3D nanofabrication of fluidic components by corner lithography

Wide-Size Range and High Robustness Self-Assembly Micropillars for Capturing Microspheres

Capillary force driven self-assembly micropillars (CFSA-MP) holds immense promise for the manipulation and capture of cells/tiny objects, which has great demands of wide size range and high robustness. Here, we propose a novel method to fabricate size-adjustable and highly robust CFSA-MP that can achieve wide size range and high stability to capture microspheres. First, we fabricate a microholes template with an adjustable aspect ratio using the spatial-temporal shaping femtosecond laser double-pulse Bessel beam-assisted chemical etching technique, and then the micropillars with adjustable aspect ratio are demolded by polydimethylsiloxane (PDMS). We fully demonstrated the advantages of the Bessel optical field by using the spatial-temporal shaping femtosecond laser double-pulse Bessel beams to broaden the height range of the micropillars, which in turn expands the size range of the captured microspheres, and finally achieving a wide range of capturing microspheres with a diameter of 5-410 μm. Based on the inverted mold technology, the PDMS micropillars have ultrahigh mechanical robustness, which greatly improves the durability. CFSA-MP has the ability to capture tiny objects with wide range and high stability, which indicates great potential applications in the fields of chemistry, biomedicine, and microfluidics.

Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices

High-density arrays of silicon wedges bound by {111} planes on silicon (100) wafers have been created by combining convex corner lithography on a silicon dioxide hard mask with anisotropic, crystallographic etching in a repetitive, self-aligned multiplication procedure. A mean pitch of around 30 nm has been achieved, based on an initial pitch of ∼120 nm obtained through displacement Talbot lithography. The typical resolution of the convex corner lithography was reduced to the sub-10 nm range by employing an 8 nm silicon dioxide mask layer (measured on the {111} planes). Nanogaps of 6 nm and freestanding silicon dioxide flaps as thin as 1-2 nm can be obtained when etching the silicon at the exposed apices of the wedges. To enable the repetitive procedure, it was necessary to protect the concave corners between the wedges through "concave" corner lithography. The produced high-density arrays of wedges offer a promising template for the fabrication of large arrays of nanodevices in various domains with relevant details in the sub-10 nm range.

Functional Shape-Morphing Microarchitectures Fabricated by Dynamic Holographically Shifted Femtosecond Multifoci

Functional microdevices based on responsive hydrogel show great promise in targeted delivery and biomedical analysis. Among state-of-the-art techniques for manufacturing hydrogel-based microarchitectures, femtosecond laser two-photon polymerization distinguishes itself by high designability and precision, but the point-by-point writing scheme requires mechanical apparatuses to support focus scanning. In this work, by predesigning holograms combined with lens phase modulation, multiple femtosecond laser spots are holographically generated and shifted for prototyping of three-dimensional shape-morphing structures without any moving equipment in the construction process. The microcage array is rapidly fabricated for high-performance target capturing enabled by switching environmental pH. Moreover, the built scaffolds can serve as arrayed analytical platforms for observing cell behaviors in normal or changeable living spaces or revealing the anticancer effects of loaded drugs. The proposed approach opens a new path for facile and flexible manufacturing of hydrogel-based functional microstructures with great versatility in micro-object manipulation.

Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography

The current progress of system miniaturization relies extensively on the development of 3D machining techniques to increase the areal structure density. In this work, a wafer-scale out-of-plane 3D silicon (Si) shaping technology is reported, which combines a multistep plasma etching process with corner lithography. The multistep plasma etching procedure results in high aspect ratio structures with stacked semicircles etched deep into the sidewall and thereby introduces corners with a proper geometry for the subsequent corner lithography. Due to the geometrical contrast between the gaps and sidewall, residues are left only inside the gaps and form an inversion mask inside the semicircles. Using this mask, octahedra and donuts can be etched in a repeated manner into Si over the full wafer area, which demonstrates the potential of this technology for constructing high-density 3D structures with good dimensional control in the bulk of Si wafers.

Additive Manufacturing of Sub-Micron to Sub-mm Metal Structures with Hollow AFM Cantilevers

We describe our force-controlled 3D printing method for layer-by-layer additive micromanufacturing (µAM) of metal microstructures. Hollow atomic force microscopy cantilevers are utilized to locally dispense metal ions in a standard 3-electrode electrochemical cell, enabling a confined electroplating reaction. The deflection feedback signal enables the live monitoring of the voxel growth and the consequent automation of the printing protocol in a layer-by-layer fashion for the fabrication of arbitrary-shaped geometries. In a second step, we investigated the effect of the free parameters (aperture diameter, applied pressure, and applied plating potential) on the voxel size, which enabled us to tune the voxel dimensions on-the-fly, as well as to produce objects spanning at least two orders of magnitude in each direction. As a concrete example, we printed two different replicas of Michelangelo's David. Copper was used as metal, but the process can in principle be extended to all metals that are macroscopically electroplated in a standard way.

Femtosecond Mathieu Beams for Rapid Controllable Fabrication of Complex Microcages and Application in Trapping Microobjects

Structured laser beam based microfabrication technology provides a rapid and flexible way to create some special microstructures. As an important member in the propagation of invariant structured optical fields, Mathieu beams (MBs) exhibit regular intensity distribution and diverse controllable parameters, which makes it extremely suitable for flexible fabrication of functional microstructures. In this study, MBs are generated by a phase-only spatial light modulator (SLM) and used for femtosecond laser two-photon polymerization (TPP) fabrication. Based on structured beams, a dynamic holographic processing method for controllable three-dimensional (3D) microcage fabrication has been presented. MBs with diverse intensity distributions are generated by controlling the phase factors imprinted on MBs with a SLM, including feature parity, ellipticity parameter q, and integer m. The focusing properties of MBs in a high numerical aperture laser microfabrication system are theoretically and experimentally investigated. On this basis, complex two-dimensional microstructures and functional 3D microcages are rapidly and flexibly fabricated by the controllable patterned focus, which enhances the fabrication speed by 2 orders of magnitude compared with conventional single-point TPP. The fabricated microcages act as a nontrivial tool for trapping and sorting microparticles with different sizes. Finally, culturing of budding yeasts is investigated with these microcages, which demonstrates its application as 3D cell culture scaffolds.

Scalable 3D Nanoparticle Trap for Electron Microscopy Analysis

Arrays of nanoscale pyramidal cages embedded in a silicon nitride membrane are fabricated with an order of magnitude miniaturization in the size of the cages compared to previous work. This becomes possible by combining the previously published wafer-scale corner lithography process with displacement Talbot lithography, including an additional resist etching step that allows the creation of masking dots with a size down to 50 nm, using a conventional 365 nm UV source. The resulting pyramidal cages have different entrance and exit openings, which allows trapping of nanoparticles within a predefined size range. The cages are arranged in a well-defined array, which guarantees traceability of individual particles during post-trapping analysis. Gold nanoparticles with a size of 25, 150, and 200 nm are used to demonstrate the trapping capability of the fabricated devices. The traceability of individual particles is demonstrated by transferring the transmission electron microscopy (TEM) transparent devices between scanning electron microscopy and TEM instruments and relocating a desired collection of particles.

One-Dimensional Nanostructures: Microfluidic-Based Synthesis, Alignment and Integration towards Functional Sensing Devices

Microfluidic-based synthesis of one-dimensional (1D) nanostructures offers tremendous advantages over bulk approaches e.g., the laminar flow, reduced sample consumption and control of self-assembly of nanostructures. In addition to the synthesis, the integration of 1D nanomaterials into microfluidic chips can enable the development of diverse functional microdevices. 1D nanomaterials have been used in applications such as catalysts, electronic instrumentation and sensors for physical parameters or chemical compounds and biomolecules and hence, can be considered as building blocks. Here, we outline and critically discuss promising strategies for microfluidic-assisted synthesis, alignment and various chemical and biochemical applications of 1D nanostructures. In particular, the use of 1D nanostructures for sensing chemical/biological compounds are reviewed.

Simultaneous Scanning Ion Conductance Microscopy and Atomic Force Microscopy with Microchanneled Cantilevers

We combined scanning ion conductance microscopy (SICM) and atomic force microscopy (AFM) into a single tool using AFM cantilevers with an embedded microchannel flowing into the nanosized aperture at the apex of the hollow pyramid. An electrode was positioned in the AFM fluidic circuit connected to a second electrode in the bath. We could thus simultaneously measure the ionic current and the cantilever bending (in optical beam deflection mode). First, we quantitatively compared the SICM and AFM contact points on the approach curves. Second, we estimated where the probe in SICM mode touches the sample during scanning on a calibration grid and applied the finding to image a network of neurites on a Petri dish. Finally, we assessed the feasibility of a double controller using both the ionic current and the deflection as input signals of the piezofeedback. The experimental data were rationalized in the framework of finite elements simulations.

Elasto-Capillary Folding Using Stop-Programmable Hinges Fabricated by 3D Micro-Machining

We show elasto-capillary folding of silicon nitride objects with accurate folding angles between flaps of (70.6 ± 0.1)° and demonstrate the feasibility of such accurate micro-assembly with a final folding angle of 90°. The folding angle is defined by stop-programmable hinges that are fabricated starting from silicon molds employing accurate three-dimensional corner lithography. This nano-patterning method exploits the conformal deposition and the subsequent timed isotropic etching of a thin film in a 3D shaped silicon template. The technique leaves a residue of the thin film in sharp concave corners which can be used as an inversion mask in subsequent steps. Hinges designed to stop the folding at 70.6° were fabricated batchwise by machining the V-grooves obtained by KOH etching in (110) silicon wafers; 90° stop-programmable hinges were obtained starting from silicon molds obtained by dry etching on (100) wafers. The presented technique has potential to achieve any folding angle and opens a new route towards creating structures with increased complexity, which will ultimately lead to a novel method for device fabrication.

Wafer-scale fabrication of nanoapertures using corner lithography

Several submicron probe technologies require the use of apertures to serve as electrical, optical or fluidic probes; for example, writing precisely using an atomic force microscope or near-field sensing of light reflecting from a biological surface. Controlling the size of such apertures below 100 nm is a challenge in fabrication. One way to accomplish this scale is to use high resolution tools such as deep UV or e-beam. However, these tools are wafer-scale and expensive, or only provide series fabrication. For this reason, in this study a versatile method adapted from conventional micromachining is investigated to fabricate protruding apertures on wafer-scale. This approach is called corner lithography and offers control of the size of the aperture with diameter less than 50 nm using a low-budget lithography tool. For example, by tuning the process parameters, an estimated mean size of 44.5 nm and an estimated standard deviation of 2.3 nm are found. The technique is demonstrated--based on a theoretical foundation including a statistical analysis--with the nanofabrication of apertures at the apexes of micromachined pyramids. Besides apertures, the technique enables the construction of wires, slits and dots into versatile three-dimensional structures.

FluidFM as a lithography tool in liquid: spatially controlled deposition of fluorescent nanoparticles

The atomic force microscope (AFM) is a powerful instrument for nanolithography, which is well characterized in air where the deposition process is steered by capillary action. In contrast, AFM patterning has been seldom achieved in liquid, mostly via electrochemical deposition. This study investigates the pressure-controlled local deposition of nanoparticles in a liquid environment using a FluidFM. Fluorescent 25 nm polystyrene nanospheres were chosen as nanoobjects to be dispensed because they enable both the in situ monitoring of the process by optical microscopy and the ex situ high-resolution characterization of the pattern by e.g. scanning electron microscopy. The FluidFM microchannel was filled with an aqueous solution of negatively charged nanoparticles to be delivered onto a glass surface coated with a polycation. An overpressure in the internal fluidic circuit leads to the deposition of nanoparticle dots and lines under the tip, while the force control regulates the contact between the probe and the surface. The nanoparticle adsorption process depends both on applied pressure and contact time (respectively tip velocity) and can be described using the Langmuir approximation for the random sequential adsorption model. Moreover, we observed that the force setpoint, which does not influence the capillary-driven mechanism in air, indeed affects the hydrodynamic resistance at the tip aperture and therefore the volumetric flow. The described method demonstrates the potential of FluidFM in depositing nano-sized objects in liquid with nanometre precision.