Polymeric Flexible Immunosensor Based on Piezoresistive Micro-Cantilever with PEDOT/PSS Conductive Layer

A Flexible PI/Si/SiO2 Piezoresistive Microcantilever for Trace-Level Detection of Aflatoxin B1

In this paper, a polyimide (PI)/Si/SiO2-based piezoresistive microcantilever biosensor was developed to achieve a trace level detection for aflatoxin B1. To take advantage of both the high piezoresistance coefficient of single-crystal silicon and the small spring constant of PI, the flexible piezoresistive microcantilever was designed using the buried oxide (BOX) layer of a silicon-on-insulator (SOI) wafer as a bottom passivation layer, the topmost single-crystal silicon layer as a piezoresistor layer, and a thin PI film as a top passivation layer. To obtain higher sensitivity and output voltage stability, four identical piezoresistors, two of which were located in the substrate and two integrated in the microcantilevers, were composed of a quarter-bridge configuration wheatstone bridge. The fabricated PI/Si/SiO2 microcantilever showed good mechanical properties with a spring constant of 21.31 nN/μm and a deflection sensitivity of 3.54 × 10-7 nm-1. The microcantilever biosensor also showed a stable voltage output in the Phosphate Buffered Saline (PBS) buffer with a fluctuation less than 1 μV @ 3 V. By functionalizing anti-aflatoxin B1 on the sensing piezoresistive microcantilever with a biotin avidin system (BAS), a linear aflatoxin B1 detection concentration resulting from 1 ng/mL to 100 ng/mL was obtained, and the toxic molecule detection also showed good specificity. The experimental results indicate that the PI/Si/SiO2 flexible piezoresistive microcantilever biosensor has excellent abilities in trace-level and specific detections of aflatoxin B1 and other biomolecules.

Label-free attomolar protein detection using a MEMS optical interferometric surface-stress immunosensor with a freestanding PMMA/parylene-C nanosheet

We demonstrated an optical interferometer-based surface-stress immunosensor using freestanding polymethyl methacrylate (PMMA)/parylene-C nanosheet with high sensitivity for detection of biomolecules. PMMA/parylene-C nanosheets were transferred onto a silicon substrate with microcavities to fabricate freestanding submicron-thick membrane with a sealed cavity structure. The adhesive force between the transferred parylene-C and binder parylene-C layer was measured to be 1.06-2.4 N/10 mm by tape test. Evading Debye shielding, these nanomechanical sensors allow detection of the adsorption on the membrane surface through changes in surface stress transduced by the electric charge. We optimized the density of receptors and mode of immobilization for high sensitivity. To evaluate the selectivity of the sensor, membrane deflections induced by various proteins were measured and the spectral shifts showed high selectivity only for the target antigen. The minimum limit of detection (LOD) of the sensor for human serum albumin antigen was 0.1-1 fg/mL (1.5-15 aM), which was 20,000 times lower than that of the conventional micro-cantilever sensor.

A Low Spring Constant Piezoresistive Microcantilever for Biological Reagent Detection

This paper introduces a piezoresistive microcantilever with a low spring constant. The microcantilever was fabricated with titanium (Ti) as the piezoresistor, a low spring constant polyimide (PI) layer, and a thin silicon oxide (SiO₂) layer as the top and bottom passive layers, respectively. Excellent mechanical performances with the spring constant of 0.02128 N/m and the deflection sensitivity (∆V/V)/∆z of 1.03 × 10⁻⁷ nm⁻¹ were obtained. The output voltage fluctuation of a Wheatstone bridge, which consists of four piezoresistive microcantilevers, is less than 3 μV@3 V in a phosphate buffered saline (PBS) environment. A microcantilever aptasensor was then developed through functionalizing the microcantilevers with a ricin aptamer probe, and detections on ricin with concentrations of 10, 20, 50 and 100 ng/mL were successfully realized. A good specificity was also confirmed by using bovine serum albumin (BSA) as a blank control. The experiment results show that the Ti and PI-based microcantilever has great prospects for ultrasensitive biochemical molecule detections with high reliability and specificity.

Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever

In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 μL/s to 400 μL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations.

Polymeric immunosensors for tumor detection

Cancer is a broad-spectrum disease which is spread globally, having high mortality rates. This results from genetic, epigenetic and molecular abnormalities caused by various mutations. The main reason behind this critical problem lies in its diagnostics, the late detection of the disease is the root cause of all this. This can be managed well by the timely diagnosis of cancer by means of the tumor biomarkers present in the body fluids such as serum, blood, and urine. These tumor biomarkers are present in normal conditions as well, but their concentrations are altered in the presence of a malignant tumor. Prolonged studies have reported that immunosensors can be used to detect the minimal amount of biomarkers present in the sample and also provides point-of-care detection. The recent investigations demonstrated the use of polymers along with immunosensors for enhancing their selectivity and sensitivity towards the biomarkers and making them even more efficient. This review focuses on the variety of tumor biomarkers, different types of immunosensors and polymeric immunosensors using different polymers like polypyrrole, polyaniline, PHEMA, etc.

Theoretical Analysis for Bending of Single-Stranded DNA Adsorption on Microcantilever Sensors

An energy-based model is presented to establish the bending deformation of microcantilever beams induced by single-stranded DNA (ssDNA) adsorption. The total free energy of the DNA-microcantilever sensor was obtained by considering the excluded-volume energy and the polymer stretching energy of DNA chains from mean-field theory, and the mechanical energy of three non-biological layers. The radius of curvature and deflection of the cantilever were determined through the minimum principle of energy. The efficiency of the present model was confirmed through comparison with experimental data. The effects of length, grafting density, salt concentration, thickness, and elastic modulus of substrate on tip deflections are also discussed in this paper. These factors can significantly affect the deflections of the biosensor. This work demonstrates that it is useful to develop a theoretical model for the label-free nanomechanical detection technique.