An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology

A needle-to-post air discharge ion source in tandem with FAIMS system

A needle-to-post ionization source was designed for high-field asymmetric waveform ion mobility spectrometry (FAIMS). The needle-to-post ion source includes asymmetric electrode comprised of a copper post with a diameter of 2 mm and a stainless-steel needle with 200-μm tip radius and length of 28 mm. With the discharge voltage of -5.6 kV and N₂ gas flow, glow discharge was realized at atmospheric pressure. The mass spectra of ionized ions about acetone, ethanol and ethyl acetate were gotten by Thermo Scientific LTQ XL ion trap mass spectrometer (MS). The MS experimental results show that the main ions are protonated and dimer ions. The needle-to-post ion source was mounted on the FAIMS system and FAIMS spectra are gotten successfully. Separation of p-xylene, o-xylene and m-xylene was realized. It shows that the needle-to-post electrode could be used as the ion source in a FAIMS system.

Design, Fabrication and Mass-spectrometric Studies of a Micro Ion Source for High-Field Asymmetric Waveform Ion Mobility Spectrometry

A needle-to-cylinder electrode, adopted as an ion source for high-field asymmetric ion mobility spectrometry (FAIMS), is designed and fabricated by lithographie, galvanoformung and abformung (LIGA) technology. The needle, with a tip diameter of 20 μm and thickness of 20 μm, and a cylinder, with a diameter of 400 μm, were connected to the negative high voltage and ground, respectively. A negative corona and glow discharge were realized. For acetone with a density of 99.7 ppm, ethanol with a density of 300 ppm, and acetic ether with a density of 99.3 ppm, the sample gas was ionized by the needle-to-cylinder chip and the ions were detected by an LTQ XL™ (Thermo Scientific Corp.) mass spectrometer. The mass spectra show that the ions are mainly the protonated monomer, the proton bound dimer, and an ion-H₂O molecule cluster. In tandem with a FAIMS system, the FAIMS spectra show that the resolving power increases with an increase in the RF voltage. The obtained experimental results showed that the micro needle-to-cylinder chip may serve as a miniature, low cost and non-radioactive ion source for FAIMS.