A high-yield microassembly structure for three-dimensional microelectrode arrays

Novel glass microprobe arrays for neural recording

The probe array is a useful tool for neurophysiology to detect and record neural signals. Thus, the better understanding of neural systems can be achieved. Microfabricated probes have been widely used since fine-spacing probes with well-defined electrodes in smaller footprint can be created. This study presents a novel process to realize glass 2D-microprobe array. Dielectric material like glass can provide better signal isolation capability and biocompatibility. The through silicon vias (TSVs) can also be integrated with the glass 2D-microprobe using the micromachining process. The vertical integration of chips containing glass 2D-microprobe array is realized using these silicon TSVs. The 3D-microprobe array can be easily implemented after vertical assembly of 2D-microprobe chips using bonding. In application, the 2D glass microprobe is fabricated and characterized with a low impedance of 439 kOmega at 1 kHz. The action potential of crayfish's nerve cord has successfully been recorded using the glass microprobe with peak-to-peak amplitude of 228 muV, and SNR of 46.42. The spontaneous spike of rat's cortex has also been recorded by the glass microprobe with peak-to-peak amplitude of 90 muV, and SNR of 19.72.

Brain-computer interfaces: an overview of the hardware to record neural signals from the cortex

Brain-computer interfaces (BCIs) record neural signals from cortical origin with the objective to control a user interface for communication purposes, a robotic artifact or artificial limb as actuator. One of the key components of such a neuroprosthetic system is the neuro-technical interface itself, the electrode array. In this chapter, different designs and manufacturing techniques will be compared and assessed with respect to scaling and assembling limitations. The overview includes electroencephalogram (EEG) electrodes and epicortical brain-machine interfaces to record local field potentials (LFPs) from the surface of the cortex as well as intracortical needle electrodes that are intended to record single-unit activity. Two exemplary complementary technologies for micromachining of polyimide-based arrays and laser manufacturing of silicone rubber are presented and discussed with respect to spatial resolution, scaling limitations, and system properties. Advanced silicon micromachining technologies have led to highly sophisticated intracortical electrode arrays for fundamental neuroscientific applications. In this chapter, major approaches from the USA and Europe will be introduced and compared concerning complexity, modularity, and reliability. An assessment of the different technological solutions comparable to a strength weaknesses opportunities, and threats (SWOT) analysis might serve as guidance to select the adequate electrode array configuration for each control paradigm and strategy to realize robust, fast, and reliable BCIs.

High-resolution three-dimensional extracellular recording of neuronal activity with microfabricated electrode arrays

Microelectrode array recordings of neuronal activity present significant opportunities for studying the brain with single-cell and spike-time precision. However, challenges in device manufacturing constrain dense multisite recordings to two spatial dimensions, whereas access to the three-dimensional (3D) structure of many brain regions appears to remain a challenge. To overcome this limitation, we present two novel recording modalities of silicon-based devices aimed at establishing 3D functionality. First, we fabricated a dual-side electrode array by patterning recording sites on both the front and back of an implantable microstructure. We found that the majority of single-unit spikes could not be simultaneously detected from both sides, suggesting that in addition to providing higher spatial resolution measurements than that of single-side devices, dual-side arrays also lead to increased recording yield. Second, we obtained recordings along three principal directions with a multilayer array and demonstrated 3D spike source localization within the enclosed measurement space. The large-scale integration of such dual-side and multilayer arrays is expected to provide massively parallel recording capabilities in the brain.

NeuroMEMS: Neural Probe Microtechnologies

Neural probe technologies have already had a significant positive effect on our understanding of the brain by revealing the functioning of networks of biological neurons. Probes are implanted in different areas of the brain to record and/or stimulate specific sites in the brain. Neural probes are currently used in many clinical settings for diagnosis of brain diseases such as seizers, epilepsy, migraine, Alzheimer's, and dementia. We find these devices assisting paralyzed patients by allowing them to operate computers or robots using their neural activity. In recent years, probe technologies were assisted by rapid advancements in microfabrication and microelectronic technologies and thus are enabling highly functional and robust neural probes which are opening new and exciting avenues in neural sciences and brain machine interfaces. With a wide variety of probes that have been designed, fabricated, and tested to date, this review aims to provide an overview of the advances and recent progress in the microfabrication techniques of neural probes. In addition, we aim to highlight the challenges faced in developing and implementing ultra-long multi-site recording probes that are needed to monitor neural activity from deeper regions in the brain. Finally, we review techniques that can improve the biocompatibility of the neural probes to minimize the immune response and encourage neural growth around the electrodes for long term implantation studies.

Penetrating multichannel stimulation and recording electrodes in auditory prosthesis research

Microelectrode arrays offer the auditory systems physiologists many opportunities through a number of electrode technologies. In particular, silicon substrate electrode arrays offer a large design space including choice of layout plan, range of surface areas for active sites, a choice of site materials and high spatial resolution. Further, most designs can double as recording and stimulation electrodes in the same preparation. Scala tympani auditory prosthesis research has been aided by mapping electrodes in the cortex and the inferior colliculus to assess the CNS responses to peripheral stimulation. More recently silicon stimulation electrodes placed in the auditory nerve, cochlear nucleus and the inferior colliculus have advanced the exploration of alternative stimulation sites for auditory prostheses. Multiplication of results from experimental effort by simultaneously stimulating several locations, or by acquiring several streams of data synchronized to the same stimulation event, is a commonly sought after advantage. Examples of inherently multichannel functions which are not possible with single electrode sites include (1) current steering resulting in more focused stimulation, (2) improved signal-to-noise ratio (SNR) for recording when noise and/or neural signals appear on more than one site and (3) current source density (CSD) measurements. Still more powerful are methods that exploit closely-spaced recording and stimulation sites to improve detailed interrogation of the surrounding neural domain. Here, we discuss thin-film recording/stimulation arrays on silicon substrates. These electrode arrays have been shown to be valuable because of their precision coupled with reproducibility in an ever expanding design space. The shape of the electrode substrate can be customized to accommodate use in cortical, deep and peripheral neural structures while flexible cables, fluid delivery and novel coatings have been added to broaden their application. The use of iridium oxide as the neural interface site material has increased the efficiency of charge transfer for stimulation and lowered impedance for recording electrodes.

A 3D slim-base probe array for in vivo recorded neuron activity

This paper introduces the first experimental results of a new implantable slim-base three-dimensional (3D) probe array for cerebral applications. The probes are assembled perpendicularly into the slim-base readout platform where electrical and mechanical connections are achieved simultaneously. A new type of micromachined interconnect has been developed to establish electrical connection using extreme planarization techniques. Due to the modular approach of the platform, probe arrays of different dimensions and functionality can be assembled. The platform is only several hundred microns thick which is highly relevant for chronic experiments in which the probe array should be able to float on top of the brain. Preliminary tests were carried out with the implantation of a probe array into the auditory cortex of a rat.

A microsystem with varying-length electrode arrays for auditory nerve prostheses

This paper reports the design, fabrication and simulation of a novel array of micromachined electrodes with different lengths for use in auditory nerve prostheses. A 10 x 10 array is created in a 1 mm2 on silicon with bulk micromachining technology. The electrode lengths vary from 200 microm to 400 microm. This design could provide access to most fascicles within the auditory nerve and thus allow stimulation of a broad tonotopic range within the nerve fiber. A multichannel ultra-low power circuit is also designed, fabricated, and tested for neural signal recording. The chip is fabricated in 0.5 microm AMI CMOS technology with a die size of 1.5 mm x 1.5 mm. The total power consumption is less than 100 microW.

Implantable neural probe systems for cortical neuroprostheses

Advanced microfabrication processes, biomaterials, and systems technologies are enabling progressively more sophisticated devices to interface with the brain. In particular, microscale implantable neural probe systems have been developed to reliably stimulate and/or record populations of neurons for long periods of time. Our group has developed a silicon-based probe technology is effective for recording neural activity from neuronal populations for sustained time periods. In a recent study in rats, these probes consistently and reliably provided high-quality spike recordings over extended periods of time. These probes are being used to investigate and develop cortical neuroprostheses and brain-machine interface systems. This neural probe technology is currently being extended to include polymer substrates, chemical interfaces for drug delivery, advanced coatings for improved biocompatibility, and integrated electronics for wireless communication to the outside world.

Finite element analysis of a floating microstimulator

Analytical solutions for voltage fields in a volume conductor are available only for ideal electrodes with radially symmetric contacts and infinitely extending substrates. Practical electrodes for neural stimulation may have asymmetric contacts and finite substrate dimensions and hence deviate from the ideal geometries. For instance, it needs to be determined if the analytical solutions are adequate for simulations of narrow shank electrodes where the substrate width is comparable to the size of the contacts. As an extension to this problem, a "floating" stimulator can be envisioned where the substrate would be finite in all directions. The question then becomes how small this floating stimulator can be made before its stimulation strength is compromised by the decrease in the medium impedance between the contacts as the contacts are approaching each other. We used finite element modeling to solve the voltage and current profiles generated by these radially asymmetric electrode geometries in a volume conductor. The simulation results suggest that both the substrate size and the bipolar contact separation influence the voltage field when these parameters are as small as a few times the contact size. Both of these effects are larger for increasing elevations from the contact surface, and even stronger for floating electrodes (finite substrate in all directions) than the shank-type electrodes. Location of the contacts on the floating electrode also plays a role in determining the voltage field. The voltage field for any device size and current, and any specific resistance of the volume conductor can be predicted from these results so long as the aspect ratios are preserved.

Neural recording chip with penetrating Si microprobe electrode array by selective vapor-liquid-solid growth method

This paper reports on the development of neural recording chip device with penetrating Si microprobe electrode array using IC-process. The Si microprobe electrode array each with a few microns in diameter was grown at predetermined positions with interconnection-wirings. Controlling the diameter and the length of Si probes can be realized by a selective vapor-liquid-solid (VLS) growth. In this work, Si probes with 2 mum in diameter and 60 microm in length were fabricated, which were conductive-Si probes and they were encapsulated with SiO2 layers. To reduce the impedance of Si probes, the tips of Si probes were coated with a metal Au layer. As a result, penetrating Si microprobes measured in saline solution, showed impedance of the order of 300 k to 500 komega at 1 kHz. Packaging techniques for the probe chip were performed with a fluid-tight chamber and a flexible-printed-circuit of polyimide for neural recording experiments.

An Integrated System for Multichannel Neuronal Recording With Spike/LFP Separation, Integrated A/D Conversion and Threshold Detection

A mixed-signal front-end processor for multichannel neuronal recording is described. It receives 12 differential-input channels of implanted recording electrodes. A programmable cutoff High Pass Filter (HPF) blocks dc and low-frequency input drift at about 1 Hz. The signals are band-split at about 200 Hz to low-frequency Local Field Potential (LFP) and high-frequency spike data (SPK), which is band limited by a programmable-cutoff LPF, in a range of 8-13 kHz. Amplifier offsets are compensated by 5-bit calibration digital-to-analog converters (DACs). The SPK and LFP channels provide variable amplification rates of up to 5000 and 500, respectively. The analog signals are converted into 10-bit digital form, and streamed out over a serial digital bus at up to 8 Mbps. A threshold filter suppresses inactive portions of the signal and emits only spike segments of programmable length. A prototype has been fabricated on a 0.35-microm CMOS process and tested successfully, demonstrating a 3-microV noise level. Special interface system incorporating an embedded CPU core in a programmable logic device accompanied by real-time software has been developed to allow connectivity to a computer host.

Neural prostheses and biomedical microsystems in neurological rehabilitation

Interfaces between electrodes and the neural system differ with respect to material and shape depending on their intended application and fabrication method. This chapter will review the different electrode designs regarding the technological implementation and fabrication process. Furthermore this book chapter will describe electrodes for interfacing the peripheral nerves like cuff, book or helix as well as electrodes for interfacing the cortex like needle arrays. The implantation method and mechanical interaction between the electrode and the nervous tissue were taken into consideration. To develop appropriate microtechnological assembling strategies that ensure proper interfacing between the tiny electrodes and microelectronics or connectors is one of the major challenges. The integration of electronics into the system helps to improve the reliability of detecting neural signals and reduces the size of the implants. Promising results with these novel electrodes will pave the road for future developments such as visual prosthetics or improved control of artificial limbs in paralyzed patients.

Spatiotemporal pH dynamics following insertion of neural microelectrode arrays

Insertion trauma is a critical issue when assessing intracortical electrophysiological and neurochemical recordings. Previous reports document a wide variety of insertion techniques with speeds ranging from 10 microm/s to 10 m/s. We hypothesize that insertion speed has an effect on tissue trauma induced by implantation of a neural probe. In order to monitor the neural interface during and after probe insertion, we have developed a silicon-substrate array with hydrous iridium oxide microelectrodes for potentiometric recording of extracellular pH (pH(e)), a measure of brain homeostasis. Microelectrode sites were sensitive to pH in the super-Nernstian range (-85.9 mV/pH unit) and selective over other analytes including ascorbic acid, Na(+), K(+), Ca(2+), and Mg(2+). Following insertion, arrays recorded either triphasic or biphasic pH(e) responses, with a greater degree of prolonged acidosis for insertions at 50 microm/s than at 0.5 mm/s or 1.0 mm/s (p<0.05). Spatiotemporal analysis of the recordings also revealed micro-scale variability in the pH(e) response along the array, even when using the same insertion technique. Implants with more intense acidosis were often associated histologically with blood along the probe tract. The potentiometric microsensor array has implications not only as a useful tool to measure extracellular pH, but also as a feedback tool for delivery of pharmacological agents to treat surgical brain trauma.

Toward a self-deploying shape memory polymer neuronal electrode

The widespread application of neuronal probes for chronic recording of brain activity and functional stimulation has been slow to develop partially due to long-term biocompatibility problems with existing metallic and ceramic probes and the tissue damage caused during probe insertion. Stiff probes are easily inserted into soft brain tissue but cause astrocytic scars that become insulating sheaths between electrodes and neurons. In this communication, we explore the feasibility of a new approach to the composition and implantation of chronic electrode arrays. We demonstrate that softer polymer-based probes can be inserted into the olfactory bulb of a mouse and that slow insertion of the probes reduces astrocytic scarring. We further present the development of a micromachined shape memory polymer probe, which provides a vehicle to self-deploy an electrode at suitably slow rates and which can provide sufficient force to penetrate the brain. The deployment rate and composition of shape memory polymer probes can be tailored by polymer chemistry and actuator design. We conclude that it is feasible to fabricate shape memory polymer-based electrodes that would slowly self-implant compliant conductors into the brain, and both decrease initial trauma resulting from implantation and enhance long-term biocompatibility for long-term neuronal measurement and stimulation.

Analog frontend for multichannel neuronal recording system with spike and LFP separation

A 0.35microm CMOS integrated circuit for multi-channel neuronal recording with twelve true-differential channels, band separation and digital offset calibration is presented. The measured signal is separated into a low-frequency local field potential and high-frequency spike data. Digitally programmable gains of up to 60 and 80 dB for the local field potential and spike bands are provided. DC offsets are compensated on both bands by means of digitally programmable DACs. Spike band is limited by a second order low-pass filter with digitally programmable cutoff frequency. The IC has been fabricated and tested. 3microV input referred noise on the spike data band was measured.

A high-yield fabrication process for silicon neural probes

There is a great need for silicon microelectrodes that can simultaneously monitor the activity of many neurons in the brain. However, one of the existing processes for fabricating silicon microelectrodes-reactive-ion etching in combination with anisotropic KOH etching-breaks down at the wet-etching step for device release. Here we describe a modified wet-etching sidewall-protection technique for the high-yield fabrication of well-defined silicon probe structures, using a Teflon shield and low-pressure chemical vapor deposition (LPCVD) silicon nitride. In the proposed method, a micro-tab holds each individual probe to the central scaffold, allowing uniform anisotropic KOH etching. Using this approach, we obtained a well-defined probe structure without device loss during the wet-etching process. This simple method yielded more accurate fabrication and an improved mechanical profile.

Nyquist interpolation improves neuron yield in multiunit recordings

Multiunit electrodes, in particular tetrodes and polytrodes, are able to isolate action potentials from many neurons simultaneously. However, inaccuracies in the post-acquisition reconstruction of recorded spike waveforms can affect the reliability of spike detection and sorting. Here we show that bandlimited interpolation with sample-and-hold delay correction reduces waveform variability, leading to improved reliability of threshold-based event detection and improved spike sorting accuracy. Interpolation of continuously acquired data is, however, computationally expensive. A cost-benefit analysis was made of varying sampling rates from 12.5 kHz (no interpolation) to 100 kHz (eight times oversampling, with respect to the Nyquist frequency), taking into consideration the final application of the data. For most purposes, including spike sorting, sample rates below 25 kHz with bandlimited interpolation to 50 kHz were ideal, with negligible gains above this rate. A practical benefit, especially for large electrode arrays, is that the bandwidth and storage requirements can be greatly reduced by using data acquisition rates at or slightly above the Nyquist frequency.

Dexamethasone treatment reduces astroglia responses to inserted neuroprosthetic devices in rat neocortex

Microfabricated neural prosthetic devices hold great potential for increasing knowledge of brain function and treating patients with lost CNS function. Time-dependent loss of brain-device communication limits long-term use of these devices. Lost CNS function is associated with reactive responses that produce an encapsulating cellular sheath. Since early reactive responses may be associated with injuries produced at the time of device insertion, for example, vascular damage and disruption of the blood-brain barrier, we tested the effectiveness of the synthetic glucocorticoid, dexamethasone, in controlling insertion- and device-associated reactive responses. Dexamethasone (200 microg/kg) was administered as subcutaneous injections for 1 or 6 days beginning on the day of device insertion. Single shank microfabricated silicon devices were inserted into pre-motor cortex of adult rats. Reactive responses were assessed by immunohistochemistry for glial fibrillary acidic protein (astrocytes), CD11b (microglia), and laminin that labeled extracellular protein deposited around the insertion site and in association with vascular elements. Data were collected by confocal microscopy imaging of 100-microm-thick tissue slices. Reactive responses in vehicle control animals were similar to non-injected control animals. Dexamethasone treatment profoundly effected early and sustained reactive responses observed 1 and 6 weeks following device insertion, respectively. Dexamethasone treatment greatly attenuated astroglia responses, while microglia and vascular responses appeared to be increased. The 6-day treatment was more effective than the single injection regime. These results suggest that anti-inflammatory agents can be used to control reactive responses around inserted neural prosthetic devices and may provide a means to insure their long-term function.

Wireless multichannel biopotential recording using an integrated FM telemetry circuit

This paper presents a four-channel telemetric microsystem featuring on-chip alternating current amplification, direct current baseline stabilization, clock generation, time-division multiplexing, and wireless frequency-modulation transmission of microvolt- and millivolt-range input biopotentials in the very high frequency band of 94-98 MHz over a distance of approximately 0.5 m. It consists of a 4.84-mm2 integrated circuit, fabricated using a 1.5-microm double-poly double-metal n-well standard complementary metal-oxide semiconductor process, interfaced with only three off-chip components on a custom-designed printed-circuit board that measures 1.7 x 1.2 x 0.16 cm3, and weighs 1.1 g including two miniature 1.5-V batteries. We characterize the microsystem performance, operating in a truly wireless fashion in single-channel and multichannel operation modes, via extensive benchtop and in vitro tests in saline utilizing two different micromachined neural recording microelectrodes, while dissipating approximately 2.2 mW from a 3-V power supply. Moreover, we demonstrate successful wireless in vivo recording of spontaneous neural activity at 96.2 MHz from the auditory cortex of an awake marmoset monkey at several transmission distances ranging from 10 to 50 cm with signal-to-noise ratios in the range of 8.4-9.5 dB.

Easy-to-prepare assembly array of Tungsten microelectrodes

This paper provides a detailed process flow for fabricating an easy-to-prepare, inexpensive, dense array of tungsten microelectrodes. We designed the process flow to minimize routine tasks by separating an initial preparation of a master mold from a routine preparation of substrate replication, array assembly and tip processing. Sandblast processing first produced a glass mold with a pattern of a series of protruding lines at a requested interval of a few hundred micrometers. Copying the groove pattern onto polystyrene mass-produced a replica substrate. Tungsten probes were then aligned on the substrate, and the tips of probes were finely processed in the block.

Estimation of neural energy in microelectrode signals

We considered the problem of determining the neural contribution to the signal recorded by an intracortical electrode. We developed a linear least-squares approach to determine the energy fraction of a signal attributable to an arbitrary number of autocorrelation-defined signals buried in noise. Application of the method requires estimation of autocorrelation functions R(ap)(tau) characterizing the action potential (AP) waveforms and R(n)(tau) characterizing background noise. This method was applied to the analysis of chronically implanted microelectrode signals from motor cortex of rat. We found that neural (AP) energy consisted of a large-signal component which grows linearly with the number of threshold-detected neural events and a small-signal component unrelated to the count of threshold-detected AP signals. The addition of pseudorandom noise to electrode signals demonstrated the algorithm's effectiveness for a wide range of noise-to-signal energy ratios (0.08 to 39). We suggest, therefore, that the method could be of use in providing a measure of neural response in situations where clearly identified spike waveforms cannot be isolated, or in providing an additional 'background' measure of microelectrode neural activity to supplement the traditional AP spike count.

Single neuronal recordings using surface micromachined polysilicon microelectrodes

Bulk micromachining techniques of silicon have been used successfully in the past several years to microfabricate microelectrodes for monitoring single neurons in acute and chronic experiments. In this study we report for the first time a novel surface micromachining technique to microfabricate a very thin polysilicon microelectrode that can be used for monitoring single-unit activity in the central nervous system. The microelectrodes are 3 mm long and 50 microm x 3.75 microm in cross-section. Excellent signal to noise ratios in the order of 25-35 dB were obtained while recording neuronal action potentials. The microelectrodes successfully penetrated the brains after a microincision of the dura mater. Chronic implantation of the microprobe for up to 33 days produced only minor gliosis. Since the polysilicon shank acts as a conductor, additional processing steps involved in laying conductor lines on silicon substrates are avoided. Further, surface micromachining allows for fabricating extremely thin microelectrodes which could result in decreased inflammatory responses. We conclude that the polysilicon microelectrode reported here could be a complementary approach to bulk-micromachined silicon microelectrodes for chronic monitoring of single neurons in the central nervous system.

An economical multi-channel cortical electrode array for extended periods of recording during behavior

We report the development of a low-cost chronic multi-channel microwire electrode array for recording multi-unit cortical responses in behaving rodents. The design was motivated by three issues. First, standard connector systems tended to disconnect from the head-stage during extended periods of behavior. Disconnections resulted in a loss of data and an interruption of the animals' behavior. Second, the use of low insertion force connectors with locking mechanisms was cost prohibitive. Finally, connecting the head-stage to a skull-mounted connector on an unrestrained animal was highly stressful for both the researcher and animal. The design developed uses a high insertion force DIP socket separated from the skullcap that prevents inadvertent disconnects, is inexpensive, and simplifies connecting unrestrained rodents. Electrodes were implanted in layer IV of primary auditory cortex in 11 Sprague-Dawley rats. Performance of the electrodes was monitored for 6 weeks. None of the behaving animals became disconnected from the recording system during recording sessions lasting 6 h. The mean signal-to-noise ratio on all channels (154) following surgery was 3.9+/-0.2. Of the 154 channels implanted, 130 exhibited driven activity following surgery. Forty percent of the arrays continued to exhibit driven neural activity at 6 weeks.

A comparison of chronic multi-channel cortical implantation techniques: manual versus mechanical insertion

High-density multi-channel intra-cortical electrode arrays allow researchers to record simultaneously from populations of neurons for the purpose of understanding neural coding and plasticity. These devices have tens to hundreds of electrodes spaced within a few square millimeters. During insertion, the high-density probes can compress the cortex several millimeters prior to breaking through the pia. Compression of cortical tissue has been demonstrated to result in traumatic brain injury (TBI) which may be a major contributor to low electrode yield and decreased recording longevity. Two insertion techniques for chronically implanting multi-wire electrode arrays in layer IV of primary auditory cortex were compared. A mechanical insertion device, capable of rapidly inserting the electrode array without visible compression of the brain, was constructed. The neural responses to broadband clicks and pure tones recorded from the arrays inserted with the mechanical device were compared to the results from a manual insertion method using a micromanipulator. Both techniques result in a similar number of active channels directly following surgery with a mean signal-to-noise ratio of approximately 4.5. Over 60% of the animals implanted with the mechanical insertion device had driven activity at week 6 whereas none of the animals with manually inserted arrays exhibited functional responses after 3 weeks. This report provides initial evidence that mechanical insertion devices, which prevent cortical compression, increase electrode recording longevity.

Chronic neural recording using silicon-substrate microelectrode arrays implanted in cerebral cortex

An important aspect of the development of cortical prostheses is the enhancement of suitable implantable microelectrode arrays for chronic neural recording. The objective of this study was to investigate the recording performance of silicon-substrate micromachined probes in terms of reliability and signal quality. These probes were found to consistently and reliably provide high-quality spike recordings over extended periods of time lasting up to 127 days. In a consecutive series of ten rodents involving 14 implanted probes, 13/14 (93%) of the devices remained functional throughout the assessment period. More than 90% of the probe sites consistently recorded spike activity with signal-to-noise ratios sufficient for amplitudes and waveform-based discrimination. Histological analysis of the tissue surrounding the probes generally indicated the development of a stable interface sufficient for sustained electrical contact. The results of this study demonstrate that these planar silicon probes are suitable for long-term recording in the cerebral cortex and provide an effective platform technology foundation for microscale intracortical neural interfaces for use in humans.

Biocompatible benzocyclobutene (BCB)-based neural implants with micro-fluidic channel

Poly-benzocyclobutene (BCB)-based intracortical neural implant was fabricated, in which micro-fluidic channel was embedded to deliver drug solutions. BCB presents several attractive features for chronic applications: flexibility, biocompatibility, desirable chemical and electrical properties, and can be easily manufactured using existing batch micro-fabrication technology. The fabricated implants have single shank with three recording sites (20 microm x 20 microm) and two reserviors (inlet and outlet). The channel had large volume (40 microm width and 10 microm height), and hydrophobic surface to provide a high degree of chemical inertness. All the recording sites were positioned near the end of the shank in order to increase the probability of recording neural signals from a target volume of tissue. In vitro cytotoxicity tests of prototype implants revealed no adverse toxic effects on cultured cells. The implant with a silicon backbone layer of 5-10 microm was robust enough to penetrate rat's pia without buckling, a major drawback of polymer alone. The averaged impedance value at 1 KHz was approximately 1.2 MOmega. Simultaneous recordings of neural signals from barrel cortex of a rat were successfully demonstrated.

Microelectrode Array Fabrication by Electrical Discharge Machining and Chemical Etching

Wire electrical discharge machining (EDM), with a complementary chemical etching process, is explored and assessed as a method for developing microelectrode array assemblies for intracortically recording brain activity. Assembly processes based on these methods are highlighted, and results showing neural activity successfully recorded from the brain of a mouse using an EDM-based device are presented. Several structures relevant to the fabrication of microelectrode arrays are also offered in order to demonstrate the capabilities of EDM.

Electrode systems for measuring cardiac impedances using optical transmembrane potential sensors and interstitial electrodes--theoretical design

The cardiac electrical substrate is a challenge to direct measurement of its properties. Optical technology together with the capability to fabricate small electrodes at close spacings opens new possibilities. Here, those possibilities are explored from a theoretical viewpoint. It appears that with careful measurements from a well-designed set of electrodes one can obtain structural conductivities, separating intracellular from interstitial values, and longitudinal from transverse. Resting membrane resistance also can be obtained.

Silicon-substrate intracortical microelectrode arrays for long-term recording of neuronal spike activity in cerebral cortex

This study investigated the use of planar, silicon-substrate microelectrodes for chronic unit recording in the cerebral cortex. The 16-channel microelectrodes consisted of four penetrating shanks with four recording sites on each shank. The chronic electrode assembly included an integrated silicon ribbon cable and percutaneous connector. In a consecutive series of six rats, 5/6 (83%) of the implanted microelectrodes recorded neuronal spike activity for more than six weeks, with four of the implants (66%) remaining functional for more than 28 weeks. In each animal, more than 80% of the electrode sites recorded spike activity over sequential recording sessions during the postoperative time period. These results provide a performance baseline to support further electrode system development for intracortical neural implant systems for medical applications.

Instrumentation to evaluate neural signal recording properties of micromachined microelectrodes inserted in invertebrate nerve

The design and characterization of instrumentation for application in evaluating the neural signal recording properties of probe-type microelectrodes, micromachined from silicon, are reported. Key aspects include the close matching of gain and frequency response between channels (better than 1%), flexibility in signal conditioning options, the ability to operate with a wide range of (microelectrode) recording site dimensions (4 microm x 4 micrm to 50 microm x 50 microm), and hence impedances, and the facility to monitor and store instrumentation settings on computer along with the recorded signals. Noise levels ranged from 3.7 microV rms for a 50 microm site, to 11.7 microV rms for a microm site, measured in saline. Close matching between channels was required to enable comparisons between different sites and different probes to be made with confidence; however, the instrumentation could be readily applied to less demanding applications.

Visual prostheses

The development of man-made systems to restore functional vision in the profoundly blind has recently undergone a renaissance that has been fueled by a combination of celebrity and government interest, advances in the field of bioengineering, and successes with existing neuroprosthetic systems. This chapter presents the underlying physiologic principles of artificial vision, discusses three contemporary approaches to restoring functional vision in the blind, and concludes by presenting several relevant questions to vision prostheses. While there has been significant progress in the individual components constituting an artificial vision system, the remaining challenge of integrating these components with each other and the nervous system does not lie strictly in the realm of neuroscience, medicine, or engineering but at the interface of all three. In spite of the apparent complexity of an artificial vision system, it is not unreasonable to be optimistic about its eventual success.

Sending sound to the brain

The cochlear implant, a microelectrode array that directly stimulates the auditory nerve, has greatly benefited many individuals with profound deafness. Deaf patients without an intact auditory nerve may be helped by the next generation of auditory prostheses: surface or penetrating auditory brainstem implants that bypass the auditory nerve and directly stimulate auditory processing centers in the brainstem.

Single-unit neural recording with active microelectrode arrays

This paper discusses the single-unit recording characteristics of microelectrode arrays containing on-chip signal processing circuitry. Probes buffered using on-chip unity-gain operational amplifiers provide an output resistance of 200 ohm with an input-referred noise of 11-muV root-mean-square (rms) (100 Hz-10 kHz). Simultaneous in vivo recordings from single neurons using buffered and unbuffered (passive) iridium recording sites separated by less than 20 microm have shown that the use of on-chip circuitry does not significantly degrade system noise. Single-unit neural activity has also been studied using probes containing closed-loop preamplifiers having a voltage gain of 40 dB and a bandwidth of 13 kHz, and several input dc-baseline stabilization techniques have been evaluated. Low-noise in vivo recordings with a multiplexed probe have been demonstrated for the first time using an external asymmetrical clock running at 200 kHz. The multiplexed system adds less than 8-muV rms of noise to the recorded signals, suppressing the 5-V clock transitions to less than 2 ppm.

An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process

This paper reports an all-silicon fully symmetrical z-axis micro-g accelerometer that is fabricated on a single-silicon wafer using a combined surface and bulk fabrication process. The microaccelerometer has high device sensitivity, low noise, and low/controllable damping that are the key factors for attaining micro g and sub-micro g resolution in capacitive accelerometers. The microfabrication process produces a large proof mass by using the whole wafer thickness and a large sense capacitance by utilizing a thin sacrificial layer. The sense/feedback electrodes are formed by a deposited 2-3 microns polysilicon film with embedded 25-35 microns-thick vertical stiffeners. These electrodes, while thin, are made very stiff by the thick embedded stiffeners so that force rebalancing of the proof mass becomes possible. The polysilicon electrodes are patterned to create damping holes. The microaccelerometers are batch-fabricated, packaged, and tested successfully. A device with a 2-mm x 1-mm proof mass and a full bridge support has a measured sensitivity of 2 pF/g. The measured sensitivity of a 4-mm x 1-mm accelerometer with a cantilever support is 19.4 pF/g. The calculated noise floor of these devices at atmosphere are 0.23 micro g/sqrt(Hz) and 0.16 micro g/sqrt(Hz), respectively.

A high-yield microassembly structure for three-dimensional microelectrode arrays

This paper presents a practical microassembly process for three-dimensional (3-D) microelectrode arrays for recording and stimulation in the central nervous system (CNS). Orthogonal lead transfers between the micromachined two-dimensional probes and a cortical surface platform are formed by attaching gold beams on the probes to pads on the platform using wire-free ultrasonic bonding. The low-profile (150 microns) outrigger design of the probes allows the bonding of fully assembled high-density arrays. Micromachined assembly tools allow the formation of a full 3-D probe array within 30 min. Arrays having up to 8 x 16 shanks on 200-micron centers have been realized and used to record cortical single units successfully. Active 3-D probe arrays containing on-chip CMOS signal processing circuitry have also been created using the microassembly approach. In addition, a dynamic insertion technique has been explored to allow the implantation of high-density probe arrays into feline cortex at high-speed and with minimal traumatic injury.