Chen Z, Zhang Q, Fu S, Wang X, Qiu X, Wu H. Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast Performance Prediction.
Micromachines (Basel) 2020;
12:mi12010005. [PMID:
33375079 PMCID:
PMC7838811 DOI:
10.3390/mi12010005]
[Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/26/2020] [Revised: 12/14/2020] [Accepted: 12/19/2020] [Indexed: 12/04/2022]
Abstract
In this paper, a hybrid full-wave analysis of surface acoustic wave (SAW) devices is proposed to achieve accurate and fast simulation. The partial differential equation (PDE) models of the physical system in question and graphics processing unit (GPU)-assisted hierarchical cascading technology (HCT) are used to calculate acoustic-electric characteristics of a SAW filter. The practical solid model of the radio frequency (RF) filter package is constructed in High Frequency Structure Simulator (HFSS) software and the parasitic electromagnetics of the entire package is considered in the design process. The PDE-based models of the two-dimensional finite element method (2D-FEM) are derived in detail and solved by the PDE module embedded in COMSOL Multiphysics. Due to the advantages of PDE-based 2D-FEM, it is universal, efficient and not restricted to handling arbitrary materials and crystal cuts, electrode shapes, and multi-layered substrate. Combining COMSOL Multiphysics with a user-friendly interface, a flexible way of modeling and mesh generation, it can greatly reduce the complicated process of modeling and physical properties definition. Based on a hybrid full-wave analysis, we present an example application of this approach on a TC-SAW ladder filter with 5° YX-cut LiNbO3 substrate. Numerical results and measurements were calculated for comparison, and the accuracy and efficiency of the proposed method were verified.
Collapse