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Cho MY, Kim IS, Kim MJ, Hyun DE, Koo SM, Sohn H, Kim NY, Kim S, Ko S, Oh JM. NaCl Ionization-Based Moisture Sensor Prepared by Aerosol Deposition for Monitoring Respiratory Patterns. Sensors (Basel) 2022; 22:5178. [PMID: 35890859 PMCID: PMC9317478 DOI: 10.3390/s22145178] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/28/2022] [Revised: 06/27/2022] [Accepted: 07/05/2022] [Indexed: 06/15/2023]
Abstract
A highly polarizable moisture sensor with multimodal sensing capabilities has great advantages for healthcare applications such as human respiration monitoring. We introduce an ionically polarizable moisture sensor based on NaCl/BaTiO3 composite films fabricated using a facile aerosol deposition (AD) process. The proposed sensing model operates based on an enormous NaCl ionization effect in addition to natural moisture polarization, whereas all previous sensors are based only on the latter. We obtained an optimal sensing performance in a 0.5 µm-thick layer containing NaCl-37.5 wt% by manipulating the sensing layer thickness and weight fraction of NaCl. The NaCl/BaTiO3 sensing layer exhibits outstanding sensitivity over a wide humidity range and a fast response/recovery time of 2/2 s; these results were obtained by performing the one-step AD process at room temperature without using any auxiliary methods. Further, we present a human respiration monitoring system using a sensing device that provides favorable and stable electrical signals under diverse respiratory scenarios.
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Affiliation(s)
- Myung-Yeon Cho
- Department of Electronic Materials Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea; (M.-Y.C.); (M.-J.K.); (D.-E.H.); (S.-M.K.)
| | - Ik-Soo Kim
- Department of Materials Science and Engineering, Pohang University of Science and Technology, 77 Cheongam-ro, Pohang 37673, Korea;
| | - Min-Ji Kim
- Department of Electronic Materials Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea; (M.-Y.C.); (M.-J.K.); (D.-E.H.); (S.-M.K.)
| | - Da-Eun Hyun
- Department of Electronic Materials Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea; (M.-Y.C.); (M.-J.K.); (D.-E.H.); (S.-M.K.)
| | - Sang-Mo Koo
- Department of Electronic Materials Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea; (M.-Y.C.); (M.-J.K.); (D.-E.H.); (S.-M.K.)
| | - Hiesang Sohn
- Department of Chemical Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea;
| | - Nam-Young Kim
- RFIC Center, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea;
| | - Sunghoon Kim
- Department of Applied Chemistry, Dong-Eui University, Busan 47227, Korea;
| | - Seunghoon Ko
- Department of Electronic Materials Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea; (M.-Y.C.); (M.-J.K.); (D.-E.H.); (S.-M.K.)
| | - Jong-Min Oh
- Department of Electronic Materials Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea; (M.-Y.C.); (M.-J.K.); (D.-E.H.); (S.-M.K.)
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