Samaddar S, van Zanten D, Fay A, Sacépé B, Courtois H, Winkelmann CB. Niobium-based superconducting nano-device fabrication using all-metal suspended masks.
Nanotechnology 2013;
24:375304. [PMID:
23974037 DOI:
10.1088/0957-4484/24/37/375304]
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Abstract
We report a novel method for the fabrication of superconducting nano-devices based on niobium. The well-known difficulties of lithographic patterning of high-quality niobium are overcome by replacing the usual organic resist mask by a metallic one. The quality of the fabrication procedure is demonstrated by the realization and characterization of long and narrow superconducting lines and niobium-gold-niobium proximity SQUIDs.
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