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Fowler JW, O’Neil GC, Alpert BK, Bennett DA, Denison EV, Doriese WB, Hilton GC, Hudson LT, Joe YI, Morgan KM, Schmidt DR, Swetz DS, Szabo CI, Ullom JN. Absolute energies and emission line shapes of the L x-ray transitions of lanthanide metals. Metrologia 2021; 58:10.1088/1681-7575/abd28a. [PMID: 34354301 PMCID: PMC8335601 DOI: 10.1088/1681-7575/abd28a] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
We use an array of transition-edge sensors, cryogenic microcalorimeters with 4 eV energy resolution, to measure L x-ray emission-line profiles of four elements of the lanthanide series: praseodymium, neodymium, terbium, and holmium. The spectrometer also surveys numerous x-ray standards in order to establish an absolute-energy calibration traceable to the international system of units for the energy range 4 keV to 10 keV. The new results include emission line profiles for 97 lines, each expressed as a sum of one or more Voigt functions; improved absolute energy uncertainty on 71 of these lines relative to existing reference data; a median uncertainty on the peak energy of 0.24 eV, four to ten times better than the median of prior work; and six lines that lack any measured values in existing reference tables. The 97 lines comprise nearly all of the most intense L lines from these elements under broad-band x-ray excitation. The work improves on previous measurements made with a similar cryogenic spectrometer by the use of sensors with better linearity in the absorbed energy and a gold x-ray absorbing layer that has a Gaussian energy-response function. It also employs a novel sample holder that enables rapid switching between science targets and calibration targets with excellent gain balancing. Most of the results for peak energy values shown here should be considered as replacements for the currently tabulated standard reference values, while the line shapes given here represent a significant expansion of the scope of available reference data.
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Affiliation(s)
- J W Fowler
- Department of Physics, University of Colorado, Boulder, CO 80309, United States of America
- Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
| | - G C O’Neil
- Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
| | - B K Alpert
- Applied & Computational Mathematics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
| | - D A Bennett
- Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
| | - E V Denison
- Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
| | - W B Doriese
- Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
| | - G C Hilton
- Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
| | - L T Hudson
- Radiation Physics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America
| | - Y-I Joe
- Department of Physics, University of Colorado, Boulder, CO 80309, United States of America
- Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
| | - K M Morgan
- Department of Physics, University of Colorado, Boulder, CO 80309, United States of America
- Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
| | - D R Schmidt
- Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
| | - D S Swetz
- Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
| | - C I Szabo
- Radiation Physics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, United States of America
- Theiss Research, 7411 Eads Ave, La Jolla, CA 92037, United States of America
| | - J N Ullom
- Department of Physics, University of Colorado, Boulder, CO 80309, United States of America
- Quantum Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO 80305, United States of America
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Szypryt P, Bennett DA, Boone WJ, Dagel AL, Dalton G, Doriese WB, Durkin M, Fowler JW, Garboczi EJ, Gard JD, Hilton GC, Imrek J, Jimenez ES, Kotsubo VY, Larson K, Levine ZH, Mates JAB, McArthur D, Morgan KM, Nakamura N, O'Neil GC, Ortiz NJ, Pappas CG, Reintsema CD, Schmidt DR, Swetz DS, Thompson KR, Ullom JN, Walker C, Weber JC, Wessels AL, Wheeler JW. Design of a 3000-Pixel Transition-Edge Sensor X-Ray Spectrometer for Microcircuit Tomography. IEEE Trans Appl Supercond 2021; 31:10.1109/tasc.2021.3052723. [PMID: 35529769 PMCID: PMC9074750 DOI: 10.1109/tasc.2021.3052723] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Feature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex circuits after fabrication. This can be important for process development, defect analysis, and detection of unexpected structures in externally sourced chips, among other applications. Here, we report on a non-destructive, tabletop approach that addresses this imaging problem through x-ray tomography, which we uniquely realize with an instrument that combines a scanning electron microscope (SEM) with a transition-edge sensor (TES) x-ray spectrometer. Our approach uses the highly focused SEM electron beam to generate a small x-ray generation region in a carefully designed target layer that is placed over the sample being tested. With the high collection efficiency and resolving power of a TES spectrometer, we can isolate x-rays generated in the target from background and trace their paths through regions of interest in the sample layers, providing information about the various materials along the x-ray paths through their attenuation functions. We have recently demonstrated our approach using a 240 Mo/Cu bilayer TES prototype instrument on a simplified test sample containing features with sizes of ∼ 1 μm. Currently, we are designing and building a 3000 Mo/Au bilayer TES spectrometer upgrade, which is expected to improve the imaging speed by factor of up to 60 through a combination of increased detector number and detector speed.
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Affiliation(s)
- Paul Szypryt
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - Douglas A Bennett
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | | | - Amber L Dagel
- Sandia National Laboratories, Albuquerque, NM 87185 USA
| | | | | | - M Durkin
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - Joseph W Fowler
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | - Edward J Garboczi
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | - Johnathon D Gard
- Department of Physics, University of Colorado, Boulder, CO 80309 USA
| | - Gene C Hilton
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | - Jozsef Imrek
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | | | - Vincent Y Kotsubo
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | - Kurt Larson
- Sandia National Laboratories, Albuquerque, NM 87185 USA
| | - Zachary H Levine
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | - John A B Mates
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | | | - Kelsey M Morgan
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - Nathan Nakamura
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | - Galen C O'Neil
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | - Nathan J Ortiz
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | | | - Carl D Reintsema
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | - Daniel R Schmidt
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | - Daniel S Swetz
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | | | - Joel N Ullom
- National Institute of Standards and Technology, Boulder, CO 80305 USA
| | | | - Joel C Weber
- Department of Physics, University of Colorado, Boulder, CO 80309 USA
| | - Abigail L Wessels
- National Institute of Standards and Technology, Boulder, CO 80305, USA
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Durkin M, Adams JS, Bandler SR, Chervenak JA, Chaudhuri S, Dawson CS, Denison EV, Doriese WB, Duff SM, Finkbeiner FM, FitzGerald CT, Fowler JW, Gard JD, Hilton GC, Irwin KD, Joe YI, Kelley RL, Kilbourne CA, Miniussi AR, Morgan KM, O'Neil GC, Pappas CG, Porter FS, Reintsema CD, Rudman DA, SaKai K, Smith SJ, Stevens RW, Swetz DS, Szypryt P, Ullom JN, Vale LR, Wakeham N, Weber JC, Young BA. Demonstration of Athena X-IFU Compatible 40-Row Time-Division-Multiplexed Readout. IEEE Trans Appl Supercond 2019; 29:2101005. [PMID: 31160861 PMCID: PMC6544157 DOI: 10.1109/tasc.2019.2904472] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Time-division multiplexing (TDM) is the backup readout technology for the X-ray Integral Field Unit (X-IFU), a 3,168-pixel X-ray transition-edge sensor (TES) array that will provide imaging spectroscopy for ESA's Athena satellite mission. X-0IFU design studies are considering readout with a multiplexing factor of up to 40. We present data showing 40-row TDM readout (32 TES rows + 8 repeats of the last row) of TESs that are of the same type as those being planned for X-IFU, using measurement and analysis parameters within the ranges specified for X-IFU. Singlecolumn TDM measurements have best-fit energy resolution of (1.91 ± 0.01) eV for the Al Kα complex (1.5 keV), (2.10 ± 0.02) eV for Ti Kα (4.5 keV), (2.23 ± 0.02) eV for Mn Kα (5.9 keV), (2.40 ± 0.02) eV for Co Kα (6.9 keV), and (3.44 ± 0.04) eV for Br Kα (11.9 keV). Three-column measurements have best-fit resolution of (2.03 ± 0.01) eV for Ti Kα and (2.40 ± 0.01) eV for Co Kα. The degradation due to the multiplexed readout ranges from 0.1 eV at the lower end of the energy range to 0.5 eV at the higher end. The demonstrated performance meets X-IFU's energy-resolution and energy-range requirements. True 40-row TDM readout, without repeated rows, of kilopixel scale arrays of X-IFU-like TESs is now under development.
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Affiliation(s)
- M Durkin
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - J S Adams
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - S R Bandler
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - J A Chervenak
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - S Chaudhuri
- Stanford University Dept. of Physics, Stanford, CA 94305 USA
| | - C S Dawson
- Stanford University Dept. of Physics, Stanford, CA 94305 USA
| | - E V Denison
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - W B Doriese
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - S M Duff
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - F M Finkbeiner
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - C T FitzGerald
- Santa Clara University Dept. of Physics, Santa Clara, CA 95053 USA
| | - J W Fowler
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - J D Gard
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - G C Hilton
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - K D Irwin
- Stanford University Dept. of Physics, Stanford, CA 94305 USA
| | - Y I Joe
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - R L Kelley
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - C A Kilbourne
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - A R Miniussi
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - K M Morgan
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - G C O'Neil
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - C G Pappas
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - F S Porter
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - C D Reintsema
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - D A Rudman
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - K SaKai
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - S J Smith
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - R W Stevens
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - D S Swetz
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - P Szypryt
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - J N Ullom
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - L R Vale
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - N Wakeham
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - J C Weber
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - B A Young
- Santa Clara University Dept. of Physics, Santa Clara, CA 95053 USA
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Doriese WB, Bandler SR, Chaudhuri S, Dawson CS, Denison EV, Duff SM, Durkin M, FitzGerald CT, Fowler JW, Gard JD, Hilton GC, Irwin KD, Joe YI, Morgan KM, O'Neil GC, Pappas CG, Reintsema CD, Rudman DA, Smith SJ, Stevens RW, Swetz DS, Szypryt P, Ullom JN, Vale LR, Weber JC, Young BA. Optimization of Time- and Code-Division-Multiplexed Readout for Athena X-IFU. IEEE Trans Appl Supercond 2019; 29:10.1109/TASC.2019.2905577. [PMID: 31360051 PMCID: PMC6662226 DOI: 10.1109/tasc.2019.2905577] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Readout of a large, spacecraft-based array of superconducting transition-edge sensors (TESs) requires careful management of the layout area and power dissipation of the cryogenic-circuit components. We present three optimizations of our time- (TDM) and code-division-multiplexing (CDM) systems for the X-ray Integral Field Unit (X-IFU), a several-thousand-pixel-TES array for the planned Athena-satellite mission. The first optimization is a new readout scheme that is a hybrid of CDM and TDM. This C/TDM architecture balances CDM's noise advantage with TDM's layout compactness. The second is a redesign of a component: the shunt resistor that provides a dc-voltage bias to the TESs. A new layout and a thicker Pd-Au resistive layer combine to reduce this resistor's area by more than a factor of 5. Third, we have studied the power dissipated by the first-stage SQUIDs (superconducting quantum-interference devices) and the readout noise versus the critical current of the first-stage SqUIDs. As a result, the X-IFU TDM and C/TDM SQUIDs will have a specified junction critical current of 5 μA. Based on these design optimizations and TDM experiments described by Durkin, et al. (these proceedings), TDM meets all requirements to be X-IFU's backup-readout option. Hybrid C/TDM is another viable option that could save spacecraft resources.
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Affiliation(s)
- W B Doriese
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - S R Bandler
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - S Chaudhuri
- Stanford University Dept. of Physics, Stanford, CA 94305 USA
| | - C S Dawson
- Stanford University Dept. of Physics, Stanford, CA 94305 USA
| | - E V Denison
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - S M Duff
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - M Durkin
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - C T FitzGerald
- Santa Clara University Dept. of Physics, Santa Clara, CA 95053 USA
| | - J W Fowler
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - J D Gard
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - G C Hilton
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - K D Irwin
- Stanford University Dept. of Physics, Stanford, CA 94305 USA
| | - Y I Joe
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - K M Morgan
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - G C O'Neil
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - C G Pappas
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - C D Reintsema
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - D A Rudman
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - S J Smith
- National Aeronautics and Space Administration, Greenbelt, MD 20771 USA
| | - R W Stevens
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - D S Swetz
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - P Szypryt
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - J N Ullom
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - L R Vale
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - J C Weber
- National Institute of Standards and Technology, Boulder, CO 80305, USA
| | - B A Young
- Stanford University Dept. of Physics, Stanford, CA 94305 USA
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