1
|
Shu Y, Porter BF, Soh EJH, Farmakidis N, Lim S, Lu Y, Warner JH, Bhaskaran H. Nanoscale Bilayer Mechanical Lithography Using Water as Developer. Nano Lett 2021; 21:3827-3834. [PMID: 33886314 PMCID: PMC8289280 DOI: 10.1021/acs.nanolett.1c00251] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/14/2023]
Abstract
Sustainability has become a critical concern in the semiconductor industry as hazardous wastes released during the manufacturing process of semiconductor devices have an adverse impact on human beings and the environment. The use of hazardous solvents in existing fabrication processes also restricts the use of polymer substrates because of their low chemical resistance to such solvents. Here, we demonstrate an environmentally friendly mechanical, bilayer lithography that uses just water for development and lift-off. We show that we are able to create arbitrary patterns achieving resolution down to 310 nm. We then demonstrate the use of this technique to create functional devices by fabricating a MoS2 photodetector on a polyethylene terephthalate (PET) substrate with measured response times down to 42 ms.
Collapse
Affiliation(s)
- Yu Shu
- Department
of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United
Kingdom
| | - Benjamin F. Porter
- Department
of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United
Kingdom
| | - Eugene J. H. Soh
- Department
of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United
Kingdom
| | - Nikolaos Farmakidis
- Department
of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United
Kingdom
| | - Seongdong Lim
- Department
of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United
Kingdom
| | - Yang Lu
- Department
of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United
Kingdom
| | - Jamie H. Warner
- Walker
Department of Mechanical Engineering, The
University of Texas at Austin, 204 East Dean Keeton Street, Austin, Texas 78712, United States
- Materials
Graduate Program, Texas Materials Institute, The University of Texas at Austin, 204 East Dean Keeton Street, Austin, Texas 78712, United States
| | - Harish Bhaskaran
- Department
of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United
Kingdom
| |
Collapse
|