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Park H, Park JJ, Bui PD, Yoon H, Grigoropoulos CP, Lee D, Ko SH. Laser-Based Selective Material Processing for Next-Generation Additive Manufacturing. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2307586. [PMID: 37740699 DOI: 10.1002/adma.202307586] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/29/2023] [Revised: 09/14/2023] [Indexed: 09/25/2023]
Abstract
The connection between laser-based material processing and additive manufacturing is quite deeply rooted. In fact, the spark that started the field of additive manufacturing is the idea that two intersecting laser beams can selectively solidify a vat of resin. Ever since, laser has been accompanying the field of additive manufacturing, with its repertoire expanded from processing only photopolymer resin to virtually any material, allowing liberating customizability. As a result, additive manufacturing is expected to take an even more prominent role in the global supply chain in years to come. Herein, an overview of laser-based selective material processing is presented from various aspects: the physics of laser-material interactions, the materials currently used in additive manufacturing processes, the system configurations that enable laser-based additive manufacturing, and various functional applications of next-generation additive manufacturing. Additionally, current challenges and prospects of laser-based additive manufacturing are discussed.
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Affiliation(s)
- Huijae Park
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul, 08826, South Korea
| | - Jung Jae Park
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul, 08826, South Korea
| | - Phuong-Danh Bui
- Laser and Thermal Engineering Lab, Department of Mechanical Engineering, Gachon University, 1342 Seongnamdaero, Sujeong-gu, Seongnam, 13120, South Korea
| | - Hyeokjun Yoon
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul, 08826, South Korea
| | - Costas P Grigoropoulos
- Laser Thermal Lab, Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA, 94720, USA
| | - Daeho Lee
- Laser and Thermal Engineering Lab, Department of Mechanical Engineering, Gachon University, 1342 Seongnamdaero, Sujeong-gu, Seongnam, 13120, South Korea
| | - Seung Hwan Ko
- Applied Nano and Thermal Science Lab, Department of Mechanical Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul, 08826, South Korea
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Salvador-Porroche A, Herrer L, Sangiao S, de Teresa JM, Cea P. Low-resistivity Pd nanopatterns created by a direct electron beam irradiation process free of post-treatment steps. NANOTECHNOLOGY 2022; 33:405302. [PMID: 34983030 DOI: 10.1088/1361-6528/ac47cf] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/14/2021] [Accepted: 01/04/2022] [Indexed: 05/28/2023]
Abstract
The ability to create metallic patterned nanostructures with excellent control of size, shape and spatial orientation is of utmost importance in the construction of next-generation electronic and optical devices as well as in other applications such as (bio)sensors, reactive surfaces for catalysis, etc. Moreover, development of simple, rapid and low-cost fabrication processes of metallic patterned nanostructures is a challenging issue for the incorporation of such devices in real market applications. In this contribution, a direct-write method that results in highly conducting palladium-based nanopatterned structures without the need of applying subsequent curing processes is presented. Spin-coated films of palladium acetate were irradiated with an electron beam to produce palladium nanodeposits (PdNDs) with controlled size, shape and height. The use of different electron doses was investigated and its influence on the PdNDs features determined, namely: (1) thickness of the deposits, (2) atomic percentage of palladium content, (3) oxidation state of palladium in the deposit, (4) morphology of the sample and grain size of the Pd nanocrystals and (5) resistivity. It has been probed that the use of high electron doses, 30000μC cm-2results in the lowest resistivity reported to date for PdNDs, namely 145μΩ cm, which is only one order of magnitude higher than bulk palladium. This result paves the way for development of simplified lithography processes of nanostructured deposits avoiding subsequent post-treatment steps.
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Affiliation(s)
- Alba Salvador-Porroche
- Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, E-50009 Zaragoza, Spain
- Departamento de Física de la Materia Condensada, Facultad de Ciencias, Universidad de Zaragoza, E-50009 Zaragoza, Spain
- Laboratorio de Microscopías avanzadas (LMA), Universidad de Zaragoza, E-50018 Zaragoza, Spain
| | - Lucía Herrer
- Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, E-50009 Zaragoza, Spain
- Laboratorio de Microscopías avanzadas (LMA), Universidad de Zaragoza, E-50018 Zaragoza, Spain
| | - Soraya Sangiao
- Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, E-50009 Zaragoza, Spain
- Departamento de Física de la Materia Condensada, Facultad de Ciencias, Universidad de Zaragoza, E-50009 Zaragoza, Spain
- Laboratorio de Microscopías avanzadas (LMA), Universidad de Zaragoza, E-50018 Zaragoza, Spain
| | - José María de Teresa
- Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, E-50009 Zaragoza, Spain
- Departamento de Física de la Materia Condensada, Facultad de Ciencias, Universidad de Zaragoza, E-50009 Zaragoza, Spain
- Laboratorio de Microscopías avanzadas (LMA), Universidad de Zaragoza, E-50018 Zaragoza, Spain
| | - Pilar Cea
- Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, E-50009 Zaragoza, Spain
- Laboratorio de Microscopías avanzadas (LMA), Universidad de Zaragoza, E-50018 Zaragoza, Spain
- Departamento de Química Física, Facultad de Ciencias, Universidad de Zaragoza, E-50009 Zaragoza, Spain
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Utke I, Swiderek P, Höflich K, Madajska K, Jurczyk J, Martinović P, Szymańska I. Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies. Coord Chem Rev 2022. [DOI: 10.1016/j.ccr.2021.213851] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/11/2022]
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Hinum-Wagner J, Kuhness D, Kothleitner G, Winkler R, Plank H. FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality. NANOMATERIALS 2021; 11:nano11061527. [PMID: 34207654 PMCID: PMC8229455 DOI: 10.3390/nano11061527] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/12/2021] [Revised: 06/01/2021] [Accepted: 06/03/2021] [Indexed: 11/16/2022]
Abstract
High-fidelity 3D printing of nanoscale objects is an increasing relevant but challenging task. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) has demonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space and a very high design flexibility. A limitation, however, is the low fabrication speed, which often restricts 3D-FEBID for the fabrication of single objects. In this study, we approach that challenge by reducing the substrate temperatures with a homemade Peltier stage and investigate the effects on Pt based 3D deposits in a temperature range of 5–30 °C. The findings reveal a volume growth rate boost up to a factor of 5.6, while the shape fidelity in 3D space is maintained. From a materials point of view, the internal nanogranular composition is practically unaffected down to 10 °C, followed by a slight grain size increase for even lower temperatures. The study is complemented by a comprehensive discussion about the growth mechanism for a more general picture. The combined findings demonstrate that FEBID on low substrate temperatures is not only much faster, but practically free of drawbacks during high fidelity 3D nanofabrication.
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Affiliation(s)
- Jakob Hinum-Wagner
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
| | - David Kuhness
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
| | - Gerald Kothleitner
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria;
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | - Robert Winkler
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
- Correspondence: (R.W.); (H.P.)
| | - Harald Plank
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria;
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
- Correspondence: (R.W.); (H.P.)
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Belianinov A, Burch MJ, Ievlev A, Kim S, Stanford MG, Mahady K, Lewis BB, Fowlkes JD, Rack PD, Ovchinnikova OS. Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition. MICROMACHINES 2020; 11:E527. [PMID: 32455865 PMCID: PMC7281202 DOI: 10.3390/mi11050527] [Citation(s) in RCA: 13] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/16/2020] [Revised: 05/19/2020] [Accepted: 05/20/2020] [Indexed: 12/11/2022]
Abstract
The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic precursor gas to fabricate nanoscale structures in 3D with high-precision and smaller critical dimensions than focused electron beam induced deposition (FEBID), traditional liquid metal source FIBID, or other additive manufacturing technology. In this work, we report the effect of beam current, dwell time, and pixel pitch on the resultant segment and angle growth for nanoscale 3D mesh objects. We note subtle beam heating effects, which impact the segment angle and the feature size. Additionally, we investigate the competition of material deposition and sputtering during the 3D FIBID process, with helium ion microscopy experiments and Monte Carlo simulations. Our results show complex 3D mesh structures measuring ~300 nm in the largest dimension, with individual features as small as 16 nm at full width half maximum (FWHM). These assemblies can be completed in minutes, with the underlying fabrication technology compatible with existing lithographic techniques, suggesting a higher-throughput pathway to integrating FIBID with established nanofabrication techniques.
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Affiliation(s)
- Alex Belianinov
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
| | - Matthew J. Burch
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
| | - Anton Ievlev
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
| | - Songkil Kim
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
- School of Mechanical Engineering, Pusan National University, Busan 46241, Korea
| | - Michael G. Stanford
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA; (M.G.S.); (K.M.); (B.B.L.)
| | - Kyle Mahady
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA; (M.G.S.); (K.M.); (B.B.L.)
| | - Brett B. Lewis
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA; (M.G.S.); (K.M.); (B.B.L.)
| | - Jason D. Fowlkes
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA; (M.G.S.); (K.M.); (B.B.L.)
| | - Philip D. Rack
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA; (M.G.S.); (K.M.); (B.B.L.)
| | - Olga S. Ovchinnikova
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
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Skoric L, Sanz-Hernández D, Meng F, Donnelly C, Merino-Aceituno S, Fernández-Pacheco A. Layer-by-Layer Growth of Complex-Shaped Three-Dimensional Nanostructures with Focused Electron Beams. NANO LETTERS 2020; 20:184-191. [PMID: 31869235 DOI: 10.1021/acs.nanolett.9b03565] [Citation(s) in RCA: 34] [Impact Index Per Article: 8.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
Abstract
The fabrication of three-dimensional (3D) nanostructures is of great interest to many areas of nanotechnology currently challenged by fundamental limitations of conventional lithography. One of the most promising direct-write methods for 3D nanofabrication is focused electron beam-induced deposition (FEBID), owing to its high spatial resolution and versatility. Here we extend FEBID to the growth of complex-shaped 3D nanostructures by combining the layer-by-layer approach of conventional macroscopic 3D printers and the proximity effect correction of electron beam lithography. This framework is based on the continuum FEBID model and is capable of adjusting for a wide range of effects present during deposition, including beam-induced heating, defocusing, and gas flux anisotropies. We demonstrate the capabilities of our platform by fabricating free-standing nanowires, surfaces with varying curvatures and topologies, and general 3D objects, directly from standard stereolithography (STL) files and using different precursors. Real 3D nanoprinting as demonstrated here opens up exciting avenues for the study and exploitation of 3D nanoscale phenomena.
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Affiliation(s)
- Luka Skoric
- Cavendish Laboratory , University of Cambridge , JJ Thomson Avenue , CB3 0HE , Cambridge , United Kingdom
| | - Dédalo Sanz-Hernández
- Cavendish Laboratory , University of Cambridge , JJ Thomson Avenue , CB3 0HE , Cambridge , United Kingdom
| | - Fanfan Meng
- Cavendish Laboratory , University of Cambridge , JJ Thomson Avenue , CB3 0HE , Cambridge , United Kingdom
| | - Claire Donnelly
- Cavendish Laboratory , University of Cambridge , JJ Thomson Avenue , CB3 0HE , Cambridge , United Kingdom
| | - Sara Merino-Aceituno
- Faculty of Mathematics , University of Vienna , Oskar-Morgenstern-Platz 1 , 1090 , Vienna , Austria
| | - Amalio Fernández-Pacheco
- Cavendish Laboratory , University of Cambridge , JJ Thomson Avenue , CB3 0HE , Cambridge , United Kingdom
- SUPA, School of Physics and Astronomy , University of Glasgow , Kelvin Building, G12 8QQ , Glasgow , Scotland, United Kingdom
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7
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Plank H, Winkler R, Schwalb CH, Hütner J, Fowlkes JD, Rack PD, Utke I, Huth M. Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review. MICROMACHINES 2019; 11:E48. [PMID: 31906005 PMCID: PMC7019982 DOI: 10.3390/mi11010048] [Citation(s) in RCA: 47] [Impact Index Per Article: 9.4] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/29/2019] [Revised: 12/20/2019] [Accepted: 12/20/2019] [Indexed: 11/17/2022]
Abstract
Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication / modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.
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Affiliation(s)
- Harald Plank
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria;
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
| | - Robert Winkler
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria;
| | | | - Johanna Hütner
- GETec Microscopy GmbH, 1220 Vienna, Austria; (C.H.S.); (J.H.)
| | - Jason D. Fowlkes
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (J.D.F.); (P.D.R.)
- Materials Science and Engineering, The University of Tennessee, Knoxville, Knoxville, TN 37996, USA
| | - Philip D. Rack
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (J.D.F.); (P.D.R.)
- Materials Science and Engineering, The University of Tennessee, Knoxville, Knoxville, TN 37996, USA
| | - Ivo Utke
- Mechanics of Materials and Nanostructures Laboratory, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland;
| | - Michael Huth
- Physics Institute, Goethe University Frankfurt, 60323 Frankfurt am Main, Germany;
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8
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Pulsed Laser-Assisted Helium Ion Nanomachining of Monolayer Graphene-Direct-Write Kirigami Patterns. NANOMATERIALS 2019; 9:nano9101394. [PMID: 31574915 PMCID: PMC6835536 DOI: 10.3390/nano9101394] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/12/2019] [Revised: 09/24/2019] [Accepted: 09/27/2019] [Indexed: 12/22/2022]
Abstract
A helium gas field ion source has been demonstrated to be capable of realizing higher milling resolution relative to liquid gallium ion sources. One drawback, however, is that the helium ion mass is prohibitively low for reasonable sputtering rates of bulk materials, requiring a dosage that may lead to significant subsurface damage. Manipulation of suspended graphene is, therefore, a logical application for He+ milling. We demonstrate that competitive ion beam-induced deposition from residual carbonaceous contamination can be thermally mitigated via a pulsed laser-assisted He+ milling. By optimizing pulsed laser power density, frequency, and pulse width, we reduce the carbonaceous byproducts and mill graphene gaps down to sub 10 nm in highly complex kiragami patterns.
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9
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Wu Y, Liu C, Moore TM, Magel GA, Garfinkel DA, Camden JP, Stanford MG, Duscher G, Rack PD. Exploring Photothermal Pathways via in Situ Laser Heating in the Transmission Electron Microscope: Recrystallization, Grain Growth, Phase Separation, and Dewetting in Ag0.5Ni0.5 Thin Films. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2018; 24:647-656. [PMID: 30588914 DOI: 10.1017/s1431927618015465] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
A new optical delivery system has been developed for the (scanning) transmission electron microscope. Here we describe the in situ and "rapid ex situ" photothermal heating modality of the system, which delivers >200 mW of optical power from a fiber-coupled laser diode to a 3.7 μm radius spot on the sample. Selected thermal pathways can be accessed via judicious choices of the laser power, pulse width, number of pulses, and radial position. The long optical working distance mitigates any charging artifacts and tremendous thermal stability is observed in both pulsed and continuous wave conditions, notably, no drift correction is applied in any experiment. To demonstrate the optical delivery system's capability, we explore the recrystallization, grain growth, phase separation, and solid state dewetting of a Ag0.5Ni0.5 film. Finally, we demonstrate that the structural and chemical aspects of the resulting dewetted films was assessed.
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Affiliation(s)
- Yueying Wu
- 1Department of Chemistry and Biochemistry,University of Notre Dame,Notre Dame,IN46556,USA
| | - Chenze Liu
- 2Department of Materials Science and Engineering,University of Tennessee,Knoxville,TN 37996,USA
| | | | | | - David A Garfinkel
- 2Department of Materials Science and Engineering,University of Tennessee,Knoxville,TN 37996,USA
| | - Jon P Camden
- 1Department of Chemistry and Biochemistry,University of Notre Dame,Notre Dame,IN46556,USA
| | - Michael G Stanford
- 2Department of Materials Science and Engineering,University of Tennessee,Knoxville,TN 37996,USA
| | - Gerd Duscher
- 2Department of Materials Science and Engineering,University of Tennessee,Knoxville,TN 37996,USA
| | - Philip D Rack
- 2Department of Materials Science and Engineering,University of Tennessee,Knoxville,TN 37996,USA
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10
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Swiderek P, Marbach H, Hagen CW. Chemistry for electron-induced nanofabrication. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:1317-1320. [PMID: 29977666 PMCID: PMC6009412 DOI: 10.3762/bjnano.9.124] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/12/2018] [Accepted: 03/16/2018] [Indexed: 06/08/2023]
Affiliation(s)
- Petra Swiderek
- University of Bremen, Faculty 2 (Chemistry/Biology), Institute of Applied and Physical Chemistry, Leobener Straße 5, 28334 Bremen, Germany
| | - Hubertus Marbach
- Lehrstuhl für Physikalische Chemie II and Interdisciplinary Center for Molecular Materials (ICMM), Friedrich-Alexander-Universität Erlangen-Nürnberg, Egerlandstr. 3, 91058 Erlangen, Germany
| | - Cornelis W Hagen
- Department of Imaging Physics, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands
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12
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Belić D, Shawrav MM, Bertagnolli E, Wanzenboeck HD. Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2017; 8:2530-2543. [PMID: 29259868 PMCID: PMC5727840 DOI: 10.3762/bjnano.8.253] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/30/2017] [Accepted: 11/08/2017] [Indexed: 06/07/2023]
Abstract
This work presents a highly effective approach for the chemical purification of directly written 2D and 3D gold nanostructures suitable for plasmonics, biomolecule immobilisation, and nanoelectronics. Gold nano- and microstructures can be fabricated by one-step direct-write lithography process using focused electron beam induced deposition (FEBID). Typically, as-deposited gold nanostructures suffer from a low Au content and unacceptably high carbon contamination. We show that the undesirable carbon contamination can be diminished using a two-step process - a combination of optimized deposition followed by appropriate postdeposition cleaning. Starting from the common metal-organic precursor Me2-Au-tfac, it is demonstrated that the Au content in pristine FEBID nanostructures can be increased from 30 atom % to as much as 72 atom %, depending on the sustained electron beam dose. As a second step, oxygen-plasma treatment is established to further enhance the Au content in the structures, while preserving their morphology to a high degree. This two-step process represents a simple, feasible and high-throughput method for direct writing of purer gold nanostructures that can enable their future use for demanding applications.
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Affiliation(s)
- Domagoj Belić
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
- University of Liverpool, Department of Chemistry, Crown Street, Liverpool L69 7ZD, United Kingdom
| | - Mostafa M Shawrav
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
- Institute of Sensors & Actuator System, TU Wien, Gusshausstrasse 27–29, 1040 Vienna, Austria
| | - Emmerich Bertagnolli
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
| | - Heinz D Wanzenboeck
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
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13
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Spencer JA, Barclay M, Gallagher MJ, Winkler R, Unlu I, Wu YC, Plank H, McElwee-White L, Fairbrother DH. Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2017; 8:2410-2424. [PMID: 29234576 PMCID: PMC5704761 DOI: 10.3762/bjnano.8.240] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/29/2017] [Accepted: 10/18/2017] [Indexed: 05/31/2023]
Abstract
The ability of electrons and atomic hydrogen (AH) to remove residual chlorine from PtCl2 deposits created from cis-Pt(CO)2Cl2 by focused electron beam induced deposition (FEBID) is evaluated. Auger electron spectroscopy (AES) and energy-dispersive X-ray spectroscopy (EDS) measurements as well as thermodynamics calculations support the idea that electrons can remove chlorine from PtCl2 structures via an electron-stimulated desorption (ESD) process. It was found that the effectiveness of electrons to purify deposits greater than a few nanometers in height is compromised by the limited escape depth of the chloride ions generated in the purification step. In contrast, chlorine atoms can be efficiently and completely removed from PtCl2 deposits using AH, regardless of the thickness of the deposit. Although AH was found to be extremely effective at chemically purifying PtCl2 deposits, its viability as a FEBID purification strategy is compromised by the mobility of transient Pt-H species formed during the purification process. Scanning electron microscopy data show that this results in the formation of porous structures and can even cause the deposit to lose structural integrity. However, this phenomenon suggests that the use of AH may be a useful strategy to create high surface area Pt catalysts and may reverse the effects of sintering. In marked contrast to the effect observed with AH, densification of the structure was observed during the postdeposition purification of PtC x deposits created from MeCpPtMe3 using atomic oxygen (AO), although the limited penetration depth of AO restricts its effectiveness as a purification strategy to relatively small nanostructures.
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Affiliation(s)
- Julie A Spencer
- Department of Chemistry, Johns Hopkins University, Baltimore, MD, 21218, USA
| | - Michael Barclay
- Department of Chemistry, Johns Hopkins University, Baltimore, MD, 21218, USA
| | - Miranda J Gallagher
- Department of Chemistry, Johns Hopkins University, Baltimore, MD, 21218, USA
| | - Robert Winkler
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | - Ilyas Unlu
- Department of Chemistry, Johns Hopkins University, Baltimore, MD, 21218, USA
| | - Yung-Chien Wu
- Department of Chemistry, University of Florida, Gainesville, FL, 32611-7200, USA
| | - Harald Plank
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
| | - Lisa McElwee-White
- Department of Chemistry, University of Florida, Gainesville, FL, 32611-7200, USA
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14
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Lewis BB, Mound BA, Srijanto B, Fowlkes JD, Pharr GM, Rack PD. Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition. NANOSCALE 2017; 9:16349-16356. [PMID: 29052676 DOI: 10.1039/c7nr05274j] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/06/2023]
Abstract
Nanomechanical measurements of platinum-carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging. Compression tests were used to estimate the modulus of the platinum-carbon deposits to be in the range of 8.6-10.5 GPa. Cantilever arm bend tests resulted in a modulus estimation of 15.6 GPa. Atomic layer deposition was used to conformally coat FEBID structures with a thin film of Al2O3, which strengthened the structures and increased the measured modulus. Cycled load-displacement testing at various load rates of nano-truss structures was also performed, demonstrating a viscoelastic response in the FEBID material. Finally, load-displacement tests of a variety of 3-dimensional nanoarchitectures with and without Al2O3 coatings were measured.
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Affiliation(s)
- Brett B Lewis
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA
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15
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Mansilla C, Zondag Y, Mulders JJL, Trompenaars PHF. Comparison of Pd electron beam induced deposition using two precursors and an oxygen purification strategy. NANOTECHNOLOGY 2017; 28:375302. [PMID: 28617672 DOI: 10.1088/1361-6528/aa79e8] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Focused electron beam induced deposition (FEBID) allows the creation of nanoscale structures through dissociation of an organo-metallic precursor by electrons at the beam impact point. The deposition of Pd can be interesting for its catalytic behavior and ability to contact carbon based materials. Two precursors were investigated-Pd(hfac)2 and (Cp)Pd(allyl)-and two deposition methods: with and without an in situ oxygen purification process. The deposition parameters can be tuned for the Pd(hfac)2 precursor to provide a deposition with 23 ± 2 at.% of Pd and a main component of C at 51 ± 3 at.% and minor components of O and F. An in situ purification process using O2 was much faster than expected and improved the Pd content to up to >65 at.% while reducing the C to ∼20 at.%, and avoiding the oxidation of Pd. The resistivity was ∼100 μOhm · cm and compares favorably with a bulk value of 10 μOhm · cm. The (Cp)Pd(allyl) precursor is interesting because it does not release fluorine during the deposition and hence it does not etch a possible substrate. Its FEBID deposition had a composition of 26 ± 5 at.% of Pd with 74 ± 5 at.% of C. The O2 purification process can improve the Pd content up to ∼60 at.% while reducing C to <20 at.%, but also increasing the O content to 18 at%, which was released afterwards. The best resistivity was measured at ∼1000 μOhm · cm, although better values can be anticipated for longer post treatment times.
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