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Fahrbach M, Xu M, Nyang’au WO, Domanov O, Schwalb CH, Li Z, Kuhlmann C, Brand U, Peiner E. Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography. Sensors (Basel) 2023; 23:2003. [PMID: 36850600 PMCID: PMC9967852 DOI: 10.3390/s23042003] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/21/2022] [Revised: 02/05/2023] [Accepted: 02/07/2023] [Indexed: 06/18/2023]
Abstract
We addressed the coating 5 mm-long cantilever microprobes with a viscoelastic material, which was intended to considerably extend the range of the traverse speed during the measurements of the 3D surface topography by damping contact-induced oscillations. The damping material was composed of epoxy glue, isopropyl alcohol, and glycerol, and its deposition onto the cantilever is described, as well as the tests of the completed cantilevers under free-oscillating conditions and in contact during scanning on a rough surface. The amplitude and phase of the cantilever's fundamental out-of-plane oscillation mode was investigated vs. the damping layer thickness, which was set via repeated coating steps. The resonance frequency and quality factor decreased with the increasing thickness of the damping layer for both the free-oscillating and in-contact scanning operation mode, as expected from viscoelastic theory. A very low storage modulus of E'≈100kPa, a loss modulus of E″≈434kPa, and a density of ρ≈1.2gcm-3 were yielded for the damping composite. Almost critical damping was observed with an approximately 130 µm-thick damping layer in the free-oscillating case, which was effective at suppressing the ringing behavior during the high-speed in-contact probing of the rough surface topography.
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Affiliation(s)
- Michael Fahrbach
- Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, Germany
- Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6a/b, 38106 Braunschweig, Germany
| | - Min Xu
- Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany
| | - Wilson Ombati Nyang’au
- Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, Germany
- Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6a/b, 38106 Braunschweig, Germany
- Department of Metrology, Kenya Bureau of Standards (KEBS), Popo Rd, Nairobi 00200, Kenya
| | - Oleg Domanov
- GETec Microscopy GmbH, Am Heumarkt 13, 1030 Vienna, Austria
| | - Christian H. Schwalb
- GETec Microscopy GmbH, Am Heumarkt 13, 1030 Vienna, Austria
- Quantum Design Microscopy GmbH, Im Tiefen See 60a, 64293 Darmstadt, Germany
| | - Zhi Li
- Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany
| | - Christian Kuhlmann
- Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany
| | - Uwe Brand
- Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany
| | - Erwin Peiner
- Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, Germany
- Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6a/b, 38106 Braunschweig, Germany
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Setiono A, Fahrbach M, Deutschinger A, Fantner EJ, Schwalb CH, Syamsu I, Wasisto HS, Peiner E. Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure. Sensors (Basel) 2021; 21:s21124088. [PMID: 34198533 PMCID: PMC8231909 DOI: 10.3390/s21124088] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/19/2021] [Revised: 06/08/2021] [Accepted: 06/09/2021] [Indexed: 11/23/2022]
Abstract
An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms of physical, chemical, and biological sensing, e.g., high sensitivity, low cost, simple procedure, and quick response. However, a crosstalk effect is generated by the coupling of parasitic elements from the actuation part to the sensing part. This study presents a parasitic feedthrough subtraction (PFS) method to mitigate a crosstalk effect in an electrothermal piezoresistive cantilever (EPC) resonance sensor. The PFS method is employed to identify a resonance phase that is, furthermore, deployed to a phase-locked loop (PLL)-based system to track and lock the resonance frequency of the EPC sensor under cigarette smoke exposure. The performance of the EPC sensor is further evaluated and compared to an AFM-microcantilever sensor and a commercial particle counter (DC1100-PRO). The particle mass–concentration measurement result generated from cigarette-smoke puffs shows a good agreement between these three detectors.
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Affiliation(s)
- Andi Setiono
- Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany; (M.F.); (I.S.); (H.S.W.); (E.P.)
- Research Center for Physics, Indonesian Institute of Sciences (LIPI), Tangerang Selatan 15314, Indonesia
- Correspondence:
| | - Michael Fahrbach
- Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany; (M.F.); (I.S.); (H.S.W.); (E.P.)
| | | | - Ernest J. Fantner
- SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria; (A.D.); (E.J.F.)
| | | | - Iqbal Syamsu
- Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany; (M.F.); (I.S.); (H.S.W.); (E.P.)
- Research Center for Electronics and Telecommunication, Indonesian Institute of Sciences (LIPI), Jl. Sangkuriang-Komplek LIPI Gedung 20, Bandung 40135, Indonesia
| | - Hutomo Suryo Wasisto
- Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany; (M.F.); (I.S.); (H.S.W.); (E.P.)
| | - Erwin Peiner
- Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany; (M.F.); (I.S.); (H.S.W.); (E.P.)
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Sachser R, Hütner J, Schwalb CH, Huth M. Granular Hall Sensors for Scanning Probe Microscopy. Nanomaterials (Basel) 2021; 11:nano11020348. [PMID: 33535393 PMCID: PMC7912574 DOI: 10.3390/nano11020348] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/30/2020] [Revised: 01/21/2021] [Accepted: 01/25/2021] [Indexed: 02/01/2023]
Abstract
Scanning Hall probe microscopy is attractive for minimally invasive characterization of magnetic thin films and nanostructures by measurement of the emanating magnetic stray field. Established sensor probes operating at room temperature employ highly miniaturized spin-valve elements or semimetals, such as Bi. As the sensor layer structures are fabricated by patterning of planar thin films, their adaption to custom-made sensor probe geometries is highly challenging or impossible. Here we show how nanogranular ferromagnetic Hall devices fabricated by the direct-write method of focused electron beam induced deposition (FEBID) can be tailor-made for any given probe geometry. Furthermore, we demonstrate how the magnetic stray field sensitivity can be optimized in situ directly after direct-write nanofabrication of the sensor element. First proof-of-principle results on the use of this novel scanning Hall sensor are shown.
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Affiliation(s)
- Roland Sachser
- Institute of Physics, Goethe University, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany;
| | - Johanna Hütner
- GETec Microscopy GmbH, Am Heumarkt 13, 1030 Wien, Austria;
| | | | - Michael Huth
- Institute of Physics, Goethe University, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany;
- Correspondence:
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Plank H, Winkler R, Schwalb CH, Hütner J, Fowlkes JD, Rack PD, Utke I, Huth M. Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review. Micromachines (Basel) 2019; 11:E48. [PMID: 31906005 PMCID: PMC7019982 DOI: 10.3390/mi11010048] [Citation(s) in RCA: 42] [Impact Index Per Article: 8.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/29/2019] [Revised: 12/20/2019] [Accepted: 12/20/2019] [Indexed: 11/17/2022]
Abstract
Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication / modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.
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Affiliation(s)
- Harald Plank
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria;
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
| | - Robert Winkler
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria;
| | | | - Johanna Hütner
- GETec Microscopy GmbH, 1220 Vienna, Austria; (C.H.S.); (J.H.)
| | - Jason D. Fowlkes
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (J.D.F.); (P.D.R.)
- Materials Science and Engineering, The University of Tennessee, Knoxville, Knoxville, TN 37996, USA
| | - Philip D. Rack
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (J.D.F.); (P.D.R.)
- Materials Science and Engineering, The University of Tennessee, Knoxville, Knoxville, TN 37996, USA
| | - Ivo Utke
- Mechanics of Materials and Nanostructures Laboratory, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland;
| | - Michael Huth
- Physics Institute, Goethe University Frankfurt, 60323 Frankfurt am Main, Germany;
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Wu HM, Stern LA, Chen JH, Huth M, Schwalb CH, Winhold M, Porrati F, Gonzalez CM, Timilsina R, Rack PD. Synthesis of nanowires via helium and neon focused ion beam induced deposition with the gas field ion microscope. Nanotechnology 2013; 24:175302. [PMID: 23548767 DOI: 10.1088/0957-4484/24/17/175302] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/02/2023]
Abstract
The ion beam induced nanoscale synthesis of platinum nanowires using the trimethyl (methylcyclopentadienyl)platinum(IV) (MeCpPt(IV)Me3) precursor is investigated using helium and neon ion beams in the gas field ion microscope. The He(+) beam induced deposition resembles material deposited by electron beam induced deposition with very small platinum nanocrystallites suspended in a carbonaceous matrix. The He(+) deposited material composition was estimated to be 16% Pt in a matrix of amorphous carbon with a large room-temperature resistivity (∼3.5 × 10(4)-2.2 × 10(5) μΩ cm) and temperature-dependent transport behavior consistent with a granular material in the weak intergrain tunnel coupling regime. The Ne(+) deposited material has comparable composition (17%), however a much lower room-temperature resistivity (∼600-3.0 × 10(3) μΩ cm) and temperature-dependent electrical behavior representative of strong intergrain coupling. The Ne(+) deposited nanostructure has larger platinum nanoparticles and is rationalized via Monte Carlo ion-solid simulations which show that the neon energy density deposited during growth is much larger due to the smaller ion range and is dominated by nuclear stopping relative to helium which has a larger range and is dominated by electronic stopping.
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Affiliation(s)
- H M Wu
- Ion Microscopy Innovation Center LLC, Carl Zeiss Microscopy, One Corporation Way, Peabody, MA 01960, USA
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Weirich PM, Winhold M, Schwalb CH, Huth M. In situ growth optimization in focused electron-beam induced deposition. Beilstein J Nanotechnol 2013; 4:919-26. [PMID: 24367761 PMCID: PMC3869208 DOI: 10.3762/bjnano.4.103] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/07/2013] [Accepted: 12/06/2013] [Indexed: 05/12/2023]
Abstract
We present the application of an evolutionary genetic algorithm for the in situ optimization of nanostructures that are prepared by focused electron-beam-induced deposition (FEBID). It allows us to tune the properties of the deposits towards the highest conductivity by using the time gradient of the measured in situ rate of change of conductance as the fitness parameter for the algorithm. The effectiveness of the procedure is presented for the precursor W(CO)6 as well as for post-treatment of Pt-C deposits, which were obtained by the dissociation of MeCpPt(Me)3. For W(CO)6-based structures an increase of conductivity by one order of magnitude can be achieved, whereas the effect for MeCpPt(Me)3 is largely suppressed. The presented technique can be applied to all beam-induced deposition processes and has great potential for a further optimization or tuning of parameters for nanostructures that are prepared by FEBID or related techniques.
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Affiliation(s)
- Paul M Weirich
- Physikalisches Institut, Goethe Universität, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany
| | - Marcel Winhold
- Physikalisches Institut, Goethe Universität, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany
| | - Christian H Schwalb
- Physikalisches Institut, Goethe Universität, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany
| | - Michael Huth
- Physikalisches Institut, Goethe Universität, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany
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Winhold M, Schwalb CH, Porrati F, Sachser R, Frangakis AS, Kämpken B, Terfort A, Auner N, Huth M. Binary Pt-Si nanostructures prepared by focused electron-beam-induced deposition. ACS Nano 2011; 5:9675-81. [PMID: 22050515 DOI: 10.1021/nn203134a] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/25/2023]
Abstract
Binary systems of Pt-Si are prepared by electron-beam-induced deposition using the two precursors, trimethyl(methylcyclopentadienyl)platinum(IV) (MeCpPt(Me)(3)) and neopentasilane (Si(SiH(3))(4)), simultaneously. By varying the relative flux of the two precursors during deposition, we are able to study composites containing platinum and silicon in different ratios by means of energy-dispersive X-ray spectroscopy, atomic force microscopy, electrical transport measurements, and transmission electron microscopy. The results show strong evidence for the formation of a binary, metastable Pt(2)Si(3) phase, leading to a maximum in the conductivity for a Si/Pt ratio of 3:2.
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Affiliation(s)
- Marcel Winhold
- Physikalisches Institut, Goethe Universität, 60438 Frankfurt am Main, Germany
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Sachser R, Porrati F, Schwalb CH, Huth M. Universal conductance correction in a tunable strongly coupled nanogranular metal. Phys Rev Lett 2011; 107:206803. [PMID: 22181756 DOI: 10.1103/physrevlett.107.206803] [Citation(s) in RCA: 29] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/20/2011] [Indexed: 05/25/2023]
Abstract
We present temperature-dependent conductivity data obtained on a sample set of nanogranular Pt-C with finely tuned intergrain tunnel coupling strength g. For samples in the strong-coupling regime g > g(C), characterized by a finite conductivity for T→0, we find a logarithmic behavior at elevated temperatures and a crossover to a √T behavior at low temperatures over a wide range of coupling strengths g(C) ≈ 0.25 < g ≤ 3. The experimental observation for g > 1 is in very good agreement with recent theoretical findings on ordered granular metals in three spatial dimensions. The results indicate a validity of the predicted universal conductivity behavior that goes beyond the immediate range of the approach used in the theoretical derivation.
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Affiliation(s)
- Roland Sachser
- Physikalisches Institut, Goethe-Universität, Frankfurt am Main, Germany.
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Götzen J, Schwalb CH, Schmidt C, Mette G, Marks M, Höfer U, Witte G. Structural evolution of perfluoro-pentacene films on Ag(111): transition from 2D to 3D growth. Langmuir 2011; 27:993-9. [PMID: 21188995 DOI: 10.1021/la1022664] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
The structural evolution and thermal stability of perfluoro-pentacene (PF-PEN) thin films on Ag(111) have been studied by means of low-temperature scanning tunnelling microscopy (STM), low-energy electron diffraction (LEED), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), and thermal desorption spectroscopy (TDS). Well-defined monolayer films can be prepared by utilizing the different adsorption energy of mono- and multilayer films and selectively desorbing multilayers upon careful heating at 380 K, whereas at temperatures above 400 K, a dissociation occurs. In the first monolayer, the molecules adopt a planar adsorption geometry and form a well-ordered commensurate (6 × 3) superstructure where molecules are uniformly oriented with their long axis along the <110> azimuth. This molecular orientation is also maintained in the second layer, where molecules exhibit a staggered packing motif, whereas further deposition leads to the formation of isolated, tall islands. Moreover, on smooth silver surfaces with extended terraces, growth of PF-PEN onto beforehand prepared long-range ordered monolayer films at elevated temperature leads to needle-like islands that are uniformly aligned at substrate steps along <110> azimuth directions.
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Affiliation(s)
- Jan Götzen
- Molekulare Festkörperphysik, Philipps-Universität Marburg, D-35032 Marburg, Germany
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Sachs S, Schwalb CH, Marks M, Schöll A, Reinert F, Umbach E, Höfer U. Electronic structure at the perylene-tetracarboxylic acid dianhydride/Ag(111) interface studied with two-photon photoelectron spectroscopy. J Chem Phys 2009; 131:144701. [DOI: 10.1063/1.3243851] [Citation(s) in RCA: 35] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Schwalb CH, Sachs S, Marks M, Schöll A, Reinert F, Umbach E, Höfer U. Electron lifetime in a Shockley-type metal-organic interface state. Phys Rev Lett 2008; 101:146801. [PMID: 18851554 DOI: 10.1103/physrevlett.101.146801] [Citation(s) in RCA: 27] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/27/2008] [Indexed: 05/26/2023]
Abstract
The lifetimes of electrons at the interface between 3,4,9,10-perylene-tetracarboxylic acid dianhydride (PTCDA) and Ag(111) have been studied by means of time- and angle-resolved two-photon photoemission. We observe a dispersing unoccupied state 0.6 eV above the Fermi level with an effective electron mass of 0.39m{e} at the Gamma[over ] point. The short lifetime of 54 fs is indicative of a large penetration of the wave function into the metal. Supported by model calculations this interface state is interpreted as predominantly arising from an upshift of the occupied Shockley surface state of the clean metal due to the interaction with the PTCDA overlayer.
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Affiliation(s)
- C H Schwalb
- Fachbereich Physik und Zentrum für Materialwissenschaften, Philipps-Universität, D-35032 Marburg, Germany
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