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De Carlo I, Baudino L, Klapetek P, Serrapede M, Michieletti F, De Leo N, Pirri F, Boarino L, Lamberti A, Milano G. Electrical and Thermal Conductivities of Single Cu xO Nanowires. Nanomaterials (Basel) 2023; 13:2822. [PMID: 37947669 PMCID: PMC10648451 DOI: 10.3390/nano13212822] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/03/2023] [Revised: 10/18/2023] [Accepted: 10/20/2023] [Indexed: 11/12/2023]
Abstract
Copper oxide nanowires (NWs) are promising elements for the realization of a wide range of devices for low-power electronics, gas sensors, and energy storage applications, due to their high aspect ratio, low environmental impact, and cost-effective manufacturing. Here, we report on the electrical and thermal properties of copper oxide NWs synthetized through thermal growth directly on copper foil. Structural characterization revealed that the growth process resulted in the formation of vertically aligned NWs on the Cu growth substrate, while the investigation of chemical composition revealed that the NWs were composed of CuO rather than Cu2O. The electrical characterization of single-NW-based devices, in which single NWs were contacted by Cu electrodes, revealed that the NWs were characterized by a conductivity of 7.6 × 10-2 S∙cm-1. The effect of the metal-insulator interface at the NW-electrode contact was analyzed by comparing characterizations in two-terminal and four-terminal configurations. The effective thermal conductivity of single CuO NWs placed on a substrate was measured using Scanning Thermal Microscopy (SThM), providing a value of 2.6 W∙m-1∙K-1, and using a simple Finite Difference model, an estimate for the thermal conductivity of the nanowire itself was obtained as 3.1 W∙m-1∙K-1. By shedding new light on the electrical and thermal properties of single CuO NWs, these results can be exploited for the rational design of a wide range of optoelectronic devices based on NWs.
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Affiliation(s)
- Ivan De Carlo
- Advanced Materials Metrology and Life Sciences Division, Istituto Nazionale di Ricerca Metrologica (INRiM), 10135 Turin, Italy; (I.D.C.); (F.M.); (N.D.L.); (L.B.)
- Department of Electronics and Telecommunications, Politecnico di Torino, 10129 Turin, Italy
| | - Luisa Baudino
- Department of Applied Science and Technology, Politecnico di Torino, 10129 Turin, Italy; (L.B.); (M.S.); (A.L.)
| | - Petr Klapetek
- Czech Metrology Institute, Okružní 31, 638 00 Brno, Czech Republic;
| | - Mara Serrapede
- Department of Applied Science and Technology, Politecnico di Torino, 10129 Turin, Italy; (L.B.); (M.S.); (A.L.)
| | - Fabio Michieletti
- Advanced Materials Metrology and Life Sciences Division, Istituto Nazionale di Ricerca Metrologica (INRiM), 10135 Turin, Italy; (I.D.C.); (F.M.); (N.D.L.); (L.B.)
- Department of Applied Science and Technology, Politecnico di Torino, 10129 Turin, Italy; (L.B.); (M.S.); (A.L.)
| | - Natascia De Leo
- Advanced Materials Metrology and Life Sciences Division, Istituto Nazionale di Ricerca Metrologica (INRiM), 10135 Turin, Italy; (I.D.C.); (F.M.); (N.D.L.); (L.B.)
| | - Fabrizio Pirri
- Department of Applied Science and Technology, Politecnico di Torino, 10129 Turin, Italy; (L.B.); (M.S.); (A.L.)
- Center for Sustainable Future Technologies @Polito, Istituto Italiano di Tecnologia (IIT), 10144 Turin, Italy
| | - Luca Boarino
- Advanced Materials Metrology and Life Sciences Division, Istituto Nazionale di Ricerca Metrologica (INRiM), 10135 Turin, Italy; (I.D.C.); (F.M.); (N.D.L.); (L.B.)
| | - Andrea Lamberti
- Department of Applied Science and Technology, Politecnico di Torino, 10129 Turin, Italy; (L.B.); (M.S.); (A.L.)
- Center for Sustainable Future Technologies @Polito, Istituto Italiano di Tecnologia (IIT), 10144 Turin, Italy
| | - Gianluca Milano
- Advanced Materials Metrology and Life Sciences Division, Istituto Nazionale di Ricerca Metrologica (INRiM), 10135 Turin, Italy; (I.D.C.); (F.M.); (N.D.L.); (L.B.)
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2
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Valtr M, Klapetek P, Martinek J, Novotný O, Jelínek Z, Hortvík V, Nečas D. Scanning Probe Microscopy controller with advanced sampling support. HardwareX 2023; 15:e00451. [PMID: 37497345 PMCID: PMC10366577 DOI: 10.1016/j.ohx.2023.e00451] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Indexed: 07/28/2023]
Abstract
A low-cost Digital Signal Processor (DSP) unit for advanced Scanning Probe Microscopy measurements is presented. It is based on Red Pitaya board and custom built electronic boards with additional high bit depth AD and DA converters. By providing all the necessary information (position and time) with each data point collected it can be used for any scan path, using either existing libraries for scan path generation or creating adaptive scan paths using Lua scripting interface. The DSP is also capable of performing statistical calculations, that can be used for decision making during scan or for the scan path optimisation on the DSP level.
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Affiliation(s)
- Miroslav Valtr
- Czech Metrology Institute, Okružní 31, 638 00 Brno, Czech Republic
- CEITEC, Brno University of Technology, Purkyňova 123, 612 00 Brno, Czech Republic
| | - Petr Klapetek
- Czech Metrology Institute, Okružní 31, 638 00 Brno, Czech Republic
- CEITEC, Brno University of Technology, Purkyňova 123, 612 00 Brno, Czech Republic
| | - Jan Martinek
- Czech Metrology Institute, Okružní 31, 638 00 Brno, Czech Republic
| | | | | | - Václav Hortvík
- Czech Metrology Institute, Okružní 31, 638 00 Brno, Czech Republic
| | - David Nečas
- CEITEC, Brno University of Technology, Purkyňova 123, 612 00 Brno, Czech Republic
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3
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Puttock R, Barton C, Saugar E, Klapetek P, Fernández-Scarioni A, Freitas P, Schumacher HW, Ostler T, Chubykalo-Fesenko O, Kazakova O. Local thermoelectric response from a single Néel domain wall. Sci Adv 2022; 8:eadc9798. [PMID: 36417535 PMCID: PMC9683730 DOI: 10.1126/sciadv.adc9798] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/13/2022] [Accepted: 10/24/2022] [Indexed: 06/16/2023]
Abstract
Spatially resolved thermoelectric detection of magnetic systems provides a unique platform for the investigation of spintronic and spin caloritronic effects. Hitherto, these investigations have been resolution-limited, confining analysis of the thermoelectric response to regions where the magnetization is uniform or collinear at length scales comparable to the domain size. Here, we investigate the thermoelectric response from a single trapped domain wall using a heated scanning probe. Following this approach, we unambiguously resolve the domain wall due to its local thermoelectric response. Combining analytical and thermal micromagnetic modeling, we conclude that the measured thermoelectric signature is unique to that of a domain wall with a Néel-like character. Our approach is highly sensitive to the plane of domain wall rotation, which permits the distinct identification of Bloch or Néel walls at the nanoscale and could pave the way for the identification and characterization of a range of noncollinear spin textures through their thermoelectric signatures.
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Affiliation(s)
- Robert Puttock
- National Physical Laboratory, Hampton Road, Teddington TW11 0LW, UK
| | - Craig Barton
- National Physical Laboratory, Hampton Road, Teddington TW11 0LW, UK
| | - Elias Saugar
- Instituto de Ciencia de Materiales de Madrid, ICMM–CSIC, Campus de Cantoblanco, C. Sor Juana Inés de la Cruz, 3, Madrid 28049, Spain
| | - Petr Klapetek
- Czech Metrology Institute, Okruzni 772/31, Brno 10135, Czech Republic
- Central European Institute of Technology (CEITEC), Brno University of Technology, Purkynova 123, Brno 612 00, Czech Republic
| | | | - Paulo Freitas
- Instituto de Engenharia de Sistemas e Computadores (INESC-MN), R. Alves Redol 9, 1000-029 Lisboa, Portugal
| | - Hans W. Schumacher
- Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany
| | - Thomas Ostler
- Sheffield Hallam University, Howard Street, Sheffield S1 1WB, UK
- Department of Physics and Mathematics, University of Hull, Cottingham Road, Hull HU6 7RX, UK
| | - Oksana Chubykalo-Fesenko
- Instituto de Ciencia de Materiales de Madrid, ICMM–CSIC, Campus de Cantoblanco, C. Sor Juana Inés de la Cruz, 3, Madrid 28049, Spain
| | - Olga Kazakova
- National Physical Laboratory, Hampton Road, Teddington TW11 0LW, UK
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Klapetek P. Nanometrology. Nanomaterials (Basel) 2022; 12:3755. [PMID: 36364536 PMCID: PMC9657443 DOI: 10.3390/nano12213755] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/05/2022] [Revised: 10/16/2022] [Accepted: 10/20/2022] [Indexed: 06/16/2023]
Abstract
Apart from being the subject of this Special Issue, what is nanometrology [...].
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Affiliation(s)
- Petr Klapetek
- Czech Metrology Institute, Okružní 31, 638 00 Brno, Czech Republic
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5
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Ohlídal I, Vohánka J, Buršíková V, Dvořák J, Klapetek P, Jeet Kaur N. Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies. Opt Express 2022; 30:39068-39085. [PMID: 36258456 DOI: 10.1364/oe.470692] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/21/2022] [Accepted: 09/26/2022] [Indexed: 06/16/2023]
Abstract
Results concerning the optical characterization of two inhomogeneous polymer-like thin films deposited by the plasma enhanced chemical vapor deposition onto silicon single crystal substrates are presented. One of these films is deposited onto a smooth silicon surface while the latter film is deposited on a randomly rough silicon surface with a wide interval of spatial frequencies. A combination of variable-angle spectroscopic ellipsometry and spectroscopic reflectometry applied at near-normal incidence are utilized for characterizing both the films. An inhomogeneity of the films is described by the method based on multiple-beam interference of light and method replacing inhomogeneous thin films by multilayer systems. Homogeneous transition layers between the films and substrates are considered. The Campi-Coriasso dispersion model is used to express spectral dependencies of the optical constants of the polymer-like films and transition layers. A combination of the scalar diffraction theory and Rayleigh-Rice theory is used to include boundary roughness into formulae for the optical quantities of the rough polymer-like film. Within the optical characterization, the spectral dependencies of the optical constants at the upper and lower boundaries of both the polymer-like films are determined together with their thickness values and profiles of the optical constants. Roughness parameters are determined for the rough film. The values of the roughness parameters are confirmed by atomic force microscopy. Moreover, the optical constants and thicknesses of both the transition layers are determined. A discussion of the achieved results for both the polymer-like films and transition layers is performed.
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Marchi D, Cara E, Lupi FF, Hönicke P, Kayser Y, Beckhof B, Castellino M, Klapetek P, Zoccante A, Laus M, Cossi M. Structure and stability of 7-mercapto-4-methylcoumarin self-assembled monolayers on gold: an experimental and computational analysis. Phys Chem Chem Phys 2022; 24:22083-22090. [PMID: 36073159 DOI: 10.1039/d2cp03103e] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Self-assembled monolayers (SAM) of 7-mercapto-4-methylcoumarin (MMC) on a flat gold surface were studied by molecular dynamics (MD) simulations, reference-free grazing incidence X-ray fluorescence (GIXRF) and X-ray photoelectron spectroscopy (XPS), to determine the maximum monolayer density and to investigate the nature of the molecule/surface interface. In particular, the protonation state of the sulfur atom upon adsorption was analyzed, since some recent literature presented evidence for physisorbed thiols (preserving the S-H bond), unlike the common picture of chemisorbed thiyls (losing the hydrogen). MD with a specifically tailored force field was used to simulate either thiol or thiyl monolayers with increasing number of molecules, to determine the maximum dynamically stable densities. This result was refined by computing the monolayer chemical potential as a function of the density with the bennet acceptance ratio method, based again on MD simulations. The monolayer density was also measured with GIXRF, which provided the absolute quantification of the number of sulfur atoms in a dense self-assembled monolayer (SAM) on flat gold surfaces. The sulfur core level binding energies in the same monolayers were measured by XPS, fitting the recorded spectra with the binding energies proposed in the literature for free or adsorbed thiols and thiyls, to get insight on the nature of the molecular species present in the layer. The comparison of theoretical and experimental SAM densities, and the XPS analysis strongly support the picture of a monolayer formed by chemisorbed, dissociated thiyls.
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Affiliation(s)
- Davide Marchi
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Università del Piemonte Orientale, via T. Michel 11, I-15121, Alessandria, Italy.
| | - Eleonora Cara
- Istituto Nazionale di Ricerca Metrologica (INRiM), Strada delle Cacce, 91, 10135, Torino, Italy
| | - Federico Ferrarese Lupi
- Istituto Nazionale di Ricerca Metrologica (INRiM), Strada delle Cacce, 91, 10135, Torino, Italy
| | - Philipp Hönicke
- Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587, Berlin, Germany
| | - Yves Kayser
- Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587, Berlin, Germany
| | - Burkhard Beckhof
- Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587, Berlin, Germany
| | - Micaela Castellino
- Department of Applied Science and Technology, Politecnico di Torino, C.so Duca degli Abruzzi 24, 10129, Turin, Italy
| | - Petr Klapetek
- Department of Nanometrology, Czech Metrology Institute, Okružní 31, 638 00, Brno, Czech Republic
| | - Alberto Zoccante
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Università del Piemonte Orientale, via T. Michel 11, I-15121, Alessandria, Italy.
| | - Michele Laus
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Università del Piemonte Orientale, via T. Michel 11, I-15121, Alessandria, Italy.
| | - Maurizio Cossi
- Dipartimento di Scienze e Innovazione Tecnologica (DISIT), Università del Piemonte Orientale, via T. Michel 11, I-15121, Alessandria, Italy.
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7
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Vohánka J, Ohlídal I, Buršíková V, Klapetek P, Kaur NJ. Optical characterization of inhomogeneous thin films with randomly rough boundaries. Opt Express 2022; 30:2033-2047. [PMID: 35209352 DOI: 10.1364/oe.447146] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/02/2021] [Accepted: 12/21/2021] [Indexed: 06/14/2023]
Abstract
An inhomogeneous polymer-like thin film was deposited by the plasma enhanced chemical vapor deposition onto silicon single-crystal substrate whose surface was roughened by anodic oxidation. The inhomogeneous thin film with randomly rough boundaries was created as a result. This sample was studied using the variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The structural model including the inhomogeneous thin film, transition layer, and identically rough boundaries was used to process the experimental data. The scalar diffraction theory was used to describe the influence of roughness. The influence of the scattered light registered by the spectrophotometer due to its finite acceptance angle was also taken into account. The thicknesses and optical constants of the inhomogeneous thin film and the transition layer were determined in the optical characterization together with the roughness parameters. The determined rms value of the heights of roughness was found to be in good agreement with values obtained using AFM. The results of the optical characterization of the studied inhomogeneous thin film with rough boundaries were also verified by comparing them with the results of the optical characterization of the inhomogeneous thin film prepared using the same deposition conditions but onto the substrate with a smooth surface.
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8
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Corte-León H, Neu V, Manzin A, Barton C, Tang Y, Gerken M, Klapetek P, Schumacher HW, Kazakova O. Comparison and Validation of Different Magnetic Force Microscopy Calibration Schemes. Small 2020; 16:e1906144. [PMID: 32037728 DOI: 10.1002/smll.201906144] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/25/2019] [Revised: 01/01/2020] [Indexed: 06/10/2023]
Abstract
The future of consumer electronics depends on the capability to reliably fabricate nanostructures with given physical properties. Therefore, techniques to characterize materials and devices with nanoscale resolution are crucial. Among these is magnetic force microscopy (MFM), which transduces the magnetic force between the sample and a magnetic oscillating probe into a phase shift, enabling the locally resolved study of magnetic field patterns down to 10 nm. Here, the progress done toward making quantitative MFM a common tool in nanocharacterization laboratories is shown. The reliability and ease of use of the calibration method based on a magnetic reference sample, with a calculable stray field, and a deconvolution algorithm is demonstrated. This is achieved by comparing two calibration approaches combined with numerical modeling as a quantitative link: measuring the probe's effect on the voltage signal when scanning above a nanosized graphene Hall sensor, and recording the MFM phase shift signal when the probe scans across magnetic fields produced by metallic microcoils. Furthermore, in the case of the deconvolution algorithm, it is shown how it can be applied using the open-source software package Gwyddion. The estimated magnetic dipole approximation for the most common probes currently in the market is also reported.
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Affiliation(s)
- Héctor Corte-León
- National Physical Laboratory, Hampton Road, Teddington, TW11 0LW, UK
| | - Volker Neu
- Leibniz IFW Dresden, Helmholtzstr. 20, 01069, Dresden, Germany
| | | | - Craig Barton
- National Physical Laboratory, Hampton Road, Teddington, TW11 0LW, UK
| | - Yuanjun Tang
- Leibniz IFW Dresden, Helmholtzstr. 20, 01069, Dresden, Germany
| | - Manuela Gerken
- Physikalisch-Technische Bundesanstalt, Braunschweig, D-38116, Germany
| | - Petr Klapetek
- Department of Nanometrology, Czech Metrology Institute Okružní 31, 638 00, Brno, Czech Republic
| | | | - Olga Kazakova
- National Physical Laboratory, Hampton Road, Teddington, TW11 0LW, UK
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9
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Klapetek P, Charvátová Campbell A, Buršíková V. Fast mechanical model for probe-sample elastic deformation estimation in scanning probe microscopy. Ultramicroscopy 2019; 201:18-27. [PMID: 30913478 DOI: 10.1016/j.ultramic.2019.03.010] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/30/2018] [Revised: 01/02/2019] [Accepted: 03/18/2019] [Indexed: 10/27/2022]
Abstract
We present a numerical approach for estimation of the probe-sample elastic deformation for higher contact forces and/or smaller probe apex radii in Scanning Probe Microscopy (SPM) measurements. It is based on a mass-spring model implemented on a graphics card in order to perform very high numbers of individual force-distance curves calculations in reasonable time, forming virtual profiles or virtual SPM images. The model is suitable for predicting the mechanical response of the probe and sample in SPM mechanical properties mapping regimes and for estimating the uncertainty sources related to probe-sample elastic deformation in dimensional nanometrology. As the model is based on using regular orthogonal mesh formed from the scanned surface topography, it can be also used as preprocessor for various pixel by pixel physical quantities calculations using Finite Difference Method, namely for the energy transfer between probe and sample, where a realistic probe-sample contact formation needs to be taken into account. Model performance is demonstrated via comparison to analytical solutions for simple contact mechanics tasks and its possibilities for SPM data interpretation are illustrated on measurements on simple reference structures, such as step edges or quantum dots.
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Affiliation(s)
- Petr Klapetek
- Czech Metrology Institute, Okružní 31, Brno 638 00, Czechia; CEITEC BUT, Purkyňova 123, Brno 612 00, Czechia.
| | | | - Vilma Buršíková
- Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlářská 267/2, Brno 611 37, Czechia
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10
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Nečas D, Klapetek P, Neu V, Havlíček M, Puttock R, Kazakova O, Hu X, Zajíčková L. Determination of tip transfer function for quantitative MFM using frequency domain filtering and least squares method. Sci Rep 2019; 9:3880. [PMID: 30846777 PMCID: PMC6405750 DOI: 10.1038/s41598-019-40477-x] [Citation(s) in RCA: 13] [Impact Index Per Article: 2.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/29/2018] [Accepted: 02/11/2019] [Indexed: 11/09/2022] Open
Abstract
Magnetic force microscopy has unsurpassed capabilities in analysis of nanoscale and microscale magnetic samples and devices. Similar to other Scanning Probe Microscopy techniques, quantitative analysis remains a challenge. Despite large theoretical and practical progress in this area, present methods are seldom used due to their complexity and lack of systematic understanding of related uncertainties and recommended best practice. Use of the Tip Transfer Function (TTF) is a key concept in making Magnetic Force Microscopy measurements quantitative. We present a numerical study of several aspects of TTF reconstruction using multilayer samples with perpendicular magnetisation. We address the choice of numerical approach, impact of non-periodicity and windowing, suitable conventions for data normalisation and units, criteria for choice of regularisation parameter and experimental effects observed in real measurements. We present a simple regularisation parameter selection method based on TTF width and verify this approach via numerical experiments. Examples of TTF estimation are shown on both 2D and 3D experimental datasets. We give recommendations on best practices for robust TTF estimation, including the choice of windowing function, measurement strategy and dealing with experimental error sources. A method for synthetic MFM data generation, suitable for large scale numerical experiments is also presented.
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Affiliation(s)
- David Nečas
- Plasma Technologies, CEITEC, Masaryk University, Brno, 62500, Czech Republic.
| | - Petr Klapetek
- CEITEC, Brno University of Technology, Brno, 63800, Czech Republic.,Czech Metrology Institute, Brno, 63800, Czech Republic
| | | | - Marek Havlíček
- CEITEC, Brno University of Technology, Brno, 63800, Czech Republic.,Czech Metrology Institute, Brno, 63800, Czech Republic
| | - Robert Puttock
- National Physical Laboratory, Teddington, TW11 0LW, United Kingdom.,Physics Department, Royal Holloway University of London, Egham, TW20 0EX, United Kingdom
| | - Olga Kazakova
- National Physical Laboratory, Teddington, TW11 0LW, United Kingdom
| | - Xiukun Hu
- Physikalisch Technische Bundesanstalt, Braunschweig, 38116, Germany
| | - Lenka Zajíčková
- Plasma Technologies, CEITEC, Masaryk University, Brno, 62500, Czech Republic.,Department of Physical Electronics, Faculty of Science, Masaryk University, Brno, 61137, Czech Republic
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11
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Cechalova B, Branecky M, Klapetek P, Cech V. Optical Properties of Oxidized Plasma-Polymerized Organosilicones and Their Correlation with Mechanical and Chemical Parameters. Materials (Basel) 2019; 12:ma12030539. [PMID: 30759719 PMCID: PMC6384779 DOI: 10.3390/ma12030539] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/16/2019] [Revised: 01/31/2019] [Accepted: 02/06/2019] [Indexed: 11/22/2022]
Abstract
Pure tetravinylsilane and its oxygen mixture were used to deposit oxidized plasma polymer films at various effective power (0.1–10 W) and various oxygen fractions (0–0.71) using RF pulsed plasma. The optical properties (refractive index, extinction coefficient, band gap) of the deposited films were investigated by spectroscopic ellipsometry (230–830 nm) using an optical model and Tauc‒Lorentz parametrization. Analyses of chemical and mechanical properties of films allowed for the interpretation of changes in optical properties with deposition conditions. The refractive index was revealed to increase with enhanced effective power due to the increased crosslinking of the plasma polymer network but decreased when increasing the oxygen fraction due to the decrease of polymer crosslinking as the number of carbon bonds in the plasma polymer network was eliminated. A very strong positive correlation was found between the Young’s modulus and the refractive index for oxidized plasma polymer films. The optical properties of films correlated with their chemical properties for the specific deposition conditions used in this study. The band gap (1.9–2.9 eV) was assumed to be widened due to the increased concentration of vinyl groups in oxidized plasma polymer films.
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Affiliation(s)
- Bozena Cechalova
- CEITEC, Brno University of Technology, Purkynova 123, 612 00 Brno, Czech Republic.
| | - Martin Branecky
- Institute of Materials Chemistry, Faculty of Chemistry, Brno University of Technology, Purkynova 118, 612 00 Brno, Czech Republic.
| | - Petr Klapetek
- Czech Metrology Institute, Okruzni 31, 638 00 Brno, Czech Republic.
| | - Vladimir Cech
- Institute of Materials Chemistry, Faculty of Chemistry, Brno University of Technology, Purkynova 118, 612 00 Brno, Czech Republic.
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12
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Sikora A, Rodak A, Unold O, Klapetek P. The development of the spatially correlated adjustment wavelet filter for atomic force microscopy data. Ultramicroscopy 2016; 171:146-152. [PMID: 27686275 DOI: 10.1016/j.ultramic.2016.09.012] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/18/2014] [Revised: 08/19/2016] [Accepted: 09/15/2016] [Indexed: 10/21/2022]
Abstract
In this paper a novel approach for the practical utilization of the 2D wavelet filter in terms of the artifacts removal from atomic force microscopy measurements results is presented. The utilization of additional data such as summary photodiode signal map is implemented in terms of the identification of the areas requiring the data processing, filtering settings optimization and the verification of the process performance. Such an approach allows to perform the filtering parameters adjustment by average user, while the straightforward method requires an expertise in this field. The procedure was developed as the function of the Gwyddion software. The examples of filtering the phase imaging and Electrostatic Force Microscopy measurement result are presented. As the wavelet filtering feature may remove a local artifacts, its superior efficiency over similar approach with 2D Fast Fourier Transformate based filter (2D FFT) can be noticed.
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Affiliation(s)
- Andrzej Sikora
- Electrotechnical Institute, Division of Electrotechnology and Materials Science, M. Skłodowskiej-Curie 55/61, 50-369 Wrocław, Poland.
| | - Aleksander Rodak
- Faculty of Electronics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
| | - Olgierd Unold
- Institute of Computer Engineering, Control and Robotics, Faculty of Electronics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland
| | - Petr Klapetek
- Czech Metrology Institute, Okružní 31, 638 00 Brno, Czech Republic
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Martinek J, Klapetek P, Campbell AC. Methods for topography artifacts compensation in scanning thermal microscopy. Ultramicroscopy 2015; 155:55-61. [PMID: 25942752 DOI: 10.1016/j.ultramic.2015.04.011] [Citation(s) in RCA: 27] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/10/2014] [Revised: 04/08/2015] [Accepted: 04/15/2015] [Indexed: 11/19/2022]
Abstract
Thermal conductivity contrast images in scanning thermal microscopy (SThM) are often distorted by artifacts related to local sample topography. This is pronounced on samples with sharp topographic features, on rough samples and while using larger probes, for example, Wollaston wire-based probes. The topography artifacts can be so high that they can even obscure local thermal conductivity variations influencing the measured signal. Three methods for numerically estimating and compensating for topographic artifacts are compared in this paper: a simple approach based on local sample geometry at the probe apex vicinity, a neural network analysis and 3D finite element modeling of the probe-sample interaction. A local topography and an estimated probe shape are used as source data for the calculation in all these techniques; the result is a map of false conductivity contrast signals generated only by sample topography. This map can be then used to remove the topography artifacts from measured data or to estimate the uncertainty of conductivity measurements using SThM. The accuracy of the results and the computational demands of the presented methods are discussed.
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Affiliation(s)
- Jan Martinek
- Czech Metrology Institute, Okružní 31, 638 00 Brno, Czech Republic; Department of Physics, Faculty of Civil Engineering, BUT, Žižkova 17, Brno 602 00, Czech Republic
| | - Petr Klapetek
- Czech Metrology Institute, Okružní 31, 638 00 Brno, Czech Republic; CEITEC, BUT, Technická 3058/10, 616 00 Brno, Czech Republic
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14
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Abstract
We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm(2) regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In order to successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described. The first utilizes the low uncertainty interferometric sensors of the XYZ scanner while the second implements a genetic algorithm with multiple parameter fitting during the data merging step of the image stitching process. The basic uncertainty components related to these high-speed measurements are also discussed. Both techniques are shown to successfully enable high-resolution, large area images to be generated at least an order of magnitude faster than with a conventional atomic force microscope.
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Affiliation(s)
- P Klapetek
- Czech Metrology Institute, Okružní 31, 638 00 Brno, Czech Republic. CEITEC BUT, Technická 10, 616 00 Brno, Czech Republic
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15
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Lazar J, Klapetek P, Valtr M, Hrabina J, Buchta Z, Cip O, Cizek M, Oulehla J, Sery M. Short-range six-axis interferometer controlled positioning for scanning probe microscopy. Sensors (Basel) 2014; 14:877-86. [PMID: 24451463 PMCID: PMC3926591 DOI: 10.3390/s140100877] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/08/2013] [Revised: 12/12/2013] [Accepted: 12/13/2013] [Indexed: 11/19/2022]
Abstract
We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. This small range system is based on a commercial nanopositioning stage driven by piezoelectric transducers with the range (200 × 200 × 10) μm. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system and serve as sensors for othogonality alignment.
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Affiliation(s)
- Josef Lazar
- Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic.
| | - Petr Klapetek
- Czech Metrology Institute, Brno, Okružní 31, Brno 638 00, Czech Republic.
| | - Miroslav Valtr
- Czech Metrology Institute, Brno, Okružní 31, Brno 638 00, Czech Republic.
| | - Jan Hrabina
- Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic.
| | - Zdenek Buchta
- Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic.
| | - Onrej Cip
- Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic.
| | - Martin Cizek
- Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic.
| | - Jindrich Oulehla
- Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic.
| | - Mojmir Sery
- Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic.
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16
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Nečas D, Klapetek P. One-dimensional autocorrelation and power spectrum density functions of irregular regions. Ultramicroscopy 2013; 124:13-9. [DOI: 10.1016/j.ultramic.2012.08.002] [Citation(s) in RCA: 32] [Impact Index Per Article: 2.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/16/2012] [Revised: 07/25/2012] [Accepted: 08/08/2012] [Indexed: 11/26/2022]
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17
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Klapetek P, Duchoň V, Sobota J. Voice coil-based scanning probe microscopy. Nanoscale Res Lett 2012; 7:332. [PMID: 22720756 PMCID: PMC3442967 DOI: 10.1186/1556-276x-7-332] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/11/2012] [Accepted: 06/21/2012] [Indexed: 06/01/2023]
Abstract
We present a novel system for large-area scanning probe microscopy (SPM) measurements based on minimum counter-force linear guidance mechanisms, voice coils, interferometers and fuzzy logic-based feedback loop electronics. It is shown that voice coil-based actuation combined with interferometry can be a good alternative to piezoceramic positioning systems, providing fast and still sufficient, precise displacements which range from nanometers to millimeters. Using fuzzy logic feedback control, it can be actuated even with only a few low-cost components, like a cheap single-chip microcontroller. As the final positioning resolution can be made independent on the electronics output resolution, the system can reach high positioning resolution even on very large scan sizes. This is a key prerequisite for devel.
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Affiliation(s)
- Petr Klapetek
- Czech Metrology Institute, , 638 00, Okružní 31, Brno, Czech Republic
| | | | - Václav Duchoň
- Czech Metrology Institute, , 638 00, Okružní 31, Brno, Czech Republic
| | - Jaroslav Sobota
- Institute of Scientific Instruments, Academy of Sciences of the Czech Republic v.v.i., 612 64, Královopolská 147/62, Brno, Czech Republic
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18
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Klapetek P, Valtr M, Buršík P. Non-equidistant scanning approach for millimetre-sized SPM measurements. Nanoscale Res Lett 2012; 7:213. [PMID: 22587490 PMCID: PMC3352299 DOI: 10.1186/1556-276x-7-213] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/30/2011] [Accepted: 04/11/2012] [Indexed: 05/31/2023]
Abstract
Long-range scanning probe microscope (SPM) measurements are usually extremely time consuming as many data need to be collected, and the microscope probe speed is limited. In this article, we present an adaptive measurement method for a large-area SPM. In contrast to the typically used line by line scanning with constant pixel spacing, we use an algorithm based on several levels of local refinement in order to minimize the amount of information that would be useless in the data processing phase. The data obtained from the measurement are in general formed by xyz data sets that are triangulated back with a desired local resolution. This enables storing more relevant information from a single measurement as the data are interpolated and regularized in the data processing phase instead of during the measurement. In this article, we also discuss the influence of thermal drifts on the measured data and compare the presented algorithm to the standard matrix-based measuring approach.
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Affiliation(s)
- Petr Klapetek
- Czech Metrology Institute, Okružní 31, Brno, 638 00, Czech Republic
| | - Miroslav Valtr
- Czech Metrology Institute, Okružní 31, Brno, 638 00, Czech Republic
| | - Petr Buršík
- Faculty of Informatics, Masaryk University, Botanická 68a, Brno, 602 00, Czech Republic
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19
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Campbell AC, Klapetek P, Valtr M, Buršíková V. Development of reference materials for the investigation of local mechanical properties at the nanoscale. SURF INTERFACE ANAL 2012. [DOI: 10.1002/sia.4850] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
Affiliation(s)
| | - Petr Klapetek
- Department of Nanometrology; Czech Metrology Institute; Okružní 31 638 00 Brno Czech Republic
| | - Miroslav Valtr
- Department of Nanometrology; Czech Metrology Institute; Okružní 31 638 00 Brno Czech Republic
| | - Vilma Buršíková
- Department of Physical Electronics, Faculty of Science; Masaryk University; Kotlářská 2 611 37 Brno Czech Republic
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20
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Klapetek P, Valtr M, Nečas D, Salyk O, Dzik P. Atomic force microscopy analysis of nanoparticles in non-ideal conditions. Nanoscale Res Lett 2011; 6:514. [PMID: 21878120 PMCID: PMC3212053 DOI: 10.1186/1556-276x-6-514] [Citation(s) in RCA: 64] [Impact Index Per Article: 4.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/15/2010] [Accepted: 08/30/2011] [Indexed: 05/18/2023]
Abstract
Nanoparticles are often measured using atomic force microscopy or other scanning probe microscopy methods. For isolated nanoparticles on flat substrates, this is a relatively easy task. However, in real situations, we often need to analyze nanoparticles on rough substrates or nanoparticles that are not isolated. In this article, we present a simple model for realistic simulations of nanoparticle deposition and we employ this model for modeling nanoparticles on rough substrates. Different modeling conditions (coverage, relaxation after deposition) and convolution with different tip shapes are used to obtain a wide spectrum of virtual AFM nanoparticle images similar to those known from practice. Statistical parameters of nanoparticles are then analyzed using different data processing algorithms in order to show their systematic errors and to estimate uncertainties for atomic force microscopy analysis of nanoparticles under non-ideal conditions. It is shown that the elimination of user influence on the data processing algorithm is a key step for obtaining accurate results while analyzing nanoparticles measured in non-ideal conditions.
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Affiliation(s)
- Petr Klapetek
- Czech Metrology Institute, Okružní 31, 638 00, Brno, Czech Republic
| | - Miroslav Valtr
- Czech Metrology Institute, Okružní 31, 638 00, Brno, Czech Republic
| | - David Nečas
- Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlářská 2, 611 37 Brno, Czech Republic
| | - Ota Salyk
- Faculty of Chemistry, Brno University of Technology, Purkyňova 118, 612 00 Brno, Czech Republic
| | - Petr Dzik
- Faculty of Chemistry, Brno University of Technology, Purkyňova 118, 612 00 Brno, Czech Republic
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21
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Campbellová A, Ondráček M, Pou P, Pérez R, Klapetek P, Jelínek P. 'Sub-atomic' resolution of non-contact atomic force microscope images induced by a heterogeneous tip structure: a density functional theory study. Nanotechnology 2011; 22:295710. [PMID: 21685559 DOI: 10.1088/0957-4484/22/29/295710] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/05/2023]
Abstract
A Si adatom on a Si(111)-(7 × 7) reconstructed surface is a typical atomic feature that can rather easily be imaged by a non-contact atomic force microscope (nc-AFM) and can be thus used to test the atomic resolution of the microscope. Based on our first principles density functional theory (DFT) calculations, we demonstrate that the structure of the termination of the AFM tip plays a decisive role in determining the appearance of the adatom image. We show how the AFM image changes depending on the tip-surface distance and the composition of the atomic apex at the end of the tip. We also demonstrate that contaminated tips may give rise to image patterns displaying so-called 'sub-atomic' features even in the attractive force regime.
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22
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23
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24
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25
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Klapetek P, Ohlídal I, Buršík J. Applications of scanning thermal microscopy in the analysis of the geometry of patterned structures. SURF INTERFACE ANAL 2006. [DOI: 10.1002/sia.2191] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/05/2022]
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26
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Klapetek P, Ohlídal I, Bílek J. Influence of the atomic force microscope tip on the multifractal analysis of rough surfaces. Ultramicroscopy 2005; 102:51-9. [PMID: 15556700 DOI: 10.1016/j.ultramic.2004.08.005] [Citation(s) in RCA: 19] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/17/2004] [Revised: 08/09/2004] [Accepted: 08/20/2004] [Indexed: 11/21/2022]
Abstract
In this paper, the influence of atomic force microscope tip on the multifractal analysis of rough surfaces is discussed. This analysis is based on two methods, i.e. on the correlation function method and the wavelet transform modulus maxima method. The principles of both methods are briefly described. Both methods are applied to simulated rough surfaces (simulation is performed by the spectral synthesis method). It is shown that the finite dimensions of the microscope tip misrepresent the values of the quantities expressing the multifractal analysis of rough surfaces within both the methods. Thus, it was concretely shown that the influence of the finite dimensions of the microscope tip changed mono-fractal properties of simulated rough surface to multifractal ones. Further, it is shown that a surface reconstruction method developed for removing the negative influence of the microscope tip does not improve the results obtained in a substantial way. The theoretical procedures concerning both the methods, i.e. the correlation function method and the wavelet transform modulus maxima method, are illustrated for the multifractal analysis of randomly rough gallium arsenide surfaces prepared by means of the thermal oxidation of smooth gallium arsenide surfaces and subsequent dissolution of the oxide films.
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Affiliation(s)
- Petr Klapetek
- Czech Metrology Institute, Okruzní 31, 638 00 Brno, Czech Republic.
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27
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Franta D, Ohlídal I, Klapetek P, Ohlídal M. Characterization of thin oxide films on GaAs substrates by optical methods and atomic force microscopy. SURF INTERFACE ANAL 2004. [DOI: 10.1002/sia.1876] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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28
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Klapetek P, Ohl�dal I, Navr�til K. Atomic Force Microscopy Analysis of Statistical Roughness of GaAs Surfaces Originated by Thermal Oxidation. Mikrochim Acta 2004. [DOI: 10.1007/s00604-004-0188-4] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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29
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Abstract
In this paper, the theoretical analysis of the influence of finite linear dimensions of an atomic force microscope tip on profiles of the upper boundaries of columnar thin films and their statistical quantities is performed. This analysis is based on a numerical evaluation of the main statistical quantities, i.e. the standard deviations of the heights and slopes, one-dimensional distributions of the probability density of heights and slopes and power spectral density function, corresponding to a simulated columnar structure of the thin films. It is shown that the strongest misrepresentation of the measured profiles of the upper boundaries of the columnar films originates in the cases when the linear dimensions of the columns are smaller or comparable with the linear dimensions of the tip. Further, it is shown that using a surface reconstruction procedure one can correct (improve) the boundary profiles and their statistical quantities partially. The results of this analysis enable us to perform rough estimation of the errors achieved within atomic force microscopy studies of the real columnar thin films. Moreover, these results allow to estimate the corrections of the statistical quantities mentioned above to be obtained using the surface reconstruction.
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Affiliation(s)
- Petr Klapetek
- Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlárská 2, 611 37 Brno, Czech Republic
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30
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Franta D, Ohlídal I, Klapetek P, Pokorný P. Characterization of the boundaries of thin films of TiO2by atomic force microscopy and optical methods. SURF INTERFACE ANAL 2002. [DOI: 10.1002/sia.1405] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
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31
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Klapetek P, Ohlídal I, Franta D, Pokorný P. Analysis of the boundaries of ZrO2and HfO2thin films by atomic force microscopy and the combined optical method. SURF INTERFACE ANAL 2002. [DOI: 10.1002/sia.1419] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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32
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Franta D, Ohlídal I, Klapetek P, Pokorný P, Ohlídal M. Analysis of inhomogeneous thin films of ZrO2by the combined optical method and atomic force microscopy. SURF INTERFACE ANAL 2001. [DOI: 10.1002/sia.1013] [Citation(s) in RCA: 19] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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