Ma T, Wang J, Du J, Yuan L, Qian Z, Zhang Z, Zhang C. Investigation of
quasi lateral-field-excitation on (yxl)-17° LiNbO3 single crystal.
Ultrasonics 2014;
54:967-970. [PMID:
24485749 DOI:
10.1016/j.ultras.2014.01.010]
[Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/03/2013] [Revised: 01/08/2014] [Accepted: 01/10/2014] [Indexed: 06/03/2023]
Abstract
Quasi lateral-field-excitation (LFE) on LiNbO3 crystal is investigated both theoretically and experimentally. It is found that when the driving electric field direction is parallel to the crystallographic X-axis of the piezoelectric substrate, (yxl)-17° LiNbO3 LFE bulk acoustic wave devices work on quasi-LFE mode. The experimental results agreed with the theoretical prediction well. The results provide the cut of LiNbO3 crystal for quasi-LFE bulk acoustic wave devices, which is important for designing high performance LFE sensors on LiNbO3 substrates.
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