MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever

A comprehensive review on technological advancements for sensor-based Nadi Pariksha: An ancient Indian science for human health diagnosis

Nadi Pariksha is a significant, rather symbolic term for Ayurveda. Ancient Ayurvedic literature has prominently stated its importance in the judgment of Tridoshas (Vata, Pitta, and Kapha) which are the base of ailment diagnosis and prediction. The knowledge about Nadi Pariksha is uncovered in various ancient Ayurvedic literature like Ravansamhita, Bhavprakash, Nadivigyan by Kanad, Sharangdhar, and Yogratnakar. The various Nadi parameters are indicative of the diagnosis of diseases. These techniques were used as popular diagnostic tools in Indian culture from ancient days. Still, nowadays, these are not being used explicitly due to the lack of expertise, so it is necessary to establish their results once gained so that they can be used along with technical aspects in today's era. Ayurveda believes that all the elements of the Universe are present in any human body in minute, proportionate quantity, and the Nadi represents these elements, that is, Vata, Pitta, and Kapha (VPK). To facilitate the Nadi Pariksha using appropriate sensors may help the Ayurveda practitioners diagnose Prakriti and predict some diseases, making the Nadi Pariksha more reliable and faster. This review paper lists, 2 books and 67 research papers, mostly from countries like India, China, Japan, Korea, etc., from various reputed databases. The review primarily concentrates on six research themes: sensors and devices used for Nadi signal acquisition, signal pre-processing methods, feature extraction methods, feature selection approaches, classification practices, diseases diagnosed, and results attained. The paper also reviews the challenges in implementing the automated Nadi Pariksha with technological aid, which is a necessity of this period and is a very vibrant research arena. Yet significant work remains to be done, like bridging the gaps between technical and commercial development, and the procedure standardization is also required.

Rational Design of Flexible Mechanical Force Sensors for Healthcare and Diagnosis

Over the past decade, there has been a significant surge in interest in flexible mechanical force sensing devices and systems. Tremendous efforts have been devoted to the development of flexible mechanical force sensors for daily healthcare and medical diagnosis, driven by the increasing demand for wearable/portable devices in long-term healthcare and precision medicine. In this review, we summarize recent advances in diverse categories of flexible mechanical force sensors, covering piezoresistive, capacitive, piezoelectric, triboelectric, magnetoelastic, and other force sensors. This review focuses on their working principles, design strategies and applications in healthcare and diagnosis, with an emphasis on the interplay among the sensor architecture, performance, and application scenario. Finally, we provide perspectives on the remaining challenges and opportunities in this field, with particular discussions on problem-driven force sensor designs, as well as developments of novel sensor architectures and intelligent mechanical force sensing systems.

Sensor-Location-Specific Joint Acquisition of Peripheral Artery Bioimpedance and Photoplethysmogram for Wearable Applications

BACKGROUND

Cardiovascular diseases (CVDs), being the culprit for one-third of deaths globally, constitute a challenge for biomedical instrumentation development, especially for early disease detection. Pulsating arterial blood flow, providing access to cardiac-related parameters, involves the whole body. Unobtrusive and continuous acquisition of electrical bioimpedance (EBI) and photoplethysmography (PPG) constitute important techniques for monitoring the peripheral arteries, requiring novel approaches and clever means.

METHODS

In this work, five peripheral arteries were selected for EBI and PPG signal acquisition. The acquisition sites were evaluated based on the signal morphological parameters. A small-data-based deep learning model, which increases the data by dividing them into cardiac periods, was proposed to evaluate the continuity of the signals.

RESULTS

The highest sensitivity of EBI was gained for the carotid artery (0.86%), three times higher than that for the next best, the posterior tibial artery (0.27%). The excitation signal parameters affect the measured EBI, confirming the suitability of classical 100 kHz frequency (average probability of 52.35%). The continuity evaluation of the EBI signals confirmed the advantage of the carotid artery (59.4%), while the posterior tibial artery (49.26%) surpasses the radial artery (48.17%). The PPG signal, conversely, commends the location of the posterior tibial artery (97.87%).

CONCLUSIONS

The peripheral arteries are highly suitable for non-invasive EBI and PPG signal acquisition. The posterior tibial artery constitutes a candidate for the joint acquisition of EBI and PPG signals in sensor-fusion-based wearable devices-an important finding of this research.

Highly sensitive low-frequency-detectable acoustic sensor using a piezoresistive cantilever for health monitoring applications

This study investigates a cantilever-based pressure sensor that can achieve a resolution of approximately 0.2 mPa, over the frequency range of 0.1-250 Hz. A piezoresistive cantilever with ultra-high acoustic compliance is used as the sensing element in the proposed pressure sensor. We achieved a cantilever with a sensitivity of approximately 40 times higher than that of the previous cantilever device by realizing an ultrathin (340 nm thick) structure with large pads and narrow hinges. Based on the measurement results, the proposed pressure sensor can measure acoustic signals with frequencies as low as 0.1 Hz. The proposed pressure sensor can be used to measure low-frequency pressure and sound, which is crucial for various applications, including photoacoustic-based gas/chemical sensing and monitoring of physiological parameters and natural disasters. We demonstrate the measurement of heart sounds with a high SNR of 58 dB. We believe the proposed microphone will be used in various applications, such as wearable health monitoring, monitoring of natural disasters, and realization of high-resolution photoacoustic-based gas sensors. We successfully measured the first (S1) and second (S2) cardiac sounds with frequencies of 7-100 Hz and 20-45 Hz, respectively.

Recent Advances in Cardiovascular Disease Biosensors and Monitoring Technologies

Cardiovascular disease (CVD) causes significant mortality and remains the leading cause of death globally. Thus, to reduce mortality, early diagnosis by measurement of cardiac biomarkers and heartbeat signals presents fundamental importance. Traditional CVD examination requires bulky hospital instruments to conduct electrocardiography recording and immunoassay analysis, which are both time-consuming and inconvenient. Recently, development of biosensing technologies for rapid CVD marker screening attracted great attention. Thanks to the advancement in nanotechnology and bioelectronics, novel biosensor platforms are developed to achieve rapid detection, accurate quantification, and continuous monitoring throughout disease progression. A variety of sensing methodologies using chemical, electrochemical, optical, and electromechanical means are explored. This review first discusses the prevalence and common categories of CVD. Then, heartbeat signals and cardiac blood-based biomarkers that are widely employed in clinic, as well as their utilizations for disease prognosis, are summarized. Emerging CVD wearable and implantable biosensors and monitoring bioelectronics, allowing these cardiac markers to be continuously measured are introduced. Finally, comparisons of the pros and cons of these biosensing devices along with perspectives on future CVD biosensor research are presented.

Beyond biology: alternative uses of cantilever-based technologies

Micromechanical cantilever sensors are attracting a lot of attention because of the need for characterizing, detecting, and monitoring chemical and physical properties, as well as compounds at the nanoscale. The fields of application of micro-cantilever sensors span from biological and point-of-care, to military or industrial sectors. The purpose of this work focuses on thermal and mechanical characterization, environmental monitoring, and chemical detection, in order to provide a technical review of the most recent technical advances and applications, as well as the future prospective of micro-cantilever sensor research.

Development of Pressure Sensor Based Wearable Pulse Detection Device for Radial Pulse Monitoring

Wearable pulse detection devices can be used for daily human healthcare monitoring; however, the relatively poor flexibility and low sensitivity of the pulse detection devices are hindering the scrutiny of pulse information during pulse diagnosis of different pulse positions. This paper developed a novel and wearable pulse detection device based on three flexible pressure sensors using synthetic graphene and silver composites as the pressure sensing material. The structural design of the pulse detection device is firstly presented; the core component of pressure sensors is using the sawtooth protrusions to convert pressure induced by radial pulse vibrations into localized deformation of graphene composites. The fabricated pulse detection device is characterized by high pressure sensing performance, including relatively high sensitivity (8.65% kPa^-1), broad sensing range (12 kPa), and good dynamic response with a response time of about 100 ms. Then, the pulse detection device is worn on a human wrist to detect the pulses from three pulse positions, namely, 'Cun', 'Guan', and 'Chi', and the results demonstrated the capability of using our device to detect pulse signals. The physical conditions of the subject, such as arterial stiffness index, can be further analyzed through the characteristics of the acquired pulse signals, demonstrating the potential application of using wearable pulse detection devices for human health monitoring.

Multimodal Finger Pulse Wave Sensing: Comparison of Forcecardiography and Photoplethysmography Sensors

Pulse waves (PWs) are mechanical waves that propagate from the ventricles through the whole vascular system as brisk enlargements of the blood vessels' lumens, caused by sudden increases in local blood pressure. Photoplethysmography (PPG) is one of the most widespread techniques employed for PW sensing due to its ability to measure blood oxygen saturation. Other sensors and techniques have been proposed to record PWs, and include applanation tonometers, piezoelectric sensors, force sensors of different kinds, and accelerometers. The performances of these sensors have been analyzed individually, and their results have been found not to be in good agreement (e.g., in terms of PW morphology and the physiological parameters extracted). Such a comparison has led to a deeper comprehension of their strengths and weaknesses, and ultimately, to the consideration that a multimodal approach accomplished via sensor fusion would lead to a more robust, reliable, and potentially more informative methodology for PW monitoring. However, apart from various multichannel and multi-site systems proposed in the literature, no true multimodal sensors for PW recording have been proposed yet that acquire PW signals simultaneously from the same measurement site. In this study, a true multimodal PW sensor is presented, which was obtained by integrating a piezoelectric forcecardiography (FCG) sensor and a PPG sensor, thus enabling simultaneous mechanical-optical measurements of PWs from the same site on the body. The novel sensor performance was assessed by measuring the finger PWs of five healthy subjects at rest. The preliminary results of this study showed, for the first time, that a delay exists between the PWs recorded simultaneously by the PPG and FCG sensors. Despite such a delay, the pulse waveforms acquired by the PPG and FCG sensors, along with their first and second derivatives, had very high normalized cross-correlation indices in excess of 0.98. Six well-established morphological parameters of the PWs were compared via linear regression, correlation, and Bland-Altman analyses, which showed that some of these parameters were not in good agreement for all subjects. The preliminary results of this proof-of-concept study must be confirmed in a much larger cohort of subjects. Further investigation is also necessary to shed light on the physical origin of the observed delay between optical and mechanical PW signals. This research paves the way for the development of true multimodal, wearable, integrated sensors and for potential sensor fusion approaches to improve the performance of PW monitoring at various body sites.

Mechanically Active Materials and Devices for Bio-Interfaced Pressure Sensors-A Review

Pressures generated by external forces or by internal body processes represent parameters of critical importance in diagnosing physiological health and in anticipating injuries. Examples span intracranial hypertension from traumatic brain injuries, high blood pressure from poor diet, pressure-induced skin ulcers from immobility, and edema from congestive heart failure. Pressures measured on the soft surfaces of vital organs or within internal cavities of the body can provide essential insights into patient status and progression. Challenges lie in the development of high-performance pressure sensors that can softly interface with biological tissues to enable safe monitoring for extended periods of time. This review focuses on recent advances in mechanically active materials and structural designs for classes of soft pressure sensors that have proven uses in these contexts. The discussions include applications of such sensors as implantable and wearable systems, with various unique capabilities in wireless continuous monitoring, minimally invasive deployment, natural degradation in biofluids, and/or multiplexed spatiotemporal mapping. A concluding section summarizes challenges and future opportunities for this growing field of materials and biomedical research.

Frequency Characteristics of Pulse Wave Sensor Using MEMS Piezoresistive Cantilever Element

Wearable sensor devices with minimal discomfort to the wearer have been widely developed to realize continuous measurements of vital signs (body temperature, blood pressure, respiration rate, and pulse wave) in many applications across various fields, such as healthcare and sports. Among them, microelectromechanical systems (MEMS)-based differential pressure sensors have garnered attention as a tool for measuring pulse waves with weak skin tightening. Using a MEMS-based piezoresistive cantilever with an air chamber as the pressure change sensor enables highly sensitive pulse-wave measurements to be achieved. Furthermore, the initial static pressure when attaching the sensor to the skin is physically excluded because of air leakage around the cantilever, which serves as a high-pass filter. However, if the frequency characteristics of this mechanical high-pass filter are not appropriately designed, then the essential information of the pulse-wave measurement may not be reflected. In this study, the frequency characteristics of a sensor structure is derived theoretically based on the air leakage rate and chamber size. Subsequently, a pulse wave sensor with a MEMS piezoresistive cantilever element, two air chambers, and a skin-contacted membrane is designed and fabricated. The developed sensor is 30 mm in diameter and 8 mm in thickness and realizes high-pass filter characteristics of 0.7 Hz. Finally, pulse wave measurement at the neck of a participant is demonstrated using the developed sensor. It is confirmed that the measured pulse wave contains signals in the designed frequency band.

Integrated Opto-mechanical Cantilever Sensor with a Rib Waveguide

An integrated opto-mechanical cantilever sensor with a rib waveguide is reported in this paper. The device consists of a rib waveguide cantilever with buried waveguides on silicon. The rib cantilever is introduced to match better with the buried waveguide, further for increasing the interface coupling efficiency. With this configuration, single-mode operating can be achieved in transverse direction without decreasing the width of optical waveguide cantilever. The system sensitivity is 1.1 μm^-1 which is increased by about 21%, compared with the conventional structure. This article is protected by copyright. All rights reserved.

Piezoelectric Sensor for the Monitoring of Arterial Pulse Wave: Detection of Arrhythmia Occurring in PAC/PVC Patients

Previous studies have found that the non-invasive blood pressure measurement method based on the oscillometric method is inaccurate when an arrhythmia occurs. Therefore, we propose a high-sensitivity pulse sensor that can measure the hemodynamic characteristics of the pulse wave and then estimate the blood pressure. When an arrhythmia occurs, the hemodynamics of the pulse wave are abnormal and change the morphology of the pulse wave. Our proposed sensor can measure the occurrence of ectopic beats from the radial artery, and the detection algorithm can reduce the error of blood pressure estimation caused by the distortion of ectopic beats that occurs when the pulse wave is measured. In this study, we tested patients with premature atrial contraction (PAC) or premature ventricular contraction (PVC) and analyzed the morphology of the pulse waves when the sensor detected the ectopic beats. We discuss the advantages of using the Moens–Korteweg equation to estimate the blood pressure of patients with arrhythmia, which is different from the oscillometric method. Our research provides a possible arrhythmia detection method for wearable devices and can accurately estimate blood pressure in a non-invasive way during an arrhythmia.

Mask-Type Sensor for Pulse Wave and Respiration Measurements and Eye Blink Detection

This paper reports on a mask-type sensor for simultaneous pulse wave and respiration measurements and eye blink detection that uses only one sensing element. In the proposed sensor, a flexible air bag-shaped chamber whose inner pressure change can be measured by a microelectromechanical system-based piezoresistive cantilever was used as the sensing element. The air bag-shaped chamber is fabricated by wrapping a sponge pad with plastic film and polyimide tape. The polyimide tape has a hole to which the substrate with the piezoresistive cantilever adheres. By attaching the sensor device to a mask where it contacts the nose of the subject, the sensor can detect the pulses and eye blinks of the subject by detecting the vibration and displacement of the nose skin caused by these physiological parameters. Moreover, the respiration of the subject causes pressure changes in the space between the mask and the face of the subject as well as slight vibrations of the mask. Therefore, information about the respiration of the subject can be extracted from the sensor signal using either the low-frequency component (<1 Hz) or the high-frequency component (>100 Hz). This paper describes the sensor fabrication and provides demonstrations of the pulse wave and respiration measurements as well as eye blink detection using the fabricated sensor.

Imperceptible energy harvesting device and biomedical sensor based on ultraflexible ferroelectric transducers and organic diodes

Energy autonomy and conformability are essential elements in the next generation of wearable and flexible electronics for healthcare, robotics and cyber-physical systems. This study presents ferroelectric polymer transducers and organic diodes for imperceptible sensing and energy harvesting systems, which are integrated on ultrathin (1-µm) substrates, thus imparting them with excellent flexibility. Simulations show that the sensitivity of ultraflexible ferroelectric polymer transducers is strongly enhanced by using an ultrathin substrate, which allows the mounting on 3D-shaped objects and the stacking in multiple layers. Indeed, ultraflexible ferroelectric polymer transducers have improved sensitivity to strain and pressure, fast response and excellent mechanical stability, thus forming imperceptible wireless e-health patches for precise pulse and blood pressure monitoring. For harvesting biomechanical energy, the transducers are combined with rectifiers based on ultraflexible organic diodes thus comprising an imperceptible, 2.5-µm thin, energy harvesting device with an excellent peak power density of 3 mW·cm⁻³.

Next-generation energy autonomous biomedical devices must easily conform to human skin, provide accurate health monitoring and allow for scalable manufacturing. Here, the authors report ultraflexible ferroelectric transducers and organic diodes for biomedical sensing and energy harvesting.

Ultraflexible ferroelectric transducers based on P(VDF:TrFE) co-polymer with optimised crystalline structure by thermal annealing are utilised as sensors for vital parameters detection and as piezoelectric nanogenerators (PENG). The PENGs were incorporated in an energy harvesting system including OTFT-based rectifying circuits and thin film capacitors on a single ultrathin substrate. Both developments could pave the way towards self-powering, imperceptible e-health systems.

Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane

This paper reports on micro-fabricated pressure sensors based on a thin metallic glass membrane. The Pd₆₆Cu₄Si₃₀ metallic glass material is deposited successfully by a sputter technique. An amorphous feature of the deposited film is confirmed by high resolution transmission electron microscopy (HR-TEM) and the corresponding the selected area electron diffraction (SAED). The ultra-flat freestanding metallic glass membrane with 50 nm in thickness and 2 mm in circular diameter has been fabricated successfully. In addition, two kinds of micro-fabricated pressure sensor types, including itself membrane and additional metallic glass bar as piezoresistive sensing elements, are proposed and fabricated. A displacement of membrane can reach over 100 µm without any damage to membrane which is equivalent to over 0.7% of an elastic strain. Besides, the temperature coefficient of resistance of the Pd-based metallic glass thin film is extremely low 9.6 × 10^-6 °C^-1. This development of nano-thick metallic glass membrane possibly opens a new field of micro-fabricated devices with large displacement and enhanced sensing.