Sampling and Mass Detection of a Countable Number of Microparticles Using on-Cantilever Imprinting

Tailored Microcantilever Optimization for Multifrequency Force Microscopy

Microcantilevers are at the heart of atomic force microscopy (AFM) and play a significant role in AFM-based techniques. Recent advancements in multifrequency AFM require the simultaneous excitation and detection of multiple eigenfrequencies of microcantilevers to assess more data channels to quantify the material properties. However, to achieve higher spatiotemporal resolution there is a need to optimize the structure of microcantilevers. In this study, the architecture of the cantilever with gold nanoparticles using a dip-coating method is modified, aiming to tune the higher eigenmodes of the microcantilever as integer multiples of its fundamental frequency. Through the theoretical methodology and simulative model, that integer harmonics improve the coupling in multifrequency AFM measurements is demonstrated, leading to enhanced image quality and resolution. Furthermore, via the combined theoretical-experimental approach, the interplay between induced mass and stiffness change of the modified cantilever depending on the attached particle location, size, mass, and geometry is found. To validate the results of this predictive model, tapping-mode AFM is utilized and bimodal Amplitude Modulation AFM techniques to examine and quantify the impact of tuning higher-order eigenmodes on the imaging quality of a polystyrene-polymethylmethacrylate (PS-PMMA) block co-polymer assembly deposited on a glass slide and Highly Ordered Pyrolytic Graphite (HOPG).

Self-Excited Microcantilever with Higher Mode Using Band-Pass Filter

Microresonators have a variety of scientific and industrial applications. The measurement methods based on the natural frequency shift of a resonator have been studied for a wide range of applications, including the detection of the microscopic mass and measurements of viscosity and stiffness. A higher natural frequency of the resonator realizes an increase in the sensitivity and a higher-frequency response of the sensors. In the present study, by utilizing the resonance of a higher mode, we propose a method to produce the self-excited oscillation with a higher natural frequency without downsizing the resonator. We establish the feedback control signal for the self-excited oscillation using the band-pass filter so that the signal consists of only the frequency corresponding to the desired excitation mode. It results that careful position setting of the sensor for constructing a feedback signal, which is needed in the method based on the mode shape, is not necessary. By the theoretical analysis of the equations governing the dynamics of the resonator coupled with the band-pass filter, it is clarified that the self-excited oscillation is produced with the second mode. Furthermore, the validity of the proposed method is experimentally confirmed by an apparatus using a microcantilever.

MEMS-Based Cantilever Sensor for Simultaneous Measurement of Mass and Magnetic Moment of Magnetic Particles

This study presents a measurement approach suitable for the simultaneous determination of both the mass mp and magnetic moment µp of magnetic particles deposited on a micro electro mechanical system (MEMS) resonant cantilever balance, which is operated in parallel to an external magnetic field-induced force gradient F′(z). Magnetic induction B(z) and its second spatial derivative δ2B/δz2 is realized, beforehand, through the finite element method magnetics (FEMM) simulation with a pair of neodymium permanent magnets configured in a face-to-face arrangement. Typically, the magnets are mounted in a magnet holder assembly designed and fabricated in-house. The resulting F′ lowers the calibrated intrinsic stiffness k0 of the cantilever to k0-F′, which can, thus, be obtained from a measured resonance frequency shift of the cantilever. The magnetic moment µp per deposited particle is determined by dividing F′ by δ2B/δz2 and the number of the attached monodisperse particles given by the mass-induced frequency shift of the cantilever. For the plain iron oxide particles (250 nm) and the magnetic polystyrene particles (2 µm), we yield µp of 0.8 to 1.5 fA m2 and 11 to 19 fA m2 compared to 2 fA m2 and 33 fA m2 nominal values, respectively.

A Flexible PI/Si/SiO2 Piezoresistive Microcantilever for Trace-Level Detection of Aflatoxin B1

In this paper, a polyimide (PI)/Si/SiO2-based piezoresistive microcantilever biosensor was developed to achieve a trace level detection for aflatoxin B1. To take advantage of both the high piezoresistance coefficient of single-crystal silicon and the small spring constant of PI, the flexible piezoresistive microcantilever was designed using the buried oxide (BOX) layer of a silicon-on-insulator (SOI) wafer as a bottom passivation layer, the topmost single-crystal silicon layer as a piezoresistor layer, and a thin PI film as a top passivation layer. To obtain higher sensitivity and output voltage stability, four identical piezoresistors, two of which were located in the substrate and two integrated in the microcantilevers, were composed of a quarter-bridge configuration wheatstone bridge. The fabricated PI/Si/SiO2 microcantilever showed good mechanical properties with a spring constant of 21.31 nN/μm and a deflection sensitivity of 3.54 × 10-7 nm-1. The microcantilever biosensor also showed a stable voltage output in the Phosphate Buffered Saline (PBS) buffer with a fluctuation less than 1 μV @ 3 V. By functionalizing anti-aflatoxin B1 on the sensing piezoresistive microcantilever with a biotin avidin system (BAS), a linear aflatoxin B1 detection concentration resulting from 1 ng/mL to 100 ng/mL was obtained, and the toxic molecule detection also showed good specificity. The experimental results indicate that the PI/Si/SiO2 flexible piezoresistive microcantilever biosensor has excellent abilities in trace-level and specific detections of aflatoxin B1 and other biomolecules.