The Investigation of a SAW Oxygen Gas Sensor Operated at Room Temperature, Based on Nanostructured ZnxFeyO Films

A passive wireless surface acoustic wave (SAW) sensor system for detecting warfare agents based on fluoroalcohol polysiloxane film

Long-term monitoring of environmental warfare agengts is a challenge for chemical gas sensors. To address this issue, we developed a 433 MHz passive wireless surface acoustic wave (WSAW) gas sensor for dimethyl methylphosphonate (DMMP) detection. This WSAW gas sensor includes a YZ lithium niobate (LiNbO3) substrate with metallic interdigital transducers (IDTs) etched on it, and an antenna was placed near the IDT. A DMMP-sensitive viscoelastic polymer fluoroalcoholpolysiloxane (SXFA) film was prepared on a LiNbO3 substrate, and mode modeling coupling was used to optimize the design parameters. The sensor can function properly in an environments between -30 °C and 100 °C with humidity less than 60% RH. When the wireless transmission distance was within the range of 0-90 cm, the sensor noise increased with distance, and the stability was less than 32°/h. While optimizing the film thickness of SXFA, a relationship was observed between sensor sensitivity and film thickness. When the film thickness of SXFA reached 450 nm, the optimal value was reached. At a distance of 20 cm between the transmitting and receiving antennas, DMMP was detected at different concentrations with the developed WSAW gas sensor. The lower detection limit of DMMP was 0.48 mg/m3, the sensitivity of the sensor was 4.63°/(mg/m3), and repeatable performance of the sensor was confirmed.

Lead-Free Perovskite Thin Films for Gas Sensing through Surface Acoustic Wave Device Detection

Thin film technology shows great promise in fabricating electronic devices such as gas sensors. Here, we report the fabrication of surface acoustic wave (SAW) sensors based on thin films of (1 - x) Ba(Ti0.8Zr0.2)O3-x(Ba0.7Ca0.3)TiO3 (BCTZ50, x = 50) and Polyethylenimine (PEI). The layers were deposited by two laser-based techniques, namely pulsed laser deposition (PLD) for the lead-free material and matrix assisted pulsed laser evaporation (MAPLE) for the sensitive polymer. In order to assay the impact of the thickness, the number of laser pulses was varied, leading to thicknesses between 50 and 350 nm. The influence of BCTZ film's crystallographic features on the characteristics and performance of the SAW device was studied by employing substrates with different crystal structures, more precisely cubic Strontium Titanate (SrTiO3) and orthorhombic Gadolinium Scandium Oxide (GdScO3). The SAW sensors were further integrated into a testing system to evaluate the response of the BCTZ thin films with PEI, and then subjected to tests for N2, CO2 and O2 gases. The influence of the MAPLE's deposited PEI layer on the overall performance was demonstrated. For the SAW sensors based on BCTZ/GdScO3 thin films with a PEI polymer, a maximum frequency shift of 39.5 kHz has been obtained for CO2; eight times higher compared to the sensor without the polymeric layer.

Equivalent Circuit Model Extraction for a SAW Resonator: Below and above Room Temperature

In this work, a SAW resonator is characterized in terms of admittance (Y-) parameters in the temperature range spanning from 0 °C to 100 °C, with the aim of highlighting how its physical properties are affected by the temperature change. A lumped-element equivalent-circuit model is used to represent the device under test at the considered temperature conditions and a parameters extraction process based on a Lorentzian fitting is developed for the determination of the equivalent-circuit elements in the investigated temperature range. A very good agreement is observed between the performed measurements and the model simulations. The characterization process and the subsequent equivalent-circuit parameters extraction at different temperature values are described and discussed.

Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

Surface acoustic waves (SAWs) are the guided waves that propagate along the top surface of a material with wave vectors orthogonal to the normal direction to the surface. Based on these waves, SAW sensors are conceptualized by employing piezoelectric crystals where the guided elastodynamic waves are generated through an electromechanical coupling. Electromechanical coupling in both active and passive modes is achieved by integrating interdigitated electrode transducers (IDT) with the piezoelectric crystals. Innovative meta-designs of the periodic IDTs define the functionality and application of SAW sensors. This review article presents the physics of guided surface acoustic waves and the piezoelectric materials used for designing SAW sensors. Then, how the piezoelectric materials and cuts could alter the functionality of the sensors is explained. The article summarizes a few key configurations of the electrodes and respective guidelines for generating different guided wave patterns such that new applications can be foreseen. Finally, the article explores the applications of SAW sensors and their progress in the fields of biomedical, microfluidics, chemical, and mechano-biological applications along with their crucial roles and potential plans for improvements in the long-term future in the field of science and technology.

ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review

Surface acoustic wave (SAW) gas sensors are of continuous development interest to researchers due to their sensitivity, short detection time, and reliability. Among the most used materials to achieve the sensitive film of SAW sensors are metal oxide semiconductors, which are highlighted by thermal and chemical stability, by the presence on their surface of free electrons and also by the possibility of being used in different morphologies. For different types of gases, certain metal oxide semiconductors are used, and ZnO is an important representative for this category of materials in the field of sensors. Having a great potential for the development of SAW sensors, the discussion related to the development of the sensitivity of metal oxide semiconductors, especially ZnO, by the synthesis method or by obtaining new materials, is suitable and necessary to have an overview of the latest results in this domain.

Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure-A Review

This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element modeling. Additionally, the most common fabrication techniques, including sacrificial release and wafer bonding, are discussed for advantages for gravimetric sensing. As functional materials are the most important part of the selective gravimetric sensing, the review of different functional material properties and coating and application methods is necessary. Particularly, absorption and desorption mechanisms of functional materials, like methylated polyethyleneimine, with examples of applications for gas sensing and using immune complexes for specific biomolecules detection are reviewed.

Review on Smart Gas Sensing Technology

With the development of the Internet-of-Things (IoT) technology, the applications of gas sensors in the fields of smart homes, wearable devices, and smart mobile terminals have developed by leaps and bounds. In such complex sensing scenarios, the gas sensor shows the defects of cross sensitivity and low selectivity. Therefore, smart gas sensing methods have been proposed to address these issues by adding sensor arrays, signal processing, and machine learning techniques to traditional gas sensing technologies. This review introduces the reader to the overall framework of smart gas sensing technology, including three key points; gas sensor arrays made of different materials, signal processing for drift compensation and feature extraction, and gas pattern recognition including Support Vector Machine (SVM), Artificial Neural Network (ANN), and other techniques. The implementation, evaluation, and comparison of the proposed solutions in each step have been summarized covering most of the relevant recently published studies. This review also highlights the challenges facing smart gas sensing technology represented by repeatability and reusability, circuit integration and miniaturization, and real-time sensing. Besides, the proposed solutions, which show the future directions of smart gas sensing, are explored. Finally, the recommendations for smart gas sensing based on brain-like sensing are provided in this paper.