The Effect of Height Error on Performance of Propagation Phase-Based Metalens

Metalenses, as a new type of planar optical device with flexible design, play an important role in miniaturized and integrated optical devices. Propagation phase-based metalenses, known for their low loss and extensive design flexibility, are widely utilized in optical imaging and optical communication. However, fabrication errors introduced by thin-film deposition and etching processes inevitably result in variations in the height of the metalens structure, leading to the fabricated devices not performing as expected. Here, we introduce a reflective TiO2 metalens based on the propagation phase. Then, the relationship between the height variation and the performance of the metalens is explored by using the maximum phase error. Our results reveal that the height error of the unit structure affects the phase rather than the amplitude. The focusing efficiency of our metalens exhibits robustness to structural variations, with only a 5% decrease in focusing efficiency when the height varies within ±8% of the range. The contents discussed in this paper provide theoretical guidance for the unit design of the propagation phase-based metalens and the determination of its allowable fabrication error range, which is of great significance for low-cost and high-efficiency manufacturing.

The Effect of Fabrication Error on the Performance of Mid-Infrared Metalens with Large Field-of-View

Mid-infrared large field-of-view (FOV) imaging optics play a vital role in infrared imaging and detection. The metalens, which is composed of subwavelength-arrayed structures, provides a new possibility for the miniaturization of large FOV imaging systems. However, the inaccuracy during fabrication is the main obstacle to developing practical uses for metalenses. Here, we introduce the principle and method of designing a large FOV doublet metalens at the mid-infrared band. Then, the quantitative relationship between the fabrication error and the performance of the doublet metalens with a large FOV from four different fabrication errors is explored by using the finite-difference time-domain method. The simulation results show that the inclined sidewall error has the greatest impact on the focusing performance, and the interlayer alignment error deforms the focusing beam and affects the focusing performance, while the spacer thickness error has almost no impact on the performance. The contents discussed in this paper can help manufacturers determine the allowable processing error range of the large FOV doublet metalens and the priority level for optimizing the process, which is of significance.

Design and Numerical Analysis of an Infrared Cassegrain Telescope Based on Reflective Metasurfaces

Reflective imaging systems such as Cassegrain-type telescopes are widely utilized in astronomical observations. However, curved mirrors in traditional Cassegrain telescopes unavoidably make the imaging system bulky and costly. Recent developments in the field of metasurfaces provide an alternative way to construct optical systems, possessing the potential to make the whole system flat, compact and lightweight. In this work, we propose a design for a miniaturized Cassegrain telescope by replacing the curved primary and secondary mirrors with flat and ultrathin metasurfaces. The meta-atoms, consisting of SiO₂ stripes on an Al film, provide high reflectance (>95%) and a complete phase coverage of 0~2π at the operational wavelength of 4 μm. The optical functionality of the metasurface Cassegrain telescope built with these meta-atoms was confirmed and studied with numerical simulations. Moreover, fabrication errors were mimicked by introducing random width errors to each meta-atom; their influence on the optical performance of the metasurface device was studied numerically. The concept of the metasurface Cassegrain telescope operating in the infrared wavelength range can be extended to terahertz (THz), microwave and even radio frequencies for real-world applications, where metasurfaces with a large aperture size are more easily obtained.