1
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Li B, Li Z, Cooperstein I, Shan W, Wang S, Jiang B, Zhang L, Magdassi S, He J. Additive Manufacturing of Transparent Multi-Component Nanoporous Glasses. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2023; 10:e2305775. [PMID: 37870213 PMCID: PMC10724418 DOI: 10.1002/advs.202305775] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/20/2023] [Revised: 10/05/2023] [Indexed: 10/24/2023]
Abstract
Fabrication of glass with complex geocd the low resolution of particle-based or fused glass technologies. Herein, a high-resolution 3D printing of transparent nanoporous glass is presented, by the combination of transparent photo-curable sol-gel printing compositions and digital light processing (DLP) technology. Multi-component glass, including binary (Al2 O3 -SiO2 ), ternary (ZnO-Al2 O3 -SiO2 , TiO2 -Al2 O3 -SiO2 ), and quaternary oxide (CaO-P2 O5 -Al2 O3 -SiO2 ) nanoporous glass objects with complex shapes, high spatial resolutions, and multi-oxide chemical compositions are fabricated, by DLP printing and subsequent sintering process. The uniform nanopores of Al2 O3 -SiO2 -based nanoporous glasses with the diameter (≈6.04 nm), which is much smaller than the visible light wavelength, result in high transmittance (>95%) at the visible range. The high surface area of printed glass objectives allows post-functionalization via the adsorption of functional guest molecules. The photoluminescence and hydrophobic modification of 3D printed glass objectives are successfully demonstrated. This work extends the scope of 3D printing to transparent nanoporous glasses with complex geometry and facile functionalization, making them available for a wide range of applications.
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Affiliation(s)
- Beining Li
- Key Laboratory of Materials for High Power LasersShanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghai201800China
- College of Materials Science and Opto‐Electronic TechnologyUniversity of Chinese Academy of SciencesBeijing100083China
| | - Zhenjiang Li
- College of Materials Science and Opto‐Electronic TechnologyUniversity of Chinese Academy of SciencesBeijing100083China
- Shanghai Institute of Applied PhysicsChinese Academy of SciencesShanghai201800China
| | - Ido Cooperstein
- Casali Center of Applied ChemistryInstitute of ChemistryThe Hebrew University of JerusalemJerusalem9190401Israel
| | - Wenze Shan
- Key Laboratory of Materials for High Power LasersShanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghai201800China
- College of Materials Science and Opto‐Electronic TechnologyUniversity of Chinese Academy of SciencesBeijing100083China
| | - Shuaipeng Wang
- Key Laboratory of Materials for High Power LasersShanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghai201800China
| | - Benxue Jiang
- Key Laboratory of Materials for High Power LasersShanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghai201800China
| | - Long Zhang
- Key Laboratory of Materials for High Power LasersShanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghai201800China
| | - Shlomo Magdassi
- Casali Center of Applied ChemistryInstitute of ChemistryThe Hebrew University of JerusalemJerusalem9190401Israel
| | - Jin He
- Key Laboratory of Materials for High Power LasersShanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghai201800China
- Casali Center of Applied ChemistryInstitute of ChemistryThe Hebrew University of JerusalemJerusalem9190401Israel
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2
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Xu H, Chen S, Hu R, Hu M, Xu Y, Yoon Y, Chen Y. Continuous Vat Photopolymerization for Optical Lens Fabrication. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2023; 19:e2300517. [PMID: 37246277 DOI: 10.1002/smll.202300517] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/17/2023] [Revised: 05/04/2023] [Indexed: 05/30/2023]
Abstract
Optical lenses require feature resolution and surface roughness that are beyond most (3D) printing methods. A new continuous projection-based vat photopolymerization process is reported that can directly shape polymer materials into optical lenses with microscale dimensional accuracy (< 14.7 µm) and nanoscale surface roughness (< 20 nm) without post-processing. The main idea is to utilize frustum layer stacking, instead of the conventional 2.5D layer stacking, to eliminate staircase aliasing. A continuous change of mask images is achieved using a zooming-focused projection system to generate the desired frustum layer stacking with controlled slant angles. The dynamic control of image size, objective and imaging distances, and light intensity involved in the zooming-focused continuous vat photopolymerization are systematically investigated. The experimental results reveal the effectiveness of the proposed process. The 3D-printed optical lenses with various designs, including parabolic lenses, fisheye lenses, and a laser beam expander, are fabricated with a surface roughness of 3.4 nm without post-processing. The dimensional accuracy and optical performance of the 3D-printed compound parabolic concentrators and fisheye lenses within a few millimeters are investiagted. These results highlight the rapid and precise nature of this novel manufacturing process, demonstrating a promising avenue for future optical component and device fabrication.
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Affiliation(s)
- Han Xu
- Center for Advanced Manufacturing, University of Southern California, Los Angeles, CA, 90007, USA
- Daniel J. Epstein Department of Industrial and Systems Engineering, University of Southern California, Los Angeles, CA, 90089, USA
| | - Shuai Chen
- Center for Advanced Manufacturing, University of Southern California, Los Angeles, CA, 90007, USA
- Department of Aerospace and Mechanical Engineering, University of Southern California, Los Angeles, CA, 90089, USA
| | - Renzhi Hu
- Center for Advanced Manufacturing, University of Southern California, Los Angeles, CA, 90007, USA
- Department of Aerospace and Mechanical Engineering, University of Southern California, Los Angeles, CA, 90089, USA
| | - Muqun Hu
- Department of Aerospace and Mechanical Engineering, University of Southern California, Los Angeles, CA, 90089, USA
| | - Yang Xu
- Center for Advanced Manufacturing, University of Southern California, Los Angeles, CA, 90007, USA
- Daniel J. Epstein Department of Industrial and Systems Engineering, University of Southern California, Los Angeles, CA, 90089, USA
| | - Yeowon Yoon
- Center for Advanced Manufacturing, University of Southern California, Los Angeles, CA, 90007, USA
- Department of Aerospace and Mechanical Engineering, University of Southern California, Los Angeles, CA, 90089, USA
| | - Yong Chen
- Center for Advanced Manufacturing, University of Southern California, Los Angeles, CA, 90007, USA
- Daniel J. Epstein Department of Industrial and Systems Engineering, University of Southern California, Los Angeles, CA, 90089, USA
- Department of Aerospace and Mechanical Engineering, University of Southern California, Los Angeles, CA, 90089, USA
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3
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Bauer J, Crook C, Baldacchini T. A sinterless, low-temperature route to 3D print nanoscale optical-grade glass. Science 2023; 380:960-966. [PMID: 37262172 DOI: 10.1126/science.abq3037] [Citation(s) in RCA: 10] [Impact Index Per Article: 10.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/30/2022] [Accepted: 04/12/2023] [Indexed: 06/03/2023]
Abstract
Three-dimensional (3D) printing of silica glass is dominated by techniques that rely on traditional particle sintering. At the nanoscale, this limits their adoption within microsystem technology, which prevents technological breakthroughs. We introduce the sinterless, two-photon polymerization 3D printing of free-form fused silica nanostructures from a polyhedral oligomeric silsesquioxane (POSS) resin. Contrary to particle-loaded sacrificial binders, our POSS resin itself constitutes a continuous silicon-oxygen molecular network that forms transparent fused silica at only 650°C. This temperature is 500°C lower than the sintering temperatures for fusing discrete silica particles to a continuum, which brings silica 3D printing below the melting points of essential microsystem materials. Simultaneously, we achieve a fourfold resolution enhancement, which enables visible light nanophotonics. By demonstrating excellent optical quality, mechanical resilience, ease of processing, and coverable size scale, our material sets a benchmark for micro- and nano-3D printing of inorganic solids.
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Affiliation(s)
- J Bauer
- Institute of Nanotechnology, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany
- Materials Science and Engineering Department, University of California, Irvine, CA 94550, USA
| | - C Crook
- Materials Science and Engineering Department, University of California, Irvine, CA 94550, USA
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4
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Schmid M, Thiele S, Herkommer A, Giessen H. Adjustment-free two-sided 3D direct laser writing for aligned micro-optics on both substrate sides. OPTICS LETTERS 2023; 48:131-134. [PMID: 36563386 DOI: 10.1364/ol.476448] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/26/2022] [Accepted: 11/11/2022] [Indexed: 06/17/2023]
Abstract
3D direct laser writing is a powerful and widely used tool to create complex micro-optics. The fabrication method offers two different writing modes. During the immersion mode, an immersion medium is applied between the objective and the substrate while the photoresist is exposed on its back side. Alternatively, when using the dip-in mode, the objective is in direct contact with the photoresist and the structure is fabricated on the objective facing side of the substrate. In this Letter, we demonstrate the combination of dip-in and photoresist immersion printing, by using the photoresist itself as immersion medium. This way, two parts of a doublet objective can be fabricated on the front and back sides of a substrate, using it as a spacer with a lateral registration below 1 µm and without the need of additional alignment. This approach also enables the alignment free combination of different photoresists on the back and front sides. We use this benefit by printing a black aperture on the back of the substrate, while the objective lens is printed on the front.
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5
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Bürger J, Schalles V, Kim J, Jang B, Zeisberger M, Gargiulo J, de S. Menezes L, Schmidt MA, Maier SA. 3D-Nanoprinted Antiresonant Hollow-Core Microgap Waveguide: An on-Chip Platform for Integrated Photonic Devices and Sensors. ACS PHOTONICS 2022; 9:3012-3024. [PMID: 36164483 PMCID: PMC9501922 DOI: 10.1021/acsphotonics.2c00725] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/12/2022] [Indexed: 05/25/2023]
Abstract
Due to their unique capabilities, hollow-core waveguides are playing an increasingly important role, especially in meeting the growing demand for integrated and low-cost photonic devices and sensors. Here, we present the antiresonant hollow-core microgap waveguide as a platform for the on-chip investigation of light-gas interaction over centimeter-long distances. The design consists of hollow-core segments separated by gaps that allow external access to the core region, while samples with lengths up to 5 cm were realized on silicon chips through 3D-nanoprinting using two-photon absorption based direct laser writing. The agreement of mathematical models, numerical simulations and experiments illustrates the importance of the antiresonance effect in that context. Our study shows the modal loss, the effect of gap size and the spectral tuning potential, with highlights including extremely broadband transmission windows (>200 nm), very high contrast resonance (>60 dB), exceptionally high structural openness factor (18%) and spectral control by nanoprinting (control over dimensions with step sizes (i.e., increments) of 60 nm). The application potential was demonstrated in the context of laser scanning absorption spectroscopy of ammonia, showing diffusion speeds comparable to bulk diffusion and a low detection limit. Due to these unique properties, application of this platform can be anticipated in a variety of spectroscopy-related fields, including bioanalytics, environmental sciences, and life sciences.
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Affiliation(s)
- Johannes Bürger
- Chair
in Hybrid Nanosystems, Nanoinstitute Munich, Ludwig-Maximilians-Universität Munich, Königinstraße 10, 80539 Munich, Germany
| | - Vera Schalles
- Leibniz
Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany
- Abbe
Center of Photonics and Faculty of Physics, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, 07743 Jena, Germany
| | - Jisoo Kim
- Leibniz
Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany
- Abbe
Center of Photonics and Faculty of Physics, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, 07743 Jena, Germany
| | - Bumjoon Jang
- Leibniz
Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany
- Abbe
Center of Photonics and Faculty of Physics, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, 07743 Jena, Germany
| | - Matthias Zeisberger
- Leibniz
Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany
- Abbe
Center of Photonics and Faculty of Physics, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, 07743 Jena, Germany
| | - Julian Gargiulo
- Chair
in Hybrid Nanosystems, Nanoinstitute Munich, Ludwig-Maximilians-Universität Munich, Königinstraße 10, 80539 Munich, Germany
| | - Leonardo de S. Menezes
- Chair
in Hybrid Nanosystems, Nanoinstitute Munich, Ludwig-Maximilians-Universität Munich, Königinstraße 10, 80539 Munich, Germany
- Departmento
de Física, Universidade Federal de
Pernambuco, 50670-901 Recife-PE Brazil
| | - Markus A. Schmidt
- Leibniz
Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany
- Abbe
Center of Photonics and Faculty of Physics, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, 07743 Jena, Germany
- Otto
Schott Institute of Materials Research (OSIM), Friedrich-Schiller-Universität Jena, Fraunhoferstr. 6, 07743 Jena, Germany
| | - Stefan A. Maier
- Chair
in Hybrid Nanosystems, Nanoinstitute Munich, Ludwig-Maximilians-Universität Munich, Königinstraße 10, 80539 Munich, Germany
- School
of
Physics and Astronomy, Monash University, Clayton, Victoria 3800, Australia
- The
Blackett Laboratory, Department of Physics, Imperial College London, London SW7 2AZ, United Kingdom
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6
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Zhang L, Liu B, Wang C, Xin C, Li R, Wang D, Xu L, Fan S, Zhang J, Zhang C, Hu Y, Li J, Wu D, Zhang L, Chu J. Functional Shape-Morphing Microarchitectures Fabricated by Dynamic Holographically Shifted Femtosecond Multifoci. NANO LETTERS 2022; 22:5277-5286. [PMID: 35728002 DOI: 10.1021/acs.nanolett.2c01178] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Functional microdevices based on responsive hydrogel show great promise in targeted delivery and biomedical analysis. Among state-of-the-art techniques for manufacturing hydrogel-based microarchitectures, femtosecond laser two-photon polymerization distinguishes itself by high designability and precision, but the point-by-point writing scheme requires mechanical apparatuses to support focus scanning. In this work, by predesigning holograms combined with lens phase modulation, multiple femtosecond laser spots are holographically generated and shifted for prototyping of three-dimensional shape-morphing structures without any moving equipment in the construction process. The microcage array is rapidly fabricated for high-performance target capturing enabled by switching environmental pH. Moreover, the built scaffolds can serve as arrayed analytical platforms for observing cell behaviors in normal or changeable living spaces or revealing the anticancer effects of loaded drugs. The proposed approach opens a new path for facile and flexible manufacturing of hydrogel-based functional microstructures with great versatility in micro-object manipulation.
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Affiliation(s)
- Leran Zhang
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Bingrui Liu
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Chaowei Wang
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Chen Xin
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Rui Li
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Dawei Wang
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Liqun Xu
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Shengying Fan
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Juan Zhang
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Chenchu Zhang
- Anhui Province Key Lab of Aerospace Structural Parts Forming Technology and Equipment, Institute of Industry and Equipment Technology, Hefei University of Technology, Hefei 230009, China
| | - Yanlei Hu
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Jiawen Li
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Dong Wu
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
| | - Li Zhang
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Hong Kong 999077, China
| | - Jiaru Chu
- Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
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7
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Maillard reaction-derived laser lithography for printing functional inorganics. Sci China Chem 2022. [DOI: 10.1007/s11426-022-1230-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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8
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Akolawala Q, Rovituso M, Versteeg HH, Rondon AMR, Accardo A. Evaluation of Proton-Induced DNA Damage in 3D-Engineered Glioblastoma Microenvironments. ACS APPLIED MATERIALS & INTERFACES 2022; 14:20778-20789. [PMID: 35442634 PMCID: PMC9100514 DOI: 10.1021/acsami.2c03706] [Citation(s) in RCA: 15] [Impact Index Per Article: 7.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/02/2023]
Abstract
Glioblastoma (GBM) is a devastating cancer of the brain with an extremely poor prognosis. For this reason, besides clinical and preclinical studies, novel in vitro models for the assessment of cancer response to drugs and radiation are being developed. In such context, three-dimensional (3D)-engineered cellular microenvironments, compared to unrealistic two-dimensional (2D) monolayer cell culture, provide a model closer to the in vivo configuration. Concerning cancer treatment, while X-ray radiotherapy and chemotherapy remain the current standard, proton beam therapy is an appealing alternative as protons can be efficiently targeted to destroy cancer cells while sparing the surrounding healthy tissue. However, despite the treatment's compelling biological and medical rationale, little is known about the effects of protons on GBM at the cellular level. In this work, we designed novel 3D-engineered scaffolds inspired by the geometry of brain blood vessels, which cover a vital role in the colonization mechanisms of GBM cells. The architectures were fabricated by two-photon polymerization (2PP), cultured with U-251 GBM cells and integrated for the first time in the context of proton radiation experiments to assess their response to treatment. We employed Gamma H2A.X as a fluorescent biomarker to identify the DNA damage induced in the cells by proton beams. The results show a higher DNA double-strand breakage in 2D cell monolayers as compared to cells cultured in 3D. The discrepancy in terms of proton radiation response could indicate a difference in the radioresistance of the GBM cells or in the rate of repair kinetics between 2D cell monolayers and 3D cell networks. Thus, these biomimetic-engineered 3D scaffolds pave the way for the realization of a benchmark tool that can be used to routinely assess the effects of proton therapy on 3D GBM cell networks and other types of cancer cells.
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Affiliation(s)
- Qais Akolawala
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628
CD Delft, The Netherlands
| | - Marta Rovituso
- Holland
Proton Therapy Center (HollandPTC), Huismansingel 4, 2629 JH Delft, The Netherlands
| | - Henri H. Versteeg
- Einthoven
Laboratory for Vascular and Regenerative Medicine, Division of Thrombosis
and Hemostasis, Department of Internal Medicine, Leiden University Medical Center, 2333 ZA Leiden, The Netherlands
| | - Araci M. R. Rondon
- Einthoven
Laboratory for Vascular and Regenerative Medicine, Division of Thrombosis
and Hemostasis, Department of Internal Medicine, Leiden University Medical Center, 2333 ZA Leiden, The Netherlands
| | - Angelo Accardo
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628
CD Delft, The Netherlands
- . Tel: +31 (0)15 27 81610
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9
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Zhang Y, Su Y, Zhao Y, Wang Z, Wang C. Two-Photon 3D Printing in Metal-Organic Framework Single Crystals. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2022; 18:e2200514. [PMID: 35481614 DOI: 10.1002/smll.202200514] [Citation(s) in RCA: 5] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/22/2022] [Revised: 03/16/2022] [Indexed: 06/14/2023]
Abstract
Two-photon polymerization (TPP) is a micro/nano-fabrication technology for additive manufacturing, enabling 3D printing of polymeric materials using ultrafast laser pulses. In this work, two-photon polymerization is realized inside a metal-organic framework (MOF) crystal. Intricate structures are built in the porous crystal to create a microstructure-in-crystal hybrid. Furthermore, the MOF can be removed by acid treatment to release the printed structure. The two-photon polymerization inside the crystal has the potential for MOF sensing device fabrication and data storage applications. In the future development, printing different materials in the same MOF crystal for creating functional 3D devices is hoped.
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Affiliation(s)
- Yusheng Zhang
- Collaborative Innovation Center of Chemistry for Energy Materials, State Key Laboratory of Physical Chemistry of Solid Surfaces, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, P. R. China
| | - Yuming Su
- Collaborative Innovation Center of Chemistry for Energy Materials, State Key Laboratory of Physical Chemistry of Solid Surfaces, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, P. R. China
| | - Yi Zhao
- Collaborative Innovation Center of Chemistry for Energy Materials, State Key Laboratory of Physical Chemistry of Solid Surfaces, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, P. R. China
| | - Zhiye Wang
- Collaborative Innovation Center of Chemistry for Energy Materials, State Key Laboratory of Physical Chemistry of Solid Surfaces, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, P. R. China
| | - Cheng Wang
- Collaborative Innovation Center of Chemistry for Energy Materials, State Key Laboratory of Physical Chemistry of Solid Surfaces, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, P. R. China
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10
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Butkutė A, Merkininkaitė G, Jurkšas T, Stančikas J, Baravykas T, Vargalis R, Tičkūnas T, Bachmann J, Šakirzanovas S, Sirutkaitis V, Jonušauskas L. Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant. MATERIALS 2022; 15:ma15082817. [PMID: 35454510 PMCID: PMC9030282 DOI: 10.3390/ma15082817] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/11/2022] [Revised: 03/29/2022] [Accepted: 04/07/2022] [Indexed: 01/20/2023]
Abstract
Selective laser etching (SLE) is a technique that allows the fabrication of arbitrarily shaped glass micro-objects. In this work, we show how the capabilities of this technology can be improved in terms of selectivity and etch rate by applying an etchant solution based on a Potassium Hydroxide, water, and isopropanol mixture. By varying the concentrations of these constituents, the wetting properties, as well as the chemical reaction of fused silica etching, can be changed, allowing us to achieve etching rates in modified fused silica up to 820 μm/h and selectivity up to ∼3000. This is used to produce a high aspect ratio (up to 1:1000), straight and spiral microfluidic channels which are embedded inside a volume of glass. Complex 3D glass micro-structures are also demonstrated.
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Affiliation(s)
- Agnė Butkutė
- Femtika Ltd., Saulėtekio Ave. 15, LT-10224 Vilnius, Lithuania; (G.M.); (T.J.); (T.B.); (R.V.); (T.T.)
- Laser Research Center, Vilnius University, Saulėtekio Ave. 10, LT-10223 Vilnius, Lithuania; (J.S.); (V.S.); (L.J.)
- Correspondence:
| | - Greta Merkininkaitė
- Femtika Ltd., Saulėtekio Ave. 15, LT-10224 Vilnius, Lithuania; (G.M.); (T.J.); (T.B.); (R.V.); (T.T.)
- Faculty of Chemistry and Geoscience, Vilnius University, Naugarduko Str. 24, LT-03225 Vilnius, Lithuania;
| | - Tomas Jurkšas
- Femtika Ltd., Saulėtekio Ave. 15, LT-10224 Vilnius, Lithuania; (G.M.); (T.J.); (T.B.); (R.V.); (T.T.)
| | - Jokūbas Stančikas
- Laser Research Center, Vilnius University, Saulėtekio Ave. 10, LT-10223 Vilnius, Lithuania; (J.S.); (V.S.); (L.J.)
| | - Tomas Baravykas
- Femtika Ltd., Saulėtekio Ave. 15, LT-10224 Vilnius, Lithuania; (G.M.); (T.J.); (T.B.); (R.V.); (T.T.)
| | - Rokas Vargalis
- Femtika Ltd., Saulėtekio Ave. 15, LT-10224 Vilnius, Lithuania; (G.M.); (T.J.); (T.B.); (R.V.); (T.T.)
| | - Titas Tičkūnas
- Femtika Ltd., Saulėtekio Ave. 15, LT-10224 Vilnius, Lithuania; (G.M.); (T.J.); (T.B.); (R.V.); (T.T.)
| | - Julien Bachmann
- Chemistry of Thin Film Materials, Department of Chemistry and Pharmacy, IZNF, Friedrich-Alexander University of Erlangen-Nürnberg, Cauerstr. 3, 91058 Erlangen, Germany;
| | - Simas Šakirzanovas
- Faculty of Chemistry and Geoscience, Vilnius University, Naugarduko Str. 24, LT-03225 Vilnius, Lithuania;
| | - Valdas Sirutkaitis
- Laser Research Center, Vilnius University, Saulėtekio Ave. 10, LT-10223 Vilnius, Lithuania; (J.S.); (V.S.); (L.J.)
| | - Linas Jonušauskas
- Laser Research Center, Vilnius University, Saulėtekio Ave. 10, LT-10223 Vilnius, Lithuania; (J.S.); (V.S.); (L.J.)
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