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Zeng Q, Zhao Z, Xiong X, Du H, Zhang W, Zhang Z, Wang P, Lei L. Design and Implementation of a Subnanometer Heterodyne Interference Signal Processing Algorithm with a Dynamic Filter. SENSORS (BASEL, SWITZERLAND) 2022; 22:5422. [PMID: 35891103 PMCID: PMC9323930 DOI: 10.3390/s22145422] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/02/2022] [Revised: 07/16/2022] [Accepted: 07/18/2022] [Indexed: 06/15/2023]
Abstract
In this study, a subnanometer heterodyne interference signal processing algorithm with a dynamic filter is proposed. The algorithm can effectively reduce the measurement error caused by the noise introduced in the optical path and circuit. Because of the low signal-to-noise ratio of the measurement signal, a dynamic filter with variable coefficients is designed. The role of the bi-quadrature lock-in amplifier algorithm in the problem of different amplitudes among the measurement signal, reference signal, and uncertainty of the frequency difference of the dual-frequency laser is analyzed. With the aid of the heterodyne interferometry platform, the error in the solution results of the proposed algorithm and the conventional algorithm is compared. The results indicate that the maximum deviation of the phase increment of the algorithm does not exceed 6 mrad, the single-cycle phase difference can be subdivided by 1024, and the system resolution reaches 0.15 nm.
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Affiliation(s)
- Qilin Zeng
- Department of Electrical Engineering and Automation, Guilin University of Electronic Technology, Guilin 541004, China; (Q.Z.); (Z.Z.); (X.X.); (H.D.); (Z.Z.); (P.W.)
- Key Laboratory of Optoelectronic Information Processing, Guilin University of Electronic Technology, Guilin 541004, China
| | - Zhengyi Zhao
- Department of Electrical Engineering and Automation, Guilin University of Electronic Technology, Guilin 541004, China; (Q.Z.); (Z.Z.); (X.X.); (H.D.); (Z.Z.); (P.W.)
- Key Laboratory of Optoelectronic Information Processing, Guilin University of Electronic Technology, Guilin 541004, China
| | - Xianming Xiong
- Department of Electrical Engineering and Automation, Guilin University of Electronic Technology, Guilin 541004, China; (Q.Z.); (Z.Z.); (X.X.); (H.D.); (Z.Z.); (P.W.)
- Key Laboratory of Optoelectronic Information Processing, Guilin University of Electronic Technology, Guilin 541004, China
| | - Hao Du
- Department of Electrical Engineering and Automation, Guilin University of Electronic Technology, Guilin 541004, China; (Q.Z.); (Z.Z.); (X.X.); (H.D.); (Z.Z.); (P.W.)
- Key Laboratory of Optoelectronic Information Processing, Guilin University of Electronic Technology, Guilin 541004, China
| | - Wentao Zhang
- Department of Electrical Engineering and Automation, Guilin University of Electronic Technology, Guilin 541004, China; (Q.Z.); (Z.Z.); (X.X.); (H.D.); (Z.Z.); (P.W.)
- Key Laboratory of Optoelectronic Information Processing, Guilin University of Electronic Technology, Guilin 541004, China
| | - Zhicheng Zhang
- Department of Electrical Engineering and Automation, Guilin University of Electronic Technology, Guilin 541004, China; (Q.Z.); (Z.Z.); (X.X.); (H.D.); (Z.Z.); (P.W.)
- Key Laboratory of Optoelectronic Information Processing, Guilin University of Electronic Technology, Guilin 541004, China
| | - Peng Wang
- Department of Electrical Engineering and Automation, Guilin University of Electronic Technology, Guilin 541004, China; (Q.Z.); (Z.Z.); (X.X.); (H.D.); (Z.Z.); (P.W.)
- Key Laboratory of Optoelectronic Information Processing, Guilin University of Electronic Technology, Guilin 541004, China
| | - Lihua Lei
- Shanghai Key Laboratory of Online Test and Control Technology, Shanghai 201203, China;
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