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Kirchhof JN, Yu Y, Antheaume G, Gordeev G, Yagodkin D, Elliott P, de Araújo DB, Sharma S, Reich S, Bolotin KI. Nanomechanical Spectroscopy of 2D Materials. Nano Lett 2022; 22:8037-8044. [PMID: 36252952 PMCID: PMC9615986 DOI: 10.1021/acs.nanolett.2c01289] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/30/2022] [Revised: 09/23/2022] [Indexed: 06/16/2023]
Abstract
We introduce a nanomechanical platform for fast and sensitive measurements of the spectrally resolved optical dielectric function of 2D materials. At the heart of our approach is a suspended 2D material integrated into a high Q silicon nitride nanomechanical resonator illuminated by a wavelength-tunable laser source. From the heating-related frequency shift of the resonator as well as its optical reflection measured as a function of photon energy, we obtain the real and imaginary parts of the dielectric function. Our measurements are unaffected by substrate-related screening and do not require any assumptions on the underling optical constants. This fast (τrise ∼ 135 ns), sensitive (noise-equivalent power = 90 pW √ Hz ), and broadband (1.2-3.1 eV, extendable to UV-THz) method provides an attractive alternative to spectroscopic or ellipsometric characterization techniques.
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Affiliation(s)
- Jan N. Kirchhof
- Department
of Physics, Freie Universität Berlin, Arnimallee 14, 14195Berlin, Germany
| | - Yuefeng Yu
- Department
of Physics, Freie Universität Berlin, Arnimallee 14, 14195Berlin, Germany
| | - Gabriel Antheaume
- Department
of Physics, Freie Universität Berlin, Arnimallee 14, 14195Berlin, Germany
| | - Georgy Gordeev
- Department
of Physics, Freie Universität Berlin, Arnimallee 14, 14195Berlin, Germany
- Department
of Physics and Materials Science, University
of Luxembourg, 41 Rue
du Brill, 4422Belvaux, Luxembourg
| | - Denis Yagodkin
- Department
of Physics, Freie Universität Berlin, Arnimallee 14, 14195Berlin, Germany
| | - Peter Elliott
- Max-Born
Institute for Nonlinear Optics and Short Pulse Spectroscopy, Max-Born-Strasse 2A, 12489Berlin, Germany
| | - Daniel B. de Araújo
- Department
of Physics, Freie Universität Berlin, Arnimallee 14, 14195Berlin, Germany
| | - Sangeeta Sharma
- Max-Born
Institute for Nonlinear Optics and Short Pulse Spectroscopy, Max-Born-Strasse 2A, 12489Berlin, Germany
| | - Stephanie Reich
- Department
of Physics, Freie Universität Berlin, Arnimallee 14, 14195Berlin, Germany
| | - Kirill I. Bolotin
- Department
of Physics, Freie Universität Berlin, Arnimallee 14, 14195Berlin, Germany
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Bereyhi MJ, Beccari A, Fedorov SA, Ghadimi AH, Schilling R, Wilson DJ, Engelsen NJ, Kippenberg TJ. Clamp-Tapering Increases the Quality Factor of Stressed Nanobeams. Nano Lett 2019; 19:2329-2333. [PMID: 30811943 DOI: 10.1021/acs.nanolett.8b04942] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Stressed nanomechanical resonators are known to have exceptionally high quality factors ( Q) due to the dilution of intrinsic dissipation by stress. Typically, the amount of dissipation dilution and thus the resonator Q is limited by the high mode curvature region near the clamps. Here we study the effect of clamp geometry on the Q of nanobeams made of high-stress Si3N4. We find that tapering the beam near the clamps, thus locally increasing the stress, leads to an increased Q of MHz-frequency low order modes due to enhanced dissipation dilution. Contrary to recent studies of tethered-membrane resonators, we find that widening the clamps leads to a decreased Q despite increased stress in the beam bulk. The tapered-clamping approach has practical advantages compared to the recently developed "soft-clamping" technique, as it enhances the Q of the fundamental mode and can be implemented without increasing the device size.
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Affiliation(s)
- Mohammad J Bereyhi
- Institute of Physics (IPHYS) , École Polytechnique Fédérale de Lausanne , Lausanne 1015 , Switzerland
| | - Alberto Beccari
- Institute of Physics (IPHYS) , École Polytechnique Fédérale de Lausanne , Lausanne 1015 , Switzerland
| | - Sergey A Fedorov
- Institute of Physics (IPHYS) , École Polytechnique Fédérale de Lausanne , Lausanne 1015 , Switzerland
| | - Amir H Ghadimi
- Institute of Physics (IPHYS) , École Polytechnique Fédérale de Lausanne , Lausanne 1015 , Switzerland
| | - Ryan Schilling
- Institute of Physics (IPHYS) , École Polytechnique Fédérale de Lausanne , Lausanne 1015 , Switzerland
| | - Dalziel J Wilson
- IBM Research, Zürich , Saümerstrasse 4 , Rüschlikon 8803 , Switzerland
| | - Nils J Engelsen
- Institute of Physics (IPHYS) , École Polytechnique Fédérale de Lausanne , Lausanne 1015 , Switzerland
| | - Tobias J Kippenberg
- Institute of Physics (IPHYS) , École Polytechnique Fédérale de Lausanne , Lausanne 1015 , Switzerland
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de Bonis SL, Urgell C, Yang W, Samanta C, Noury A, Vergara-Cruz J, Dong Q, Jin Y, Bachtold A. Ultrasensitive Displacement Noise Measurement of Carbon Nanotube Mechanical Resonators. Nano Lett 2018; 18:5324-5328. [PMID: 30062893 PMCID: PMC6089494 DOI: 10.1021/acs.nanolett.8b02437] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/05/2023]
Abstract
Mechanical resonators based on a single carbon nanotube are exceptional sensors of mass and force. The force sensitivity in these ultralight resonators is often limited by the noise in the detection of the vibrations. Here, we report on an ultrasensitive scheme based on a RLC resonator and a low-temperature amplifier to detect nanotube vibrations. We also show a new fabrication process of electromechanical nanotube resonators to reduce the separation between the suspended nanotube and the gate electrode down to ∼150 nm. These advances in detection and fabrication allow us to reach [Formula: see text] displacement sensitivity. Thermal vibrations cooled cryogenically at 300 mK are detected with a signal-to-noise ratio as high as 17 dB. We demonstrate [Formula: see text] force sensitivity, which is the best force sensitivity achieved thus far with a mechanical resonator. Our work is an important step toward imaging individual nuclear spins and studying the coupling between mechanical vibrations and electrons in different quantum electron transport regimes.
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Affiliation(s)
- S L de Bonis
- ICFO - Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology , 08860 Castelldefels, Barcelona , Spain
| | - C Urgell
- ICFO - Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology , 08860 Castelldefels, Barcelona , Spain
| | - W Yang
- ICFO - Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology , 08860 Castelldefels, Barcelona , Spain
| | - C Samanta
- ICFO - Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology , 08860 Castelldefels, Barcelona , Spain
| | - A Noury
- ICFO - Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology , 08860 Castelldefels, Barcelona , Spain
| | - J Vergara-Cruz
- ICFO - Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology , 08860 Castelldefels, Barcelona , Spain
| | - Q Dong
- Centre de Nanosciences et de Nanotechnologies, CNRS , University of Paris-Sud, University of Paris-Saclay, C2N Marcoussis, 91460 Marcoussis , France
| | - Y Jin
- Centre de Nanosciences et de Nanotechnologies, CNRS , University of Paris-Sud, University of Paris-Saclay, C2N Marcoussis, 91460 Marcoussis , France
| | - A Bachtold
- ICFO - Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology , 08860 Castelldefels, Barcelona , Spain
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Morell N, Reserbat-Plantey A, Tsioutsios I, Schädler K, Dubin F, Koppens FHL, Bachtold A. High Quality Factor Mechanical Resonators Based on WSe2 Monolayers. Nano Lett 2016; 16:5102-8. [PMID: 27459399 PMCID: PMC5023224 DOI: 10.1021/acs.nanolett.6b02038] [Citation(s) in RCA: 55] [Impact Index Per Article: 6.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/19/2016] [Revised: 07/19/2016] [Indexed: 05/22/2023]
Abstract
Suspended monolayer transition metal dichalcogenides (TMD) are membranes that combine ultralow mass and exceptional optical properties, making them intriguing materials for opto-mechanical applications. However, the low measured quality factor of TMD resonators has been a roadblock so far. Here, we report an ultrasensitive optical readout of monolayer TMD resonators that allows us to reveal their mechanical properties at cryogenic temperatures. We find that the quality factor of monolayer WSe2 resonators greatly increases below room temperature, reaching values as high as 1.6 × 10(4) at liquid nitrogen temperature and 4.7 × 10(4) at liquid helium temperature. This surpasses the quality factor of monolayer graphene resonators with similar surface areas. Upon cooling the resonator, the resonant frequency increases significantly due to the thermal contraction of the WSe2 lattice. These measurements allow us to experimentally study the thermal expansion coefficient of WSe2 monolayers for the first time. High Q-factors are also found in resonators based on MoS2 and MoSe2 monolayers. The high quality-factor found in this work opens new possibilities for coupling mechanical vibrational states to two-dimensional excitons, valley pseudospins, and single quantum emitters and for quantum opto-mechanical experiments based on the Casimir interaction.
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Affiliation(s)
- Nicolas Morell
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels
Barcelona, Spain
| | - Antoine Reserbat-Plantey
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels
Barcelona, Spain
| | - Ioannis Tsioutsios
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels
Barcelona, Spain
| | - Kevin
G. Schädler
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels
Barcelona, Spain
| | | | - Frank H. L. Koppens
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels
Barcelona, Spain
| | - Adrian Bachtold
- ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels
Barcelona, Spain
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