Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications

Development of a 16-Channel Broadband Piezoelectric Micro Ultrasonic Transducer Array Probe for Pipeline Butt-Welded Defect Detection

Butt welding is extensively applied in long-distance oil and gas pipelines, and it is of great significance to conduct non-destructive ultrasonic testing of girth welds in order to avoid leakage and safety accidents during pipeline production and operation. In view of the limitations of large transducer size, single fixed beam angle, low detection resolution and high cost of conventional ultrasonic inspection technologies, a 16-channel piezoelectric micro ultrasonic transducer (PMUT) array probe was developed through theoretical analysis and structural optimization design. After the probe impedance characterization, the experimental results show that the theoretical model can effectively guide the design of the ultrasonic transducer array, offering the maximum operating frequency deviation of less than 5%. The ultrasonic echo performance tests indicate that the average -6 dB bandwidth of the PMUT array probe can be up to 77.9%. In addition, the fabricated PMUT array probe has been used to successfully detect five common internal defects in pipeline girth welds. Due to the multiple micro array elements, flexible handling of each element, large bandwidth and high resolution of defect detection, the designed PMUT array probe can provide a good application potential in structural health monitoring and medical ultrasound imaging fields.

Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding

Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further development and application. In this paper, a vacuum-sealed device for medical applications is introduced, which has the advantages of simple manufacturing process, no static friction, repeatability, and high reliability. The CMUT array suitable for medical imaging frequency band was fabricated by a silicon wafer bonding technology, and the adjacent array devices were isolated by an isolation slot, which was cut through the silicon film. The CMUT device fabricated following this process is a 4 × 16 array with a single element size of 1 mm × 1 mm. Device performance tests were conducted, where the center frequency of the transducer was 3.8 MHz, and the 6 dB fractional bandwidth was 110%. The static capacitance (29.4 pF) and center frequency (3.78 MHz) of each element of the array were tested, and the results revealed that the array has good consistency. Moreover, the transmitting and receiving performance of the transducer was evaluated by acoustic tests, and the receiving sensitivity was −211 dB @ 3 MHz, −213 dB @ 4 MHz. Finally, reflection imaging was performed using the array, which provides certain technical support for the research of two-dimensional CMUT arrays in the field of 3D ultrasound imaging.

A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). CMUT elements are easily made into a high-density array, which will increase the hardware complexity. In order to reduce the number of active channels, this paper studies the grating lobes generated by CMUT periodic sparse array (PSA) pairs. Through the design of active element positions in the transmitting and receiving processes, the simulation results of effective aperture and beam patterns show that the common grating lobes (CGLs) generated by the transmit and receive array are eliminated. On the basis of point targets imaging, a CMUT linear array with 256 elements is used to carry out the PSA pairs experiment. Under the same sparse factor (SF), the optimal sparse array configuration can be selected to reduce the imaging artifacts. This conclusion is of great significance for the application of CMUT in three-dimensional ultrasound imaging.

Research on High-Efficiency Transmission Characteristics of Multi-Channel Breast Ultrasound Signals Based on Graphene Structure

In breast ultrasound CT imaging, the ultrasound signals received by high-density CMUT cylindrical array have problems of low transmission efficiency, susceptibility to interference from other signals, and an inability to achieve efficient acquisition. Therefore, to overcome these problems, based on acoustic metamaterials and graphene structure, an efficient transmission model of the multi-channel breast ultrasonic signals was designed, and a finite element simulation experiment was conducted. Research showed that the separation of ultrasonic signals could be achieved by the model designed in this article. The anti-interference ability in the ultrasonic signal acquisition process was effectively improved by the good multi-channel directional transmission and the sound wave local enhancement effect, which improved the sound wave transmission efficiency. In addition, the acoustic signals could be effectively transmitted from 80 kHz to 4000 kHz, realizing broadband transmission. Based on the flexibility of the design of the phononic crystal structure, phase adjustment could be achieved in a wide frequency range by changing the parameters of the primary cell structure. This enabled the CMUT cylindrical array to obtain better directivity characteristics, laying the foundation for high-quality breast ultrasound imaging.

Full-Differential Folded-Cascode Front-End Receiver Amplifier Integrated Circuit for Capacitive Micromachined Ultrasonic Transducers

This paper describes the design of a front-end receiver amplifier for capacitive micromachined ultrasonic transducer (CMUT). The proposed operational amplifier (op amp) consists of a full differential folded-cascode amplifier stage followed by a class AB output stage. A feedback resistor is applied between the input and the output of the op amp to make a transimpedance amplifier. We analyzed the equivalent circuit model of the CMUT element operating in the receiving mode and obtained the static output impedance and center frequency characteristics of the CMUT. The op amp gain, bandwidth, noise, and power consumption trade-offs are discussed in detail. The amplifier was fabricated using GlobalFoundries 0.18-μm complementary metal-oxide-semiconductor (CMOS) technology. The open loop gain of the amplifier is approximately 65 dB, and its gain bandwidth product is approximately 29.5 MHz. The measured input reference noise current was 56 nA/√Hz@3 MHz. The amplifier chip area is 325 μm × 150 μm and the op amp is powered by ±3.3 V, the static power consumption is 11 mW. We verified the correct operation of our amplifier with CMUT and echo-pulse shown that the CMUT center frequency is 3 MHz with 92% fractional bandwidth.

Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers

Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wire bonding. The measured resonant frequency of 19.3 MHz using a Polytec™ laser Doppler vibrometer (Polytec™ MSA-500) is in excellent agreement with the 3-D FEA simulation result using IntelliSuite™. An Agilent ENA5061B vector network analyzer (VNA) has been used for impedance measurement and the resonance and anti-resonance values from the imaginary impedance curve were used to determine the electromechanical coupling co-efficient. The measured coupling coefficient of 0.294 at 20 V DC bias exhibits 40% higher transduction efficiency as compared to a measured value published elsewhere for a silicon nitride based CMUT. A white light interferometry method was used to measure the diaphragm deflection profiles at different DC bias. The diaphragm center velocity was measured for different sub-resonant frequencies using a Polytec™ laser Doppler vibrometer that confirms vibration of the diaphragm at different excitation frequencies and bias voltages. Transmit and receive operations of CMUT cells were characterized using a pitch-catch method and a −6 dB fractional bandwidth of 23% was extracted from the received signal in frequency domain. From the measurement, it appears that BCB-based CMUTs offer superior transduction efficiency as compared to silicon nitride or silicon dioxide insulator-based CMUTs, and provide a very uniform deflection profile thus making them a suitable candidate to fabricate highly energy efficient CMUTs.

Underwater Imaging Using a 1 × 16 CMUT Linear Array

A 1 × 16 capacitive micro-machined ultrasonic transducer linear array was designed, fabricated, and tested for underwater imaging in the low frequency range. The linear array was fabricated using Si-SOI bonding techniques. Underwater transmission performance was tested in a water tank, and the array has a resonant frequency of 700 kHz, with pressure amplitude 182 dB (μPa·m/V) at 1 m. The -3 dB main beam width of the designed dense linear array is approximately 5 degrees. Synthetic aperture focusing technique was applied to improve the resolution of reconstructed images, with promising results. Thus, the proposed array was shown to be suitable for underwater imaging applications.