicated that the microfluidic devices fabricated in the present study can be applied for cell research.

Investigation of Micromachined Antenna Substrates Operating at 5 GHz for RF Energy Harvesting Applications

This paper investigates micromachined antenna performance operating at 5 GHz for radio frequency (RF) energy harvesting applications by comparing different substrate materials and fabrication modes. The research aims to discover appropriate antenna designs that can be integrated with the rectifier circuit and fabricated in a CMOS (Complementary Metal-Oxide Semiconductor)-compatible process approach. Therefore, the investigation involves the comparison of three different micromachined antenna substrate materials, including micromachined Si surface, micromachined Si bulk with air gaps, and micromachined glass-surface antenna, as well as conventional RT/Duroid-5880 (Rogers Corp., Chandler, AZ, USA)-based antenna as the reference. The characteristics of the antennas have been analysed using CST-MWS (CST MICROWAVE STUDIO^®-High Frequency EM Simulation Tool). The results show that the Si-surface micromachined antenna does not meet the parameter requirement for RF antenna specification. However, by creating an air gap on the Si substrate using a micro-electromechanical system (MEMS) process, the antenna performance could be improved. On the other hand, the glass-based antenna presents a good S₁₁ parameter, wide bandwidth, VSWR (Voltage Standing Wave Ratio) ≤ 2, omnidirectional radiation pattern and acceptable maximum gain of >5 dB. The measurement results on the fabricated glass-based antenna show good agreement with the simulation results. The study on the alternative antenna substrates and structures is especially useful for the development of integrated patch antennas for RF energy harvesting systems.

Interlaced Laser Beam Scanning: A Method Enabling an Increase in the Throughput of Ultrafast Laser Machining of Borosilicate Glass

We provide experimental evidence that the laser beam scanning strategy has a significant influence on material removal rate in the ultrafast laser machining of glass. A comparative study of two laser beam scanning methods, (i) bidirectional sequential scanning method (SM) and (ii) bidirectional interlaced scanning method (IM), is presented for micromachining 1.1-mm-thick borosilicate glass plates (Borofloat® 33). Material removal rate and surface roughness are measured for a range of pulse energies, overlaps, and repetition frequencies. With a pulse overlap of ≤90%, IM can provide double the ablation depth and double the removal rate in comparison to SM, whilst maintaining very similar surface roughness. In both cases, the root-mean-square (RMS) surface roughness (Sq) was in the range of 1 μm to 2.5 μm. For a 95% pulse overlap, the difference was more pronounced, with IM providing up to four times the ablation depth of SM; however, this is at the cost of a significant increase in surface roughness (Sq values >5 μm). The increased ablation depths and removal rates with IM are attributed to a layer-by-layer material removal process, providing more efficient ejection of glass particles and, hence, reduced shielding of the machined area. IM also has smaller local angles of incidence of the laser beam that potentially can lead to a better coupling efficiency of the laser beam with the material.

Editorial for the Special Issue on Glassy Materials Based Microdevices

Glassy materials, i.e., glasses and most polymers, play a very important role in microtechnologies and photonics[...].