Surface Acoustic Wave Resonator Chip Setup for the Elimination of Interfering Conductivity Responses

A surface acoustic wave (SAW) resonator chip setup is presented that eliminates interfering signal responses caused by changes in the electrical environment of the surrounding media. When using a two-port resonator, applying electrically shielding layers between the interdigital transducers (IDTs) can be challenging due to the limited dimensions. Therefore, a layered setup consisting of an insulating polymer layer and a conductive gold layer was preferred. The SAW resonators were provided with polycarbonate housings, resulting in SAW resonator chips. This setup enables easy application of a wide range of coatings to the active part of the resonator surface, while ensuring subsequent electrical and fluidic integration of the resonator chips into a microfluidic array for measurements. The signal responses of uncoated SAW resonators and those with polymer coatings with and without a gold layer were tested with aqueous potassium chloride (KCl) solutions up to 3 mol/L, corresponding to conductivities up to 308 mS/cm. The use of a polymer coating at the thickness of the first Love mode resonance and a conductive gold layer completely reduced the electrical impact on the SAW resonator signal response, making small signals resulting from changes in viscosity and density of the KCl solutions visible.

Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

Surface acoustic waves (SAWs) are the guided waves that propagate along the top surface of a material with wave vectors orthogonal to the normal direction to the surface. Based on these waves, SAW sensors are conceptualized by employing piezoelectric crystals where the guided elastodynamic waves are generated through an electromechanical coupling. Electromechanical coupling in both active and passive modes is achieved by integrating interdigitated electrode transducers (IDT) with the piezoelectric crystals. Innovative meta-designs of the periodic IDTs define the functionality and application of SAW sensors. This review article presents the physics of guided surface acoustic waves and the piezoelectric materials used for designing SAW sensors. Then, how the piezoelectric materials and cuts could alter the functionality of the sensors is explained. The article summarizes a few key configurations of the electrodes and respective guidelines for generating different guided wave patterns such that new applications can be foreseen. Finally, the article explores the applications of SAW sensors and their progress in the fields of biomedical, microfluidics, chemical, and mechano-biological applications along with their crucial roles and potential plans for improvements in the long-term future in the field of science and technology.

Love wave propagation in piezoelectric structures bonded with conductive polymer films

In this study, we investigate analytically Love wave propagation in layered piezoelectric structures, where a thin conductive polymer layer is bonded to an unbounded piezoelectric substrate. The dispersive relation is derived and the effects of viscosity and conductivity on the phase velocity and attenuation of Love wave are analyzed and discussed. The results reveal that the effects of the viscosity and conductivity on the properties of Love wave are obvious. The phase velocity is affected by the viscosity and conductivity slightly, while the attenuation is remarkably changed with the varying frequency of the waves, viscosity and conductivity, respectively. The relationship between attenuation and frequency are not monotone increasing. The analytical solutions results are well-matched with the finite element results. The results in this work is useful for the design of acoustic wave device.

Hybrid Sensor Device for Simultaneous Surface Plasmon Resonance and Surface Acoustic Wave Measurements

Surface plasmon resonance (SPR) and Love wave (LW) surface acoustic wave (SAW) sensors have been established as reliable biosensing technologies for label-free, real-time monitoring of biomolecular interactions. This work reports the development of a combined SPR/LW-SAW platform to facilitate simultaneous optical and acoustic measurements for the investigation of biomolecules binding on a single surface. The system’s output provides recordings of two acoustic parameters, phase and amplitude of a Love wave, synchronized with SPR readings. We present the design and manufacturing of a novel experimental set-up employing, in addition to the SPR/LW-SAW device, a 3D-printed plastic holder combined with a PDMS microfluidic cell so that the platform can be used in a flow-through mode. The system was evaluated in a systematic study of the optical and acoustic responses for different surface perturbations, i.e., rigid mass loading (Au deposition), pure viscous loading (glycerol and sucrose solutions) and protein adsorption (BSA). Our results provide the theoretical and experimental basis for future application of the combined system to other biochemical and biophysical studies.

Point-of-Care Assessment of Hemostasis with a Love-Mode Surface Acoustic Wave Sensor

Monitoring of the hemostasis status is essential for therapeutic anticoagulants, undergoing surgery, cardiovascular diseases, etc. Although the clinical values of conventional blood coagulation tests have been well demonstrated, these devices have limitations such as large and expensive equipment, excessive sample volumes, long turnaround times, and difficulty in miniaturization for point-of-care use. Here, we present a novel strategy to evaluate blood hemostasis using the single-port Love-mode surface acoustic wave (SLSAW) sensor. The SLSAW sensor was designed as a plug-and-play-type unit for disposable use and operated under the harmonic resonant mode to produce frequency response to the blood coagulation cascade. Compared with a quartz crystal microbalance, Lamb wave, and film bulk acoustic resonator, the frequency shift of SLSAW was significantly increased, ranging from approximately 8960 to 10 368 kHz, which indicated enhancement of the signal-to-noise ratio. To demonstrate the feasibility of the SLSAW, studies were carried out to examine the effects of temperature and clotting reagents on coagulation times and kinetics. Activated partial thromboplastin times of plasma were validated by comparing with SYSMEX CA-7000 with the correlation (R²) as 0.996. In terms of coagulation kinetics, reaction time, clot formation time, maximum frequency shift, and clot formation rate of whole blood correlated well with corresponding parameters of the standard thromboelastography (TEG) analyzer (R² = 0.9942, 0.9868, 0.9712, and 0.9939, respectively). The SLSAW sensor, with the advantages of low cost, small size, little sample consumption (1 μL), disposable use, and simple operation, is a promising tool for point-of-care diagnosis of hemostasis.

ZIF Nanocrystal-Based Surface Acoustic Wave (SAW) Electronic Nose to Detect Diabetes in Human Breath

In the present work, a novel, portable and innovative eNose composed of a surface acoustic wave (SAW) sensor array based on zeolitic imidazolate frameworks, ZIF-8 and ZIF-67 nanocrystals (pure and combined with gold nanoparticles), as sensitive layers has been tested as a non-invasive system to detect different disease markers, such as acetone, ethanol and ammonia, related to the diagnosis and control of diabetes mellitus through exhaled breath. The sensors have been prepared by spin coating, achieving continuous sensitive layers at the surface of the SAW device. Low concentrations (5 ppm, 10 ppm and 25 ppm) of the marker analytes were measured, obtaining high sensitivities, good reproducibility, short time response and fast signal recovery.

Properties of Love Waves in Functional Graded Saturated Material

In the present study, the propagation of Love waves is investigated in a layered structure with two different homogeneity saturated materials based on Biot’s theory. The upper layer is a transversely isotropic functional graded saturated layer, and the substrate is a saturated semi-space. The inhomogeneity of the functional graded layer is taken into account. Furthermore, the gradient coefficient is employed as the representation of the relation with the layer thickness and the material parameters, and the power series method is applied to solve the variable coefficients governing the equations. In this regard, the influence of the gradient coefficients of saturated material on the dispersion relations, and the attenuation of Love waves in this structure are explored, and the results of the present study can provide theoretical guidance for the non-destructive evaluation of functional graded saturated material.

Acoustic Sensors Based on Amino-Functionalized Nanoparticles to Detect Volatile Organic Solvents

Love-wave gas sensors based on surface functionalized iron oxide nanoparticles has been developed in this research. Amino-terminated iron oxide nanoparticles were deposited, by a spin coating technique, onto the surface of Love-wave sensors, as a very reproducible gas-sensing layer. The gases tested were organic solvents, such as butanol, isopropanol, toluene and xylene, for a wide and low concentration range, obtaining great responses, fast response times of a few minutes (the time at which the device produced a signal change equal to 90%), good reproducibilities, and different responses for each detected solvent. The estimated limits of detection obtained have been very low for each detected compound, about 1 ppm for butanol, 12 ppm for isopropanol, 3 ppm for toluene and 0.5 ppm for xylene. Therefore, it is demonstrated that this type of acoustic wave sensor, with surface amino-functionalized nanoparticles, is a good alternative to those ones functionalized with metal nanoparticles, which result very expensive sensors to achieve worse results.

Love-mode surface acoustic wave devices based on multilayers of TeO2/ZnO(112¯0)/Si(100) with high sensitivity and temperature stability

A multilayer structure of TeO₂/interdigital transducers (IDTs)/ZnO(112¯0)/Si(100) was proposed and investigated to achieve both high sensitivity and temperature-stability for bio-sensing applications. Dispersions of phase velocities, electromechanical coupling coefficients K², temperature coefficient of delay (TCD) and sensitivity in the multilayer structures were simulated as functions of normalized thicknesses of ZnO (h_ZnO/λ) and TeO₂ (h_TeO2/λ) films. The fundamental mode of Love mode (LM) - surface acoustic wave (SAW) shows a larger value of K² and higher sensitivity compared with those of the first mode. TeO₂ film with a positive TCD not only compensates the temperature effect induced due to the negative TCD of ZnO(112¯0)/Si(100), but also enhances the sensitivity of the love mode device. The optimal normalized thickness ratios were identified to be h_TeO2/λ=0.021 and h_ZnO/λ=0.304, and the devices with such structures can which generate a normalized sensitivity of -1.04×10^-3m³/kg, a TCD of 0.009ppm/°C, and a K² value of 2.76%.

Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures

The characteristics of two types of surface acoustic waves SAWs (Rayleigh waves and Love waves) propagating in bilayered structures of (112¯0)ZnO/R-sapphire are simulated by a finite element method (FEM) model, in which both SAWs have crossed propagation directions. Furthermore, based on the bilayered structures, the frequency responses of Rayleigh wave and Love wave humidity sensors are also simulated. Meanwhile, the frequency shifts, insertion loss changes and then the sensitivities of both humidity sensors induced by the adsorbed water layer perturbations, including the mechanical and electrical factors, are calculated numerically. Generally, the characteristics and performances of both sensors are strongly dependent on the thickness of the ZnO films. By appropriate selecting the ratio of the film thickness to SAW wavelength for each kind of the sensors, the performances of both sensors can be optimized.

Propagation of Love waves with surface effects in an electrically-shorted piezoelectric nanofilm on a half-space elastic substrate

The propagation of Love waves in the structure consisting of a nanosized piezoelectric film and a semi-infinite elastic substrate is investigated in the present paper with the consideration of surface effects. In our analysis, surface effects are taken into account in terms of the surface elasticity theory and the electrically-shorted conditions are adopted on the free surface of the piezoelectric film and the interface between the film and the substrate. This work focuses on the new features in the dispersion relations of different modes due to surface effects. It is found that with the existence of surface effects, the frequency dispersion of Love waves shows the distinct dependence on the thickness and the surface constants when the film thickness reduces to nanometers. In general, phase velocities of all dispersion modes increase with the decrease of the film thickness and the increase of the surface constants. However, surface effects play different functions in the frequency dispersions of different modes, especially for the first mode dispersion. Moreover, different forms of Love waves are observed in the first mode dispersion, depending on the presence of the surface effects on the surface and the interface.

A Microfluidic Love-Wave Biosensing Device for PSA Detection Based on an Aptamer Beacon Probe

A label-free and selective aptamer beacon-based Love-wave biosensing device was developed for prostate specific antigen (PSA) detection. The device consists of the following parts: LiTaO₃ substrate with SiO₂ film as wave guide layer, two set of inter-digital transducers (IDT), gold film for immobilization of the biorecongniton layer and a polydimethylsiloxane (PDMS) microfluidic channels. DNA aptamer, or “artificial antibody”, was used as the specific biorecognition probe for PSA capture. Some nucleotides were added to the 3'-end of the aptamer to form a duplex with the 3'-end, turning the aptamer into an aptamer-beacon. Taking advantage of the selective target-induced assembly changes arising from the “aptamer beacon”, highly selective and specific detection of PSA was achieved. Furthermore, PDMS microfluidic channels were designed and fabricated to realize automated quantitative sample injection. After optimization of the experimental conditions, the established device showed good performance for PSA detection between 10 ng/mL to 1 μg/mL, with a detection limit of 10 ng/mL. The proposed sensor might be a promising alternative for point of care diagnostics.

The analysis of the effect of homogeneous mechanical stress on the acoustic wave propagation in the "La3Ga5SiO14/fused silica" piezoelectric layered structure

The results of computer simulation taking into account the linear and nonlinear material constants have been presented. Study of the influence of external uniaxial mechanical stress on the dispersive characteristics of elastic waves in piezoelectric structures as "La3Ga5SiO14/fused silica" has been executed. The comparison of elastic wave velocity changes under the influence of an uniaxial stress while a full set of nonlinear material constants of crystalline layer+geometric nonlinearity, or only geometric nonlinearity of the layer induced by the static deformation of a substrate, has been fulfilled.

Temperature effects on the propagation characteristics of Love waves along multi-guide layers of Sio2/Su-8 on St-90°X quartz

Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (Tcf) of the fabricated Love wave devices with guide layers of SU-8/SiO₂ on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm.

A Love Wave Reflective Delay Line with Polymer Guiding Layer for Wireless Sensor Application

This paper presents an optimal design for a Love wave reflective delay line on 41^° YX LiNbO₃ with a polymer guiding layer for wireless sensor applications. A theoretical model was established to describe the Love wave propagation along the larger piezoelectric substrate with polymer waveguide, and the lossy mechanism from the viscoelastic waveguide was discussed, which results in the optimal guiding layer thickness. Coupling of modes (COM) was used to determine the optimal design parameters of the reflective delay line structured by single phase unidirectional transducers (SPUDTs) and shorted grating reflectors. Using the network analyzer, the fabricated Love wave reflective delay line was characterized, high signal noise ratio (S/N), sharp reflection peaks, and few spurious noise between the peaks were found, and the measured result agrees well with the simulated one. Also, the optimal guiding layer thickness of 1.5∼1.8µm was extracted experimentally, and it is consistent with the theoretical analysis.

ST Quartz Acoustic Wave Sensors with Sectional Guiding Layers

We report the effect of removing a section of guiding layer from the propagation paths of ST-quartz Love wave sensors; this offers the ease of fabrication of a polymer guiding layer whilst retaining the native surface of the quartz which may then be used for the attachment of a sensitizing layer. Data is presented for the rigid and viscous loading, which indicates a small reduction in mass sensitivity compared to a Love wave device. Biosensing capabilities of these discontinuous 'sectional' guiding layer devices are demonstrated using protein adsorption from solution.

ST Quartz Acoustic Wave Sensors with Sectional Guiding Layers

We report the effect of removing a section of guiding layer from the propagation paths of ST-quartz Love wave sensors; this offers the ease of fabrication of a polymer guiding layer whilst retaining the native surface of the quartz which may then be used for the attachment of a sensitizing layer. Data is presented for the rigid and viscous loading, which indicates a small reduction in mass sensitivity compared to a Love wave device. Biosensing capabilities of these discontinuous 'sectional' guiding layer devices are demonstrated using protein adsorption from solution.

SU-8 Guiding Layer for Love Wave Devices

SU-8 is a technologically important photoresist used extensively for the fabrication of microfluidics and MEMS, allowing high aspect ratio structures to be produced. In this work we report the use of SU-8 as a Love wave sensor guiding layer which allows the possibility of integrating a guiding layer with flow cell during fabrication. Devices were fabricated on ST-cut quartz substrates with a single-single finger design such that a surface skimming bulk wave (SSBW) at 97.4 MHz was excited. SU-8 polymer layers were successively built up by spin coating and spectra recorded at each stage; showing a frequency decrease with increasing guiding layer thickness. The insertion loss and frequency dependence as a function of guiding layer thickness was investigated over the first Love wave mode. Mass loading sensitivity of the resultant Love wave devices was investigated by deposition of multiple gold layers. Liquid sensing using these devices was also demonstrated; water-glycerol mixtures were used to demonstrate sensing of density-viscosity and the physical adsorption and removal of protein was also assessed using albumin and fibrinogen as model proteins.