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1
Larson DJ, Lawrence D, Lefebvre W, Olson D, Prosa TJ, Reinhard DA, Ulfig RM, Clifton PH, Bunton JH, Lenz D, Olson JD, Renaud L, Martin I, Kelly TF. Toward atom probe tomography of microelectronic devices. ACTA ACUST UNITED AC 2011. [DOI: 10.1088/1742-6596/326/1/012030] [Citation(s) in RCA: 29] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
2
Bennett SE, Clifton PH, Ulfig RM, Kappers MJ, Barnard JS, Humphreys CJ, Oliver RA. Mg dopant distribution in an AlGaN/GaN p-type superlattice assessed using atom probe tomography, TEM and SIMS. ACTA ACUST UNITED AC 2010. [DOI: 10.1088/1742-6596/209/1/012014] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
3
Russell KF, Miller MK, Ulfig RM, Gribb T. Performance of local electrodes in the local electrode atom probe. Ultramicroscopy 2007;107:750-5. [PMID: 17398008 DOI: 10.1016/j.ultramic.2007.02.028] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
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