Genetic Transformation of Plasmid DNA into Escherichia coli Using High Frequency Electromagnetic Energy

We present a novel technique of genetic transformation of bacterial cells mediated by high frequency electromagnetic energy (HF EME). Plasmid DNA, pGLO (5.4 kb), was successfully transformed into Escherichia coli JM109 cells after exposure to 18 GHz irradiation at a power density between 5.6 and 30 kW m-2 for 180 s at temperatures ranging from 30 to 40 °C. Transformed bacteria were identified by the expression of green fluorescent protein (GFP) using confocal scanning microscopy (CLSM) and flow cytometry (FC). Approximately 90.7% of HF EME treated viable E. coli cells exhibited uptake of the pGLO plasmid. The interaction of plasmid DNA with bacteria leading to transformation was confirmed by using cryogenic transmission electron microscopy (cryo-TEM). HF EME-induced plasmid DNA transformation was shown to be unique, highly efficient, and cost-effective. HF EME-induced genetic transformation is performed under physiologically friendly conditions in contrast to existing techniques that generate higher temperatures, leading to altered cellular integrity. This technique allows safe delivery of genetic material into bacterial cells, thus providing excellent prospects for applications in microbiome therapeutics and synthetic biology.

Silicon-Aluminum Phase-Transformation-Induced Superconducting Rings

The development of devices that exhibit both superconducting and semiconducting properties is an important endeavor for emerging quantum technologies. We investigate superconducting nanowires fabricated on a silicon-on-insulator (SOI) platform. Aluminum from deposited contact electrodes is found to interdiffuse with Si along the entire length of the nanowire, over micrometer length scales and at temperatures well below the Al-Si eutectic. The phase-transformed material is conformal with the predefined device patterns. The superconducting properties of a transformed mesoscopic ring formed on a SOI platform are investigated. Low-temperature magnetoresistance oscillations, quantized in units of the fluxoid, h/2e, are observed.

Spontaneous Formation of a Ligand-Based 2D Capping Layer on the Surface of Quasi-2D Perovskite Films

Two-dimensional (2D) Ruddlesden-Popper phase perovskites (RPPs) are attracting growing attention for photovoltaic applications due to their enhanced stability compared to three-dimensional (3D) perovskites. The superior tolerance of 2D RPPs films to moisture and oxygen is mainly attributed to the hydrophobic nature of the introduced long-chain spacer cations (ligands). In this work, it is revealed that a thin capping layer, consisting of self-assembled butylammonium ligands, is spontaneously formed on the top surface of a quasi-2D perovskite film prepared by conventional one-step hot casting. Based on morphological and crystallographic analyses of both the top/bottom surfaces and the interior of quasi-2D perovskite films, the formation process of the 2D capping layer and the assembly of RPPs, comprising both large and small slab thickness (large-n, small-n), is elucidated. The vertical orientation of RPPs that is required for sufficient charge transport for 2D perovskite solar cells (PSCs) is further verified. We propose that the surface capping layer is directly responsible for the long-term stability of 2D PSCs. This work provides detailed insight into the microstructure of quasi-2D RPPs films that should assist the development of strategies for unlocking the full potential of 2D perovskites for high-performance PSCs and other solid-state electronic devices.

Creation of pure non-crystalline diamond nanostructures via room-temperature ion irradiation and subsequent thermal annealing

Carbon exhibits a remarkable range of structural forms, due to the availability of sp³, sp² and sp¹ chemical bonds. Contrarily to other group IV elements such as silicon and germanium, the formation of an amorphous phase based exclusively on sp³ bonds is extremely challenging due to the strongly favored formation of graphitic-like structures at room temperature and pressure. As such, the formation of a fully sp³-bonded carbon phase requires an extremely careful (and largely unexplored) definition of the pressure and temperature across the phase diagram. Here, we report on the possibility of creating full-sp³ amorphous nanostructures within the bulk crystal of diamond with room-temperature ion-beam irradiation, followed by an annealing process that does not involve the application of any external mechanical pressure. As confirmed by numerical simulations, the (previously unreported) radiation-damage-induced formation of an amorphous sp²-free phase in diamond is determined by the buildup of extremely high internal stresses from the surrounding lattice, which (in the case of nanometer-scale regions) fully prevent the graphitization process. Besides the relevance of understanding the formation of exotic carbon phases, the use of focused/collimated ion beams discloses appealing perspectives for the direct fabrication of such nanostructures in complex three-dimensional geometries.

Gallium Plasmonic Nanoantennas Unveiling Multiple Kinetics of Hydrogen Sensing, Storage, and Spillover

Hydrogen is the key element to accomplish a carbon-free based economy. Here, the first evidence of plasmonic gallium (Ga) nanoantennas is provided as nanoreactors supported on sapphire (α-Al₂ O₃ ) acting as direct plasmon-enhanced photocatalyst for hydrogen sensing, storage, and spillover. The role of plasmon-catalyzed electron transfer between hydrogen and plasmonic Ga nanoparticle in the activation of those processes is highlighted, as opposed to conventional refractive index-change-based sensing. This study reveals that, while temperature selectively operates those various processes, longitudinal (LO-LSPR) and transverse (TO-LSPR) localized surface plasmon resonances of supported Ga nanoparticles open selectivity of localized reaction pathways at specific sites corresponding to the electromagnetic hot-spots. Specifically, the TO-LSPR couples light into the surface dissociative adsorption of hydrogen and formation of hydrides, whereas the LO-LSPR activates heterogeneous reactions at the interface with the support, that is, hydrogen spillover into α-Al₂ O₃ and reverse-oxygen spillover from α-Al₂ O_3. This Ga-based plasmon-catalytic platform expands the application of supported plasmon-catalysis to hydrogen technologies, including reversible fast hydrogen sensing in a timescale of a few seconds with a limit of detection as low as 5 ppm and in a broad temperature range from room-temperature up to 600 °C while remaining stable and reusable over an extended period of time.

Catalyst-free synthesis of copper oxide composites as solar radiative filters

Copper oxide composites were successfully synthesized by a catalyst-free method, plasma arc technology. The as-synthesized composites were characterized by x-ray diffraction, scanning electron microscopy, transmission electron microscopy, Raman spectroscopy, and x-ray photoelectron spectroscopy. The analysis revealed a mixture of crystalline copper oxide (CuO), cuprous oxide (Cu₂O) and copper (Cu) phases of the copper oxide composites constitute of irregularly spheroidal particlesµ with nanoparticles aggregate on the surface. Gas pressure during plasma arc process noticeably influences the composition and solar radiative properties of the composite materials. Among the samples studied, the composites synthesized with an arc current of 80 A and a pressure of 300 Torr exhibited the highest near infrared diffuse reflectance, providing a total solar reflectance of 22.96%. The mixed phase composition together with the nanostructures among the composites are considered to contribute to the excellent near infrared reflectance of copper oxide composites. Low reflectance in the visible region combined with high reflectance in the near infrared region make this composite material a good candidate for solar reflective coating which will demonstrate black appearance but keep a cool surface under solar irradiation.

Guided Vortex Motion Control in Superconducting Thin Films by Sawtooth Ion Surface Modification

Design of flux profile and guided motion of magnetic flux quanta (also known as vortices) are central issues for functionality of superconducting devices. Anchoring vortex movement by trapping flux lines through the use of defects and preventing vortex entry by shielding magnetic field have been broadly explored, which can also enable reduction of noise for optimal device operation. Removing vortices entirely via the so-called ratchet effect (employing an asymmetric energy potential) is another alternative. This ratcheting potential is also used in DNA splitting, particle separation, surface atom electromigration, and electrophoresis. Utilizing a superconductor with the ratchet vortex pinning potential induces a dominant motion direction, which can be used to pump flux out from device functional zones. In this work, a varying thickness superconductor with its tailored intrinsic pinning mechanism has been simulated and proven to provide this preferential vortex motion. We demonstrate both theoretically and experimentally that a varying thickness superconducting ratchet is indeed possible. Furthermore, the sawtooth shape of the bridge provides a tunability to the preferred vortex motion direction, dependent on the ramp gradient and intrinsic pinning strength.

High Aspect Ratio Nanostructures Kill Bacteria via Storage and Release of Mechanical Energy

The threat of a global rise in the number of untreatable infections caused by antibiotic-resistant bacteria calls for the design and fabrication of a new generation of bactericidal materials. Here, we report a concept for the design of antibacterial surfaces, whereby cell death results from the ability of the nanofeatures to deflect when in contact with attaching cells. We show, using three-dimensional transmission electron microscopy, that the exceptionally high aspect ratio (100-3000) of vertically aligned carbon nanotubes (VACNTs) imparts extreme flexibility, which enhances the elastic energy storage in CNTs as they bend in contact with bacteria. Our experimental and theoretical analyses demonstrate that, for high aspect ratio structures, the bending energy stored in the CNTs is a substantial factor for the physical rupturing of both Gram-positive and Gram-negative bacteria. The highest bactericidal rates (99.3% for Pseudomonas aeruginosa and 84.9% for Staphylococcus aureus) were obtained by modifying the length of the VACNTs, allowing us to identify the optimal substratum properties to kill different types of bacteria efficiently. This work highlights that the bactericidal activity of high aspect ratio nanofeatures can outperform both natural bactericidal surfaces and other synthetic nanostructured multifunctional surfaces reported in previous studies. The present systems exhibit the highest bactericidal activity of a CNT-based substratum against a Gram-negative bacterium reported to date, suggesting the possibility of achieving close to 100% bacterial inactivation on VACNT-based substrata.

Microstructure and dynamics of vacancy-induced nanofilamentary switching network in donor doped SrTiO3-x memristors

Donor doping of perovskite oxides has emerged as an attractive technique to create high performance and low energy non-volatile analog memories. Here, we examine the origins of improved switching performance and stable multi-state resistive switching in Nb-doped oxygen-deficient amorphous SrTiO₃ (Nb:a-STO _x ) metal-insulator-metal (MIM) devices. We probe the impact of substitutional dopants (i.e., Nb) in modulating the electronic structure and subsequent switching performance. Temperature stability and bias/time dependence of the switching behavior are used to ascertain the role of substitutional dopants and highlight their utility to modulate volatile and non-volatile behavior in a-STO _x devices for adaptive and neuromorphic applications. We utilized a combination of transmission electron microscopy, photoluminescence emission properties, interfacial compositional evaluation, and activation energy measurements to investigate the microstructure of the nanofilamentary network responsible for switching. These results provide important insights into understanding mechanisms that govern the performance of donor-doped perovskite oxide-based memristive devices.

Thermally stable coexistence of liquid and solid phases in gallium nanoparticles

Gallium (Ga), a group III metal, is of fundamental interest due to its polymorphism and unusual phase transition behaviours. New solid phases have been observed when Ga is confined at the nanoscale. Herein, we demonstrate the stable coexistence, from 180 K to 800 K, of the unexpected solid γ-phase core and a liquid shell in substrate-supported Ga nanoparticles. We show that the support plays a fundamental role in determining Ga nanoparticle phases, with the driving forces for the nucleation of the γ-phase being the Laplace pressure in the nanoparticles and the epitaxial relationship of this phase to the substrate. We exploit the change in the amplitude of the evolving surface plasmon resonance of Ga nanoparticle ensembles during synthesis to reveal in real time the solid core formation in the liquid Ga nanoparticle. Finally, we provide a general framework for understanding how nanoscale confinement, interfacial and surface energies, and crystalline relationships to the substrate enable and stabilize the coexistence of unexpected phases.

Synthesis and Compositional Analysis of Permalloy Powder Prepared by Arc-Discharge

We report the synthesis, compositional, structural and magnetic properties of permalloy powders prepared using an arc-discharge method under different atmospheres. Ion beam analysis results showed that powder prepared in air had a higher concentration of oxygen than those prepared under nitrogen or argon atmospheres. X-ray diffraction measurements showed that powders prepared in air contained magnetite (Fe3O4) and other phases, while powders prepared under nitrogen or argon predominately contained permalloy. The permalloy powders contained a broad range of particle sizes, and nanoparticles as small as 10 nm were evident from transmission electron microscopy data. The saturation magnetizations were significantly lower for the powders prepared in air than those prepared under nitrogen or argon. This can be attributed to oxidation, where the saturation magnetization is predominately from Fe3O4 for powders made in air. The coercive fields were also significantly larger for powders prepared in air, which is consistent with the powders containing different phases when compared with the permalloy powders. Our results show that permalloy powders can be made in nitrogen and argon, allowing for the production of low oxygen content permalloy powders for device applications. Our results also suggest that the use of an iron anode could result in Fe3O4 powders.

Demonstrating the capability of the high-performance plasmonic gallium-graphene couple

Metal nanoparticle (NP)-graphene multifunctional platforms are of great interest for exploring strong light-graphene interactions enhanced by plasmons and for improving performance of numerous applications, such as sensing and catalysis. These platforms can also be used to carry out fundamental studies on charge transfer, and the findings can lead to new strategies for doping graphene. There have been a large number of studies on noble metal Au-graphene and Ag-graphene platforms that have shown their potential for a number of applications. These studies have also highlighted some drawbacks that must be overcome to realize high performance. Here we demonstrate the promise of plasmonic gallium (Ga) nanoparticle (NP)-graphene hybrids as a means of modulating the graphene Fermi level, creating tunable localized surface plasmon resonances and, consequently, creating high-performance surface-enhanced Raman scattering (SERS) platforms. Four prominent peculiarities of Ga, differentiating it from the commonly used noble (gold and silver) metals are (1) the ability to create tunable (from the UV to the visible) plasmonic platforms, (2) its chemical stability leading to long-lifetime plasmonic platforms, (3) its ability to n-type dope graphene, and (4) its weak chemical interaction with graphene, which preserves the integrity of the graphene lattice. As a result of these factors, a Ga NP-enhanced graphene Raman intensity effect has been observed. To further elucidate the roles of the electromagnetic enhancement (or plasmonic) mechanism in relation to electron transfer, we compare graphene-on-Ga NP and Ga NP-on-graphene SERS platforms using the cationic dye rhodamine B, a drug model biomolecule, as the analyte.

Direct measurement and modelling of internal strains in ion-implanted diamond

We present a phenomenological model and finite element simulations to describe the depth variation of mass density and strain of ion-implanted single-crystal diamond. Several experiments are employed to validate the approach: firstly, samples implanted with 180 keV B ions at relatively low fluences are characterized using high-resolution x-ray diffraction; secondly, the mass density variation of a sample implanted with 500 keV He ions, well above its amorphization threshold, is characterized with electron energy loss spectroscopy. At high damage densities, the experimental depth profiles of strain and density display a saturation effect with increasing damage and a shift of the damage density peak towards greater depth values with respect to those predicted by TRIM simulations, which are well accounted for in the model presented here. The model is then further validated by comparing transmission electron microscopy-measured and simulated thickness values of a buried amorphous carbon layer formed at different depths by implantation of 500 keV He ions through a variable-thickness mask to simulate the simultaneous implantation of ions at different energies.

Controlled deterministic implantation by nanostencil lithography at the limit of ion-aperture straggling

Solid state electronic devices fabricated in silicon employ many ion implantation steps in their fabrication. In nanoscale devices deterministic implants of dopant atoms with high spatial precision will be needed to overcome problems with statistical variations in device characteristics and to open new functionalities based on controlled quantum states of single atoms. However, to deterministically place a dopant atom with the required precision is a significant technological challenge. Here we address this challenge with a strategy based on stepped nanostencil lithography for the construction of arrays of single implanted atoms. We address the limit on spatial precision imposed by ion straggling in the nanostencil-fabricated with the readily available focused ion beam milling technique followed by Pt deposition. Two nanostencils have been fabricated; a 60 nm wide aperture in a 3 μm thick Si cantilever and a 30 nm wide aperture in a 200 nm thick Si3N4 membrane. The 30 nm wide aperture demonstrates the fabricating process for sub-50 nm apertures while the 60 nm aperture was characterized with 500 keV He(+) ion forward scattering to measure the effect of ion straggling in the collimator and deduce a model for its internal structure using the GEANT4 ion transport code. This model is then applied to simulate collimation of a 14 keV P(+) ion beam in a 200 nm thick Si3N4 membrane nanostencil suitable for the implantation of donors in silicon. We simulate collimating apertures with widths in the range of 10-50 nm because we expect the onset of J-coupling in a device with 30 nm donor spacing. We find that straggling in the nanostencil produces mis-located implanted ions with a probability between 0.001 and 0.08 depending on the internal collimator profile and the alignment with the beam direction. This result is favourable for the rapid prototyping of a proof-of-principle device containing multiple deterministically implanted dopants.

Large, controllable spikes of magnetoresistance in La(2/3)Ca(1/3)MnO3/SrTiO3 superlattices

We have investigated superlattices consisting of up to 30 epitaxial nanomultilayers (3-7 nm thick) of ferromagnetic La(2/3)Ca(1/3)MnO(3) (LCMO) and insulating SrTiO(3) (STO) hybrids. The superlattices demonstrate dramatic shifts of Curie temperature, indicating the possibility of its tunability. The metal-insulator transition (MIT) has been observed around 140 K. Below the MIT temperature, the superlattices have shown sharp drops of resistivity, facilitating the largest and sharpest magnetoresistance peaks (>2000%) ever observed in LCMO films and superlattices at low temperatures. The observed experimental results can be explained in the frame of the phase separation model in manganites with well-organized structures. The results of magnetic and transport measurements of such hybrid structures are discussed, indicating a magnetodielectric effect in STO interlayers. The magnetic and transport properties of the superlattices are shown to be technology-dependent, experiencing dimensional transitions, which enables the creation of structures with prescribed magnetoresistance characteristics for a broad range of applications.

Layer-by-layer assembly of sintered CdSe(x)Te1-x nanocrystal solar cells

Alloying is a versatile tool for engineering the optical and electronic properties of materials. Here, we explore the use of CdTe and CdSe nanocrystals in developing sintered CdSe(x)Te(1-x) alloys as bandgap tunable, light-absorbing layers for solution-processed solar cells. Using a layer-by-layer approach, we incorporate such alloyed materials into single- and graded-composition device architectures. Nanostructured solar cells employing CdSe(x)Te(1-x) layers are found to exhibit a spectral response deeper into the IR region than bulk CdTe devices as a result of optical bowing and achieve power conversion efficiencies as high as 7.1%. The versatility of the layer-by-layer approach is highlighted through the fabrication of compositionally graded solar cells in which the [Se]:[Te] ratio is varied across the device. Each of the individual layers can be clearly resolved through cross-sectional imaging and show limited interdiffusion. Such devices demonstrate the importance of band-alignment in the development of highly efficient, nanostructured solar cells.

Mechanism for the amorphisation of diamond

The breakdown of the diamond lattice is explored by ion implantation and molecular dynamics simulations. We show that lattice breakdown is strain-driven, rather than damage-driven, and that the lattice persists until 16% of the atoms have been removed from their lattice sites. The figure shows the transition between amorphous carbon and diamond, with the interfaces highlighted with dashed lines.

Characterization of nanoscale features in tapered fractal and photonic crystal fibers

The internal structure of nanostructured air-silica fiber probes have been characterized using a combined focused ion beam and scanning electron microscopy technique. The collapse rate of the air-holes is shown to differ substantially between a regular photonic crystal fiber (PCF) and the quasi-periodic Fractal fiber. The integrity of the Fractal fiber structure is maintained down to an outer diameter as small as 120 nm, whereas the air-holes of the regular PCF begin to collapse when the outer diameter is approximately 820 nm. The observed smallest hole diameter of 10 nm is suggested to be due to physical limits imposed by the molecular structure of silica. These results confirm structural inferences made in previous publications.

Superconducting transition in Nb nanowires fabricated using focused ion beam

Making use of focused Ga-ion beam (FIB) fabrication technology, the evolution with device dimension of the low-temperature electrical properties of Nb nanowires has been examined in a regime where crossover from Josephson-like to insulating behaviour is evident. Resistance-temperature data for devices with a physical width of order 100 nm demonstrate suppression of superconductivity, leading to dissipative behaviour that is shown to be consistent with the activation of phase-slip below T(c). This study suggests that by exploiting the Ga-impurity poisoning introduced by the FIB into the periphery of the nanowire, a central superconducting phase-slip nanowire with sub-10 nm dimensions may be engineered within the core of the nanowire.

Extremely high aspect ratio alumina transmission nanomasks: their fabrication and characterization using electron microscopy

Free standing, nanoporous alumina templates were fabricated as transmission masks from aluminium using a two-step anodization process followed by acid etching. The resulting membrane comprises self-ordered, periodic arrays of non-connecting circular channels which can be prepared with pore diameters <100 nm and with minimal occlusion. Aspect ratios greater than 300:1 were measured directly using electron transmission and the channels were shown to be highly aligned (angular) over membrane thicknesses of tens of microns. Also evident is some local order associated with both azimuthal and angular domain structure giving rise to local channel tilt which has not previously been reported. Transmission electron microscopy has been shown to be an important characterization tool for these nanomasks as the channels are transparent to electrons, providing a means of directly measuring their thickness and aspect ratio. Expressions for determining their thickness and aspect ratio are also presented and evaluated in this work. These membranes are well suited for use as nanotemplates in transmission lithography applications including ion implantation and ion or electron beam collimation.

Polarisation and wavelength selective transmission through nanohole structures with multiple grating geometry

Excitation and localization of surface plasmon polariton modes in metal-dielectric structures can be utilized to construct nanophotonic materials and devices with tuneable optical dispersion. We present a selective polariton generator (SPG) device that demonstrates switching of light transmission based on surface plasmon antennae principles. This polarization-sensitive structure selectively generates and transports polaritons of a desired wavelength through subwavelength apertures. Two of these SPGs have been combined around a nanohole into a new, single device that allows polarization and wavelength selective switching of transmission. The multi-state operation is confirmed by experiment results.

Coherent population trapping in diamond N-V centers at zero magnetic field

Coherent population trapping at zero magnetic field was observed for nitrogen-vacancy centers in diamond under optical excitation. This was measured as a reduction in photoluminescence when the detuning between two excitation lasers matched the 2.88 GHz crystal-field splitting of the color center ground states. This behavior is highly sensitive to strain, which modifies the excited states, and was unexpected following recent experiments demonstrating optical readout of single nitrogen-vacancy electron spins based on cycling transitions. These results demonstrate for the first time that three-level Lambda configurations suitable for proposed quantum information applications can be realized simultaneously for all four orientations of nitrogen-vacancy centers at zero magnetic field.

Exposure and characterization of nano-structured hole arrays in tapered photonic crystal fibers using a combined FIB/SEM technique

This paper presents a technique to expose and characterize nano-structured hole arrays in tapered photonic crystal fibers. Hole array structures are examined with taper outer diameters ranging from 12.9 microm to 1.6 microm. A combined focused ion beam milling and scanning electron microscope system was used to expose and characterize the arrayed air-silica structures. Results from this combined technique are presented which resolve hole-to-hole pitch sizes and hole diameters in the order of 120 nm and 60 nm, respectively.

Damage in III-V compounds during focused ion beam milling

The damage layers generated in III-V compounds exposed to energetic gallium ions in a focused ion beam (FIB) instrument have been characterized by transmission electron microscopy (TEM). The damage on the side walls of the milled trenches is in the form of amorphous layers associated with direct amorphization from the gallium beam, rather than from redeposition of milled material. However, the damage on the bottom of the milled trenches is more complex. For InP and InAs the damage layers include the presence of crystalline phases resulting from recrystallization associated heating from the incident beam and gallium implantation. In contrast, such crystalline phases are not present in GaAs. The thicknesses of the damage layers are greater than those calculated from theoretical models of ion implantation. These differences arise because the dynamic nature of FIB milling means that the energetic ion beams pass through already damaged layers. In InP recoil phosphorus atoms also cause significant damage.

The application of FIB milling for specimen preparation from crystalline germanium

The effectiveness of focused ion beam (FIB) for preparation of crystalline germanium specimens has been studied. FIB milling results in strong cellular relief of the germanium surfaces on bulk specimens. This cellular relief, associated with the generation of high densities of point defects during interaction of the specimen with the high-energy gallium beam, can be reduced by using either a lower ion beam currents or a lower beam energy. Even under these milling conditions the cellular relief is, however, still evident on the surface of the TEM specimens as evidenced by so-called 'curtaining' relief. Nevertheless good quality specimens for both conventional and high-resolution imaging may be prepared using FIB milling if low currents are employed for final milling.

FIB-induced damage in silicon

The damage created in silicon transmission electron microscope specimens prepared using a focused ion beam miller is assessed using cross-sections of trenches milled under different beam conditions. Side-wall damage consists of an amorphous layer formed by direct interaction with the energetic gallium ion beam; a small amount of implanted gallium is also detected. By contrast, bottom-wall damage layers are more complex and contain both amorphous films and crystalline regions that are richer in implanted gallium. More complex milling sequences show that redeposition of milled material, enriched in gallium, can occur depending on the geometry of the mill employed. The thickness of the damage layers depends strongly on beam energy, but is independent of beam current. Monte Carlo modelling of the damage formed indicates that recoil silicon atoms contribute significantly to the damaged formed in the specimen.