Subsurface imaging of flexible circuits via contact resonance atomic force microscopy

Imaging beyond the surface region: Probing hidden materials via atomic force microscopy

Probing material properties at surfaces down to the single-particle scale of atoms and molecules has been achieved, but high-resolution subsurface imaging remains a nanometrology challenge due to electromagnetic and acoustic dispersion and diffraction. The atomically sharp probe used in scanning probe microscopy (SPM) has broken these limits at surfaces. Subsurface imaging is possible under certain physical, chemical, electrical, and thermal gradients present in the material. Of all the SPM techniques, atomic force microscopy has entertained unique opportunities for nondestructive and label-free measurements. Here, we explore the physics of the subsurface imaging problem and the emerging solutions that offer exceptional potential for visualization. We discuss materials science, electronics, biology, polymer and composite sciences, and emerging quantum sensing and quantum bio-imaging applications. The perspectives and prospects of subsurface techniques are presented to stimulate further work toward enabling noninvasive high spatial and spectral resolution investigation of materials including meta- and quantum materials.

Resolving the Subsurface Structure and Elastic Modulus of Layered Films via Contact Resonance Atomic Force Microscopy

Since its discovery, atomic force microscopy (AFM) has become widely used for surface characterization, evolving from a tool for probing surface topography to a versatile method for characterizing mechanical, electrical, chemical, magnetic, and electro-optical properties of surfaces at the nanoscale. Developments of several AFM-based techniques have enabled even subsurface imaging, which is routinely being carried out at the qualitative level of feature detection for localized subsurface inhomogeneities. We surmise, however, that a quantitative three-dimensional (3D) subsurface characterization can emerge from the AFM mechanical response of flat buried interfaces, and present here a methodology for determining the depth of a film and its mechanical properties. Using load-dependent contact resonance atomic force microscopy (CR-AFM) and accurate modeling of the contact between the AFM tip and a layered sample, we determine the relationship between the measured resonance frequency of the AFM probe and the contact stiffness. Our subsequent statistical analysis reveals an intrinsic and sample-specific interdependence between the depth and modulus sensitivities of CR-AFM. This interdependence prevents the simultaneous accurate determination of both depth and modulus from measurements on a single-layered sample. If the elastic moduli of the sample components are predetermined from separate investigations of bulk samples (or otherwise known), then this methodology accurately yields the location of the interface between the layers of the sample; as such, it can serve as a nondestructive and robust technique for probing layer thickness, subsurface features, and elastic properties of materials used in semiconductor electronics, additive manufacturing, or biomaterials.

Cantilever signature of tip detachment during contact resonance AFM

Contact resonance atomic force microscopy, piezoresponse force microscopy, and electrochemical strain microscopy are atomic force microscopy modes in which the cantilever is held in contact with the sample at a constant average force while monitoring the cantilever motion under the influence of a small, superimposed vibrational signal. Though these modes depend on permanent contact, there is a lack of detailed analysis on how the cantilever motion evolves when this essential condition is violated. This is not an uncommon occurrence since higher operating amplitudes tend to yield better signal-to-noise ratio, so users may inadvertently reduce their experimental accuracy by inducing tip-sample detachment in an effort to improve their measurements. We shed light on this issue by deliberately pushing both our experimental equipment and numerical simulations to the point of tip-sample detachment to explore cantilever dynamics during a useful and observable threshold feature in the measured response. Numerical simulations of the analytical model allow for extended insight into cantilever dynamics such as full-length deflection and slope behavior, which can be challenging or unobtainable in a standard equipment configuration. With such tools, we are able to determine the cantilever motion during detachment and connect the qualitative and quantitative behavior to experimental features.

Multifunctional cantilevers for simultaneous enhancement of contact resonance and harmonic atomic force microscopy

To enhance contact resonance atomic force microscopy (CR-AFM) and harmonic AFM imaging simultaneously, we design a multifunctional cantilever. Precise tailoring of the cantilever's dynamic properties is realized by either mass-removing or mass-adding. As prototypes, focused ion beam drilling or depositing is used to fabricate the optimized structures. CR-AFM subsurface imaging on circular cavities covered by a piece of highly oriented pyrolytic graphite validates the improved CR frequency to contact stiffness sensitivity. The detectable subsurface depth and cavity radius increase accordingly by using the multifunctional cantilever. At the same time, the free resonance frequency of the second mode is tuned to an integer multiple of the fundamental one. Harmonic AFM imaging on polystyrene and low-density polystyrene mixture shows the improved harmonic amplitude contrast and signal strength on the two material phases. The multifunctional cantilever can be extended to enhance other similar AFM operation modes and it has potential applications in relevant fields such as mechanical characterization and subsurface imaging.

Application of contact-resonance AFM methods to polymer samples

Contact-resonance AFM (CR-AFM) has been used in recent years for the measurement of mechanical properties of rather stiff materials, such as ceramics or metals, but also of some polymers. Compared with other techniques providing information on the mechanical properties of a sample, notably force-distance curves, CR-AFM has a much shorter acquisition time. This compensates in part the incomplete theoretical understanding of the underlying physical phenomena and of factors influencing the measurements. A commonly used method to analyze CR data requires the determination of the relative position of the tip, the calculation of the normalized contact stiffness, and the use of a calibration sample for the calculation of the elastic modulus of the sample. In the present paper, we propose an alternative procedure, based on approximations of the equations describing the system, which allows one to determine the elastic modulus of the sample as a parameter of the fit of the CR frequency as a function of the load. After showing that CR modes including scanning under continuous contact wear and damage the sample and/or alter the surface roughness, the results of point CR measurements on bulk and thin films are presented. Though Young's moduli of bulk polystyrene and poly(methyl methacrylate) could be determined through the presented analysis, it is concluded that CR measurements are not appropriate for polymer samples. Major drawbacks are the bad resolution for moduli lower than ca. 10 GPa and the lack of a comprehensive physical model accounting for many factors affecting the dynamic response of a cantilever in contact with a sample.