Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues

Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the kilohertz range. State-of-the-art designs incorporate uniquely designed flexure mechanisms driven by compact and stiff piezoelectric actuators. This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning. Future challenges and research topics are also discussed.

Control Issues in High-speed AFM for Biological Applications: Collagen Imaging Example

This article considers the precision positioning problem associated with high-speed operation of the Atomic Force Microscope (AFM), and presents an inversion-based control approach to achieve precision positioning. Although AFMs have high (nanoscale) spatial resolution, a problem with current AFM systems is that they have low temporal resolution, i.e., AFM imaging is slow. In particular, current AFM imaging cannot be used to provide three-dimensional, time-lapse images of fast processes when imaging relatively-large, soft samples. For instance, current AFM imaging of living cells takes 1-2 minutes (per image frame) - such imaging speeds are too slow to study rapid biological processes that occur in seconds, e.g., to investigate the rapid movement of cells or the fast dehydration and denaturation of collagen. This inability, to rapidly image fast biological processes, motivates our current research to increase the operating speed of the AFM. We apply an inversion-based feedback/feedforward control approach to overcome positioning problems that limit the operating speed of current AFM systems. The efficacy of the method, to achieve high-speed AFM operation, is experimentally evaluated by applying it to image collagen samples.