Imprinting the optical near field of microstructures with nanometer resolution

Analysis of the Pattern Shapes Obtained By Micro/Nanospherical Lens Photolithography

Micro/nanospherical lens photolithography (SLPL) constitutes an efficient and precise micro/nanofabrication methodology. It offers advantages over traditional nanolithography approaches, such as cost-effectiveness and ease of implementation. By using micrometer-sized microspheres, SLPL enables the preparation of subwavelength scale features. This technique has gained attention due to its potential applications. However, the SLPL process has a notable limitation in that it mostly produces simple pattern shapes, mainly consisting of circular arrays. There has been a lack of theoretical analysis regarding the possible shapes that can be created. In our experiments, we successfully prepared annular and ring-with-hole pattern shapes. To address this limitation, we applied the Mie scattering theory to systematically analyze and summarize the various patterns that can be obtained through the SLPL process. We also proposed methods to predict and obtain different patterns. This theoretical analysis enhances the understanding of SLPL and expands its potential applications, making it a valuable area for further research.

Role of Symmetry Breaking in Observing Strong Molecule-Cavity Coupling Using Dielectric Microspheres

The emergence of dielectric open optical cavities has opened a new research avenue in nanophotonics. In particular, dielectric microspheres support a rich set of cavity modes with varying spectral characteristics, making them an ideal platform to study molecule-cavity interactions. The symmetry of the structure plays a critical role in the outcoupling of these modes and, hence, the perceived molecule-cavity coupling strength. Here, we experimentally and theoretically study molecule-cavity coupling mediated by the Mie scattering modes of a dielectric microsphere placed on a glass substrate and excited with far-field illumination, from which we collect scattering signatures both in the air and glass sides. Glass-side collection reveals clear signatures of strong molecule-cavity coupling (coupling strength 2g = 74 meV), in contrast to the air-side scattering signal. Rigorous electromagnetic modeling allows us to understand molecule-cavity coupling and unravel the role played by the spatial mode profile in the observed coupling strength.

Ultrafast laser stabilization by nonlinear absorption for enhanced-precision material processing

Using ultrafast lasers, sub-diffraction features can be produced thanks to the threshold-based response of materials to the local beam fluence. In practice, Gaussian beams with peak fluence near the modification threshold lead to high-resolution. However, this conflicts with reliability as the process becomes increasingly sensitive to pulse-to-pulse energy fluctuations. Using nonlinear absorption in a ZnS crystal, we demonstrate a passive extra-cavity energy stabilization method in a femtosecond laser material machining configuration. Processing precision and repeatability are enhanced as evidenced by highly reliable amorphous features produced on silicon with sizes ten times smaller than the spot size, becoming a practical solution for high-precision manufacturing applications.

Cathodoluminescence Phase Extraction of the Coupling between Nanoparticles and Surface Plasmon Polaritons

Nanoscale gaps between metals can strongly confine electromagnetic fields that enable efficient electromagnetic energy conversion and coupling to nanophotonic structures. In particular, the gap formed by depositing a metallic particle on a metallic substrate produces coupling of localized particle plasmons to propagating surface plasmon polaritons (SPPs). Understanding and controlling the phase of such coupling is essential for the design of devices relying on nanoparticles coupled through SPPs. Here we demonstrate the experimental visualization of the phase associated with the plasmonic field of metallic particle-surface composites through nanoscopically and spectroscopically resolved cathodoluminescence using a scanning transmission electron microscope. Specifically, we study the interference between the substrate transition radiation and the field resulting from out-coupling of SPP excitation, therefore giving rise to angle-, polarization-, and energy-dependent photon emission fringe patterns from which we extract phase information. Our methods should be readily applicable to more complex nanostructures, thus providing direct experimental insight into nanoplasmonic near-fields with potential applications in improving plasmon-based devices.

Recent progress in near-field nanolithography using light interactions with colloidal particles: from nanospheres to three-dimensional nanostructures

The advance of nanotechnology is firmly rooted in the development of cost-effective, versatile, and easily accessible nanofabrication techniques. The ability to pattern complex two-dimensional and three-dimensional nanostructured materials are particularly desirable, since they can have novel physical properties that are not found in bulk materials. This review article will report recent progress in utilizing self-assembly of colloidal particles for nanolithography. In these techniques, the near-field interactions of light and colloids are the sole mechanisms employed to generate the intensity distributions for patterning. Based on both 'bottom-up' self-assembly and 'top-down' lithography approaches, these processes are highly versatile and can take advantage of a number of optical effects, allowing the complex 3D nanostructures to be patterned using single exposures. There are several key advantages including low equipment cost, facile structure design, and patterning scalability, which will be discussed in detail. We will outline the underlying optical effects, review the geometries that can be fabricated, discuss key limitations, and highlight potential applications in nanophotonics, optoelectronic devices, and nanoarchitectured materials.

Ultrafast Microscopy: Imaging Light with Photoelectrons on the Nano-Femto Scale

Experimental methods for ultrafast microscopy are advancing rapidly. Promising methods combine ultrafast laser excitation with electron-based imaging or rely on super-resolution optical techniques to enable probing of matter on the nano-femto scale. Among several actively developed methods, ultrafast time-resolved photoemission electron microscopy provides several advantages, among which the foremost are that time resolution is limited only by the laser source and it is immediately capable of probing of coherent phenomena in solid-state materials and surfaces. Here we present recent progress in interference imaging of plasmonic phenomena in metal nanostructures enabled by combining a broadly tunable femtosecond laser excitation source with a low-energy electron microscope.

Substrate surface patterning by optical near field modulation around colloidal particles immersed in a liquid

Optical near field enhancements in the vicinity of particles illuminated by laser light are increasingly recognized as a powerful tool for nanopatterning applications, but achieving sub-wavelength details from the near-field distribution remains a challenge. Here we present a quantitative analysis of the spatial modulation of the near optical fields generated using single 8 ps, 355 nm (and 532 nm) laser pulses around individual colloidal particles and small close packed arrays of such particles on silicon substrates. The analysis is presented for particles in air and, for the first time, when immersed in a range of liquid media. Immersion in a liquid allows detailed exploration of the effects on the near field of changing not just the magnitude but also the sign of the refractive index difference between the particle and the host medium. The level of agreement between the results of ray tracing and Mie scattering simulations, and the experimentally observed patterns on solid surfaces, should encourage further modelling, predictions and demonstrations of the rich palette of sub-wavelength surface profiles that can be achieved using colloidal particles immersed in liquids.

Femtosecond laser-controlled self-assembly of amorphous-crystalline nanogratings in silicon

Self-assembly (SA) of molecular units to form regular, periodic extended structures is a powerful bottom-up technique for nanopatterning, inspired by nature. SA can be triggered in all classes of solid materials, for instance, by femtosecond laser pulses leading to the formation of laser-induced periodic surface structures (LIPSS) with a period slightly shorter than the laser wavelength. This approach, though, typically involves considerable material ablation, which leads to an unwanted increase of the surface roughness. We present a new strategy to fabricate high-precision nanograting structures in silicon, consisting of alternating amorphous and crystalline lines, with almost no material removal. The strategy can be applied to static irradiation experiments and can be extended into one and two dimensions by scanning the laser beam over the sample surface. We demonstrate that lines and areas with parallel nanofringe patterns can be written by an adequate choice of spot size, repetition rate and scan velocity, keeping a constant effective pulse number (N eff) per area for a given laser wavelength. A deviation from this pulse number leads either to inhomogeneous or ablative structures. Furthermore, we demonstrate that this approach can be used with different laser systems having widely different wavelengths (1030 nm, 800 nm, 400 nm), pulse durations (370 fs, 100 fs) and repetition rates (500 kHz, 100 Hz, single pulse) and that the grating period can also be tuned by changing the angle of laser beam incidence. The grating structures can be erased by irradiation with a single nanosecond laser pulse, triggering recrystallization of the amorphous stripes. Given the large differences in electrical conductivity between the two phases, our structures could find new applications in nanoelectronics.

Modulation of photonic nanojets generated by microspheres decorated with concentric rings

A novel design of decorating microsphere surface with concentric rings to modulate the photonic nanojet (PNJ) is investigated. By introducing the concentric ring structures into the illumination side of the microspheres, a reduction of the full width at half maximum (FWHM) intensity of the PNJ by 29.1%, compared to that without the decoration, can be achieved numerically. Key design parameters, such as ring number and depth, are analyzed. Engineered microsphere with four uniformly distributed rings etched at a depth of 1.2 μm and width of 0.25 μm can generate PNJ at a FWHM of 0.485 λ (λ = 400nm). Experiments were carried out by direct observation of the PNJ with an optical microscope under 405 nm laser illumination. As a result, shrinking of PNJ beam size of 28.0% compared to the case without the rings has been achieved experimentally. Sharp FWHM of this design can be beneficial to micro/nanoscale fabrication, optical super-resolution imaging, and sensing.

Sculpting asymmetric, hollow-core, three-dimensional nanostructures using colloidal particles

Colloidal elements have historically played a key role in "bottom-up" self-assembly processes for nanofabrication. However, these elementary components can also interact with light to generate complex intensity distributions and facilitate "top-down" lithography. Here, a nanolithography technique is demonstrated based on oblique illuminations of colloidal particles to fabricate hollow-core 3D nanostructures with complex symmetry. The light-particle interaction generates an angular light distribution as governed by Mie scattering, which can be compounded by multiple illuminations to sculpt novel 3D structures in the underlying photoresist. The fabricated geometry can be controlled by the particle parameters and illumination configurations, enabling the fabrication of a large variety of asymmetric hollow nanostructures. The proposed technique has high pattern versatility, is low cost and high throughput, and can find potential application in nanoneedles, nanonozzles, and materials with anisotropic properties.

The interplay between localized and propagating plasmonic excitations tracked in space and time

In this work, the mutual coupling and coherent interaction of propagating and localized surface plasmons within a model-type plasmonic assembly is experimentally demonstrated, imaged, and analyzed. Using interferometric time-resolved photoemission electron microscopy the interplay between ultrashort surface plasmon polariton wave packets and plasmonic nanoantennas is monitored on subfemtosecond time scales. The data reveal real-time insights into dispersion and localization of electromagnetic fields as governed by the elementary modes determining the functionality of plasmonic operation units.

Near-field nanoimprinting using colloidal monolayers

We experimentally and theoretically explore near-field nanopatterning obtained by irradiation of hexagonal monolayers of micron-sized polystyrene spheres on photosensitive Ge(2)Sb(5)Te(5) (GST) films. The imprinted patterns are strongly sensitive to the illumination conditions, as well as the size of the spheres and the orientation of the monolayer, which we change to demonstrate control over the resulting structures. We show that the presence of multiple scattering effects cannot be neglected to describe the resulting pattern. The experimental patterns imprinted are shown to be robust to small displacements and structural defects of the monolayer. Our method enables the design and experimental verification of patterns with multiple focii per particle and complex shapes, which can be directly implemented for large scale fabrication on different substrates.

Nanostructuring thin polymer films with optical near fields

In the present work, we report on the application of optical near fields to nanostructuring of poly(trimethylene terephthalate) (PTT) thin films. By exposure to a single ultraviolet nanosecond laser pulse, the spatial intensity modulation of the near-field distribution created by a silica microsphere is imprinted into the films. Setting different angles of incidence of the laser, elliptical or circular periodic ring patterns can be produced with periods as small as half the laser wavelength used. These highly complex patterns show optical and topographical contrast and can be characterized by optical microscopy (OM) and atomic force microscopy (AFM). We demonstrate the key role of the laser wavelength and coherence length in achieving smooth, extended patterns in PTT by using excimer laser (193 nm) and Nd:YAG laser (266 nm) pulses. Reference experiments performed in Ge2Sb2Te5 (GST) demonstrate that nanopatterning in PTT is triggered by ablation as opposed to GST, in which nanopatterning originates from laser-induced phase change, accompanied by a small topographical contrast. The experiments presented in this work demonstrate the suitability of optical near fields for structuring polymer films, opening up new possibilities for nanopatterning and paving the way for potential applications where optical near fields and polymer nanostructures are involved.

Three-dimensional nanolithography using light scattering from colloidal particles

The interaction between light and colloidal elements can result in a wealth of interesting near-field optical patterns. By examining the optical and colloidal properties, the intensity distribution can be tailored and harnessed for three-dimensional nanolithography. Here, we examine the use of light scattering from colloidal particles to fabricate complex hollow nanostructures. In this approach, a single colloidal sphere is illuminated to create a scattering pattern, which is captured by a photoresist in close proximity. No external optical elements are required, and the colloidal elements alone provide the modulation of the optical intensity pattern. The fabricated nanostructures can be designed to have multiple shells, confined volumes, and single top openings, resembling "nano-volcanoes." The geometry of such structures is dependent on the scattered light distribution and can be accurately modeled by examining the light-particle interaction. The hollow nanostructures can be used to trap nanomaterial, and we demonstrate their ability to trap 50 nm silica nanoparticles. These well-defined surface hollow structures can be further functionalized for applications in controlled drug delivery and biotrapping. Colloidal elements with different geometries and material compositions can also be incorporated to examine other light-colloid interactions.

Femtosecond-resolved ablation dynamics of Si in the near field of a small dielectric particle

In this work we analyze the ablation dynamics of crystalline Si in the intense near field generated by a small dielectric particle located at the material surface when being irradiated with an infrared femtosecond laser pulse (800 nm, 120 fs). The presence of the particle (7.9 μm diameter) leads to a strong local enhancement (ca. 40 times) of the incoming intensity of the pulse. The transient optical response of the material has been analyzed by means of fs-resolved optical microscopy in reflection configuration over a time span from 0.1 ps to about 1 ns. Characteristic phenomena like electron plasma formation, ultrafast melting and ablation, along with their characteristic time scales are observed in the region surrounding the particle. The use of a time resolved imaging technique allows us recording simultaneously the material response at ordinary and large peak power densities enabling a direct comparison between both scenarios. The time resolved images of near field exposed regions are consistent with a remarkable temporal shift of the ablation onset which occurs in the sub-picosend regime, from about 500 to 800 fs after excitation.

Mapping of plasmonic resonances in nanotriangles

Plasmonic resonances in metallic nano-triangles have been investigated by irradiating these structures with short laser pulses and imaging the resulting ablation and melting patterns. The triangular gold structures were prepared on Si substrates and had a thickness of 40 nm and a side length of ca. 500 nm. Irradiation was carried out with single femtosecond and picosecond laser pulses at a wavelength of 800 nm, which excited higher order plasmon modes in these triangles. The ablation distribution as well as the local melting of small parts of the nanostructures reflect the regions of large near-field enhancement. The observed patterns are reproduced in great detail by FDTD simulations with a 3-dimensional model, provided that the calculations are not based on idealized, but on realistic structures. In this realistic model, details like the exact shape of the triangle edges and the dielectric environment of the structures are taken into account. The experimental numbers found for the field enhancement are typically somewhat smaller than the calculated ones. The results demonstrate the caveats for FDTD simulations and the potential and the limitations of "near field photography" by local ablation and melting for the mapping of complex plasmon fields and their applications.

Quantitative imaging of the optical near field

When exposing small particles on a substrate to a light plane wave, the scattered optical near field is spatially modulated and highly complex. We show, for the particular case of dielectric microspheres, that it is possible to image these optical near-field distributions in a quantitative way. By placing a single microsphere on a thin film of the photosensitive phase change material Ge(2)Sb(5)Te(5) and exposing it to a single short laser pulse, the spatial intensity modulation of the near field is imprinted into the film as a pattern of different material phases. The resulting patterns are investigated by using optical as well as high-resolution scanning electron microscopy. Quantitative information on the local optical near field at each location is obtained by calibrating the material response to pulsed laser irradiation. We discuss the influence of polarization and angle of incidence of the laser beam as well as particle size on the field distribution. The experimental results are in good quantitative agreement with a model based on a rigorous solution of Maxwell's equations. Our results have potential application to near-field optical lithography and experimental determination of near fields in complex nanostructures.

Wavelength-scale lens microscopy via thermal reshaping of colloidal particles

Lenses are by far the most simple tools for visualization. Although they are intrinsically limited in resolution, recent efforts have aimed at focusing visible light in micro-scale lenses with subwavelength resolution, triggering an intense interest in further improving and understanding their performances. Herein, we report on a distinctive library of wavelength-scale solid immersion lenses facilitated the self-assembly of polystyrene colloidal particles. The thermally activated structural changes in polystyrene colloidal spheres directly impact the optical performance of the obtained lenses. Similar melting dynamics is observed for spheres of various size spheres at different temperatures. This allows precise control of the contact angle spanning a broad range from 180° to <20°. The fabricated lenses display deviations from the ray optics, allowing us to resolve features as small as 180 nm using a simple microscopy setup. We succeed in proper self-assembly of the colloidal lenses that enables large-area optical nanoscopy through simple and reliable experimental protocols. The limitations and the artifacts of the present technique are discussed.

Quantitative measurement of the near-field enhancement of nanostructures by two-photon polymerization

The quantitative determination of the strength of the near-field enhancement in and around nanostructures is essential for optimizing and using these structures for applications. We combine the gaussian intensity distribution of a laser profile and two-photon-polymerization of SU-8 to a suitable tool for the quantitative experimental measurement of the near-field enhancement of a nanostructure. Our results give a feedback to the results obtained by finite-difference time-domain (FDTD) simulations. The structures under investigation are gold nanotriangles on a glass substrate with 85 nm side length and a thickness of 40 nm. We compare the threshold fluence for polymerization for areas of the gaussian intensity profile with and without the near-field enhancement of the nanostructures. The experimentally obtained value of the near-field intensity enhancement is 600 ± 140, independent of the laser power, irradiation time, and spot size. The FDTD simulation shows a pointlike maximum of 2600 at the tip. In a more extended area with an approximate size close to the smallest polymerized structure of 25 nm in diameter, we find a value between 800 and 600. Using our novel approach, we determine the threshold fluence for polymerization of the commercially available photopolymerizable resin SU-8 by a femtosecond laser working at a wavelength of 795 nm and a repetition rate of 82 MHz to be 0.25 J/cm(2) almost independent of the irradiation time and the laser power used. This finding is important for future applications of the method because it enables one to use varying laser systems.