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Cheng Q, Rajauria S, Schreck E, Smith R, Wang N, Reiner J, Dai Q, Bogy D. Protocol for nanoscale thermal mapping of electronic devices using atomic force microscopy with phase change material. STAR Protoc 2024; 5:103039. [PMID: 38669138 PMCID: PMC11068603 DOI: 10.1016/j.xpro.2024.103039] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/23/2024] [Revised: 03/24/2024] [Accepted: 04/11/2024] [Indexed: 04/28/2024] Open
Abstract
In this protocol, we present a facile nanoscale thermal mapping technique for electronic devices by use of atomic force microscopy and a phase change material Ge2Sb2Te5. We describe steps for Ge2Sb2Te5 thin film coating, Ge2Sb2Te5 temperature calibration, thermal mapping by varying heater power, and thermal mapping by varying heating time. The protocol can be applied for resolving surface temperatures of various operational microelectronic devices with a nanoscale precision. For complete details on the use and execution of this protocol, please refer to Cheng et al.1.
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Affiliation(s)
- Qilong Cheng
- Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA 94720, USA; Western Digital Corporation, Recording Sub System Staging and Research, San Jose, CA 95135, USA.
| | - Sukumar Rajauria
- Western Digital Corporation, Recording Sub System Staging and Research, San Jose, CA 95135, USA.
| | - Erhard Schreck
- Western Digital Corporation, Recording Sub System Staging and Research, San Jose, CA 95135, USA
| | - Robert Smith
- Western Digital Corporation, Recording Sub System Staging and Research, San Jose, CA 95135, USA
| | - Na Wang
- Western Digital Corporation, Recording Sub System Staging and Research, San Jose, CA 95135, USA
| | - Jim Reiner
- Western Digital Corporation, Recording Sub System Staging and Research, San Jose, CA 95135, USA
| | - Qing Dai
- Western Digital Corporation, Recording Sub System Staging and Research, San Jose, CA 95135, USA
| | - David Bogy
- Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA 94720, USA
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