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Yoneyama A, Ishiji K, Sakaki A, Kobayashi Y, Inaba M, Fukuda K, Konishi K, Shima A, Takamatsu D. Three-dimensional micro-X-ray topography using focused sheet-shaped X-ray beam. Sci Rep 2023; 13:12381. [PMID: 37524763 PMCID: PMC10390543 DOI: 10.1038/s41598-023-39347-4] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/27/2023] [Accepted: 07/24/2023] [Indexed: 08/02/2023] Open
Abstract
X-ray topography is a powerful method for analyzing crystal defects and strain in crystalline materials non-destructively. However, conventional X-ray topography uses simple X-ray diffraction images, which means depth information on defects and dislocations cannot be obtained. We have therefor developed a novel three-dimensional micro-X-ray topography technique (3D μ-XRT) that combines Bragg-case section topography with focused sheet-shaped X-rays. The depth resolution of the 3D μ-XRT depends mainly on the focused X-ray beam size and enables non-destructive observation of internal defects and dislocations with an accuracy on the order of 1 μm. The demonstrative observation of SiC power device chips showed that stacking faults, threading screw, threading edge, and basal plane dislocations were clearly visualized three-dimensionally with a depth accuracy of 1.3 μm. 3D μ-XRT is a promising new approach for highly sensitive and non-destructive analysis of material crystallinity in a three-dimensional manner.
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Affiliation(s)
- Akio Yoneyama
- Research and Development Group, Hitachi Ltd., 1-280 Higashi-Koigakubo, Kokubunji, 185-8601, Japan.
- SAGA Light Source, 8-7 Yayoigaoka, Tosu, 841-0005, Japan.
| | - Kotaro Ishiji
- SAGA Light Source, 8-7 Yayoigaoka, Tosu, 841-0005, Japan
| | - Atsushi Sakaki
- Phosphor R&D Center, Nichia Corporation, 1-19 Tatsumi, Anan, 774-0001, Japan
| | - Yutaka Kobayashi
- Chip Development Department, Nichia Corporation, 491 Oka, Kaminaka, Anan, 774-8601, Japan
| | - Masayuki Inaba
- Nissan ARC, Ltd. 1 Natsushima-Cho, Yokosuka, 237-0061, Japan
| | - Kazunori Fukuda
- Physical Analysis Center, Kobelco Research Institute, Inc., 1-5-5 Takatsukadai, Nishi-Ku, Kobe, 651-2271, Japan
| | - Kumiko Konishi
- Research and Development Group, Hitachi Ltd., 1-280 Higashi-Koigakubo, Kokubunji, 185-8601, Japan
| | - Akio Shima
- Research and Development Group, Hitachi Ltd., 1-280 Higashi-Koigakubo, Kokubunji, 185-8601, Japan
| | - Daiko Takamatsu
- Research and Development Group, Hitachi Ltd., 2520 Akanuma, Hatoyama, 350-0395, Japan
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Yoneyama A, Takeya S, Lwin TT, Takamatsu D, Baba R, Konishi K, Fujita R, Kobayashi K, Shima A, Kawamoto M, Setoyama H, Ishiji K, Seno Y. Advanced X-ray imaging at beamline 07 of the SAGA Light Source. J Synchrotron Radiat 2021; 28:1966-1977. [PMID: 34738952 PMCID: PMC8570222 DOI: 10.1107/s1600577521009553] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/31/2021] [Accepted: 09/15/2021] [Indexed: 06/13/2023]
Abstract
The SAGA Light Source provides X-ray imaging resources based on high-intensity synchrotron radiation (SR) emitted from the superconducting wiggler at beamline 07 (BL07). By combining quasi-monochromatic SR obtained by the newly installed water-cooled metal filter and monochromatic SR selected by a Ge double-crystal monochromator (DCM) with high-resolution lens-coupled X-ray imagers, fast and low-dose micro-computed tomography (CT), fast phase-contrast CT using grating-based X-ray interferometry, and 2D micro-X-ray absorption fine structure analysis can be performed. In addition, by combining monochromatic SR obtained by a Si DCM with large-area fiber-coupled X-ray imagers, high-sensitivity phase-contrast CT using crystal-based X-ray interferometry can be performed. Low-temperature CT can be performed using the newly installed cryogenic system, and time-resolved analysis of the crystallinity of semiconductor devices in operation can be performed using a time-resolved topography system. The details of each instrument and imaging method, together with exemplary measurements, are presented.
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Affiliation(s)
- Akio Yoneyama
- Beamline Group, SAGA Light Source, 8-7 Yayoigaoka, Tosu, Saga 841-0005, Japan
- Allied Health Sciences, Kitasato University, 1-15-1 Kitasato, Minamiku, Sagamihara, Kanagawa 252-0373, Japan
- Research and Development Group, Hitachi Ltd, 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
| | - Satoshi Takeya
- National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (AIST), Central 5, 1-1-1 Higashi, Tukuba, Ibaraki 305-8565, Japan
| | - Thet Thet Lwin
- Allied Health Sciences, Kitasato University, 1-15-1 Kitasato, Minamiku, Sagamihara, Kanagawa 252-0373, Japan
| | - Daiko Takamatsu
- Research and Development Group, Hitachi Ltd, 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
| | - Rika Baba
- Research and Development Group, Hitachi Ltd, 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
| | - Kumiko Konishi
- Research and Development Group, Hitachi Ltd, 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
| | - Ryusei Fujita
- Research and Development Group, Hitachi Ltd, 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
| | - Keisuke Kobayashi
- Research and Development Group, Hitachi Ltd, 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
| | - Akio Shima
- Research and Development Group, Hitachi Ltd, 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
| | - Masahide Kawamoto
- Beamline Group, SAGA Light Source, 8-7 Yayoigaoka, Tosu, Saga 841-0005, Japan
| | - Hiroyuki Setoyama
- Beamline Group, SAGA Light Source, 8-7 Yayoigaoka, Tosu, Saga 841-0005, Japan
| | - Kotaro Ishiji
- Beamline Group, SAGA Light Source, 8-7 Yayoigaoka, Tosu, Saga 841-0005, Japan
| | - Yoshiki Seno
- Beamline Group, SAGA Light Source, 8-7 Yayoigaoka, Tosu, Saga 841-0005, Japan
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Kawamoto M, Shimizu N, Baba S, Hirata K, Ishiji K, Sumitani K, Okajima T, Motoshima H, Watanabe K, Kumasaka T, Yamamoto M. Studies for S-SAD method using various wavelength at SPring-8 and SAGA-LS. Acta Crystallogr A 2008. [DOI: 10.1107/s0108767308093501] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022] Open
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