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Dynamic Outlier Detection in the Calibration by Comparison Method Applied to Strain Gauge Weight Sensors. SENSORS 2018; 18:s18124200. [PMID: 30513652 PMCID: PMC6308441 DOI: 10.3390/s18124200] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/04/2018] [Revised: 11/24/2018] [Accepted: 11/28/2018] [Indexed: 11/16/2022]
Abstract
The present work proposes a robust method of analyzing sets of data series shifted in time in respect to each other utilizing the process of dynamic calibration by comparison. Usually the Pearson’s correlation analysis coefficient is applied for this purpose. However, in some cases the method does not bring satisfactory results, as it can be seen in the results of the research conducted for the purpose of this paper. The Dynamic Time Warping method may be the solution to this problem, as it appears to be more efficient while comparing the shapes of calibration characteristics done with the use of the Pearson’s method. The presented method may also be applied to eliminate dynamic outliers collected in the process of recurrence examination or the analysis of strain gauge weight sensors hysteresis. This fact also makes the method a good tool for eliminating improper data series which might appear in the calibration process due to, e.g., malfunctioning devices installed in the calibration stand. The article presents an example of using the proposed method in eliminating improper dynamic characteristics obtained in a simulated calibration stand. Moreover, a comparative analysis performed on the simulation data is also presented in the article, as well as the result of the laboratory experiment.
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Design and Optimization of a Novel Three-Dimensional Force Sensor with Parallel Structure. SENSORS 2018; 18:s18082416. [PMID: 30044432 PMCID: PMC6111584 DOI: 10.3390/s18082416] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/14/2018] [Revised: 07/09/2018] [Accepted: 07/24/2018] [Indexed: 11/17/2022]
Abstract
To measure large external forces exerted on a loading platform, a novel three-dimensional force sensor is developed in this paper. The proposed sensor was designed with a parallel mechanism with three degrees of freedom. Kinematic analysis of this sensor was performed. Due to its structural characteristics, the working principle of the sensor was analyzed using a Jacobian matrix. The sensitivity diversity index and measuring capability were both calculated. The analysis showed that the proposed sensor is more suitable for measuring large forces than existing strain sensors. In addition, compared with existing strain sensors, this sensor is more suitable for measuring forces along the x and y axes. By changing the stiffness coefficients of the springs, the proposed sensor has reconfigurability. This sensor can change its measuring capability to meet different requirements. Next, the mode shapes and natural frequencies of the proposed sensor were performed. Finally, based on these performance indices, the design variables were optimized using a Multi-Objective Genetic Algorithm.
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Design and Test of a New Inductive Force Sensor. SENSORS (BASEL, SWITZERLAND) 2018; 18:E2079. [PMID: 29958474 PMCID: PMC6069070 DOI: 10.3390/s18072079] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/22/2018] [Revised: 06/24/2018] [Accepted: 06/28/2018] [Indexed: 11/26/2022]
Abstract
The currently accepted interval of weekly cast changes in the treatment of clubfeet seems unsubstantiated. A force sensor is needed to determine the adaptation rate of a clubfoot to establish what cast change interval would be most effective and efficient. We developed a force sensor based on the principle that the resonance frequency of an LC-tank changes when a metal target is brought in close proximity. A thin rubber ring between the LC-tank and the metal target transformed this proximity sensor into a force sensor. With a static load test and an incremental load test, the performance of the constructed force sensors was characterized. The custom-made sensor showed excellent sensitivity ((1.7±0.8×105) counts/N), resolution ((0.15±0.06) mN), and accuracy ((3.5±3.0) %) for the application. The observed drift was (2.1±0.7) %/log10(h), which is lower than other thin force sensors. Preliminary results of measurements in the treatment of Dupuytren fingers and clubfeet show good functioning for long-term force measurements.
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Design and Evaluation of FBG-Based Tension Sensor in Laparoscope Surgical Robots. SENSORS 2018; 18:s18072067. [PMID: 29958441 PMCID: PMC6068875 DOI: 10.3390/s18072067] [Citation(s) in RCA: 20] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/16/2018] [Revised: 06/12/2018] [Accepted: 06/25/2018] [Indexed: 11/24/2022]
Abstract
Due to the narrow space and a harsh chemical environment in the sterilization processes for the end-effector of surgical robots, it is difficult to install and integrate suitable sensors for the purpose of effective and precise force control. This paper presents an innovative tension sensor for estimation of grasping force in our laparoscope surgical robot. The proposed sensor measures the tension of cable using fiber gratings (FBGs) which are pasted in the grooves on the inclined cantilevers of the sensor. By exploiting the stain measurement characteristics of FBGs, the small deformation of the inclined cantilevers caused by the cable tension can be measured. The working principle and the sensor model are analyzed. Based on the sensor model, the dimensions of the sensor are designed and optimized. A dedicated experimental setup is established to calibrate and test the sensor. The results of experiments for estimation the grasping force validate the sensor.
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Quantifying Local Molecular Tension Using Intercalated DNA Fluorescence. NANO LETTERS 2018; 18:2274-2281. [PMID: 29473755 PMCID: PMC6023266 DOI: 10.1021/acs.nanolett.7b04842] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/15/2017] [Revised: 02/14/2018] [Indexed: 05/25/2023]
Abstract
The ability to measure mechanics and forces in biological nanostructures, such as DNA, proteins and cells, is of great importance as a means to analyze biomolecular systems. However, current force detection methods often require specialized instrumentation. Here, we present a novel and versatile method to quantify tension in molecular systems locally and in real time, using intercalated DNA fluorescence. This approach can report forces over a range of at least ∼0.5-65 pN with a resolution of 1-3 pN, using commercially available intercalating dyes and a general-purpose fluorescence microscope. We demonstrate that the method can be easily implemented to report double-stranded (ds)DNA tension in any single-molecule assay that is compatible with fluorescence microscopy. This is particularly useful for multiplexed techniques, where measuring applied force in parallel is technically challenging. Moreover, tension measurements based on local dye binding offer the unique opportunity to determine how an applied force is distributed locally within biomolecular structures. Exploiting this, we apply our method to quantify the position-dependent force profile along the length of flow-stretched DNA and reveal that stretched and entwined DNA molecules-mimicking catenated DNA structures in vivo-display transient DNA-DNA interactions. The method reported here has obvious and broad applications for the study of DNA and DNA-protein interactions. Additionally, we propose that it could be employed to measure forces in any system to which dsDNA can be tethered, for applications including protein unfolding, chromosome mechanics, cell motility, and DNA nanomachines.
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Abstract
The high prevalence of shoulder pain in using walkers in patients who have spinal cord injury (SCI). Also, the limited options available to economically measure grip forces in walkers, which drove the need to create one. This article describes a method to obtain upper-extremities' forces and moments in a person with SCI by designing an appropriate instrumented walker. First, since the commercial multidirectional loadcells are too expensive, custom loadcells are fabricated. Ultimately, a complete gait analysis by means of VICON motion analysis and using inverse dynamic method has been held to measure upper-extremities' efforts. The results for a person with SCI using a two-wheel walker in low and high heights and a basic walker show that there are higher shoulder and elbow flexion-extension moments and also higher shoulder forces in superior-inferior direction and higher elbow and wrist forces in anterior-posterior directions. The results are not much different in using two different types of walker. By using the proposed method, upper-extremities' forces and moments were obtained and the results were compared to each other in using two different walkers.
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A Novel Model to Simulate Flexural Complements in Compliant Sensor Systems. SENSORS (BASEL, SWITZERLAND) 2018; 18:s18041029. [PMID: 29596377 PMCID: PMC5948526 DOI: 10.3390/s18041029] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/10/2018] [Revised: 03/15/2018] [Accepted: 03/27/2018] [Indexed: 06/08/2023]
Abstract
The main challenge in analyzing compliant sensor systems is how to calculate the large deformation of flexural complements. Our study proposes a new model that is called the spline pseudo-rigid-body model (spline PRBM). It combines dynamic spline and the pseudo-rigid-body model (PRBM) to simulate the flexural complements. The axial deformations of flexural complements are modeled by using dynamic spline. This makes it possible to consider the nonlinear compliance of the system using four control points. Three rigid rods connected by two revolute (R) pins with two torsion springs replace the three lines connecting the four control points. The kinematic behavior of the system is described using Lagrange equations. Both the optimization and the numerical fitting methods are used for resolving the characteristic parameters of the new model. An example is given of a compliant mechanism to modify the accuracy of the model. The spline PRBM is important in expanding the applications of the PRBM to the design and simulation of flexural force sensors.
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Abstract
We present a "nanoladder" geometry that minimizes the mechanical dissipation of ultrasensitive cantilevers. A nanoladder cantilever consists of a lithographically patterned scaffold of rails and rungs with feature size ∼100 nm. Compared to a rectangular beam of the same dimensions, the mass and spring constant of a nanoladder are each reduced by roughly 2 orders of magnitude. We demonstrate a low force noise of 158-42+62 zN and 190-33+42 zN in a 1 Hz bandwidth for devices made from silicon and diamond, respectively, measured at temperatures between 100-150 mK. As opposed to bottom-up mechanical resonators like nanowires or nanotubes, nanoladder cantilevers can be batch-fabricated using standard lithography, which is a critical factor for applications in scanning force microscopy.
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Compact Hip- Force Sensor for a Gait-Assistance Exoskeleton System. SENSORS (BASEL, SWITZERLAND) 2018; 18:E566. [PMID: 29438300 PMCID: PMC5856075 DOI: 10.3390/s18020566] [Citation(s) in RCA: 27] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/27/2017] [Revised: 02/03/2018] [Accepted: 02/10/2018] [Indexed: 12/29/2022]
Abstract
In this paper, we propose a compact force sensor system for a hip-mounted exoskeleton for seniors with difficulties in walking due to muscle weakness. It senses and monitors the delivered force and power of the exoskeleton for motion control and taking urgent safety action. Two FSR (force-sensitive resistors) sensors are used to measure the assistance force when the user is walking. The sensor system directly measures the interaction force between the exoskeleton and the lower limb of the user instead of a previously reported force-sensing method, which estimated the hip assistance force from the current of the motor and lookup tables. Furthermore, the sensor system has the advantage of generating torque in the walking-assistant actuator based on directly measuring the hip-assistance force. Thus, the gait-assistance exoskeleton system can control the delivered power and torque to the user. The force sensing structure is designed to decouple the force caused by hip motion from other directional forces to the sensor so as to only measure that force. We confirmed that the hip-assistance force could be measured with the proposed prototype compact force sensor attached to a thigh frame through an experiment with a real system.
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Arrayed Force Sensors Made of Paper, Elastomer, and Hydrogel Particles. MICROMACHINES 2017; 8:mi8120356. [PMID: 30400546 PMCID: PMC6187906 DOI: 10.3390/mi8120356] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/06/2017] [Revised: 12/02/2017] [Accepted: 12/04/2017] [Indexed: 11/17/2022]
Abstract
This article presents a sensor for detecting the distribution of forces on a surface. The device with nine buttons consisted of an elastomer-based layer as a touch interface resting on a substrate of patterned metallized paper. The elastomer-based layer included a three-by-three array of deformable, hemispherical elements/reliefs, facing down toward an array of interdigitated capacitive sensing units on patterned metallized paper. Each hemispherical element is 20 mm in diameter and 8 mm in height. When a user applied pressure to the elastomer-based layer, the contact area between the hemispherical elements and the interdigitated capacitive sensing units increased with the deformation of the hemispherical elements. To enhance the sensitivity of the sensors, embedded particles of hydrogel in the elastomer-based layer increased the measured electrical responses. The measured capacitance increased because the effective dielectric permittivity of the hydrogel was greater than that of air. Electromechanical characterization verified that the hydrogel-filled elastomer was more sensitive to force at a low range of loads (23.4 pF/N) than elastomer alone without embedded hydrogel (3.4 pF/N), as the hydrogel reduced the effective elastic modulus of the composite material by a factor of seven. A simple demonstration suggests that the force-sensing array has the potential to contribute to wearable and soft robotic devices.
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Development of a disposable force-sensing glove for clinicians and demonstration of its force measurements on patients during rehabilitation following anterior cruciate ligament reconstruction surgery. JOURNAL OF BIOMEDICAL OPTICS 2017; 22:1-14. [PMID: 29264895 DOI: 10.1117/1.jbo.22.12.127002] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/10/2017] [Accepted: 11/27/2017] [Indexed: 06/07/2023]
Abstract
For many clinicians, their effectiveness is dependent on the magnitude of forces they manually apply to their patients. However, current state-of-the-art care strategies lack quantitative feedback, making it difficult to provide consistent care over time and among multiple clinicians. To provide real-time quantitative feedback to clinicians, we have developed a disposable glove with a force sensor embedded in the fingertips or palm. The sensor is based on the fiber-optic bendloss effect whereby light intensity from an infrared source is attenuated as the fiber is bent between a series of corrugated teeth. The sensor fabricated has a very low profile (10×7×1 mm) and has demonstrated high sensitivity, accuracy, range, and durability. Force feedback up to 90 N with an average force threshold at 0.19 N and average sensor resolution at 0.05 N has been demonstrated. A preliminary clinical study has also been conducted with anterior cruciate ligament reconstruction patients who show significant range of motion improvement when treated with the force-sensing glove.
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Underlying Physics of Conductive Polymer Composites and Force Sensing Resistors (FSRs). A Study on Creep Response and Dynamic Loading. MATERIALS 2017; 10:ma10111334. [PMID: 29160834 PMCID: PMC5706281 DOI: 10.3390/ma10111334] [Citation(s) in RCA: 30] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/26/2017] [Revised: 11/09/2017] [Accepted: 11/15/2017] [Indexed: 11/16/2022]
Abstract
Force Sensing Resistors (FSRs) are manufactured by sandwiching a Conductive Polymer Composite (CPC) between metal electrodes. The piezoresistive property of FSRs has been exploited to perform stress and strain measurements, but the rheological property of polymers has undermined the repeatability of measurements causing creep in the electrical resistance of FSRs. With the aim of understanding the creep phenomenon, the drift response of thirty two specimens of FSRs was studied using a statistical approach. Similarly, a theoretical model for the creep response was developed by combining the Burger's rheological model with the equations for the quantum tunneling conduction through thin insulating films. The proposed model and the experimental observations showed that the sourcing voltage has a strong influence on the creep response; this observation-and the corresponding model-is an important contribution that has not been previously accounted. The phenomenon of sensitivity degradation was also studied. It was found that sensitivity degradation is a voltage-related phenomenon that can be avoided by choosing an appropriate sourcing voltage in the driving circuit. The models and experimental observations from this study are key aspects to enhance the repeatability of measurements and the accuracy of FSRs.
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A Pneumatic Tactile Sensor for Co-Operative Robots. SENSORS 2017; 17:s17112592. [PMID: 29125565 PMCID: PMC5712939 DOI: 10.3390/s17112592] [Citation(s) in RCA: 31] [Impact Index Per Article: 4.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/20/2017] [Revised: 11/03/2017] [Accepted: 11/06/2017] [Indexed: 11/16/2022]
Abstract
Tactile sensors of comprehensive functions are urgently needed for the advanced robot to co-exist and co-operate with human beings. Pneumatic tactile sensors based on air bladder possess some noticeable advantages for human-robot interaction application. In this paper, we construct a pneumatic tactile sensor and apply it on the fingertip of robot hand to realize the sensing of force, vibration and slippage via the change of the pressure of the air bladder, and we utilize the sensor to perceive the object's features such as softness and roughness. The pneumatic tactile sensor has good linearity, repeatability and low hysteresis and both its size and sensing range can be customized by using different material as well as different thicknesses of the air bladder. It is also simple and cheap to fabricate. Therefore, the pneumatic tactile sensor is suitable for the application of co-operative robots and can be widely utilized to improve the performance of service robots. We can apply it to the fingertip of the robot to endow the robotic hand with the ability to co-operate with humans and handle the fragile objects because of the inherent compliance of the air bladder.
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From dV-Trainer to Real Robotic Console: The Limitations of Robotic Skill Training. JOURNAL OF SURGICAL EDUCATION 2017; 74:1074-1080. [PMID: 28462814 DOI: 10.1016/j.jsurg.2017.03.006] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/22/2016] [Revised: 02/05/2017] [Accepted: 03/21/2017] [Indexed: 06/07/2023]
Abstract
OBJECTIVES To investigate operators' performance quality, mental stress, and ergonomic habits through a training curriculum on robotic simulators. DESIGN Forty volunteers without robotic surgery experience were recruited to practice 2 exercises on a dV-Trainer (dVT) for 14 hours. The simulator software (M-scorea) provided an automatic evaluation of the overall score for the surgeons' performance. Each participant provided a subjective difficulty score (validity to be proven) for each exercise. Their ergonomic habits were evaluated based on the workspace range and armrest load-validated criteria for evaluating the proficiency of using the armrest. They then repeated the same tasks on a da Vinci Surgical Skill Simulator for a final-level test. Their final scores were compared with their initial scores and the scores of 5 experts on the da Vinci Surgical Skill Simulator. RESULTS A total of 14 hours of training on the dVT significantly improved the surgeons' performance scores to the expert level with a significantly reduced workload, but their ergonomic score was still far from the expert level. CONCLUSION Sufficient training on the dVT improves novices' performance, reduces psychological stress, and inculcates better ergonomic habits. Among the evaluated criteria, novices had the most difficulty in achieving expert levels of ergonomic skills. The training benefits of robotic surgery simulators should be determined with quantified variables. The detection of the limitations during robotic training curricula could guide the targeted training and improve the training effect.
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Underlying Physics of Conductive Polymer Composites and Force Sensing Resistors (FSRs) under Static Loading Conditions. SENSORS 2017; 17:s17092108. [PMID: 28906467 PMCID: PMC5621037 DOI: 10.3390/s17092108] [Citation(s) in RCA: 17] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/22/2017] [Revised: 07/25/2017] [Accepted: 07/25/2017] [Indexed: 11/23/2022]
Abstract
Conductive polymer composites are manufactured by randomly dispersing conductive particles along an insulating polymer matrix. Several authors have attempted to model the piezoresistive response of conductive polymer composites. However, all the proposed models rely upon experimental measurements of the electrical resistance at rest state. Similarly, the models available in literature assume a voltage-independent resistance and a stress-independent area for tunneling conduction. With the aim of developing and validating a more comprehensive model, a test bench capable of exerting controlled forces has been developed. Commercially available sensors—which are manufactured from conductive polymer composites—have been tested at different voltages and stresses, and a model has been derived on the basis of equations for the quantum tunneling conduction through thin insulating film layers. The resistance contribution from the contact resistance has been included in the model together with the resistance contribution from the conductive particles. The proposed model embraces a voltage-dependent behavior for the composite resistance, and a stress-dependent behavior for the tunneling conduction area. The proposed model is capable of predicting sensor current based upon information from the sourcing voltage and the applied stress. This study uses a physical (non-phenomenological) approach for all the phenomena discussed here.
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Abstract
Mechanical forces affect a myriad of processes, from bone growth to material fracture to touch-responsive robotics. While nano- to micro-Newton forces are prevalent at the microscopic scale, few methods have the nanoscopic size and signal stability to measure them in vivo or in situ. Here, we develop an optical force-sensing platform based on sub-25 nm NaYF4 nanoparticles (NPs) doped with Yb3+, Er3+, and Mn2+. The lanthanides Yb3+ and Er3+ enable both photoluminescence and upconversion, while the energetically coupled d-metal Mn2+ adds force tunability through its crystal field sensitivity. Using a diamond anvil cell to exert up to 3.5 GPa pressure or ∼10 μN force per particle, we track stress-induced spectral responses. The red (660 nm) to green (520, 540 nm) emission ratio varies linearly with pressure, yielding an observed color change from orange to red for α-NaYF4 and from yellow-green to green for d-metal optimized β-NaYF4 when illuminated in the near infrared. Consistent readouts are recorded over multiple pressure cycles and hours of illumination. With the nanoscopic size, a dynamic range of 100 nN to 10 μN, and photostability, these nanoparticles lay the foundation for visualizing dynamic mechanical processes, such as stress propagation in materials and force signaling in organisms.
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Multi-Axis Force Sensor for Human-Robot Interaction Sensing in a Rehabilitation Robotic Device. SENSORS 2017; 17:s17061294. [PMID: 28587252 PMCID: PMC5491983 DOI: 10.3390/s17061294] [Citation(s) in RCA: 26] [Impact Index Per Article: 3.7] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/03/2017] [Revised: 05/24/2017] [Accepted: 05/31/2017] [Indexed: 02/06/2023]
Abstract
Human–robot interaction sensing is a compulsory feature in modern robotic systems where direct contact or close collaboration is desired. Rehabilitation and assistive robotics are fields where interaction forces are required for both safety and increased control performance of the device with a more comfortable experience for the user. In order to provide an efficient interaction feedback between the user and rehabilitation device, high performance sensing units are demanded. This work introduces a novel design of a multi-axis force sensor dedicated for measuring pelvis interaction forces in a rehabilitation exoskeleton device. The sensor is conceived such that it has different sensitivity characteristics for the three axes of interest having also movable parts in order to allow free rotations and limit crosstalk errors. Integrated sensor electronics make it easy to acquire and process data for a real-time distributed system architecture. Two of the developed sensors are integrated and tested in a complex gait rehabilitation device for safe and compliant control.
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A Force-Visualized Silicone Retractor Attachable to Surgical Suction Pipes. SENSORS 2017; 17:s17040773. [PMID: 28379193 PMCID: PMC5422046 DOI: 10.3390/s17040773] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/02/2017] [Revised: 03/25/2017] [Accepted: 04/02/2017] [Indexed: 11/28/2022]
Abstract
This paper presents a force-visually-observable silicone retractor, which is an extension of a previously developed system that had the same functions of retracting, suction, and force sensing. These features provide not only high usability by reducing the number of tool changes, but also a safe choice of retracting by visualized force information. Suction is achieved by attaching the retractor to a suction pipe. The retractor has a deformable sensing component including a hole filled with a liquid. The hole is connected to an outer tube, and the liquid level displaced in proportion to the extent of deformation resulting from the retracting load. The liquid level is capable to be observed around the surgeon’s fingertips, which enhances the usability. The new hybrid structure of soft sensing and hard retracting allows the miniaturization of the retractor as well as a resolution of less than 0.05 N and a range of 0.1–0.7 N. The overall structure is made of silicone, which has the advantages of disposability, low cost, and easy sterilization/disinfection. This system was validated by conducting experiments.
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69
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Optimizing qPlus sensor assemblies for simultaneous scanning tunneling and noncontact atomic force microscopy operation based on finite element method analysis. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2017; 8:657-666. [PMID: 28462067 PMCID: PMC5372757 DOI: 10.3762/bjnano.8.70] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/04/2016] [Accepted: 02/28/2017] [Indexed: 05/05/2023]
Abstract
Quartz tuning forks that have a probe tip attached to the end of one of its prongs while the other prong is arrested to a holder ("qPlus" configuration) have gained considerable popularity in recent years for high-resolution atomic force microscopy imaging. The small size of the tuning forks and the complexity of the sensor architecture, however, often impede predictions on how variations in the execution of the individual assembly steps affect the performance of the completed sensor. Extending an earlier study that provided numerical analysis of qPlus-style setups without tips, this work quantifies the influence of tip attachment on the operational characteristics of the sensor. The results using finite element modeling show in particular that for setups that include a metallic tip that is connected via a separate wire to enable the simultaneous collection of local forces and tunneling currents, the exact realization of this wire connection has a major effect on sensor properties such as spring constant, quality factor, resonance frequency, and its deviation from an ideal vertical oscillation.
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Hysteresis Compensation of Piezoresistive Carbon Nanotube/Polydimethylsiloxane Composite-Based Force Sensors. SENSORS 2017; 17:s17020229. [PMID: 28125046 PMCID: PMC5335961 DOI: 10.3390/s17020229] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/09/2016] [Revised: 12/27/2016] [Accepted: 01/20/2017] [Indexed: 11/16/2022]
Abstract
This paper provides a preliminary study on the hysteresis compensation of a piezoresistive silicon-based polymer composite, poly(dimethylsiloxane) dispersed with carbon nanotubes (CNTs), to demonstrate its feasibility as a conductive composite (i.e., a force-sensitive resistor) for force sensors. In this study, the potential use of the nanotube/polydimethylsiloxane (CNT/PDMS) as a force sensor is evaluated for the first time. The experimental results show that the electrical resistance of the CNT/PDMS composite changes in response to sinusoidal loading and static compressive load. The compensated output based on the Duhem hysteresis model shows a linear relationship. This simple hysteresis model can compensate for the nonlinear frequency-dependent hysteresis phenomenon when a dynamic sinusoidal force input is applied.
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Abstract
This study used novel, force-limited nanoscale tension gauges to investigate how force and substrate stiffness guide cellular decision-making during initial cell attachment and spreading on deformable substrates. The well-established dependence of cell traction and spreading on substrate stiffness has been attributed to levels of force exerted on molecular components in focal contacts. The molecular tension gauges used in this study enabled direct estimates of threshold, pico Newton forces that instructed decision-making at different stages of cell attachment, spreading, and adhesion maturation. Results show that the force thresholds controlling adhesion and spreading transitions depend on substrate stiffness. Reported findings agree qualitatively with a proposed model that attributes rigidity-dependent differences in cell spreading to stiffness-dependent rates of competing biochemical processes. Moreover, estimated magnitudes of force thresholds governing transitions in cell attachment and spreading, based on these in situ measurements, were in remarkable agreement with prior less direct measurements.
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Force-Sensing Silicone Retractor for Attachment to Surgical Suction Pipes. SENSORS 2016; 16:s16071133. [PMID: 27455258 PMCID: PMC4970175 DOI: 10.3390/s16071133] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/02/2016] [Revised: 07/13/2016] [Accepted: 07/15/2016] [Indexed: 11/30/2022]
Abstract
This paper presents a novel force-sensing silicone retractor that can be attached to a surgical suction pipe to improve the usability of the suction and retraction functions during neurosurgery. The retractor enables simultaneous utilization of three functions: suction, retraction, and retraction-force sensing. The retractor also reduces the number of tool changes and ensures safe retraction through visualization of the magnitude of the retraction force. The proposed force-sensing system is based on a force visualization mechanism through which the force is displayed in the form of motion of a colored pole. This enables surgeons to estimate the retraction force. When a fiberscope or camera is present, the retractor enables measurement of the retraction force with a resolution of 0.05 N. The retractor has advantages of being disposable, inexpensive, and easy to sterilize or disinfect. Finite element analysis and experiments demonstrate the validity of the proposed force-sensing system.
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Nanowire Arrays as Cell Force Sensors To Investigate Adhesin-Enhanced Holdfast of Single Cell Bacteria and Biofilm Stability. NANO LETTERS 2016; 16:4656-64. [PMID: 27336224 DOI: 10.1021/acs.nanolett.6b01998] [Citation(s) in RCA: 39] [Impact Index Per Article: 4.9] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/25/2023]
Abstract
Surface attachment of a planktonic bacteria, mediated by adhesins and extracellular polymeric substances (EPS), is a crucial step for biofilm formation. Some pathogens can modulate cell adhesiveness, impacting host colonization and virulence. A framework able to quantify cell-surface interaction forces and their dependence on chemical surface composition may unveil adhesiveness control mechanisms as new targets for intervention and disease control. Here we employed InP nanowire arrays to dissect factors involved in the early stage biofilm formation of the phytopathogen Xylella fastidiosa. Ex vivo experiments demonstrate single-cell adhesion forces up to 45 nN, depending on the cell orientation with respect to the surface. Larger adhesion forces occur at the cell poles; secreted EPS layers and filaments provide additional mechanical support. Significant adhesion force enhancements were observed for single cells anchoring a biofilm and particularly on XadA1 adhesin-coated surfaces, evidencing molecular mechanisms developed by bacterial pathogens to create a stronger holdfast to specific host tissues.
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Measuring Micro-Friction Torque in MEMS Gas Bearings. SENSORS 2016; 16:s16050726. [PMID: 27213377 PMCID: PMC4883417 DOI: 10.3390/s16050726] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/07/2016] [Revised: 05/04/2016] [Accepted: 05/11/2016] [Indexed: 11/16/2022]
Abstract
An in situ measurement of micro-friction torque in MEMS gas bearings, which has been a challenging research topic for years, is realized by a system designed in this paper. In the system, a high accuracy micro-force sensor and an electronically-driven table are designed, fabricated and utilized. With appropriate installation of the sensor and bearings on the table, the engine rotor can be driven to rotate with the sensor using a silicon lever beam. One end of the beam is fixed to the shaft of the gas bearing, while the other end is free and in contact with the sensor probe tip. When the sensor begins to rotate with the table, the beam is pushed by the sensor probe to rotate in the same direction. For the beam, the friction torque from the gas bearing is balanced by the torque induced by pushing force from the sensor probe. Thus, the friction torque can be calculated as a product of the pushing force measured by the sensor and the lever arm, which is defined as the distance from the sensor probe tip to the centerline of the bearing. Experimental results demonstrate the feasibility of this system, with a sensitivity of 1.285 mV/μN·m in a range of 0 to 11.76 μN·m when the lever arm is 20 mm long. The measuring range can be modified by varying the length of the lever arm. Thus, this system has wide potential applications in measuring the micro-friction torque of gas bearings in rotating MEMS machines.
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Abstract
The distance-dependent plasmon coupling between biopolymer tethered gold or silver nanoparticles forms the foundation for the so-called plasmon rulers. While conventional plasmon ruler applications focus on the detection of singular events in the far-field spectrum, we perform in this Letter a ratiometric analysis of the continuous spectral fluctuations arising from thermal interparticle separation variations in plasmon rulers confined to fluid lipid membranes. We characterized plasmon rulers with different DNA tethers and demonstrate the ability to detect and quantify differences in the plasmon ruler potential and tether stiffness. The influence of the nature of the tether (single-stranded versus double-stranded DNA) and the length of the tether is analyzed. The characterization of the continuous variation of the interparticle separation in individual plasmon rulers through optical fluctuation analysis provides additional information about the conformational flexibility of the tether molecule(s) located in the confinement of the deeply subdiffraction limit interparticle gap and enhances the versatility of plasmon rulers as a tool in Biophysics and Nanotechnology.
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Design of a novel telerehabilitation system with a force-sensing mechanism. SENSORS 2015; 15:11511-27. [PMID: 25996511 PMCID: PMC4481901 DOI: 10.3390/s150511511] [Citation(s) in RCA: 44] [Impact Index Per Article: 4.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/17/2014] [Revised: 01/07/2015] [Accepted: 05/12/2015] [Indexed: 02/04/2023]
Abstract
Many stroke patients are expected to rehabilitate at home, which limits their access to proper rehabilitation equipment, treatment, or assessment by therapists. We have developed a novel telerehabilitation system that incorporates a human-upper-limb-like device and an exoskeleton device. The system is designed to provide the feeling of real therapist–patient contact via telerehabilitation. We applied the principle of a series elastic actuator to both the master and slave devices. On the master side, the therapist can operate the device in a rehabilitation center. When performing passive training, the master device can detect the therapist’s motion while controlling the deflection of elastic elements to near-zero, and the patient can receive the motion via the exoskeleton device. When performing active training, the design of the force-sensing mechanism in the master device can detect the assisting force added by the therapist. The force-sensing mechanism also allows force detection with an angle sensor. Patients’ safety is guaranteed by monitoring the motor’s current from the exoskeleton device. To compensate for any possible time delay or data loss, a torque-limiter mechanism was also designed in the exoskeleton device for patients’ safety. Finally, we successfully performed a system performance test for passive training with transmission control protocol/internet protocol communication.
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Temperature-compensated force/pressure sensor based on multi-walled carbon nanotube epoxy composites. SENSORS (BASEL, SWITZERLAND) 2015; 15:11133-50. [PMID: 25985160 PMCID: PMC4481925 DOI: 10.3390/s150511133] [Citation(s) in RCA: 21] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/15/2015] [Revised: 04/16/2015] [Accepted: 04/29/2015] [Indexed: 11/20/2022]
Abstract
In this study, we propose a multi-walled carbon nanotube epoxy composite sensor for force and pressure sensing in the range of 50 N-2 kN. A manufacturing procedure, including material preparation and deposition techniques, is proposed. The electrode dimensions and the layer thickness were optimized by the finite element method. Temperature compensation is realized by four nanocomposites elements, where only two elements are exposed to the measurand. In order to investigate the influence of the filler contents, samples with different compositions were prepared and investigated. Additionally, the specimens are characterized by cyclical and stepped force/pressure loads or at defined temperatures. The results show that the choice of the filler content should meet a compromise between sensitivity, temperature influence and noise behavior. At constant temperature, a force of at least 50N can be resolved. The measurement error due to the temperature influence is 150N in a temperature range of -20°C-50°C.
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The effect of climbing ability and slope inclination on vertical foot loading using a novel force sensor instrumentation system. J Hum Kinet 2014; 44:75-81. [PMID: 25713667 PMCID: PMC4327382 DOI: 10.2478/hukin-2014-0112] [Citation(s) in RCA: 24] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022] Open
Abstract
The aim of the study was to assess the effects of climbing ability and slope inclination on vertical loading both in terms the forces involved and physiological responses. Five novice and six intermediate female climbers completed a climbing route at three slope inclinations (85°, 90°, and 98°). The vertical loading during the climb was assessed by force-time integral using a Novel Pedar-X insole and physiological responses via oxygen uptake and heart rate. The novice climbers had a significantly lower (p < 0.05) vertical loading on foot holds and higher oxygen uptake and heart rate compared to intermediate climbers. A significant negative correlation was identified between the force-time integral and oxygen uptake (R = −0.72), and with heart rate (R = −0.64), respectively. The time-force integral decreased across the ascents with increasing slope inclination (p < 0.001). The results indicate that more advanced ability climbers make greater use of foot holds, with associated lowering in physiological response (oxygen uptake and heart rate) across all slope inclinations.
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Sensor-based assessment of cast placement and removal. Stud Health Technol Inform 2014; 196:259-261. [PMID: 24732518 PMCID: PMC4097323] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
Appropriate pressure during the application of a cast is critical to provide adequate stabilization of fractures. Force-sensing resistors (FSR) were used to measure pressure during cast placement and removal. The data demonstrated a signature pattern of skin pressure during the different steps of cast placement and removal. This reproducible signal provides validity evidence for our model.
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Miniature fiber-optic force sensor for vitreoretinal microsurgery based on low-coherence Fabry-Pérot interferometry. PROCEEDINGS OF SPIE--THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING 2013; 8218:82180O. [PMID: 24027611 PMCID: PMC3766974 DOI: 10.1117/12.908370] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/02/2023]
Abstract
Vitreoretinal surgery requires delicate manipulation of retinal tissue. However, tool-to-tissue interaction forces in the order of sub-millinewton are usually below the human sensory threshold. A surgical force sensor (FS) compatible with conventional surgical tools may significantly improve the surgery outcome by preventing tissue damage. We have designed and built a miniature FS for vitreoretinal surgery using a fiber-optic common-path phase-sensitive optical coherence tomography (OCT) system where the distal end of the fiber probe forms a low-finesse Fabry-Pérot (FP) cavity between the cleaved tip of the lead-in single mode fiber and the polished back surface of a stainless steel surgical tool tip. To accurately measure the change of the FP cavity length, the cavity is interrogated by the fiber-optic common-path phase-sensitive OCT. The FP cavity was illuminated with a broadband light source, and the interferometric signal was detected using a broadband spectrometer. The phase of the interferometric signal, which is proportional to the cavity length change as well as the exerted force, was extracted. We have conducted calibration experiments to characterize our one dimensional FS. Our result shows that the FS responses linearly to force in axial direction with force sensitivity better than 0.25 millinewton.
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Design of a Tool Integrating Force Sensing With Automated Insertion in Cochlear Implantation. IEEE/ASME TRANSACTIONS ON MECHATRONICS : A JOINT PUBLICATION OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY AND THE ASME DYNAMIC SYSTEMS AND CONTROL DIVISION 2012; 17:381-389. [PMID: 23482414 PMCID: PMC3591473 DOI: 10.1109/tmech.2011.2106795] [Citation(s) in RCA: 25] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
The quality of hearing restored to a deaf patient by a cochlear implant in hearing preservation cochlear implant surgery (and possibly also in routine cochlear implant surgery) is believed to depend on preserving delicate cochlear membranes while accurately inserting an electrode array deep into the spiral cochlea. Membrane rupture forces, and possibly, other indicators of suboptimal placement, are below the threshold detectable by human hands, motivating a force sensing insertion tool. Furthermore, recent studies have shown significant variability in manual insertion forces and velocities that may explain some instances of imperfect placement. Toward addressing this, an automated insertion tool was recently developed by Hussong et al. By following the same insertion tool concept, in this paper, we present mechanical enhancements that improve the surgeon's interface with the device and make it smaller and lighter. We also present electomechanical design of new components enabling integrated force sensing. The tool is designed to be sufficiently compact and light that it can be mounted to a microstereotactic frame for accurate image-guided preinsertion positioning. The new integrated force sensing system is capable of resolving forces as small as 0.005 N, and we provide experimental illustration of using forces to detect errors in electrode insertion.
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Genetically encoded force sensors for measuring mechanical forces in proteins. Commun Integr Biol 2011; 4:385-90. [PMID: 21966553 DOI: 10.4161/cib.4.4.15505] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Key Words] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/16/2011] [Accepted: 03/16/2011] [Indexed: 11/19/2022] Open
Abstract
THERE ARE THREE SOURCES OF FREE ENERGY FOR CELLS: chemical potential, electrical potential and mechanical potential. There is little known about the last one since there have not been simple ways to measure stress in proteins in cells. we have now developed genetically encoded force sensors to assess the stress in fibrous proteins in living cells. These FReT based fluorescence sensors can be read out at video rates and provide real time maps of the stress distribution in cells, tissues and animals. The sensors can be inserted into specific proteins and in general do not disturb the normal function or anatomy. The original sensors used mutant GFPs linked by elastic linkers. These sensors provide a linear output with applied stress but the response is linear in strain. To improve contrast and dynamic range we have now developed a new class of sensors that are smaller making them less invasive, and have much higher intrinsic sensitivity since force modulates the angle between the donor and acceptor much more than the distance between them. Known as cpstFRET, the probe shows improved biocompatibility, wider dynamic range and higher sensitivity.
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Force feedback in a piezoelectric linear actuator for neurosurgery. Int J Med Robot 2011; 7:268-75. [PMID: 21538769 DOI: 10.1002/rcs.391] [Citation(s) in RCA: 26] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Accepted: 03/21/2011] [Indexed: 11/10/2022]
Abstract
BACKGROUND Force feedback in robotic minimally invasive surgery allows the human operator to manipulate tissues as if his/her hands were in contact with the patient organs. A force sensor mounted on the probe raises problems with sterilization of the overall surgical tool. Also, the use of off-axis gauges introduces a moment that increases the friction force on the bearing, which can easily mask off the signal, given the small force to be measured. METHODS This work aims at designing and testing two methods for estimating the resistance to the advancement (force) experienced by a standard probe for brain biopsies within a brain-like material. The further goal is to provide a neurosurgeon using a master-slave tele-operated driver with direct feedback on the tissue mechanical characteristics. Two possible sensing methods, in-axis strain gauge force sensor and position-position error (control-based method), were implemented and tested, both aimed at device miniaturization. The analysis carried out was aimed at fulfilment of the psychophysics requirements for force detection and delay tolerance, also taking into account safety, which is directly related to the last two issues. Controller parameters definition is addressed and consideration is given to development of the device with integration of a haptic interface. RESULTS Results show better performance of the control-based method (RMSE < 0.1 N), which is also best for reliability, sterilizability, and material dimensions for the application addressed. CONCLUSIONS The control-based method developed for force estimation is compatible with the neurosurgical application and is also capable of measuring tissue resistance without any additional sensors. Force feedback in minimally invasive surgery allows the human operator to manipulate tissues as if his/her hands were in contact with the patient organs.
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Extensive and modular intrinsically disordered segments in C. elegans TTN-1 and implications in filament binding, elasticity and oblique striation. J Mol Biol 2010; 398:672-89. [PMID: 20346955 PMCID: PMC2908218 DOI: 10.1016/j.jmb.2010.03.032] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/25/2010] [Revised: 03/17/2010] [Accepted: 03/17/2010] [Indexed: 11/26/2022]
Abstract
TTN-1, a titin like protein in Caenorhabditis elegans, is encoded by a single gene and consists of multiple Ig and fibronectin 3 domains, a protein kinase domain and several regions containing tandem short repeat sequences. We have characterized TTN-1's sarcomere distribution, protein interaction with key myofibrillar proteins as well as the conformation malleability of representative motifs of five classes of short repeats. We report that two antibodies developed to portions of TTN-1 detect an approximately 2-MDa polypeptide on Western blots. In addition, by immunofluorescence staining, both of these antibodies localize to the I-band and may extend into the outer edge of the A-band in the obliquely striated muscle of the nematode. Six different 300-residue segments of TTN-1 were shown to variously interact with actin and/or myosin in vitro. Conformations of synthetic peptides of representative copies of each of the five classes of repeats--39-mer PEVT, 51-mer CEEEI, 42-mer AAPLE, 32-mer BLUE and 30-mer DispRep--were investigated by circular dichroism at different temperatures, ionic strengths and solvent polarities. The PEVT, CEEEI, DispRep and AAPLE peptides display a combination of a polyproline II helix and an unordered structure in aqueous solution and convert in trifluoroethanol to alpha-helix (PEVT, CEEEI, DispRep) and beta-turn (AAPLE) structures, respectively. The octads in BLUE motifs form unstable alpha-helix-like structures coils in aqueous solution and negligible heptad-based, alpha-helical coiled-coils. The alpha-helical structure, as modeled by threading and molecular dynamics simulations, tends to form helical bundles and crosses based on its 8-4-2-2 hydrophobic helical patterns and charge arrays on its surface. Our finding indicates that APPLE, PEVT, CEEEI and DispRep regions are all intrinsically disordered and highly reminiscent of the conformational malleability and elasticity of vertebrate titin PEVK segments. The proposed presence of long, modular and unstable alpha-helical oligomerization domains in the BLUE region of TTN-1 could bundle TTN-1 and stabilize oblique striation of the sarcomere.
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Piezoresistive Cantilever Performance-Part I: Analytical Model for Sensitivity. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS : A JOINT IEEE AND ASME PUBLICATION ON MICROSTRUCTURES, MICROACTUATORS, MICROSENSORS, AND MICROSYSTEMS 2010; 19:137-148. [PMID: 20336183 PMCID: PMC2844673 DOI: 10.1109/jmems.2009.2036581] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
An accurate analytical model for the change in resistance of a piezoresistor is necessary for the design of silicon piezoresistive transducers. Ion implantation requires a high-temperature oxidation or annealing process to activate the dopant atoms, and this treatment results in a distorted dopant profile due to diffusion. Existing analytical models do not account for the concentration dependence of piezoresistance and are not accurate for nonuniform dopant profiles. We extend previous analytical work by introducing two nondimensional factors, namely, the efficiency and geometry factors. A practical benefit of this efficiency factor is that it separates the process parameters from the design parameters; thus, designers may address requirements for cantilever geometry and fabrication process independently. To facilitate the design process, we provide a lookup table for the efficiency factor over an extensive range of process conditions. The model was validated by comparing simulation results with the experimentally determined sensitivities of piezoresistive cantilevers. We performed 9200 TSUPREM4 simulations and fabricated 50 devices from six unique process flows; we systematically explored the design space relating process parameters and cantilever sensitivity. Our treatment focuses on piezoresistive cantilevers, but the analytical sensitivity model is extensible to other piezoresistive transducers such as membrane pressure sensors.
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Piezoresistive Cantilever Performance-Part II: Optimization. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS : A JOINT IEEE AND ASME PUBLICATION ON MICROSTRUCTURES, MICROACTUATORS, MICROSENSORS, AND MICROSYSTEMS 2010; 19:149-161. [PMID: 20333323 PMCID: PMC2843105 DOI: 10.1109/jmems.2009.2036582] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
Piezoresistive silicon cantilevers fabricated by ion implantation are frequently used for force, displacement, and chemical sensors due to their low cost and electronic readout. However, the design of piezoresistive cantilevers is not a straightforward problem due to coupling between the design parameters, constraints, process conditions, and performance. We systematically analyzed the effect of design and process parameters on force resolution and then developed an optimization approach to improve force resolution while satisfying various design constraints using simulation results. The combined simulation and optimization approach is extensible to other doping methods beyond ion implantation in principle. The optimization results were validated by fabricating cantilevers with the optimized conditions and characterizing their performance. The measurement results demonstrate that the analytical model accurately predicts force and displacement resolution, and sensitivity and noise tradeoff in optimal cantilever performance. We also performed a comparison between our optimization technique and existing models and demonstrated eight times improvement in force resolution over simplified models.
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