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Labed M, Moon JY, Kim SI, Park JH, Kim JS, Venkata Prasad C, Bae SH, Rim YS. 2D Embedded Ultrawide Bandgap Devices for Extreme Environment Applications. ACS NANO 2024. [PMID: 39436685 DOI: 10.1021/acsnano.4c09173] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/23/2024]
Abstract
Ultrawide bandgap semiconductors such as AlGaN, AlN, diamond, and β-Ga2O3 have significantly enhanced the functionality of electronic and optoelectronic devices, particularly in harsh environment conditions. However, some of these materials face challenges such as low thermal conductivity, limited P-type conductivity, and scalability issues, which can hinder device performance under extreme conditions like high temperature and irradiation. In this review paper, we explore the integration of various two-dimensional materials (2DMs) to address these challenges. These materials offer excellent properties such as high thermal conductivity, mechanical strength, and electrical properties. Notably, graphene, hexagonal boron nitride, transition metal dichalcogenides, 2D and quasi-2D Ga2O3, TeO2, and others are investigated for their potential in improving ultrawide bandgap semiconductor-based devices. We highlight the significant improvement observed in the device performance after the incorporation of 2D materials. By leveraging the properties of these materials, ultrawide bandgap semiconductor devices demonstrate enhanced functionality and resilience in harsh environmental conditions. This review provides valuable insights into the role of 2D materials in advancing the field of ultrawide bandgap semiconductors and highlights opportunities for further research and development in this area.
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Affiliation(s)
- Madani Labed
- Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone, Sejong University, Seoul 05006, Republic of Korea
- Institute of Semiconductor and System IC, Sejong University Seoul, Seoul 05006, Republic of Korea
| | - Ji-Yun Moon
- Department of Mechanical Engineering and Materials Science, Washington University in Saint Louis, Saint Louis, Missouri 63130, United States
| | - Seung-Il Kim
- Department of Mechanical Engineering and Materials Science, Washington University in Saint Louis, Saint Louis, Missouri 63130, United States
| | - Jang Hyeok Park
- Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone, Sejong University, Seoul 05006, Republic of Korea
- Institute of Semiconductor and System IC, Sejong University Seoul, Seoul 05006, Republic of Korea
| | - Justin S Kim
- Department of Mechanical Engineering and Materials Science, Washington University in Saint Louis, Saint Louis, Missouri 63130, United States
- Institute of Materials Science and Engineering, Washington University in Saint Louis, Saint Louis, Missouri 63130, United States
| | - Chowdam Venkata Prasad
- Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone, Sejong University, Seoul 05006, Republic of Korea
- Institute of Semiconductor and System IC, Sejong University Seoul, Seoul 05006, Republic of Korea
| | - Sang-Hoon Bae
- Department of Mechanical Engineering and Materials Science, Washington University in Saint Louis, Saint Louis, Missouri 63130, United States
- Institute of Materials Science and Engineering, Washington University in Saint Louis, Saint Louis, Missouri 63130, United States
| | - You Seung Rim
- Department of Semiconductor Systems Engineering and Convergence Engineering for Intelligent Drone, Sejong University, Seoul 05006, Republic of Korea
- Institute of Semiconductor and System IC, Sejong University Seoul, Seoul 05006, Republic of Korea
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2
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Yasuoka T, Susami H, Liu L, Dang GT, Kawaharamura T. Analysis of dislocation defects in compositionally step-graded α-(Al x Ga 1-x ) 2O 3 layers. RSC Adv 2024; 14:31570-31576. [PMID: 39372044 PMCID: PMC11450698 DOI: 10.1039/d4ra06182a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/27/2024] [Accepted: 09/11/2024] [Indexed: 10/08/2024] Open
Abstract
The ultra-wide bandgap semiconductor α-Ga2O3 can be heteroepitaxially grown on a sapphire substrate. However, due to a lattice mismatch of about 4.6% with a sapphire substrate, many dislocation defects occur in α-Ga2O3 films. To reduce the dislocation density, compositionally step-graded α-(Al x Ga1-x )2O3 layers were fabricated on a c-plane sapphire substrate using mist CVD. TEM measurements revealed few dislocations in the initial layer of α-(Al0.96Ga0.04)2O3, but numerous dislocations were observed in the subsequent layer of α-(Al0.84Ga0.16)2O3. However, the step-graded α-(Al x Ga1-x )2O3 layers exhibited bending of the dislocations under both compressive and tensile strains due to compositional differences of α-(Al x Ga1-x )2O3, resulting in about 50% reduction of the dislocation density in the high-Ga-composition layer of α-(Al x Ga1-x )2O3. The introduction of multiple 50 nm α-Ga2O3 layers into the compositionally step-graded α-(Al x Ga1-x )2O3 layers resulted in a notable reduction in dislocation defects at the interface between the sandwiched α-Ga2O3 layers. It is assumed that the dislocations were bent by the strain caused by the composition change, resulting in a decrease in the number of dislocations. It is anticipated that further reduction of dislocation density will be achieved by optimizing the composition change and thicknesses of layers that provide effective strain for dislocation bending, and by stacking these layers.
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Affiliation(s)
- Tatsuya Yasuoka
- School of Systems Engineering, Kochi University of Technology 185 Miyanokuchi, Tosayamada, Kami Kochi 782-8502 Japan
| | - Hiromu Susami
- School of Systems Engineering, Kochi University of Technology 185 Miyanokuchi, Tosayamada, Kami Kochi 782-8502 Japan
| | - Li Liu
- School of Systems Engineering, Kochi University of Technology 185 Miyanokuchi, Tosayamada, Kami Kochi 782-8502 Japan
- Center for Nanotechnology, Research Institute, Kochi University of Technology 185 Miyanokuchi, Tosayamada, Kami Kochi 782-8502 Japan
| | - Giang T Dang
- School of Systems Engineering, Kochi University of Technology 185 Miyanokuchi, Tosayamada, Kami Kochi 782-8502 Japan
- Center for Nanotechnology, Research Institute, Kochi University of Technology 185 Miyanokuchi, Tosayamada, Kami Kochi 782-8502 Japan
| | - Toshiyuki Kawaharamura
- School of Systems Engineering, Kochi University of Technology 185 Miyanokuchi, Tosayamada, Kami Kochi 782-8502 Japan
- Center for Nanotechnology, Research Institute, Kochi University of Technology 185 Miyanokuchi, Tosayamada, Kami Kochi 782-8502 Japan
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3
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Chen R, Sathasivam S, Borowiec J, Carmalt CJ. An Aerosol-Assisted Chemical Vapor Deposition Route to Tin-Doped Gallium Oxide Thin Films with Optoelectronic Properties. ACS APPLIED ELECTRONIC MATERIALS 2024; 6:6085-6091. [PMID: 39221136 PMCID: PMC11360363 DOI: 10.1021/acsaelm.4c00973] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/29/2024] [Revised: 07/27/2024] [Accepted: 07/29/2024] [Indexed: 09/04/2024]
Abstract
Gallium oxide is a wide-bandgap compound semiconductor material renowned for its diverse applications spanning gas sensors, liquid crystal displays, transparent electrodes, and ultraviolet detectors. This paper details the aerosol assisted chemical vapor deposition synthesis of tin doped gallium oxide thin films using gallium acetylacetonate and monobutyltin trichloride dissolved in methanol. It was observed that Sn doping resulted in a reduction in the transmittance of Ga2O3 films within the visible spectrum, while preserving the wide bandgap characteristics of 4.8 eV. Furthermore, Hall effect testing revealed a substantial decrease in the resistivity of Sn-doped Ga2O3 films, reducing it from 4.2 × 106 Ω cm to 2 × 105 Ω cm for the 2.5 at. % Sn:Ga2O3 compared to the nominally undoped Ga2O3.
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Affiliation(s)
- Ruizhe Chen
- Materials
Chemistry Centre, Department of Chemistry, University College London, 20 Gordon Street, London WC1H 0AJ, U.K.
| | - Sanjayan Sathasivam
- Materials
Chemistry Centre, Department of Chemistry, University College London, 20 Gordon Street, London WC1H 0AJ, U.K.
- School
of Engineering, London South Bank University, London SE1 0AA, U.K.
| | - Joanna Borowiec
- Materials
Chemistry Centre, Department of Chemistry, University College London, 20 Gordon Street, London WC1H 0AJ, U.K.
| | - Claire J Carmalt
- Materials
Chemistry Centre, Department of Chemistry, University College London, 20 Gordon Street, London WC1H 0AJ, U.K.
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4
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Yasuoka T, Liu L, Dang GT, Kawaharamura T. Growth of α-Ga 2O 3 from Gallium Acetylacetonate under HCl Support by Mist Chemical Vapor Deposition. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:1221. [PMID: 39057897 PMCID: PMC11279528 DOI: 10.3390/nano14141221] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/18/2024] [Revised: 07/05/2024] [Accepted: 07/17/2024] [Indexed: 07/28/2024]
Abstract
α-Ga2O3 films were grown on a c-plane sapphire substrate by HCl-supported mist chemical vapor deposition with multiple solution chambers, and the effect of HCl support on α-Ga2O3 film quality was investigated. The growth rate monotonically increased with increasing Ga supply rate. However, as the Ga supply rate was higher than 0.1 mmol/min, the growth rate further increased with increasing HCl supply rate. The surface roughness was improved by HCl support when the Ga supply rate was smaller than 0.07 mmol/min. The crystallinity of the α-Ga2O3 films exhibited an improvement with an increase in the film thickness, regardless of the solution preparation conditions, Ga supply rate, and HCl supply rate. These results indicate that there is a low correlation between the improvement of surface roughness and crystallinity in the α-Ga2O3 films grown under the conditions described in this paper.
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Affiliation(s)
- Tatsuya Yasuoka
- School of Systems Engineering, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami 782-8502, Kochi, Japan; (T.Y.)
| | - Li Liu
- School of Systems Engineering, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami 782-8502, Kochi, Japan; (T.Y.)
- Center for Nanotechnology, Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami 782-8502, Kochi, Japan
| | - Giang T. Dang
- School of Systems Engineering, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami 782-8502, Kochi, Japan; (T.Y.)
- Center for Nanotechnology, Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami 782-8502, Kochi, Japan
| | - Toshiyuki Kawaharamura
- School of Systems Engineering, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami 782-8502, Kochi, Japan; (T.Y.)
- Center for Nanotechnology, Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami 782-8502, Kochi, Japan
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5
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Zhang J, Kuang X, Tu R, Zhang S. A review on synthesis and applications of gallium oxide materials. Adv Colloid Interface Sci 2024; 328:103175. [PMID: 38723295 DOI: 10.1016/j.cis.2024.103175] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/06/2023] [Revised: 04/30/2024] [Accepted: 04/30/2024] [Indexed: 05/26/2024]
Abstract
Gallium oxide (Ga2O3), as a new kind of ultra-wide band gap semiconductor material, is widely studied in many fields, such as power electronics, UV - blind photodetectors, solar cells and so on. Owing to the advantages of its excellent performance and broad application prospects in semiconductor technology, Ga2O3 materials have attracted extensive academic and technological attention. This review mainly focuses on introducing the main liquid-phase synthesis methods of Ga2O3 nanoparticles, such as direct-precipitation, chemical bath deposition, hydrothermal, solvothermal, and sol-gel method, including the characteristics in process and advantages and disadvantages of these methods. Then, the effects of reaction conditions, such as pH, capping agent, aging and calcination conditions, on the morphologies and sizes of the precursor and the final products were elucidated. Moreover, the applications of Ga2O3 particles in the fields of catalysis, gas sensors, and other devices in current research on Ga2O3 nanomaterials are discussed with the description of the basic working principle and influence factors.
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Affiliation(s)
- Jinshu Zhang
- Triumph Science &Technology Group Co., Ltd., Anhui 233000, China.
| | - Xiaoxu Kuang
- Chaozhou Branch of Chemistry and Chemical Engineering Guangdong Laboratory, Chaozhou 521000, China.
| | - Rong Tu
- Chaozhou Branch of Chemistry and Chemical Engineering Guangdong Laboratory, Chaozhou 521000, China; State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China.
| | - Song Zhang
- Chaozhou Branch of Chemistry and Chemical Engineering Guangdong Laboratory, Chaozhou 521000, China; State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China.
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6
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Xiao X, Mao Y, Meng B, Ma G, Hušeková K, Egyenes F, Rosová A, Dobročka E, Eliáš P, Ťapajna M, Gucmann F, Yuan C. Phase-Dependent Phonon Heat Transport in Nanoscale Gallium Oxide Thin Films. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024; 20:e2309961. [PMID: 38098343 DOI: 10.1002/smll.202309961] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/01/2023] [Revised: 12/03/2023] [Indexed: 05/25/2024]
Abstract
Different phases of Ga2O3 have been regarded as superior platforms for making new-generation high-performance electronic devices. However, understanding of thermal transport in different phases of nanoscale Ga2O3 thin-films remains challenging, owing to the lack of phonon transport models and systematic experimental investigations. Here, thermal conductivity (TC) and thermal boundary conductance (TBC) of the( 1 ¯ 010 ) $( {\bar 1010} )$ α-,( 2 ¯ 01 ) $( {\bar 201} )\;$ β-, and (001) κ-Ga2O3 thin films on sapphire are investigated. At ≈80 nm, the measured TC of α (8.8 W m-1 K-1) is ≈1.8 times and ≈3.0 times larger than that of β and κ, respectively, consistent with model based on density functional theory (DFT), whereas the model reveals a similar TC for the bulk α- and β-Ga2O3. The observed phase- and size-dependence of TC is discussed thoroughly with phonon transport properties such as phonon mean free path and group velocity. The measured TBC at Ga2O3/sapphire interface is analyzed with diffuse mismatch model using DFT-derived full phonon dispersion relation. Phonon spectral distribution of density of states, transmission coefficients, and group velocity are studied to understand the phase-dependence of TBC. This study provides insight into the fundamental phonon transport mechanism in Ga2O3 thin films and paves the way for improved thermal management of high-power Ga2O3-based devices.
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Affiliation(s)
- Xinglin Xiao
- The Institute of Technological Sciences, Wuhan University, Wuhan, 430072, P. R. China
| | - Yali Mao
- The Institute of Technological Sciences, Wuhan University, Wuhan, 430072, P. R. China
| | - Biwei Meng
- The Institute of Technological Sciences, Wuhan University, Wuhan, 430072, P. R. China
| | - Guoliang Ma
- The Institute of Technological Sciences, Wuhan University, Wuhan, 430072, P. R. China
| | - Kristína Hušeková
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, Bratislava, 841 04, Slovakia
| | - Fridrich Egyenes
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, Bratislava, 841 04, Slovakia
| | - Alica Rosová
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, Bratislava, 841 04, Slovakia
| | - Edmund Dobročka
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, Bratislava, 841 04, Slovakia
| | - Peter Eliáš
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, Bratislava, 841 04, Slovakia
| | - Milan Ťapajna
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, Bratislava, 841 04, Slovakia
| | - Filip Gucmann
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, Bratislava, 841 04, Slovakia
| | - Chao Yuan
- The Institute of Technological Sciences, Wuhan University, Wuhan, 430072, P. R. China
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7
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Zhang Z, Wang T, Jiang H, Qi R, Li Y, Wang J, Sheng S, Li N, Shi R, Wei J, Liu F, Zhang S, Huo X, Du J, Zhang J, Xu J, Rong X, Gao P, Shen B, Wang X. Probing Hyperbolic Shear Polaritons in β-Ga 2O 3 Nanostructures Using STEM-EELS. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2204884. [PMID: 38374724 DOI: 10.1002/adma.202204884] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/30/2022] [Revised: 01/23/2024] [Indexed: 02/21/2024]
Abstract
Phonon polaritons, quasiparticles arising from strong coupling between electromagnetic waves and optical phonons, have potential for applications in subdiffraction imaging, sensing, thermal conduction enhancement, and spectroscopy signal enhancement. A new class of phonon polaritons in low-symmetry monoclinic crystals, hyperbolic shear polaritons (HShPs), have been verified recently in β-Ga2O3 by free electron laser (FEL) measurements. However, detailed behaviors of HShPs in β-Ga2O3 nanostructures still remain unknown. Here, by using monochromatic electron energy loss spectroscopy in conjunction with scanning transmission electron microscopy, the experimental observation of multiple HShPs in β-Ga2O3 in the mid-infrared (MIR) and far-infrared (FIR) ranges is reported. HShPs in various β-Ga2O3 nanorods and a β-Ga2O3 nanodisk are excited. The frequency-dependent rotation and shear effect of HShPs reflect on the distribution of EELS signals. The propagation and reflection of HShPs in nanostructures are clarified by simulations of electric field distribution. These findings suggest that, with its tunable broad spectral HShPs, β-Ga2O3 is an excellent candidate for nanophotonic applications.
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Affiliation(s)
- Zhenyu Zhang
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-Optoelectronics, School of Physics, Peking University, Beijing, 100871, China
- Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, 100871, China
| | - Tao Wang
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-Optoelectronics, School of Physics, Peking University, Beijing, 100871, China
- Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, 100871, China
| | - Hailing Jiang
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-Optoelectronics, School of Physics, Peking University, Beijing, 100871, China
| | - Ruishi Qi
- Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, 100871, China
| | - Yuehui Li
- Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, 100871, China
- International Center for Quantum Materials, School of Physics, Peking University, Beijing, 100871, China
| | - Jinlin Wang
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-Optoelectronics, School of Physics, Peking University, Beijing, 100871, China
| | - Shanshan Sheng
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-Optoelectronics, School of Physics, Peking University, Beijing, 100871, China
| | - Ning Li
- Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, 100871, China
| | - Ruochen Shi
- Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, 100871, China
| | - Jiaqi Wei
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-Optoelectronics, School of Physics, Peking University, Beijing, 100871, China
| | - Fang Liu
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-Optoelectronics, School of Physics, Peking University, Beijing, 100871, China
| | - Shengnan Zhang
- The 46th Research Institute, China Electronics Technology Group Corporation (CETC), Tianjin, 300220, China
| | - Xiaoqing Huo
- The 46th Research Institute, China Electronics Technology Group Corporation (CETC), Tianjin, 300220, China
| | - Jinlong Du
- Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, 100871, China
| | - Jingmin Zhang
- Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, 100871, China
| | - Jun Xu
- Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, 100871, China
| | - Xin Rong
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-Optoelectronics, School of Physics, Peking University, Beijing, 100871, China
| | - Peng Gao
- Electron Microscopy Laboratory, School of Physics, Peking University, Beijing, 100871, China
- International Center for Quantum Materials, School of Physics, Peking University, Beijing, 100871, China
- Collaborative Innovation Center of Quantum Matter, Peking University, Beijing, 100871, China
| | - Bo Shen
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-Optoelectronics, School of Physics, Peking University, Beijing, 100871, China
- Collaborative Innovation Center of Quantum Matter, Peking University, Beijing, 100871, China
- Peking University Yangtze Delta Institute of Optoelectronics, Nantong, Jiangsu, 226010, China
| | - Xinqiang Wang
- State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-Optoelectronics, School of Physics, Peking University, Beijing, 100871, China
- Collaborative Innovation Center of Quantum Matter, Peking University, Beijing, 100871, China
- Peking University Yangtze Delta Institute of Optoelectronics, Nantong, Jiangsu, 226010, China
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8
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Devamanoharan A, Venkatachalapathy V, Veerapandy V, Vajeeston P. Investigating Stable Low-Energy Gallium Oxide (Ga 2O 3) Polytypes: Insights into Electronic and Optical Properties from First Principles. ACS OMEGA 2024; 9:16207-16220. [PMID: 38617702 PMCID: PMC11007711 DOI: 10.1021/acsomega.3c10192] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/20/2023] [Revised: 02/10/2024] [Accepted: 03/05/2024] [Indexed: 04/16/2024]
Abstract
This study provides a comprehensive analysis of the electronic and optical properties of low-energy gallium oxide (Ga2O3) polytypes not considered earlier. Among these polytypes, the monoclinic structure (β-Ga2O3) holds significant relevance for both research and practical applications due to its superior stability under typical conditions. The primary aim of this research is to identify new and stable Ga2O3 polytypes that may exist under zero-temperature and zero-pressure conditions. To achieve this objective, we employ the VASP code to investigate electrical and optical properties, as well as stability assessments. Additionally, we examine phonon and thermal properties, including heat capacity, for all polytypes. This study also encompasses the computation of full elastic tensors and elastic moduli for all polytypes at 0 K, with Poisson's and Pugh's ratios confirming their ductile nature. Furthermore, we present the first ever report on the Raman- and infrared (IR)-active modes of these stable Ga2O3 polytypes. Our findings reveal that these mechanically and dynamically stable Ga2O3 polytypes exhibit semiconductive properties, as evidenced by electronic band structure investigations. This research offers valuable insights into the optical characteristics of Ga2O3 polytypes with potential applications spanning various fields.
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Affiliation(s)
| | - Vishnukanthan Venkatachalapathy
- Department
of Physics/Centre for Materials Science and Nanotechnology, University of Oslo, P.O. Box 1048 Blindern, Oslo NO-0316, Norway
- Department
of Materials Science, National Research
Nuclear University “MEPhI”, 31 Kashirskoe Sh., Moscow 115409, Russian
Federation
| | - Vasu Veerapandy
- School
of Physics, Madurai Kamaraj University, Madurai 625021, India
| | - Ponniah Vajeeston
- Center
for Materials Science and Nanotechnology, University of Oslo, Oslo 0371, Norway
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9
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Wang YR, Bai ZX, Liu QJ, Liu ZT, Jiang CL. The calculated electronic and optical properties of β-Ga 2O 3 based on the first principles. J Mol Model 2024; 30:116. [PMID: 38561503 DOI: 10.1007/s00894-024-05907-2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/27/2023] [Accepted: 03/15/2024] [Indexed: 04/04/2024]
Abstract
INTRODUCTION The electronic and optical properties of β-Ga2O3 have been investigated by CASTEP using first principles. It is found that β-Ga2O3 has an indirect band gap and the conduction band base is located at the Γ point. The stability of β-Ga2O3 is demonstrated by the calculation of elastic constants, and the ductility of β-Ga2O3 is demonstrated by the ratio of Poisson's ratio to shear modulus. The optical property analysis shows that β-Ga2O3 has a high absorption capacity in the ultraviolet region, but a low absorption capacity in visible and infrared light. CONTEXT The structure, optical, and electronic properties of β-Ga2O3 are calculated and analyzed based on first-principles calculation. The optimized structures of β-Ga2O3 are in good agreement with previously studied. In this paper, the elastic, electronic, and optical properties of β-Ga2O3 are calculated. METHODS The CASTEP code was employed to execute these calculations in the present work, where the exchange-correlation interactions were treated in the generalized gradient approximation (GGA) using the Perdew-Burke-Ernzerhof (PBE) functional in the geometry optimizations and electronic and elastic properties.
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Affiliation(s)
- Yan-Ru Wang
- College of Water Conservancy and Hydropower Engineering, Sichuan Agricultural University, Ya' an, 625014, China
| | - Zhi-Xin Bai
- School of Physical Science and Technology, Southwest Jiaotong University, Chengdu, 610031, China
| | - Qi-Jun Liu
- School of Physical Science and Technology, Southwest Jiaotong University, Chengdu, 610031, China
| | - Zheng-Tang Liu
- State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi'an, 710072, China
| | - Cheng-Lu Jiang
- College of Water Conservancy and Hydropower Engineering, Sichuan Agricultural University, Ya' an, 625014, China.
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10
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Dawson DM, Clayton JA, Marshall THD, Guillou N, Walton RI, Ashbrook SE. Site-directed cation ordering in chabazite-type Al xGa 1-xPO 4-34 frameworks revealed by NMR crystallography. Chem Sci 2024; 15:4374-4385. [PMID: 38516069 PMCID: PMC10952087 DOI: 10.1039/d3sc06924a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/24/2023] [Accepted: 02/14/2024] [Indexed: 03/23/2024] Open
Abstract
We report the first synthesis of the mixed-metal chabazite-type AlxGa1-xPO4-34(mim) solid solution, containing 1-methylimidazolium, mim, as structure directing agent (SDA), from the parent mixed-metal oxide solid solution, γ-(AlxGa1-x)2O3. This hitherto unreported family of materials exhibits complex disorder, arising from the possible distributions of cations over available sites, the orientation of the SDA and the presence of variable amounts of water, which provides a prototype for understanding structural subtleties in nanoporous materials. In the as-made forms of the phosphate frameworks, there are three crystallographically distinct metal sites: two tetrahedral MO4 and one octahedral MO4F2 (M = Al, Ga). A combination of solid-state NMR spectroscopy and periodic DFT calculations reveals that the octahedral site is preferentially occupied by Al and the tetrahedral sites by Ga, leading to a non-random distribution of cations within the framework. Upon calcination to the AlxGa1-xPO4-34 framework, all metal sites are tetrahedral and crystallographically equivalent in the average R3̄ symmetry. The cation distribution was explored by 31P solid-state NMR spectroscopy, and it is shown that the non-random distribution demonstrated to exist in the as-made materials would be expected to give remarkably similar patterns of peak intensities to a random distribution owing to the change in average symmetry in the calcined materials.
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Affiliation(s)
- Daniel M Dawson
- School of Chemistry, EaStCHEM and St Andrews Centre for Magnetic Resonance, University of St Andrews North Haugh St Andrews KY16 9ST UK
| | | | | | - Nathalie Guillou
- Institut Lavoisier, UMR CNRS 8180, Université de Versailles St-Quentin-en-Yvelines, Université Paris-Saclay 78035 Versailles France
| | - Richard I Walton
- Department of Chemistry, University of Warwick Coventry CV4 7AL UK
| | - Sharon E Ashbrook
- School of Chemistry, EaStCHEM and St Andrews Centre for Magnetic Resonance, University of St Andrews North Haugh St Andrews KY16 9ST UK
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11
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Kim HJ, Hong S, Jang C, Jin HJ, Woo H, Bae H, Im S. Anisotropic Electron Mobility and Contact Resistance of β-Ga 2O 3 Obtained via Radio Frequency Transmission Line Methods on Schottky Devices. ACS NANO 2024; 18:8546-8554. [PMID: 38456657 DOI: 10.1021/acsnano.4c01813] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 03/09/2024]
Abstract
Monoclinic semiconducting β-Ga2O3 has drawn attention, particularly because its thin film could be achieved via mechanical exfoliation from bulk crystals, which is analogous to van der Waals materials' behavior. For the transistor devices with exfoliated β-Ga2O3, the channel direction becomes [010] for in-plane electron transport, which changes to vertical [100] near the source/drain (S/D) contact. Hence, anisotropic transport behavior is certainly worth to study but rarely reported. Here we achieve the vertical [100] direction electron mobility of 4.18 cm2/(V s) from Pt/β-Ga2O3 Schottky diodes with various thickness via radio frequency-transmission line method (RF-TLM), which is recently developed. The specific contact resistivity (ρc) could also be estimated from RF-TLM, to be 4.72 × 10-5 Ω cm2, which is quite similar to the value (5.25 × 10-5 Ω cm2) from conventional TLM proving the validity of RF-TLM. We also fabricate metal-semiconductor field-effect transistors (MESFETs) to study anisotropic transport behavior and contact resistance (RC). RC-free [010] in-plane mobility appears as high as maximum ∼67 cm2/(V s), extracted from total resistance in MESFETs.
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Affiliation(s)
- Hyun-Jung Kim
- Van der Waals Materials Research Center, Institute of Physics and Applied Physics, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul 03722, Republic of Korea
| | - Sungjae Hong
- Van der Waals Materials Research Center, Institute of Physics and Applied Physics, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul 03722, Republic of Korea
| | - Chorom Jang
- Department of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul 03722, Republic of Korea
| | - Hye-Jin Jin
- Van der Waals Materials Research Center, Institute of Physics and Applied Physics, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul 03722, Republic of Korea
| | - Haneul Woo
- Department of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul 03722, Republic of Korea
| | - Heesun Bae
- Van der Waals Materials Research Center, Institute of Physics and Applied Physics, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul 03722, Republic of Korea
| | - Seongil Im
- Van der Waals Materials Research Center, Institute of Physics and Applied Physics, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul 03722, Republic of Korea
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12
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Kim KH, Shin YJ, Jeong SM, Lee H, Bae SY. Controlled Crystallinity of a Sn-Doped α-Ga 2O 3 Epilayer Using Rapidly Annealed Double Buffer Layers. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:178. [PMID: 38251142 PMCID: PMC10818942 DOI: 10.3390/nano14020178] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/19/2023] [Revised: 01/09/2024] [Accepted: 01/10/2024] [Indexed: 01/23/2024]
Abstract
Double buffer layers composed of (AlxGa1-x)2O3/Ga2O3 structures were employed to grow a Sn-doped α-Ga2O3 epitaxial thin film on a sapphire substrate using mist chemical vapor deposition. The insertion of double buffer layers improved the crystal quality of the upper-grown Sn-doped α-Ga2O3 thin films by blocking dislocation generated by the substrates. Rapid thermal annealing was conducted for the double buffer layers at phase transition temperatures of 700-800 °C. The slight mixing of κ and β phases further improved the crystallinity of the grown Sn-Ga2O3 thin film through local lateral overgrowth. The electron mobility of the Sn-Ga2O3 thin films was also significantly improved due to the smoothened interface and the diffusion of Al. Therefore, rapid thermal annealing with the double buffer layer proved advantageous in achieving strong electrical properties for Ga2O3 semiconductor devices within a shorter processing time.
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Affiliation(s)
- Kyoung-Ho Kim
- Semiconductor Materials Center, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Republic of Korea; (K.-H.K.); (Y.-J.S.); (S.-M.J.)
- School of Materials Science and Engineering, Pusan National University, Busan 46241, Republic of Korea;
| | - Yun-Ji Shin
- Semiconductor Materials Center, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Republic of Korea; (K.-H.K.); (Y.-J.S.); (S.-M.J.)
| | - Seong-Min Jeong
- Semiconductor Materials Center, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Republic of Korea; (K.-H.K.); (Y.-J.S.); (S.-M.J.)
| | - Heesoo Lee
- School of Materials Science and Engineering, Pusan National University, Busan 46241, Republic of Korea;
| | - Si-Young Bae
- Semiconductor Materials Center, Korea Institute of Ceramic Engineering and Technology, Jinju 52851, Republic of Korea; (K.-H.K.); (Y.-J.S.); (S.-M.J.)
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13
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Maimon O, Li Q. Progress in Gallium Oxide Field-Effect Transistors for High-Power and RF Applications. MATERIALS (BASEL, SWITZERLAND) 2023; 16:7693. [PMID: 38138834 PMCID: PMC10744974 DOI: 10.3390/ma16247693] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/30/2023] [Revised: 11/21/2023] [Accepted: 11/23/2023] [Indexed: 12/24/2023]
Abstract
Power electronics are becoming increasingly more important, as electrical energy constitutes 40% of the total primary energy usage in the USA and is expected to grow rapidly with the emergence of electric vehicles, renewable energy generation, and energy storage. New materials that are better suited for high-power applications are needed as the Si material limit is reached. Beta-phase gallium oxide (β-Ga2O3) is a promising ultra-wide-bandgap (UWBG) semiconductor for high-power and RF electronics due to its bandgap of 4.9 eV, large theoretical breakdown electric field of 8 MV cm-1, and Baliga figure of merit of 3300, 3-10 times larger than that of SiC and GaN. Moreover, β-Ga2O3 is the only WBG material that can be grown from melt, making large, high-quality, dopable substrates at low costs feasible. Significant efforts in the high-quality epitaxial growth of β-Ga2O3 and β-(AlxGa1-x)2O3 heterostructures has led to high-performance devices for high-power and RF applications. In this report, we provide a comprehensive summary of the progress in β-Ga2O3 field-effect transistors (FETs) including a variety of transistor designs, channel materials, ohmic contact formations and improvements, gate dielectrics, and fabrication processes. Additionally, novel structures proposed through simulations and not yet realized in β-Ga2O3 are presented. Main issues such as defect characterization methods and relevant material preparation, thermal studies and management, and the lack of p-type doping with investigated alternatives are also discussed. Finally, major strategies and outlooks for commercial use will be outlined.
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Affiliation(s)
- Ory Maimon
- Department of Electrical Engineering, George Mason University, Fairfax, VA 22030, USA;
- Nanoscale Device and Characterization Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
| | - Qiliang Li
- Department of Electrical Engineering, George Mason University, Fairfax, VA 22030, USA;
- Nanoscale Device and Characterization Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
- Quantum Science & Engineering Center, George Mason University, Fairfax, VA 22030, USA
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14
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Shu L, Yao S, Xi Z, Liu Z, Guo Y, Tang W. Multi-pixels gallium oxide UV detector array and optoelectronic applications. NANOTECHNOLOGY 2023; 35:052001. [PMID: 37890476 DOI: 10.1088/1361-6528/ad079f] [Citation(s) in RCA: 4] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/11/2023] [Accepted: 10/26/2023] [Indexed: 10/29/2023]
Abstract
With the continuous advancement of deep-ultraviolet (DUV) communication and optoelectronic detection, research in this field has become a significant focal point in the scientific community. For more accurate information collection and transport, the photodetector array of many pixels is the key of the UV imaging and commnication systems, and its photoelectric performance seriously depends on semiconductor material and array layout. Gallium oxide (Ga2O3) is an emerging wide bandgap semicondutor material which has been widely used in DUV dectection. Therefore, this paper mainly focuses on Ga2O3semiconductor detector array which has gained widespread attention in the field of DUV technique, from the perspective of individual device to array and its optoelectonic integration, for reviewing and discussing the research progress in design, fabrication, and application of Ga2O3arrays in recent years. It includes the structure design and material selection of array units, units growth and array layout, response to solar blind light, the method of imaging and image recognition. Morever, the future development trend of the photodetector array has been analyzed and reflected, aiming to provide some useful suggestions for the optimizing array structure, improving patterned growth technology and material growth quality. As well as Ga2O3optoelectronic devices and their applications are discussed in view of device physics and photophysics in detector.
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Affiliation(s)
- Lincong Shu
- Innovation Center of Gallium Oxide Semiconductor (IC-GAO), College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210023, People's Republic of China
| | - Suhao Yao
- Innovation Center of Gallium Oxide Semiconductor (IC-GAO), College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210023, People's Republic of China
| | - Zhaoying Xi
- Innovation Center of Gallium Oxide Semiconductor (IC-GAO), College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210023, People's Republic of China
| | - Zeng Liu
- Innovation Center of Gallium Oxide Semiconductor (IC-GAO), College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210023, People's Republic of China
- National and Local Joint Engineering Laboratory for RF Integration and Micro-Assembly Technologies, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210023, People's Republic of China
| | - Yufeng Guo
- Innovation Center of Gallium Oxide Semiconductor (IC-GAO), College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210023, People's Republic of China
- National and Local Joint Engineering Laboratory for RF Integration and Micro-Assembly Technologies, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210023, People's Republic of China
| | - Weihua Tang
- Innovation Center of Gallium Oxide Semiconductor (IC-GAO), College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210023, People's Republic of China
- National and Local Joint Engineering Laboratory for RF Integration and Micro-Assembly Technologies, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210023, People's Republic of China
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15
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Wang J, Guan X, Zheng H, Zhao L, Jiang R, Zhao P, Zhang Y, Hu J, Li P, Jia S, Wang J. Size-Dependent Phase Transition in Ultrathin Ga 2O 3 Nanowires. NANO LETTERS 2023; 23:7364-7370. [PMID: 37530420 DOI: 10.1021/acs.nanolett.3c01751] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/03/2023]
Abstract
Gallium oxide (Ga2O3) has attracted extensive attention as a potential candidate for low-dimensional metal-oxide-semiconductor field-effect transistors (MOSFETs) due to its wide bandgap, controllable doping, and low cost. The structural stability of nanoscale Ga2O3 is the key parameter for designing and constructing a MOSFET, which however remains unexplored. Using in situ transmission electron microscopy, we reveal the size-dependent phase transition of sub-2 nm Ga2O3 nanowires. Based on theoretical calculations, the transformation pathways from the initial monoclinic β-phase to an intermediate cubic γ-phase and then back to the β-phase have been mapped and identified as a sequence of Ga cation migrations. Our results provide fundamental insights into the Ga2O3 phase stability within the nanoscale, which is crucial for advancing the miniaturization, light weight, and integration of wide-bandgap semiconductor devices.
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Affiliation(s)
- Jiaheng Wang
- School of Physics and Technology, Center for Electron Microscopy, MOE Key Laboratory of Artificial Micro- and Nano-structures, and Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
| | - Xiaoxi Guan
- School of Physics and Technology, Center for Electron Microscopy, MOE Key Laboratory of Artificial Micro- and Nano-structures, and Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
| | - He Zheng
- School of Physics and Technology, Center for Electron Microscopy, MOE Key Laboratory of Artificial Micro- and Nano-structures, and Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
- Wuhan University Shenzhen Research Institute, Shenzhen, Guangdong 518057, China
| | - Ligong Zhao
- School of Physics and Technology, Center for Electron Microscopy, MOE Key Laboratory of Artificial Micro- and Nano-structures, and Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
| | - Renhui Jiang
- School of Physics and Technology, Center for Electron Microscopy, MOE Key Laboratory of Artificial Micro- and Nano-structures, and Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
| | - Peili Zhao
- School of Physics and Technology, Center for Electron Microscopy, MOE Key Laboratory of Artificial Micro- and Nano-structures, and Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
| | - Ying Zhang
- School of Physics and Technology, Center for Electron Microscopy, MOE Key Laboratory of Artificial Micro- and Nano-structures, and Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
| | - Jie Hu
- School of Physics and Technology, Center for Electron Microscopy, MOE Key Laboratory of Artificial Micro- and Nano-structures, and Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
| | - Pei Li
- School of Physics and Technology, Center for Electron Microscopy, MOE Key Laboratory of Artificial Micro- and Nano-structures, and Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
| | - Shuangfeng Jia
- School of Physics and Technology, Center for Electron Microscopy, MOE Key Laboratory of Artificial Micro- and Nano-structures, and Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
| | - Jianbo Wang
- School of Physics and Technology, Center for Electron Microscopy, MOE Key Laboratory of Artificial Micro- and Nano-structures, and Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
- Core Facility of Wuhan University, Wuhan 430072, China
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16
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Azarov A, Fernández JG, Zhao J, Djurabekova F, He H, He R, Prytz Ø, Vines L, Bektas U, Chekhonin P, Klingner N, Hlawacek G, Kuznetsov A. Universal radiation tolerant semiconductor. Nat Commun 2023; 14:4855. [PMID: 37563159 PMCID: PMC10415340 DOI: 10.1038/s41467-023-40588-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/03/2023] [Accepted: 07/31/2023] [Indexed: 08/12/2023] Open
Abstract
Radiation tolerance is determined as the ability of crystalline materials to withstand the accumulation of the radiation induced disorder. Nevertheless, for sufficiently high fluences, in all by far known semiconductors it ends up with either very high disorder levels or amorphization. Here we show that gamma/beta (γ/β) double polymorph Ga2O3 structures exhibit remarkably high radiation tolerance. Specifically, for room temperature experiments, they tolerate a disorder equivalent to hundreds of displacements per atom, without severe degradations of crystallinity; in comparison with, e.g., Si amorphizable already with the lattice atoms displaced just once. We explain this behavior by an interesting combination of the Ga- and O- sublattice properties in γ-Ga2O3. In particular, O-sublattice exhibits a strong recrystallization trend to recover the face-centered-cubic stacking despite the stronger displacement of O atoms compared to Ga during the active periods of cascades. Notably, we also explained the origin of the β-to-γ Ga2O3 transformation, as a function of the increased disorder in β-Ga2O3 and studied the phenomena as a function of the chemical nature of the implanted atoms. As a result, we conclude that γ/β double polymorph Ga2O3 structures, in terms of their radiation tolerance properties, benchmark a class of universal radiation tolerant semiconductors.
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Affiliation(s)
- Alexander Azarov
- University of Oslo, Centre for Materials Science and Nanotechnology, PO Box 1048 Blindern, N-0316, Oslo, Norway.
| | - Javier García Fernández
- University of Oslo, Centre for Materials Science and Nanotechnology, PO Box 1048 Blindern, N-0316, Oslo, Norway
| | - Junlei Zhao
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055, China
| | - Flyura Djurabekova
- Department of Physics, University of Helsinki, P.O. Box 43, FI-00014, Helsinki, Finland
| | - Huan He
- Department of Physics, University of Helsinki, P.O. Box 43, FI-00014, Helsinki, Finland
| | - Ru He
- Department of Physics, University of Helsinki, P.O. Box 43, FI-00014, Helsinki, Finland
| | - Øystein Prytz
- University of Oslo, Centre for Materials Science and Nanotechnology, PO Box 1048 Blindern, N-0316, Oslo, Norway
| | - Lasse Vines
- University of Oslo, Centre for Materials Science and Nanotechnology, PO Box 1048 Blindern, N-0316, Oslo, Norway
| | - Umutcan Bektas
- Helmholtz-Zentrum Dresden-Rossendorf, D-01328, Dresden, Germany
| | - Paul Chekhonin
- Helmholtz-Zentrum Dresden-Rossendorf, D-01328, Dresden, Germany
| | - Nico Klingner
- Helmholtz-Zentrum Dresden-Rossendorf, D-01328, Dresden, Germany
| | - Gregor Hlawacek
- Helmholtz-Zentrum Dresden-Rossendorf, D-01328, Dresden, Germany
| | - Andrej Kuznetsov
- University of Oslo, Centre for Materials Science and Nanotechnology, PO Box 1048 Blindern, N-0316, Oslo, Norway.
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17
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Schmidt C, Fechner A, Selyshchev O, Zahn DRT. The Influence of Process Parameters on the Microstructural Properties of Spray-Pyrolyzed β-Ga 2O 3. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:nano13091455. [PMID: 37177000 PMCID: PMC10179802 DOI: 10.3390/nano13091455] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/15/2023] [Revised: 04/14/2023] [Accepted: 04/23/2023] [Indexed: 05/15/2023]
Abstract
In this work, the deposition of β-Ga2O3 microstructures and thin films was performed with Ga(NO3)3 solutions by ultrasonic nebulization and spray coating as low-cost techniques. By changing the deposition parameters, the shape of β-Ga2O3 microstructures was controlled. Micro-spheres were obtained by ultrasonic nebulization. Micro-flakes and vortices were fabricated by spray coating aqueous concentrated and diluted precursor solutions, respectively. Roundish flakes were achieved from water-ethanol mixtures, which were rolled up into tubes by increasing the number of deposition cycles. Increasing the ethanol-to-water ratio allows continuous thin films at an optimal Ga(NO3)3 concentration of 0.15 M and a substrate temperature of 190 °C to be formed. The monoclinic β-Ga2O3 phase was achieved by thermal annealing at 1000 °C in an ambient atmosphere. Scanning electronic microscopy (SEM), X-ray diffraction (XRD), and UV-Raman spectroscopy were employed to characterize these microstructures. In the XRD study, in addition to the phase information, the residual stress values were determined using the sin2(ψ) method. Raman spectroscopy confirms that the β-Ga2O3 phase and relative shifts of the Raman modes of the different microstructures can partially be assigned to residual stress. The high-frequency Raman modes proved to be more sensitive to shifting and broadening than the low-frequency Raman modes.
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Affiliation(s)
- Constance Schmidt
- Semiconductor Physics, Chemnitz University of Technology, D-09107 Chemnitz, Germany
| | - Axel Fechner
- Semiconductor Physics, Chemnitz University of Technology, D-09107 Chemnitz, Germany
| | - Oleksandr Selyshchev
- Semiconductor Physics, Chemnitz University of Technology, D-09107 Chemnitz, Germany
| | - Dietrich R T Zahn
- Semiconductor Physics, Chemnitz University of Technology, D-09107 Chemnitz, Germany
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18
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García-Carrión M, Ramírez-Castellanos J, Nogales E, Méndez B. Temperature-Dependent and Time-Resolved Luminescence Characterization of γ-Ga 2O 3 Nanoparticles. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:nano13091445. [PMID: 37176990 PMCID: PMC10180148 DOI: 10.3390/nano13091445] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/31/2023] [Revised: 04/21/2023] [Accepted: 04/21/2023] [Indexed: 05/15/2023]
Abstract
The temperature-dependent luminescence properties of γ-Ga2O3 nanoparticles prepared by a precipitation method are investigated under steady-state and pulsed-light excitation. The main photoluminescence (PL) emission at room temperature consists of a single blue band centered around 2.76 eV, which hardly undergoes a blueshift of 0.03 eV when temperature goes down to 4 K. The emission behaves with a positive thermal quenching following an Arrhenius-type curve. The data fitting yields two non-radiative levels affecting the emission band with activation energies of 7 meV and 40 meV. On the other hand, time-resolved PL measurements have also been taken and studied as a function of the temperature. The data analysis has resulted in two lifetimes: one of 3.4 ns and the other of 32 ns at room temperature, which undergo an increase up to 4.5 ns and 65 ns at T = 4 K, respectively. Based on both stationary and dynamic PL results, a model of radiative and non-radiative levels associated with the main emission bands of γ-Ga2O3 is suggested. Finally, by using PL excitation measurements, an estimation of the bandgap and its variation with temperature between 4 K and room temperature were obtained and assessed against O'Donnell-Chen's law. With this variation it has been possible to calculate the average of the phonon energy, resulting in ⟨ħω⟩ = 10 ± 1 meV.
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Affiliation(s)
- Marina García-Carrión
- Department of Materials Physics, Faculty of Physical Sciences, University Complutense of Madrid, E-28040 Madrid, Spain
| | - Julio Ramírez-Castellanos
- Department of Inorganic Chemistry, Faculty of Chemical Sciences, University Complutense of Madrid, E-28040 Madrid, Spain
| | - Emilio Nogales
- Department of Materials Physics, Faculty of Physical Sciences, University Complutense of Madrid, E-28040 Madrid, Spain
| | - Bianchi Méndez
- Department of Materials Physics, Faculty of Physical Sciences, University Complutense of Madrid, E-28040 Madrid, Spain
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19
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Nielsen IG, Kløve M, Roelsgaard M, Dippel AC, Iversen BB. In situ X-ray diffraction study of the solvothermal formation mechanism of gallium oxide nanoparticles. NANOSCALE 2023; 15:5284-5292. [PMID: 36810774 DOI: 10.1039/d2nr07128b] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Gallium oxides are of broad interest due to their wide band gaps and attractive photoelectric properties. Typically, the synthesis of gallium oxide nanoparticles is based on a combination of solvent-based methods and subsequent calcination, but detailed information about solvent based formation processes is lacking, and this limits the tailoring of materials. Here we have examined the formation mechanisms and crystal structure transformations of gallium oxides during solvothermal synthesis using in situ X-ray diffraction. γ-Ga2O3 readily forms over a wide range of conditions. In contrast, β-Ga2O3 only forms at high temperatures (T > 300 °C), and it is always preceded by γ-Ga2O3, indicating that γ-Ga2O3 is a crucial part of the formation mechanism of β-Ga2O3. The activation energy for formation of β-Ga2O3 from γ-Ga2O3 is determined to be 90-100 kJ mol-1 in ethanol, water and aqueous NaOH based on kinetic modelling of phase fractions obtained from multi-temperature in situ X-ray diffraction data. At low temperatures GaOOH and Ga5O7OH form in aqueous solvent, but these phases are also obtained from γ-Ga2O3. Systematic exploration of synthesis parameters such as temperature, heating rate, solvent and reaction time reveal that they all affect the resulting product. In general, the solvent based reaction paths are different from reports on solid state calcination studies. This underlines that the solvent is an active part of the solvothermal reactions and to a high degree determines different formation mechanisms.
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Affiliation(s)
- Ida Gjerlevsen Nielsen
- Center for Integrated Materials Research, Department of Chemistry and iNANO, Aarhus University, 8000 Aarhus C, Denmark.
| | - Magnus Kløve
- Center for Integrated Materials Research, Department of Chemistry and iNANO, Aarhus University, 8000 Aarhus C, Denmark.
| | - Martin Roelsgaard
- Center for Integrated Materials Research, Department of Chemistry and iNANO, Aarhus University, 8000 Aarhus C, Denmark.
| | | | - Bo Brummerstedt Iversen
- Center for Integrated Materials Research, Department of Chemistry and iNANO, Aarhus University, 8000 Aarhus C, Denmark.
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20
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Dobročka E, Gucmann F, Hušeková K, Nádaždy P, Hrubišák F, Egyenes F, Rosová A, Mikolášek M, Ťapajna M. Structure and Thermal Stability of ε/κ-Ga 2O 3 Films Deposited by Liquid-Injection MOCVD. MATERIALS (BASEL, SWITZERLAND) 2022; 16:20. [PMID: 36614359 PMCID: PMC9821604 DOI: 10.3390/ma16010020] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/23/2022] [Revised: 12/15/2022] [Accepted: 12/17/2022] [Indexed: 06/17/2023]
Abstract
We report on crystal structure and thermal stability of epitaxial ε/κ-Ga2O3 thin films grown by liquid-injection metal−organic chemical vapor deposition (LI-MOCVD). Si-doped Ga2O3 films with a thickness of 120 nm and root mean square surface roughness of ~1 nm were grown using gallium-tetramethylheptanedionate (Ga(thd)3) and tetraethyl orthosilicate (TEOS) as Ga and Si precursor, respectively, on c-plane sapphire substrates at 600 °C. In particular, the possibility to discriminate between ε and κ-phase Ga2O3 using X-ray diffraction (XRD) φ-scan analysis or electron diffraction analysis using conventional TEM was investigated. It is shown that the hexagonal ε-phase can be unambiguously identified by XRD or TEM only in the case that the orthorhombic κ-phase is completely suppressed. Additionally, thermal stability of prepared ε/κ-Ga2O3 films was studied by in situ and ex situ XRD analysis and atomic force microscopy. The films were found to preserve their crystal structure at temperatures as high as 1100 °C for 5 min or annealing at 900 °C for 10 min in vacuum ambient (<1 mBar). Prolonged annealing at these temperatures led to partial transformation to β-phase Ga2O3 and possible amorphization of the films.
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Affiliation(s)
- Edmund Dobročka
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava, Slovakia
| | - Filip Gucmann
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava, Slovakia
| | - Kristína Hušeková
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava, Slovakia
| | - Peter Nádaždy
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava, Slovakia
| | - Fedor Hrubišák
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava, Slovakia
| | - Fridrich Egyenes
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava, Slovakia
| | - Alica Rosová
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava, Slovakia
| | - Miroslav Mikolášek
- Faculty of Electrical Engineering and Information Technology, Institute of Electronics and Photonics, Slovak University of Technology, Ilkovičova 3, 812 19 Bratislava, Slovakia
| | - Milan Ťapajna
- Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava, Slovakia
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21
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Shen Y, Ma HP, Gu L, Zhang J, Huang W, Zhu JT, Zhang QC. Atomic-Level Sn Doping Effect in Ga 2O 3 Films Using Plasma-Enhanced Atomic Layer Deposition. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:4256. [PMID: 36500879 PMCID: PMC9737259 DOI: 10.3390/nano12234256] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/04/2022] [Revised: 11/24/2022] [Accepted: 11/26/2022] [Indexed: 06/17/2023]
Abstract
In this work, the atomic level doping of Sn into Ga2O3 films was successfully deposited by using a plasma-enhanced atomic layer deposition method. Here, we systematically studied the changes in the chemical state, microstructure evolution, optical properties, energy band alignment, and electrical properties for various configurations of the Sn-doped Ga2O3 films. The results indicated that all the films have high transparency with an average transmittance of above 90% over ultraviolet and visible light wavelengths. X-ray reflectivity and spectroscopic ellipsometry measurement indicated that the Sn doping level affects the density, refractive index, and extinction coefficient. In particular, the chemical microstructure and energy band structure for the Sn-doped Ga2O3 films were analyzed and discussed in detail. With an increase in the Sn content, the ratio of Sn-O bonding increases, but by contrast, the proportion of the oxygen vacancies decreases. The reduction in the oxygen vacancy content leads to an increase in the valence band maximum, but the energy bandgap decreases from 4.73 to 4.31 eV. Moreover, with the increase in Sn content, the breakdown mode transformed the hard breakdown into the soft breakdown. The C-V characteristics proved that the Sn-doped Ga2O3 films have large permittivity. These studies offer a foundation and a systematical analysis for assisting the design and application of Ga2O3 film-based transparent devices.
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Affiliation(s)
- Yi Shen
- Institute of Wide Bandgap Semiconductors and Future Lighting, Academy for Engineering & Technology, Fudan University, Shanghai 200433, China
- Shanghai Research Center for Silicon Carbide Power Devices Engineering & Technology, Fudan University, Shanghai 200433, China
| | - Hong-Ping Ma
- Institute of Wide Bandgap Semiconductors and Future Lighting, Academy for Engineering & Technology, Fudan University, Shanghai 200433, China
- Shanghai Research Center for Silicon Carbide Power Devices Engineering & Technology, Fudan University, Shanghai 200433, China
- Institute of Wide Bandgap Semiconductor Materials and Devices, Research Institute of Fudan University in Ningbo, Ningbo 315327, China
| | - Lin Gu
- Institute of Wide Bandgap Semiconductors and Future Lighting, Academy for Engineering & Technology, Fudan University, Shanghai 200433, China
- Shanghai Research Center for Silicon Carbide Power Devices Engineering & Technology, Fudan University, Shanghai 200433, China
| | - Jie Zhang
- Institute of Wide Bandgap Semiconductors and Future Lighting, Academy for Engineering & Technology, Fudan University, Shanghai 200433, China
- Shanghai Research Center for Silicon Carbide Power Devices Engineering & Technology, Fudan University, Shanghai 200433, China
| | - Wei Huang
- Institute of Wide Bandgap Semiconductors and Future Lighting, Academy for Engineering & Technology, Fudan University, Shanghai 200433, China
- Shanghai Research Center for Silicon Carbide Power Devices Engineering & Technology, Fudan University, Shanghai 200433, China
| | - Jing-Tao Zhu
- Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
| | - Qing-Chun Zhang
- Institute of Wide Bandgap Semiconductors and Future Lighting, Academy for Engineering & Technology, Fudan University, Shanghai 200433, China
- Shanghai Research Center for Silicon Carbide Power Devices Engineering & Technology, Fudan University, Shanghai 200433, China
- Institute of Wide Bandgap Semiconductor Materials and Devices, Research Institute of Fudan University in Ningbo, Ningbo 315327, China
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22
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Lu Y, Krishna S, Liao CH, Yang Z, Kumar M, Liu Z, Tang X, Xiao N, Hassine MB, Thoroddsen ST, Li X. Transferable Ga 2O 3 Membrane for Vertical and Flexible Electronics via One-Step Exfoliation. ACS APPLIED MATERIALS & INTERFACES 2022; 14:47922-47930. [PMID: 36241169 PMCID: PMC9614724 DOI: 10.1021/acsami.2c14661] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/16/2023]
Abstract
Transferable Ga2O3 thin film membrane is desirable for vertical and flexible solar-blind photonics and high-power electronics applications. However, Ga2O3 epitaxially grown on rigid substrates such as sapphire, Si, and SiC hinders its exfoliation due to the strong covalent bond between Ga2O3 and substrates, determining its lateral device configuration and also hardly reaching the ever-increasing demand for wearable and foldable applications. Mica substrate, which has an atomic-level flat surface and high-temperature tolerance, could be a good candidate for the van der Waals (vdW) epitaxy of crystalline Ga2O3 membrane. Beyond that, benefiting from the weak vdW bond between Ga2O3 and mica substrate, in this work, the Ga2O3 membrane is exfoliated and transferred to arbitrary flexible and adhesive tape, allowing for the vertical and flexible electronic configuration. This straightforward exfoliation method is verified to be consistent and reproducible by the transfer and characterization of thick (∼380 nm)/thin (∼95 nm) κ-phase Ga2O3 and conductive n-type β-Ga2O3. Vertical photodetectors are fabricated based on the exfoliated Ga2O3 membrane, denoting the peak response at ∼250 nm. Through the integration of Ti/Au Ohmic contact and Ni/Ag Schottky contact electrode, the vertical photodetector exhibits self-powered photodetection behavior with a responsivity of 17 mA/W under zero bias. The vdW-bond-assisted exfoliation of the Ga2O3 membrane demonstrated here could provide enormous opportunities in the pursuit of vertical and flexible Ga2O3 electronics.
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Affiliation(s)
- Yi Lu
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal23955-6900, Kingdom of Saudi Arabia
| | - Shibin Krishna
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal23955-6900, Kingdom of Saudi Arabia
| | - Che-Hao Liao
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal23955-6900, Kingdom of Saudi Arabia
| | - Ziqiang Yang
- Division
of Physical Science and Engineering, King
Abdullah University of Science and Technology (KAUST), Thuwal23955-6900, Kingdom of Saudi Arabia
| | - Mritunjay Kumar
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal23955-6900, Kingdom of Saudi Arabia
| | - Zhiyuan Liu
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal23955-6900, Kingdom of Saudi Arabia
| | - Xiao Tang
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal23955-6900, Kingdom of Saudi Arabia
| | - Na Xiao
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal23955-6900, Kingdom of Saudi Arabia
| | - Mohamed Ben Hassine
- CoreLabs, King Abdullah University of Science and Technology
(KAUST), Thuwal23955-6900, Kingdom of Saudi
Arabia
| | - Sigurdur T. Thoroddsen
- Division
of Physical Science and Engineering, King
Abdullah University of Science and Technology (KAUST), Thuwal23955-6900, Kingdom of Saudi Arabia
| | - Xiaohang Li
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal23955-6900, Kingdom of Saudi Arabia
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23
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Zhu J, Xu Z, Ha S, Li D, Zhang K, Zhang H, Feng J. Gallium Oxide for Gas Sensor Applications: A Comprehensive Review. MATERIALS (BASEL, SWITZERLAND) 2022; 15:7339. [PMID: 36295403 PMCID: PMC9611408 DOI: 10.3390/ma15207339] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/19/2022] [Revised: 10/09/2022] [Accepted: 10/12/2022] [Indexed: 06/16/2023]
Abstract
Ga2O3 has emerged as a promising ultrawide bandgap semiconductor for numerous device applications owing to its excellent material properties. In this paper, we present a comprehensive review on major advances achieved over the past thirty years in the field of Ga2O3-based gas sensors. We begin with a brief introduction of the polymorphs and basic electric properties of Ga2O3. Next, we provide an overview of the typical preparation methods for the fabrication of Ga2O3-sensing material developed so far. Then, we will concentrate our discussion on the state-of-the-art Ga2O3-based gas sensor devices and put an emphasis on seven sophisticated strategies to improve their gas-sensing performance in terms of material engineering and device optimization. Finally, we give some concluding remarks and put forward some suggestions, including (i) construction of hybrid structures with two-dimensional materials and organic polymers, (ii) combination with density functional theoretical calculations and machine learning, and (iii) development of optical sensors using the characteristic optical spectra for the future development of novel Ga2O3-based gas sensors.
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Affiliation(s)
- Jun Zhu
- School of Physical Science and Technology, Inner Mongolia University, Hohhot 010021, China
| | - Zhihao Xu
- Global Zero Emission Research Center (GZR), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 3058560, Japan
| | - Sihua Ha
- College of Sciences, Inner Mongolia University of Technology, Hohhot 010051, China
| | - Dongke Li
- ZJU-Hangzhou Global Scientific and Technological Innovation Center, School of Materials Science and Engineering, Zhejiang University, Hangzhou 311200, China
| | - Kexiong Zhang
- School of Microelectronics, Dalian University of Technology, Dalian 116602, China
| | - Hai Zhang
- College of Sciences, Inner Mongolia University of Technology, Hohhot 010051, China
| | - Jijun Feng
- Shanghai Key Laboratory of Modern Optical System, Engineering Research Center of Optical Instrument and System (Ministry of Education), School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
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24
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Chiang JL, Yadlapalli BK, Chen MI, Wuu DS. A Review on Gallium Oxide Materials from Solution Processes. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:3601. [PMID: 36296792 PMCID: PMC9609084 DOI: 10.3390/nano12203601] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/09/2022] [Revised: 10/08/2022] [Accepted: 10/09/2022] [Indexed: 06/16/2023]
Abstract
Gallium oxide (Ga2O3) materials can be fabricated via various methods or processes. It is often mentioned that it possesses different polymorphs (α-, β-, γ-, δ- and ε-Ga2O3) and excellent physical and chemical properties. The basic properties, crystalline structure, band gap, density of states, and other properties of Ga2O3 will be discussed in this article. This article extensively discusses synthesis of pure Ga2O3, co-doped Ga2O3 and Ga2O3-metal oxide composite and Ga2O3/metal oxide heterostructure nanomaterials via solution-based methods mainly sol-gel, hydrothermal, chemical bath methods, solvothermal, forced hydrolysis, reflux condensation, and electrochemical deposition methods. The influence of the type of precursor solution and the synthesis conditions on the morphology, size, and properties of final products is thoroughly described. Furthermore, the applications of Ga2O3 will be introduced and discussed from these solution processes, such as deep ultraviolet photodetector, gas sensors, pH sensors, photocatalytic and photodegradation, and other applications. In addition, research progress and future outlook are identified.
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Affiliation(s)
- Jung-Lung Chiang
- Ph.D. Program, Prospective Technology of Electrical Engineering and Computer Science, National Chin-Yi University of Technology, Taichung 41170, Taiwan
| | - Bharath Kumar Yadlapalli
- Department of Materials Science and Engineering, National Chung Hsing University, Taichung 40227, Taiwan
| | - Mu-I Chen
- Department of Materials Science and Engineering, National Chung Hsing University, Taichung 40227, Taiwan
| | - Dong-Sing Wuu
- Department of Materials Science and Engineering, National Chung Hsing University, Taichung 40227, Taiwan
- Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Nantou 54561, Taiwan
- Innovation and Development Center of Sustainable Agriculture, National Chung Hsing University, Taichung 40227, Taiwan
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25
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Ratcliff LE, Oshima T, Nippert F, Janzen BM, Kluth E, Goldhahn R, Feneberg M, Mazzolini P, Bierwagen O, Wouters C, Nofal M, Albrecht M, Swallow JEN, Jones LAH, Thakur PK, Lee TL, Kalha C, Schlueter C, Veal TD, Varley JB, Wagner MR, Regoutz A. Tackling Disorder in γ-Ga 2 O 3. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2022; 34:e2204217. [PMID: 35866491 DOI: 10.1002/adma.202204217] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/10/2022] [Revised: 07/05/2022] [Indexed: 06/15/2023]
Abstract
Ga2 O3 and its polymorphs are attracting increasing attention. The rich structural space of polymorphic oxide systems such as Ga2 O3 offers potential for electronic structure engineering, which is of particular interest for a range of applications, such as power electronics. γ-Ga2 O3 presents a particular challenge across synthesis, characterization, and theory due to its inherent disorder and resulting complex structure-electronic-structure relationship. Here, density functional theory is used in combination with a machine-learning approach to screen nearly one million potential structures, thereby developing a robust atomistic model of the γ-phase. Theoretical results are compared with surface and bulk sensitive soft and hard X-ray photoelectron spectroscopy, X-ray absorption spectroscopy, spectroscopic ellipsometry, and photoluminescence excitation spectroscopy experiments representative of the occupied and unoccupied states of γ-Ga2 O3 . The first onset of strong absorption at room temperature is found at 5.1 eV from spectroscopic ellipsometry, which agrees well with the excitation maximum at 5.17 eV obtained by photoluminescence excitation spectroscopy, where the latter shifts to 5.33 eV at 5 K. This work presents a leap forward in the treatment of complex, disordered oxides and is a crucial step toward exploring how their electronic structure can be understood in terms of local coordination and overall structure.
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Affiliation(s)
- Laura E Ratcliff
- Department of Materials, Imperial College London, London, SW7 2AZ, UK
- Center for Computational Chemistry, School of Chemistry, University of Bristol, Bristol, BS8 1TS, UK
| | - Takayoshi Oshima
- Department of Electrical and Electronic Engineering, Saga University, Saga, 840-8502, Japan
| | - Felix Nippert
- Technische Universität Berlin, Institute of Solid State Physics, Hardenbergstrasse 36, 10623, Berlin, Germany
| | - Benjamin M Janzen
- Technische Universität Berlin, Institute of Solid State Physics, Hardenbergstrasse 36, 10623, Berlin, Germany
| | - Elias Kluth
- Institut für Physik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39106, Magdeburg, Germany
| | - Rüdiger Goldhahn
- Institut für Physik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39106, Magdeburg, Germany
| | - Martin Feneberg
- Institut für Physik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39106, Magdeburg, Germany
| | - Piero Mazzolini
- Paul-Drude-Institut für Festkörperelektronik, Leibniz-Institut im Forschungsverbund Berlin e.V., Hausvogteiplatz 5-7, 10117, Berlin, Germany
| | - Oliver Bierwagen
- Paul-Drude-Institut für Festkörperelektronik, Leibniz-Institut im Forschungsverbund Berlin e.V., Hausvogteiplatz 5-7, 10117, Berlin, Germany
| | - Charlotte Wouters
- Leibniz-Institut für Kristallzüchtung, Max-Born-Str. 2, 12489, Berlin, Germany
| | - Musbah Nofal
- Leibniz-Institut für Kristallzüchtung, Max-Born-Str. 2, 12489, Berlin, Germany
| | - Martin Albrecht
- Leibniz-Institut für Kristallzüchtung, Max-Born-Str. 2, 12489, Berlin, Germany
| | - Jack E N Swallow
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, UK
| | - Leanne A H Jones
- Stephenson Institute for Renewable Energy and Department of Physics, University of Liverpool, Liverpool, L69 7ZF, UK
| | - Pardeep K Thakur
- Diamond Light Source Ltd., Diamond House, Harwell Science and Innovation Campus, Didcot, OX11 0DE, UK
| | - Tien-Lin Lee
- Diamond Light Source Ltd., Diamond House, Harwell Science and Innovation Campus, Didcot, OX11 0DE, UK
| | - Curran Kalha
- Department of Chemistry, University College London, 20 Gordon Street, London, WC1H 0AJ, UK
| | - Christoph Schlueter
- Deutsches Elektronen-Synchrotron DESY, Notkestrasse 85, 22607, Hamburg, Germany
| | - Tim D Veal
- Stephenson Institute for Renewable Energy and Department of Physics, University of Liverpool, Liverpool, L69 7ZF, UK
| | - Joel B Varley
- Lawrence Livermore National Laboratory, Livermore, CA, 94550, USA
| | - Markus R Wagner
- Technische Universität Berlin, Institute of Solid State Physics, Hardenbergstrasse 36, 10623, Berlin, Germany
| | - Anna Regoutz
- Department of Chemistry, University College London, 20 Gordon Street, London, WC1H 0AJ, UK
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26
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Yamanaka T, Hayashi Y, Takizawa H. Sonochemical synthesis of supersaturated Ga-Al liquid-alloy fine particles and Al 3+-doped γ-Ga 2O 3 nanoparticles by direct oxidation at near room temperature. ULTRASONICS SONOCHEMISTRY 2022; 89:106114. [PMID: 35987105 PMCID: PMC9403562 DOI: 10.1016/j.ultsonch.2022.106114] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/28/2022] [Revised: 08/01/2022] [Accepted: 08/04/2022] [Indexed: 06/15/2023]
Abstract
In this study, we investigated the fabrication of supersaturated gallium (Ga)-aluminum (Al) liquid alloy and Al3+-doped γ-Ga2O3 nanoparticles (NPs) at near room temperature (60 °C) using sonochemical and sonophysical effects. Supersaturated Ga-Al liquid alloy microparticles (Dav = 1.72 µm) were formed and stabilized at 60 °C by the thermal nonequilibrium field provided by sonochemical hot spots. Compared with liquid Ga, supersaturated Ga-Al liquid alloy was rapidly oxidized to a uniform oxide without Al2O3 or Al deposition. Thus, ultrafine Al3+-doped γ-Ga2O3 NPs were obtained after only 1 h of ultrasonic irradiation at 60 °C. The oxidation of liquid Ga was remarkably accelerated by alloying with metallic Al and ultrasonic irradiation, and the time was shortened. The average diameter and surface area of the γ-Ga2O3-based NPs were 59 nm and 181 m2/g, respectively. Compared with γ-Ga2O3, the optical bandgap of the Al3+-doped γ-Ga2O3 NPs was broadened, and the thermal stability improved, indicating Al3+-doping into the γ-Ga2O3 lattice. However, the lattice constant of γ-Ga2O3 was almost unchanged with or without Al3+-doping. Al3+ was introduced into the defect sites of Ga3+, which were massively induced in the defective spinel structure during ultrasonic processing. Therefore, sonochemical processing, which provides nonequilibrium reaction fields, is suitable for the synthesis of supersaturated and metastable materials in metals and ceramics fields.
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Affiliation(s)
- Toshiki Yamanaka
- Graduate School of Engineering, Department of Applied Chemistry, Tohoku University, 6-6 Aoba, Aramaki, Aobaku, Sendai 980-8579, Japan
| | - Yamato Hayashi
- Graduate School of Engineering, Department of Applied Chemistry, Tohoku University, 6-6 Aoba, Aramaki, Aobaku, Sendai 980-8579, Japan.
| | - Hirotsugu Takizawa
- Graduate School of Engineering, Department of Applied Chemistry, Tohoku University, 6-6 Aoba, Aramaki, Aobaku, Sendai 980-8579, Japan
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27
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An approach towards the synthesis of faceted Ga2O3 nano- and micro-structures through the microwave process. APPLIED NANOSCIENCE 2022. [DOI: 10.1007/s13204-022-02572-w] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/02/2022]
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28
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Lu Y, Krishna S, Tang X, Babatain W, Ben Hassine M, Liao CH, Xiao N, Liu Z, Li X. Ultrasensitive Flexible κ-Phase Ga 2O 3 Solar-Blind Photodetector. ACS APPLIED MATERIALS & INTERFACES 2022; 14:34844-34854. [PMID: 35868327 PMCID: PMC9354794 DOI: 10.1021/acsami.2c06550] [Citation(s) in RCA: 5] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/13/2022] [Accepted: 07/14/2022] [Indexed: 05/28/2023]
Abstract
Flexible Ga2O3 photodetectors have attracted considerable interest owing to their potential use in the development of implantable, foldable, and wearable optoelectronics. In particular, β-phase Ga2O3 has been most widely investigated due to the highest thermodynamic stability. However, high-quality β-phase Ga2O3 relies on the ultrahigh crystallization temperature (usually ≥750 °C), beyond the thermal tolerance of most flexible substrates. In this work, we epitaxially grow a high-quality metastable κ-phase Ga2O3 (002) thin film on a flexible mica (001) substrate under 680 °C and develop a flexible κ-Ga2O3 thin film photodetector with ultrahigh performance. Epitaxial κ-Ga2O3 and the mica substrate are maintained to be thermally stable up to 750 °C, suggesting their potential for harsh environment applications. The responsivity, on/off ratio, detectivity, and external quantum efficiency of the fabricated photodetector are 703 A/W, 1.66 × 107, 4.08 × 1014 Jones, and 3.49 × 105 %, respectively, for 250 nm incident light and a 20 V bias voltage. These values are record-high values reported to date for flexible Ga2O3 photodetectors. Furthermore, the flexible photodetector shows robust flexibility for bending radii of 1, 2, and 3 cm. More importantly, it shows strong mechanical stability against 10,000 bending test cycles. These results reveal the significance of high-quality κ-phase Ga2O3 grown heteroepitaxially on a flexible mica substrate, especially its potential for use in future flexible solar-blind detection systems.
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Affiliation(s)
- Yi Lu
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Shibin Krishna
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Xiao Tang
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Wedyan Babatain
- MMH
Labs, Electrical and Computer Engineering Program, CEMSE Division, King Abdullah University of Science and Technology
(KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Mohamed Ben Hassine
- CoreLabs, King Abdullah University of Science
and Technology
(KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Che-Hao Liao
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Na Xiao
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Zhiyuan Liu
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
| | - Xiaohang Li
- Advanced
Semiconductor Laboratory, Electrical and Computer Engineering Program,
CEMSE Division, King Abdullah University
of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia
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29
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Comparative study of the fundamental properties of Ga2O3 polymorphs. J SOLID STATE CHEM 2022. [DOI: 10.1016/j.jssc.2022.123272] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022]
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30
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Jamwal NS, Kiani A. Gallium Oxide Nanostructures: A Review of Synthesis, Properties and Applications. NANOMATERIALS 2022; 12:nano12122061. [PMID: 35745408 PMCID: PMC9229744 DOI: 10.3390/nano12122061] [Citation(s) in RCA: 10] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/10/2022] [Revised: 06/11/2022] [Accepted: 06/13/2022] [Indexed: 12/04/2022]
Abstract
Gallium oxide, as an emerging semiconductor, has attracted a lot of attention among researchers due to its high band gap (4.8 eV) and a high critical field with the value of 8 MV/cm. This paper presents a review on different chemical and physical techniques for synthesis of nanostructured β-gallium oxide, as well as its properties and applications. The polymorphs of Ga2O3 are highlighted and discussed along with their transformation state to β-Ga2O3. Different processes of synthesis of thin films, nanostructures and bulk gallium oxide are reviewed. The electrical and optical properties of β-gallium oxide are also highlighted, based on the synthesis methods, and the techniques for tuning its optical and electrical properties compared. Based on this information, the current, and the possible future, applications for β-Ga2O3 nanostructures are discussed.
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Affiliation(s)
- Nishant Singh Jamwal
- Silicon Hall: Micro/Nano Manufacturing Facility, Faculty of Engineering and Applied Science, Ontario Tech University, 2000 Simcoe St N, Oshawa, ON L1G 0C5, Canada;
- Department of Mechanical and Manufacturing Engineering (MME), Ontario Tech University, 2000 Simcoe St N, Oshawa, ON L1G0C5, Canada
| | - Amirkianoosh Kiani
- Silicon Hall: Micro/Nano Manufacturing Facility, Faculty of Engineering and Applied Science, Ontario Tech University, 2000 Simcoe St N, Oshawa, ON L1G 0C5, Canada;
- Department of Mechanical and Manufacturing Engineering (MME), Ontario Tech University, 2000 Simcoe St N, Oshawa, ON L1G0C5, Canada
- Correspondence:
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31
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Fan Q, Zhao R, Zhang W, Song Y, Sun M, Schwingenschlögl U. Low-energy Ga 2O 3 polymorphs with low electron effective masses. Phys Chem Chem Phys 2022; 24:7045-7049. [PMID: 35258045 DOI: 10.1039/d1cp05271c] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/26/2022]
Abstract
We predict three Ga2O3 polymorphs with P21/c or Pnma symmetry. The formation energies of P21/c Ga2O3, Pnma-I Ga2O3, and Pnma-II Ga2O3 are 57 meV per atom, 51 meV per atom, and 23 meV per atom higher than that of β-Ga2O3, respectively. All the polymorphs are shown to be dynamically and mechanically stable. P21/c Ga2O3 is a quasi-direct wide band gap semiconductor (3.83 eV), while Pnma-I Ga2O3 and Pnma-II Ga2O3 are direct wide band gap semiconductors (3.60 eV and 3.70 eV, respectively). Simulated X-ray diffraction patterns are provided for experimental confirmation of the predicted structures. The polymorphs turn out to provide low electron effective masses, which is of great benefit to high-power electronic devices.
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Affiliation(s)
- Qingyang Fan
- College of Information and Control Engineering, Xi'an University of Architecture and Technology, Xi'an 710055, China.,Shaanxi Key Laboratory of Nano Materials and Technology, Xi'an, 710055, China.
| | - Ruida Zhao
- College of Information and Control Engineering, Xi'an University of Architecture and Technology, Xi'an 710055, China
| | - Wei Zhang
- School of Microelectronics, Xidian University, Xi'an 710071, China
| | - Yanxing Song
- School of Microelectronics, Xidian University, Xi'an 710071, China
| | - Minglei Sun
- Applied Physics Program, Physical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia.
| | - Udo Schwingenschlögl
- Applied Physics Program, Physical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia.
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Ga 2O 3 and Related Ultra-Wide Bandgap Power Semiconductor Oxides: New Energy Electronics Solutions for CO 2 Emission Mitigation. MATERIALS 2022; 15:ma15031164. [PMID: 35161108 PMCID: PMC8838167 DOI: 10.3390/ma15031164] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/17/2021] [Revised: 01/14/2022] [Accepted: 01/25/2022] [Indexed: 12/01/2022]
Abstract
Currently, a significant portion (~50%) of global warming emissions, such as CO2, are related to energy production and transportation. As most energy usage will be electrical (as well as transportation), the efficient management of electrical power is thus central to achieve the XXI century climatic goals. Ultra-wide bandgap (UWBG) semiconductors are at the very frontier of electronics for energy management or energy electronics. A new generation of UWBG semiconductors will open new territories for higher power rated power electronics and solar-blind deeper ultraviolet optoelectronics. Gallium oxide—Ga2O3 (4.5–4.9 eV), has recently emerged pushing the limits set by more conventional WBG (~3 eV) materials, such as SiC and GaN, as well as for transparent conducting oxides (TCO), such asIn2O3, ZnO and SnO2, to name a few. Indeed, Ga2O3 as the first oxide used as a semiconductor for power electronics, has sparked an interest in oxide semiconductors to be investigated (oxides represent the largest family of UWBG). Among these new power electronic materials, AlxGa1-xO3 may provide high-power heterostructure electronic and photonic devices at bandgaps far beyond all materials available today (~8 eV) or ZnGa2O4 (~5 eV), enabling spinel bipolar energy electronics for the first time ever. Here, we review the state-of-the-art and prospects of some ultra-wide bandgap oxide semiconductor arising technologies as promising innovative material solutions towards a sustainable zero emission society.
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33
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Azarov A, Bazioti C, Venkatachalapathy V, Vajeeston P, Monakhov E, Kuznetsov A. Disorder-Induced Ordering in Gallium Oxide Polymorphs. PHYSICAL REVIEW LETTERS 2022; 128:015704. [PMID: 35061456 DOI: 10.1103/physrevlett.128.015704] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/26/2021] [Accepted: 12/14/2021] [Indexed: 06/14/2023]
Abstract
Polymorphs are common in nature and can be stabilized by applying external pressure in materials. The pressure and strain can also be induced by the gradually accumulated radiation disorder. However, in semiconductors, the radiation disorder accumulation typically results in the amorphization instead of engaging polymorphism. By studying these phenomena in gallium oxide we found that the amorphization may be prominently suppressed by the monoclinic to orthorhombic phase transition. Utilizing this discovery, a highly oriented single-phase orthorhombic film on the top of the monoclinic gallium oxide substrate was fabricated. Exploring this system, a novel mode of the lateral polymorphic regrowth, not previously observed in solids, was detected. In combination, these data envisage a new direction of research on polymorphs in Ga_{2}O_{3} and, potentially, for similar polymorphic families in other materials.
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Affiliation(s)
- Alexander Azarov
- Department of Physics, Centre for Materials Science and Nanotechnology, University of Oslo, PO Box 1048 Blindern, N-0316 Oslo, Norway
| | - Calliope Bazioti
- Department of Physics, Centre for Materials Science and Nanotechnology, University of Oslo, PO Box 1048 Blindern, N-0316 Oslo, Norway
| | - Vishnukanthan Venkatachalapathy
- Department of Physics, Centre for Materials Science and Nanotechnology, University of Oslo, PO Box 1048 Blindern, N-0316 Oslo, Norway
- Department of Materials Science, National Research Nuclear University, "MEPhI", 31 Kashirskoe Hwy, 115409 Moscow, Russian Federation
| | - Ponniah Vajeeston
- Department of Chemistry, Centre for Materials Science and Nanotechnology, University of Oslo, PO Box 1033 Blindern, N-0315 Oslo, Norway
| | - Edouard Monakhov
- Department of Physics, Centre for Materials Science and Nanotechnology, University of Oslo, PO Box 1048 Blindern, N-0316 Oslo, Norway
| | - Andrej Kuznetsov
- Department of Physics, Centre for Materials Science and Nanotechnology, University of Oslo, PO Box 1048 Blindern, N-0316 Oslo, Norway
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Jin Z, Liu Y, Xia N, Guo X, Hong Z, Zhang H, Yang D. Wet Etching in β-Ga2O3 Bulk Single Crystal. CrystEngComm 2022. [DOI: 10.1039/d1ce01499d] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Beta-phase gallium oxide (β-Ga2O3) bulk single crystal has received increasing attentions due to their fantastic performances and widespread use in power devices and solar-blind photodetectors. Wet etching has proved to...
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35
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Abstract
Gallium oxide (Ga2O3) thin films of various thicknesses were grown on sapphire (0001) substrates by metal organic chemical vapor deposition (MOCVD) using trimethylgallium (TMGa), high purity deionized water, and silane (SiH4) as gallium, oxygen, and silicon precursors, respectively. N2 was used as carrier gas. Hall measurements revealed that films grown with a lower VI/III ratio had a dominant p-type conduction with room temperature mobilities up to 7 cm2/Vs and carrier concentrations up to ~1020 cm−3 for thinner layers. High resolution transmission electron microscopy suggested that the layers were mainly κ phase. Microstrip field-effect transistors (FETs) were fabricated using 2D p-type Ga2O3:Si, channels. They achieved a maximum drain current of 2.19 mA and an on/off ratio as high as ~108. A phenomenological model for the p-type conduction was also presented. As the first demonstration of a p-type Ga2O3, this work represents a significant advance which is state of the art, which would allow the fabrication of p-n junction based devices which could be smaller/thinner and bring both cost (more devices/wafer and less growth time) and operating speed (due to miniaturization) advantages. Moreover, the first scaling down to 2D device channels opens the prospect of faster devices and improved heat evacuation.
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36
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Nielsen IG, Sommer S, Dippel AC, Skibsted J, Iversen BB. Pair distribution function and 71Ga NMR study of aqueous Ga 3+ complexes. Chem Sci 2021; 12:14420-14431. [PMID: 34880993 PMCID: PMC8580017 DOI: 10.1039/d1sc05190c] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/17/2021] [Accepted: 10/14/2021] [Indexed: 11/23/2022] Open
Abstract
The atomic structures, and thereby the coordination chemistry, of metal ions in aqueous solution represent a cornerstone of chemistry, since they provide first steps in rationalizing generally observed chemical information. However, accurate structural information about metal ion solution species is often surprisingly scarce. Here, the atomic structures of Ga3+ ion complexes were determined directly in aqueous solutions across a wide range of pH, counter anions and concentrations by X-ray pair distribution function analysis and 71Ga NMR. At low pH (<2) octahedrally coordinated gallium dominates as either monomers with a high degree of solvent ordering or as Ga-dimers. At slightly higher pH (pH ≈ 2–3) a polyoxogallate structure is identified as either Ga30 or Ga32 in contradiction with the previously proposed Ga13 Keggin structures. At neutral and slightly higher pH nanosized GaOOH particles form, whereas for pH > 12 tetrahedrally coordinated gallium ions surrounded by ordered solvent are observed. The effects of varying either the concentration or counter anion were minimal. The present study provides the first comprehensive structural exploration of the aqueous chemistry of Ga3+ ions with atomic resolution, which is relevant for both semiconductor fabrication and medical applications. With changing pH four different structural regions in Ga3+ aqueous solutions are observed. In contrast the effects of different anions and concentrations are minimal.![]()
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Affiliation(s)
- Ida Gjerlevsen Nielsen
- Center for Materials Crystallography, Department of Chemistry, Interdisciplinary Nanoscience Center (iNANO), Aarhus University 8000 Aarhus C Denmark
| | - Sanna Sommer
- Center for Materials Crystallography, Department of Chemistry, Interdisciplinary Nanoscience Center (iNANO), Aarhus University 8000 Aarhus C Denmark
| | | | - Jørgen Skibsted
- Department of Chemistry, iNANO, Aarhus University 8000 Aarhus C Denmark
| | - Bo Brummerstedt Iversen
- Center for Materials Crystallography, Department of Chemistry, Interdisciplinary Nanoscience Center (iNANO), Aarhus University 8000 Aarhus C Denmark
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Ga 2O 3(Sn) Oxides for High-Temperature Gas Sensors. NANOMATERIALS 2021; 11:nano11112938. [PMID: 34835702 PMCID: PMC8624813 DOI: 10.3390/nano11112938] [Citation(s) in RCA: 9] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/02/2021] [Revised: 10/23/2021] [Accepted: 10/30/2021] [Indexed: 01/03/2023]
Abstract
Gallium(III) oxide is a promising functional wide-gap semiconductor for high temperature gas sensors of the resistive type. Doping of Ga2O3 with tin improves material conductivity and leads to the complicated influence on phase content, microstructure, adsorption sites, donor centers and, as a result, gas sensor properties. In this work, Ga2O3 and Ga2O3(Sn) samples with tin content of 0–13 at.% prepared by aqueous co-precipitation method were investigated by X-ray diffraction, nitrogen adsorption isotherms, X-ray photoelectron spectroscopy, infrared spectroscopy and probe molecule techniques. The introduction of tin leads to a decrease in the average crystallite size, increase in the temperature of β-Ga2O3 formation. The sensor responses of all Ga2O3(Sn) samples to CO and NH3 have non-monotonous character depending on Sn content due to the following factors: the formation of donor centers and the change of free electron concentration, increase in reactive chemisorbed oxygen ions concentration, formation of metastable Ga2O3 phases and segregation of SnO2 on the surface of Ga2O3(Sn) grains.
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Ma X, Xu R, Xu J, Ying L, Mei Y, Long H, Zhang B. In-plane crystalline anisotropy of bulk β-Ga2O3. J Appl Crystallogr 2021. [DOI: 10.1107/s1600576721006427] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022] Open
Abstract
The anisotropy of X-ray diffraction scanning of (201) β-Ga2O3 bulk material has been investigated. Symmetric rocking curves (RCs) exhibit distinctly different broadening along different azimuths, with a maximum along [102] and a minimum along a direction rotated by 30° from [010]. Williamson–Hall analysis was applied to study possible factors causing the broadening in these RCs, including instrumental factors, mosaic tilt and coherent scattering. It was found that the RC broadening is determined by both isotropic mosaic tilt and anisotropy in the length over which the crystal structure is not disrupted by limiting factors such as grain boundaries or stacking faults, which we term the `lateral limited size'. In this case, the lateral limited size is governed by {200} stacking faults along the [102] direction and grain boundaries along the [010] direction. The result presents a new anisotropy characteristic of (201) β-Ga2O3.
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Xing Y, Zhang Y, Han J, Cao X, Cui B, Ma H, Zhang B. Research of nanopore structure of Ga 2O 3 film in MOCVD for improving the performance of UV photoresponse. NANOTECHNOLOGY 2021; 32:095301. [PMID: 33105128 DOI: 10.1088/1361-6528/abc4a2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Using the mechanism of self-reactive etching between Ga and Ga2O3, Ga2O3 nanopore films were fabricated. The self-reactive etching effects based on as-grown and annealed Ga2O3 films by metal organic chemical vapor deposition were compared. It was found that the nanopore film based on as-grown Ga2O3 film has a uniform size, high density and a small diameter. Ultraviolet-visible light reflection spectra and transmission spectra show that the nanopore film could effectively reduce the reflectivity of light and enhance the light absorption. Based on the as-grown Ga2O3 film and its nanopore film, metal-semiconductor-metal structure solar blind ultraviolet photodetectors (PD) were fabricated. Under 5 V bias, the light-dark current ratio of the nanopore film PD is about 2.5 × 102 times that of the film PD, the peak responsivity of the nanopore film PD is about 49 times that of the film PD. The rejection ratio is 4.6 × 103, about 1.15 × 102 times that of the film PD. The nanopore structure effectively increases the surface-volume ratio of film. The photoelectric detection performance and response performance of the nanopore film PD could be significantly enhanced.
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Affiliation(s)
- Yanhui Xing
- Key Laboratory of Opto-electronics Technology, Ministry of Education, College of Microelectronics, Beijing University of Technology, Beijing 100124, People's Republic of China
| | - Yao Zhang
- Key Laboratory of Opto-electronics Technology, Ministry of Education, College of Microelectronics, Beijing University of Technology, Beijing 100124, People's Republic of China
| | - Jun Han
- Key Laboratory of Opto-electronics Technology, Ministry of Education, College of Microelectronics, Beijing University of Technology, Beijing 100124, People's Republic of China
| | - Xu Cao
- Key Laboratory of Opto-electronics Technology, Ministry of Education, College of Microelectronics, Beijing University of Technology, Beijing 100124, People's Republic of China
- Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, CAS, Suzhou 215123, People's Republic of China
| | - Boyao Cui
- Key Laboratory of Opto-electronics Technology, Ministry of Education, College of Microelectronics, Beijing University of Technology, Beijing 100124, People's Republic of China
| | - Haixin Ma
- Key Laboratory of Opto-electronics Technology, Ministry of Education, College of Microelectronics, Beijing University of Technology, Beijing 100124, People's Republic of China
| | - Baoshun Zhang
- Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, CAS, Suzhou 215123, People's Republic of China
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40
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Ti Alloyed α-Ga 2O 3: Route towards Wide Band Gap Engineering. MICROMACHINES 2020; 11:mi11121128. [PMID: 33419277 PMCID: PMC7766553 DOI: 10.3390/mi11121128] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/03/2020] [Revised: 12/12/2020] [Accepted: 12/15/2020] [Indexed: 11/16/2022]
Abstract
The suitability of Ti as a band gap modifier for α-Ga2O3 was investigated, taking advantage of the isostructural α phases and high band gap difference between Ti2O3 and Ga2O3. Films of (Ti,Ga)2O3 were synthesized by atomic layer deposition on sapphire substrates, and characterized to determine how crystallinity and band gap vary with composition for this alloy. We report the deposition of high quality α-(TixGa1−x)2O3 films with x = 3.7%. For greater compositions the crystalline quality of the films degrades rapidly, where the corundum phase is maintained in films up to x = 5.3%, and films containing greater Ti fractions being amorphous. Over the range of achieved corundum phase films, that is 0% ≤ x ≤ 5.3%, the band gap energy varies by ∼270 meV. The ability to maintain a crystalline phase at low fractions of Ti, accompanied by a modification in band gap, shows promising prospects for band gap engineering and the development of wavelength specific solar-blind photodetectors based on α-Ga2O3.
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41
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Marin R, Jaque D. Doping Lanthanide Ions in Colloidal Semiconductor Nanocrystals for Brighter Photoluminescence. Chem Rev 2020; 121:1425-1462. [DOI: 10.1021/acs.chemrev.0c00692] [Citation(s) in RCA: 44] [Impact Index Per Article: 11.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/19/2022]
Affiliation(s)
- Riccardo Marin
- Fluorescence Imaging Group (FIG), Departamento de Física de Materiales, Facultad de Ciencias, Universidad Autónoma de Madrid, C/Francisco Tomás y Valiente 7, Madrid 28049, Spain
| | - Daniel Jaque
- Fluorescence Imaging Group (FIG), Departamento de Física de Materiales, Facultad de Ciencias, Universidad Autónoma de Madrid, C/Francisco Tomás y Valiente 7, Madrid 28049, Spain
- Nanobiology Group, Instituto Ramón y Cajal de Investigación, Sanitaria Hospital Ramón y Cajal, Ctra. De Colmenar Viejo, Km. 9100, 28034 Madrid, Spain
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42
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Sutherland DR, Connolly AB, Amsler M, Chang MC, Gann KR, Gupta V, Ament S, Guevarra D, Gregoire JM, Gomes CP, Bruce van Dover R, Thompson MO. Optical Identification of Materials Transformations in Oxide Thin Films. ACS COMBINATORIAL SCIENCE 2020; 22:887-894. [PMID: 33118818 DOI: 10.1021/acscombsci.0c00172] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Abstract
Recent advances in high-throughput experimentation for combinatorial studies have accelerated the discovery and analysis of materials across a wide range of compositions and synthesis conditions. However, many of the more powerful characterization methods are limited by speed, cost, availability, and/or resolution. To make efficient use of these methods, there is value in developing approaches for identifying critical compositions and conditions to be used as a priori knowledge for follow-up characterization with high-precision techniques, such as micrometer-scale synchrotron-based X-ray diffraction (XRD). Here, we demonstrate the use of optical microscopy and reflectance spectroscopy to identify likely phase-change boundaries in thin film libraries. These methods are used to delineate possible metastable phase boundaries following lateral-gradient laser spike annealing (lg-LSA) of oxide materials. The set of boundaries are then compared with definitive determinations of structural transformations obtained using high-resolution XRD. We demonstrate that the optical methods detect more than 95% of the structural transformations in a composition-gradient La-Mn-O library and a Ga2O3 sample, both subject to an extensive set of lg-LSA anneals. Our results provide quantitative support for the value of optically detected transformations as a priori data to guide subsequent structural characterization, ultimately accelerating and enhancing the efficient implementation of micrometer-resolution XRD experiments.
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Affiliation(s)
- Duncan R. Sutherland
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
| | - Aine Boyer Connolly
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
| | - Maximilian Amsler
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
- Department of Chemistry and Biochemistry, University of Bern, Freiestrasse 3, CH-3012 Bern, Switzerland
| | - Ming-Chiang Chang
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
| | - Katie Rose Gann
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
| | - Vidit Gupta
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
| | - Sebastian Ament
- Department of Computer Science, Cornell University, Ithaca, New York 14853, United States
| | - Dan Guevarra
- Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, United States
| | - John M. Gregoire
- Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, United States
| | - Carla P. Gomes
- Department of Computer Science, Cornell University, Ithaca, New York 14853, United States
| | - R. Bruce van Dover
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
| | - Michael O. Thompson
- Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, United States
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Hector G, Appert E, Sarigiannidou E, Matheret E, Roussel H, Chaix-Pluchery O, Consonni V. Chemical Synthesis of β-Ga 2O 3 Microrods on Silicon and Its Dependence on the Gallium Nitrate Concentration. Inorg Chem 2020; 59:15696-15706. [PMID: 33078927 DOI: 10.1021/acs.inorgchem.0c02069] [Citation(s) in RCA: 9] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Abstract
β-Ga2O3 microrods have attracted increasing attention for their integration into solar blind/UV photodetectors and gas sensors. However, their synthesis using a low-temperature chemical route in aqueous solution is still under development, and the physicochemical processes at work have not yet been elucidated. Here, we develop a double-step process involving the growth of α-GaOOH microrods on silicon using chemical bath deposition and their further structural conversion to β-Ga2O3 microrods by postdeposition thermal treatment. It is revealed that the concentration of gallium nitrate has a drastic effect on tuning the morphology, dimensions (i.e., diameter and length), and density of α-GaOOH microrods over a broad range, in turn governing the morphological properties of β-Ga2O3 microrods. The physicochemical processes in aqueous solution are investigated by thermodynamic computations yielding speciation diagrams of Ga(III) species and theoretical solubility plots of GaOOH(s). In particular, the qualitative evolution of the morphological properties of α-GaOOH microrods with the concentration of gallium nitrate is found to be correlated with the supersaturation in the bath and discussed in light of the standard nucleation and growth theory. Interestingly, the structural conversion following the thermal treatment at 900 °C in air results in the formation of pure β-Ga2O3 microrods without any residual minor phases and with tunable morphology and improved structural ordering. These findings reporting a double-step process for forming high-quality pure β-Ga2O3 microrods on silicon open many perspectives for their integration onto a large number of substrates for solar blind/UV photodetection and gas sensing.
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Affiliation(s)
- Guislain Hector
- Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France
| | - Estelle Appert
- Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France
| | | | - Eléa Matheret
- Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France
| | - Hervé Roussel
- Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France
| | | | - Vincent Consonni
- Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France
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Rafie Borujeny E, Sendetskyi O, Fleischauer MD, Cadien KC. Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition. ACS APPLIED MATERIALS & INTERFACES 2020; 12:44225-44237. [PMID: 32865966 DOI: 10.1021/acsami.0c08477] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
This work explores the applicability of atomic layer deposition (ALD) in producing highly oriented crystalline gallium oxide films on foreign substrates at low thermal budgets. The effects of substrate, deposition temperature, and annealing process on formation of crystalline gallium oxide are discussed. The Ga2O3 films exhibited a strong preferred orientation on the c-plane sapphire substrate. The onset of formation of crystalline gallium oxide is determined, at which only two sets of planes, i.e., α-Ga2O3 (006) and β-Ga2O3 (4̅02), are present parallel to the surface. More specifically, this work reports, for the first time, that epitaxial gallium oxide films on sapphire start to form at deposition temperatures ≥ 190 °C by using an optimized plasma-enhanced ALD process such that α-Ga2O3 (006)∥α-Al2O3 (006) and β-Ga2O3 (2̅01)∥α-Al2O3 (006). Both α-Ga2O3 (006) and β-Ga2O3 (2̅01) planes are polar planes (i.e., consisting of only one type of atom, either Ga or O) and, therefore, favorable to form by ALD at such low deposition temperatures. Ellipsometry and van der Pauw measurements confirmed that the crystalline films have optical and electrical properties close to bulk gallium oxide. The film grown at 277 °C was determined to have superior properties among as-deposited films. Using TEM to locate α-Ga2O3 and β-Ga2O3 domains in the as-deposited crystalline films, we proposed a short annealing scheme to limit the development of α-Ga2O3 domains in the film and produce pure β-Ga2O3 films via an energy-efficient process. A pure β-Ga2O3 phase on sapphire with β-Ga2O3 (2̅01)∥α-Al2O3 (006) was successfully achieved by using the proposed process at the low annealing temperature of 550 °C preceded by the low deposition temperature of 190 °C. The results of this work enable epitaxial growth of gallium oxide thin films, with superior material properties offered by ALD, not only with potential applications as a high-performance material in reducing global energy consumption but also with an energy-efficient fabrication process.
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Affiliation(s)
- Elham Rafie Borujeny
- Department of Chemical and Materials Engineering, University of Alberta, 12th Floor - Donadeo Innovation Centre for Engineering (ICE), 9211-116 Street NW, Edmonton, Alberta, Canada T6G 1H9
| | - Oles Sendetskyi
- National Research Council-Nanotechnology Research Centre, 11421 Saskatchewan Dr., Edmonton, Alberta, Canada T6G 2M9
- Department of Physics, University of Alberta, Edmonton, Alberta, Canada T6G 2E1
| | - Michael D Fleischauer
- National Research Council-Nanotechnology Research Centre, 11421 Saskatchewan Dr., Edmonton, Alberta, Canada T6G 2M9
- Department of Physics, University of Alberta, Edmonton, Alberta, Canada T6G 2E1
| | - Kenneth C Cadien
- Department of Chemical and Materials Engineering, University of Alberta, 12th Floor - Donadeo Innovation Centre for Engineering (ICE), 9211-116 Street NW, Edmonton, Alberta, Canada T6G 1H9
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Ga2.52V2·48O7·33(OH)0.67, a synthetic member of the nolanite/akdalaite-type family of oxyhydroxides containing trivalent vanadium. J SOLID STATE CHEM 2020. [DOI: 10.1016/j.jssc.2020.121396] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
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46
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Cook DS, Hooper JE, Dawson DM, Fisher JM, Thompsett D, Ashbrook SE, Walton RI. Synthesis and Polymorphism of Mixed Aluminum-Gallium Oxides. Inorg Chem 2020; 59:3805-3816. [PMID: 32091886 PMCID: PMC7081611 DOI: 10.1021/acs.inorgchem.9b03459] [Citation(s) in RCA: 18] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Abstract
![]()
The synthesis of
a new solid solution of the oxyhydroxide Ga5–xAlxO7(OH) is investigated
via solvothermal reaction between gallium
acetylacetonate and aluminum isopropoxide in 1,4-butanediol at 240
°C. A limited compositional range of 0 ≤ x ≤ 1.5 is produced, with the hexagonal unit cell parameters
refined from powder X-ray diffraction (XRD) showing a linear contraction
in unit cell volume with an increase in Al content. Solid-state 27Al and 71Ga nuclear magnetic resonance (NMR) spectroscopies
show a strong preference for Ga to occupy the tetrahedral sites and
Al to occupy the octahedral sites. Using isopropanol as the solvent,
γ-Ga2–xAlxO3 defect spinel solid solutions with x ≤ 1.8 can be prepared at 240 °C in 24 h. These materials
are nanocrystalline, as evidenced by their broad diffraction profiles;
however, the refined cubic lattice parameter shows a linear relationship
with the Ga:Al content, and solid-state NMR spectroscopy again shows
a preference for Al to occupy the octahedral sites. Thermal decomposition
of Ga5–xAlxO7(OH) occurs via poorly ordered materials that
resemble ε-Ga2–xAlxO3 and κ-Ga2–xAlxO3, but
γ-Ga2–xAlxO3 transforms above 750 °C to monoclinic β-Ga2–xAlxO3 for 0 ≤ x ≤ 1.3 and to hexagonal
α-Ga2–xAlxO3 for x = 1.8, with intermediate
compositions of 1.3 < x < 1.8 giving mixtures
of the α- and β-polymorphs. Solid-state NMR spectroscopy
shows only the expected octahedral Al for α-Ga2–xAlxO3, and
for β-Ga2–xAlxO3, the ∼1:2 tetrahedral:octahedral
Al ratio is in good agreement with the results of Rietveld analysis
of the average structures against powder XRD data. Relative energies
calculated by periodic density functional theory confirm that there
is an ∼5.2 kJ mol–1 penalty for tetrahedral
rather than octahedral Al in Ga5–xAlxO7(OH), whereas this penalty
is much smaller (∼2.0 kJ mol–1) for β-Ga2–xAlxO3, in good qualitative agreement with the experimental NMR
spectra. Solvothermal reactions in 1,4-butanediol
or isopropanol
yield a new solid solution of the oxyhydroxide Ga5−xAlxO7(OH)
or the spinel series γ-Ga2−xAlxO3, respectively. We have
explored the possible composition range and the thermal stability
of the materials. For γ-Ga2−xAlxO3 (x ≤
1.3), transformation to the monoclinic β-polymorph occurs above
1000 °C, providing a convenient route to this material of interest
for electronic applications.
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Affiliation(s)
- Daniel S Cook
- Department of Chemistry, University of Warwick, Coventry CV4 7AL, U.K
| | - Joseph E Hooper
- School of Chemistry, EaStCHEM and Centre of Magnetic Resonance, University of St Andrews, North Haugh, St Andrews KY16 9ST, U.K
| | - Daniel M Dawson
- School of Chemistry, EaStCHEM and Centre of Magnetic Resonance, University of St Andrews, North Haugh, St Andrews KY16 9ST, U.K
| | - Janet M Fisher
- Johnson Matthey Technology Centre, Sonning Common, Reading RG4 9NH, U.K
| | - David Thompsett
- Johnson Matthey Technology Centre, Sonning Common, Reading RG4 9NH, U.K
| | - Sharon E Ashbrook
- School of Chemistry, EaStCHEM and Centre of Magnetic Resonance, University of St Andrews, North Haugh, St Andrews KY16 9ST, U.K
| | - Richard I Walton
- Department of Chemistry, University of Warwick, Coventry CV4 7AL, U.K
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47
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Baklanova IV, Krasil'nikov VN, Tyutyunnik AP, Enyashin AN, Baklanova YV, Gyrdasova OI, Samigullina RF, Vovkotrub EG. Synthesis, spectroscopic and luminescence properties of Ga-doped γ-Al 2O 3. SPECTROCHIMICA ACTA. PART A, MOLECULAR AND BIOMOLECULAR SPECTROSCOPY 2020; 227:117658. [PMID: 31734572 DOI: 10.1016/j.saa.2019.117658] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/08/2019] [Revised: 10/10/2019] [Accepted: 10/14/2019] [Indexed: 06/10/2023]
Abstract
Gallium-doped aluminum oxide (Al1-xGax)2O3 with γ-Al2O3 (spinel) structure has been synthesized by the precursor method using the formate Al1-xGax(OH)(HCOO)2 as a precursor. The examination of Al1-xGax(OH)(HCOO)2 (x = 0.0, 0.1, 0.2, 0.3, 0.4) was carried out by X-ray powder diffraction, Infrared, Raman spectroscopy and differential-thermal methods. The solid solutions γ-(Al1-xGax)2O3 with х≤0.2 have been synthesized by thermolysis of precursors in helium atmosphere at 700 °C; they exhibit white-blue emission under UV excitation, whose intensity lowers with increasing dopant concentration. As an independent method, the DFT calculations confirmed thermodynamically the stability field of γ-(Al1-xGax)2O3 solid solutions and the NMR data on relative abundance of Al and Ga within the tetrahedral and octahedral sites in the metal sublattice. Furthermore, the structural and thermodynamic properties of carbon-containing impurities within these compounds were suggested theoretically as possible models of luminescence emission centers. The experimentally observed Ga-dependent quenching of luminescence was explained using the competition between C2p and Ga4p states within the band gap of γ-Al2O3.
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Affiliation(s)
- I V Baklanova
- Institute of Solid State Chemistry, Ural Branch of the Russian Academy of Sciences, Ekaterinburg, Russia.
| | - V N Krasil'nikov
- Institute of Solid State Chemistry, Ural Branch of the Russian Academy of Sciences, Ekaterinburg, Russia
| | - A P Tyutyunnik
- Institute of Solid State Chemistry, Ural Branch of the Russian Academy of Sciences, Ekaterinburg, Russia
| | - A N Enyashin
- Institute of Solid State Chemistry, Ural Branch of the Russian Academy of Sciences, Ekaterinburg, Russia
| | - Ya V Baklanova
- Institute of Solid State Chemistry, Ural Branch of the Russian Academy of Sciences, Ekaterinburg, Russia
| | - O I Gyrdasova
- Institute of Solid State Chemistry, Ural Branch of the Russian Academy of Sciences, Ekaterinburg, Russia
| | - R F Samigullina
- Institute of Solid State Chemistry, Ural Branch of the Russian Academy of Sciences, Ekaterinburg, Russia
| | - E G Vovkotrub
- Institute of High-Temperature Electrochemistry, Ural Branch of the Russian Academy of Sciences, Ekaterinburg, Russia
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48
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Nano-structured phases of gallium oxide (GaOOH, α-Ga2O3, β-Ga2O3, γ-Ga2O3, δ-Ga2O3, and ε-Ga2O3): fabrication, structural, and electronic structure investigations. INTERNATIONAL NANO LETTERS 2020. [DOI: 10.1007/s40089-020-00295-w] [Citation(s) in RCA: 15] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/25/2022]
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49
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Zhang X, Wang L, Wang X, Chen Y, Shao Q, Wu G, Wang X, Lin T, Shen H, Wang J, Meng X, Chu J. High-performance β-Ga 2O 3 thickness dependent solar blind photodetector. OPTICS EXPRESS 2020; 28:4169-4177. [PMID: 32122074 DOI: 10.1364/oe.385470] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/11/2019] [Accepted: 01/18/2020] [Indexed: 06/10/2023]
Abstract
Gallium oxide (Ga2O3) has been studied as one of the most promising wide bandgap semiconductors during the past decade. Here, we prepared high quality β-Ga2O3 films by pulsed laser deposition. β-Ga2O3 films of different thicknesses were achieved and their crystal properties were comprehensively studied. As thickness increases, grain size and surface roughness are both increased. Based on these β-Ga2O3 films, a series of ultraviolet (UV) photodetectors with interdigital electrodes structure were prepared. These devices embrace an ultralow dark current of 100 fA, and high photocurrent on/off ratio of 10E8 under UV light illumination. The photoresponse time is 4 ms which is faster than most of previous works. This work paves the way for the potential application of Ga2O3 in the field of UV detection.
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50
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Yamamoto T, Kurimoto A. Ga Ion-doped ZrO 2 Catalyst Characterized by XRD, XAFS, and 2-Butanol Decomposition. ANAL SCI 2020; 36:41-46. [PMID: 31588068 DOI: 10.2116/analsci.19sap03] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
Abstract
Group 2, 3, and 13 element-doped zirconium oxide catalysts M-ZrO2 (M = Mg, Sr, Y, La, Ce, Sm, Er, Yb, B, Al, Ga, In, and Tl; 5 mol%) were prepared by impregnation of each metal salt aqueous solution on amorphous zirconium hydroxide, followed by calcination at 773 K. The M-ZrO2 samples were characterized by the catalytic performance of 2-butanol decomposition at 573 K, XRD, XANES and EXAFS spectroscopic techniques. Detailed analyses were performed herein for a series of Ga-ZrO2 with various doping amounts in the range of 1 - 60 mol%. The addition of Group 2 and 3 elements little influenced the catalytic performance of ZrO2 itself to promote dehydration to produce 1-butene with 90% selectivity. Ga-ZrO2 and In-ZrO2 gave methyl ethyl ketone as the main product via dehydrogenation. The doped Ga ion mainly existed inside the bulk of zirconia by forming the GaxZr1-xO2 solid solution up to 5 mol%. Highly doped species more than 10 mol% aggregated to form ε-Ga2O3. Each fraction forming the solid solution and Ga2O3-like species was evaluated by XANES analysis.
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Affiliation(s)
- Takashi Yamamoto
- Department of Natural Science, Faculty of Science and Technology, Tokushima University.,Department of Mathematical and Material Sciences, Faculty of Integrated Arts and Sciences, Tokushima University
| | - Akihito Kurimoto
- Department of Mathematical and Material Sciences, Faculty of Integrated Arts and Sciences, Tokushima University
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