Investigation of Acoustic Injection on the MPU6050 Accelerometer

Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor

Thermal stress is one of the main sources of micro-electro-mechanical systems (MEMS) devices error. The Wheatstone bridge is the sensing structure of a typical piezoresistive MEMS pressure sensor. In this study, the thermal stress induced by potting adhesive in MEMS pressure sensor was investigated by experiments, calculated by analytics and analyzed by simulations. An experiment system was used to test the sensor at different air pressures and temperatures. The error becomes greater with the decrease in pressure. A set of novel formulas were proposed to calculate the stress-strain on Wheatstone bridge. The error increases with the temperature deviating from 25 °C. A full-scale geometric model was developed, and finite element simulations were performed, to analyze the effect of the stress on MEMS pressure sensor induced by different temperatures and thicknesses of potting adhesive. Simulation results agree well with the experiments, which indicated that there is a 3.48% to 6.50% output error in 0.35 mm potting adhesive at 150 °C. With the thickness of potting adhesive increasing, the variations of output error of the Wheatstone bridge present an N-shaped curve. The output error meets a maximum of 5.30% in the potting adhesive of 0.95 mm and can be reduced to 2.47%, by increasing the potting adhesive to 2.40 mm.

Theoretical and Experimental Study on Nonlinear Failure of an MEMS Accelerometer under Dual Frequency Acoustic Interference

In order to quantitatively study the interfered output of the accelerometer under an acoustic injection attack, a mathematical model for fitting and predicting the accelerometer output was proposed. With ADXL103 as an example, an acoustic injection attack experiment with amplitude sweeping and frequency sweeping was performed. In the mathematical model, the R-squared coefficient was R² = 0.9990 in the acoustic injection attack experiment with amplitude sweeping, and R² = 0.9888 with frequency sweeping. Based on the mathematical model, the dual frequency acoustic injection attack mode was proposed. The difference frequency signal caused by the nonlinear effect was not filtered by the low-pass filter. At a 115 dB sound pressure level, the maximum acceleration bias of the output was 4.4 m/s² and the maximum amplitude of fluctuation was 4.97 m/s². Two kinds of methods of prevention against acoustic injection attack were proposed, including changing the damping ratio of the accelerometer and adding a preposition low-pass filter.