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Shah N, Iyer V, Zhang Z, Gao Z, Park J, Yelleswarapu V, Aflatouni F, Charlie Johnson AT, Issadore D. Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood. MICROSYSTEMS & NANOENGINEERING 2023; 9:71. [PMID: 37275264 PMCID: PMC10232500 DOI: 10.1038/s41378-023-00530-2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/04/2023] [Revised: 03/01/2023] [Accepted: 03/20/2023] [Indexed: 06/07/2023]
Abstract
The detection and analysis of rare cells in complex media such as blood is increasingly important in biomedical research and clinical diagnostics. Micro-Hall detectors (μHD) for magnetic detection in blood have previously demonstrated ultrahigh sensitivity to rare cells. This sensitivity originates from the minimal magnetic background in blood, obviating cumbersome and detrimental sample preparation. However, the translation of this technology to clinical applications has been limited by inherently low throughput (<1 mL/h), susceptibility to clogging, and incompatibility with commercial CMOS foundry processing. To help overcome these challenges, we have developed CMOS-compatible graphene Hall sensors for integration with PDMS microfluidics for magnetic sensing in blood. We demonstrate that these graphene μHDs can match the performance of the best published μHDs, can be passivated for robust use with whole blood, and can be integrated with microfluidics and sensing electronics for in-flow detection of magnetic beads. We show a proof-of-concept validation of our system on a silicon substrate and detect magnetic agarose beads, as a model for cells, demonstrating promise for future integration in clinical applications with a custom CMOS chip.
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Affiliation(s)
- Nishal Shah
- Department of Bioengineering, University of Pennsylvania, Philadelphia, PA 19104 USA
| | - Vasant Iyer
- Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA 19104 USA
| | - Zhiping Zhang
- Department of Bioengineering, University of Pennsylvania, Philadelphia, PA 19104 USA
| | - Zhaoli Gao
- Department of Biomedical Engineering, Chinese University of Hong Kong, Shatin, Hong Kong
| | - Juhwan Park
- Department of Bioengineering, University of Pennsylvania, Philadelphia, PA 19104 USA
| | - Venkata Yelleswarapu
- Department of Bioengineering, University of Pennsylvania, Philadelphia, PA 19104 USA
| | - Firooz Aflatouni
- Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA 19104 USA
| | - A. T. Charlie Johnson
- Department of Physics and Astronomy, University of Pennsylvania, Philadelphia, PA 19104 USA
| | - David Issadore
- Department of Bioengineering, University of Pennsylvania, Philadelphia, PA 19104 USA
- Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA 19104 USA
- Department of Chemical and Biomolecular, University of Pennsylvania, Philadelphia, PA 19104 USA
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2
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Antimony Hall sensor testing at ITER and DEMO relevant temperatures. FUSION ENGINEERING AND DESIGN 2023. [DOI: 10.1016/j.fusengdes.2023.113476] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/25/2023]
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3
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El-Ahmar S, Przychodnia M, Jankowski J, Prokopowicz R, Ziemba M, Szary MJ, Reddig W, Jagiełło J, Dobrowolski A, Ciuk T. The Comparison of InSb-Based Thin Films and Graphene on SiC for Magnetic Diagnostics under Extreme Conditions. SENSORS (BASEL, SWITZERLAND) 2022; 22:5258. [PMID: 35890941 PMCID: PMC9321318 DOI: 10.3390/s22145258] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/24/2022] [Revised: 07/12/2022] [Accepted: 07/12/2022] [Indexed: 06/15/2023]
Abstract
The ability to precisely measure magnetic fields under extreme operating conditions is becoming increasingly important as a result of the advent of modern diagnostics for future magnetic-confinement fusion devices. These conditions are recognized as strong neutron radiation and high temperatures (up to 350 °C). We report on the first experimental comparison of the impact of neutron radiation on graphene and indium antimonide thin films. For this purpose, a 2D-material-based structure was fabricated in the form of hydrogen-intercalated quasi-free-standing graphene on semi-insulating high-purity on-axis 4H-SiC(0001), passivated with an Al2O3 layer. InSb-based thin films, donor doped to varying degrees, were deposited on a monocrystalline gallium arsenide or a polycrystalline ceramic substrate. The thin films were covered with a SiO2 insulating layer. All samples were exposed to a fast-neutron fluence of ≈7×1017 cm-2. The results have shown that the graphene sheet is only moderately affected by neutron radiation compared to the InSb-based structures. The low structural damage allowed the graphene/SiC system to retain its electrical properties and excellent sensitivity to magnetic fields. However, InSb-based structures proved to have significantly more post-irradiation self-healing capabilities when subject to proper temperature treatment. This property has been tested depending on the doping level and type of the substrate.
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Affiliation(s)
- Semir El-Ahmar
- Institute of Physics, Poznan University of Technology, Piotrowo 3, 61-138 Poznan, Poland; (M.P.); (J.J.); (M.J.S.); (W.R.)
| | - Marta Przychodnia
- Institute of Physics, Poznan University of Technology, Piotrowo 3, 61-138 Poznan, Poland; (M.P.); (J.J.); (M.J.S.); (W.R.)
| | - Jakub Jankowski
- Institute of Physics, Poznan University of Technology, Piotrowo 3, 61-138 Poznan, Poland; (M.P.); (J.J.); (M.J.S.); (W.R.)
| | - Rafał Prokopowicz
- National Centre for Nuclear Research, Andrzeja Soltana 7, 05-400 Otwock, Poland; (R.P.); (M.Z.)
| | - Maciej Ziemba
- National Centre for Nuclear Research, Andrzeja Soltana 7, 05-400 Otwock, Poland; (R.P.); (M.Z.)
| | - Maciej J. Szary
- Institute of Physics, Poznan University of Technology, Piotrowo 3, 61-138 Poznan, Poland; (M.P.); (J.J.); (M.J.S.); (W.R.)
| | - Wiktoria Reddig
- Institute of Physics, Poznan University of Technology, Piotrowo 3, 61-138 Poznan, Poland; (M.P.); (J.J.); (M.J.S.); (W.R.)
| | - Jakub Jagiełło
- Łukasiewicz Research Network—Institute of Microelectronics and Photonics, Aleja Lotnikow 32/46, 02-668 Warsaw, Poland; (J.J.); (A.D.); (T.C.)
| | - Artur Dobrowolski
- Łukasiewicz Research Network—Institute of Microelectronics and Photonics, Aleja Lotnikow 32/46, 02-668 Warsaw, Poland; (J.J.); (A.D.); (T.C.)
| | - Tymoteusz Ciuk
- Łukasiewicz Research Network—Institute of Microelectronics and Photonics, Aleja Lotnikow 32/46, 02-668 Warsaw, Poland; (J.J.); (A.D.); (T.C.)
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Development of a concept and basis for the DEMO diagnostic and control system. FUSION ENGINEERING AND DESIGN 2022. [DOI: 10.1016/j.fusengdes.2022.113122] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/18/2022]
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Entler S, Duran I, Kocan M, Vayakis G, Sladek P, Grover O, Sebek J, Vyborny K. Calibration of the ITER outer vessel steady-state magnetic sensors. FUSION ENGINEERING AND DESIGN 2021. [DOI: 10.1016/j.fusengdes.2021.112398] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]
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Collomb D, Li P, Bending S. Frontiers of graphene-based Hall-effect sensors. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2021; 33:243002. [PMID: 33853045 DOI: 10.1088/1361-648x/abf7e2] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/22/2021] [Accepted: 04/14/2021] [Indexed: 06/12/2023]
Abstract
Hall sensors have become one of the most used magnetic sensors in recent decades, performing the vital function of providing a magnetic sense that is naturally absent in humans. Various electronic applications have evolved from circuit-integrated Hall sensors due to their low cost, simple linear magnetic field response, ability to operate in a large magnetic field range, high magnetic sensitivity and low electronic noise, in addition to many other advantages. Recent developments in the fabrication and performance of graphene Hall devices promise to open up the realm of Hall sensor applications by not only widening the horizon of current uses through performance improvements, but also driving Hall sensor electronics into entirely new areas. In this review paper we describe the evolution from the traditional selection of Hall device materials to graphene Hall devices, and explore the various applications enabled by them. This includes a summary of the selection of materials and architectures for contemporary micro-to nanoscale Hall sensors. We then turn our attention to introducing graphene and its remarkable physical properties and explore how this impacts the magnetic sensitivity and electronic noise of graphene-based Hall sensors. We summarise the current state-of-the art of research into graphene Hall probes, demonstrating their record-breaking performance. Building on this, we explore the various new application areas graphene Hall sensors are pioneering such as magnetic imaging and non-destructive testing. Finally, we look at recent encouraging results showing that graphene Hall sensors have plenty of room to improve, before then discussing future prospects for industry-level scalable fabrication.
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Affiliation(s)
- David Collomb
- Department of Physics, University of Bath, Bath, United Kingdom
| | - Penglei Li
- Department of Physics, University of Bath, Bath, United Kingdom
| | - Simon Bending
- Department of Physics, University of Bath, Bath, United Kingdom
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Entler S, Soban Z, Duran I, Kovarik K, Vyborny K, Sebek J, Tazlaru S, Strelecek J, Sladek P. Ceramic-Chromium Hall Sensors for Environments with High Temperatures and Neutron Radiation. SENSORS 2021; 21:s21030721. [PMID: 33494501 PMCID: PMC7865485 DOI: 10.3390/s21030721] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/29/2020] [Revised: 01/12/2021] [Accepted: 01/18/2021] [Indexed: 11/16/2022]
Abstract
Ceramic-chromium Hall sensors represent a temperature and radiation resistant alternative to Hall sensors based on semiconductors. Demand for these sensors is presently motivated by the ITER and DEMO nuclear fusion projects. The developed ceramic-chromium Hall sensors were tested up to a temperature of 550 °C and a magnetic field of 14 T. The magnitude of the sensitivity of the tested sensor was 6.2 mV/A/T at 20 °C and 4.6 mV/A/T at 500 °C. The sensitivity was observed to be weakly dependent on a temperature above 240 °C with an average temperature coefficient of 0.014%/°C and independent of the magnetic field with a relative average deviation below the measurement accuracy of 0.086%. A simulation of a neutron-induced transmutation was performed to assess changes in the composition of the chromium. After 5.2 operational years of the DEMO fusion reactor, the transmuted fraction of the chromium sensitive layer was found to be 0.27% at the most exposed sensor location behind the divertor cassette with a neutron fluence of 6.08 × 1025 n/m2. The ceramic-chromium Hall sensors show the potential to be suitable magnetic sensors for environments with high temperatures and strong neutron radiation.
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Affiliation(s)
- Slavomir Entler
- Institute of Plasma Physics of CAS, Za Slovankou 3, 182 00 Prague, Czech Republic; (I.D.); (K.K.); (P.S.)
- Correspondence: ; Tel.: +420-2-6605-3393
| | - Zbynek Soban
- Institute of Physics of CAS, Cukrovarnicka 10/112, 162 00 Prague 6, Czech Republic; (Z.S.); (K.V.)
| | - Ivan Duran
- Institute of Plasma Physics of CAS, Za Slovankou 3, 182 00 Prague, Czech Republic; (I.D.); (K.K.); (P.S.)
| | - Karel Kovarik
- Institute of Plasma Physics of CAS, Za Slovankou 3, 182 00 Prague, Czech Republic; (I.D.); (K.K.); (P.S.)
| | - Karel Vyborny
- Institute of Physics of CAS, Cukrovarnicka 10/112, 162 00 Prague 6, Czech Republic; (Z.S.); (K.V.)
| | - Josef Sebek
- Institute of Physics of CAS, Na Slovance 1999/2, 182 21 Prague 8, Czech Republic;
| | - Stana Tazlaru
- Faculty of Mathematics and Physics, Charles University, Ke Karlovu 5, 121 16 Prague 2, Czech Republic; (S.T.); (J.S.)
| | - Jan Strelecek
- Faculty of Mathematics and Physics, Charles University, Ke Karlovu 5, 121 16 Prague 2, Czech Republic; (S.T.); (J.S.)
| | - Petr Sladek
- Institute of Plasma Physics of CAS, Za Slovankou 3, 182 00 Prague, Czech Republic; (I.D.); (K.K.); (P.S.)
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Kovarik K, Entler S, Duran I, Eade T. Analysis of Transmutation of Candidate Sensitive Layer Materials of Hall Detectors under DEMO Like Neutron Fluxes. FUSION ENGINEERING AND DESIGN 2020. [DOI: 10.1016/j.fusengdes.2020.111670] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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Temperature dependence of the Hall coefficient of sensitive layer materials considered for DEMO Hall sensors. FUSION ENGINEERING AND DESIGN 2020. [DOI: 10.1016/j.fusengdes.2020.111454] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Prospects for the steady-state magnetic diagnostic based on antimony Hall sensors for future fusion power reactors. FUSION ENGINEERING AND DESIGN 2019. [DOI: 10.1016/j.fusengdes.2019.01.013] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/18/2022]
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Status of steady-state magnetic diagnostic for ITER and outlook for possible materials of Hall sensors for DEMO. FUSION ENGINEERING AND DESIGN 2019. [DOI: 10.1016/j.fusengdes.2019.03.201] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/22/2022]
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Entler S, Sebek J, Duran I, Vyborny K, Grover O, Kocan M, Vayakis G. High magnetic field test of the ITER outer vessel steady-state magnetic field Hall sensors at ITER relevant temperature. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2018; 89:10J112. [PMID: 30399944 DOI: 10.1063/1.5038812] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/05/2018] [Accepted: 07/24/2018] [Indexed: 06/08/2023]
Abstract
The ITER outer vessel steady-state magnetic field sensor diagnostics consist of sixty sensor units. Each sensor unit features a pair of ceramic-metal Hall sensors with a sensing layer made of bismuth. The sensors were tested simultaneously in the magnetic field ranging from -12 T to +12 T at the temperature range from 27 to 127 °C. The Hall coefficient and magnetoresistance of the bismuth layer related to the sensors were identified. In the sensor operating conditions, the Hall coefficient dependence on temperature was fitted with an exponential function with a relative error of less than 0.08%, and the dependence on the magnetic field was fitted with a Gaussian-like function with a relative error of less than 0.11%. An alternative expression based on the physical understanding of the free charge carrier transport in semimetals was derived to describe the dependence of the Hall coefficient on the magnetic field, and its fitting error of 1.2 mT in terms of the magnetic field measurement has met the ITER measurement accuracy requirements.
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Affiliation(s)
- S Entler
- Institute of Plasma Physics of the CAS, Za Slovankou 1782/3, 182 00 Prague 8, Czech Republic
| | - J Sebek
- Institute of Physics of the CAS, Na Slovance 1999/2, 182 21 Prague 8, Czech Republic
| | - I Duran
- Institute of Plasma Physics of the CAS, Za Slovankou 1782/3, 182 00 Prague 8, Czech Republic
| | - K Vyborny
- Institute of Physics of the CAS, Cukrovarnicka 10/112, 162 00 Prague 6, Czech Republic
| | - O Grover
- Institute of Plasma Physics of the CAS, Za Slovankou 1782/3, 182 00 Prague 8, Czech Republic
| | - M Kocan
- ITER Organization, Route de Vinon-sur-Verdon, CS 90 046, 13067 St. Paul Lez Durance Cedex, France
| | - G Vayakis
- ITER Organization, Route de Vinon-sur-Verdon, CS 90 046, 13067 St. Paul Lez Durance Cedex, France
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Kocan M, Duran I, Entler S, Vayakis G, Agostinetti P, Brombin M, Carmona JM, Gambetta G, Jirman T, Marconato N, Moreau P, Peruzzo S, Spuig P, Walsh M. Steady state magnetic sensors for ITER and beyond: Development and final design (invited). THE REVIEW OF SCIENTIFIC INSTRUMENTS 2018; 89:10J119. [PMID: 30399664 DOI: 10.1063/1.5038871] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/06/2018] [Accepted: 06/18/2018] [Indexed: 06/08/2023]
Abstract
The measurements of the magnetic field in tokamaks such as ITER and DEMO will be challenging due to the long pulse duration, high neutron flux, and elevated temperatures. The long duration of the plasma pulse makes standard techniques, such as inductive coils, prone to errors. At the same time, the hostile environment, with repairs possible only on blanket exchange, if at all, requires a robust magnetic sensor. This contribution presents the final design of novel, steady-state, magnetic sensors for ITER. A poloidal array of 60 sensors mounted on the vacuum vessel outer shell contributes to the measurement of the plasma current, plasma-wall clearance, low-frequency MHD modes and will allow for crosscheck with the outer-vessel inductive coils. Each sensor hosts a pair of bismuth Hall probes, themselves an outcome of extensive R&D, including neutron irradiations (to 1023 n/m2), temperature cycling tests (73-473 K) and tests at high magnetic field (to 12 T). A significant effort has been devoted to optimize the sensor housing by design and prototyping. The production version features an indium-filled cell for in situ recalibration of the onboard thermocouple, vital for the interpretation of the Hall sensor measurement.
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Affiliation(s)
- M Kocan
- ITER Organization, Route de Vinon-sur-Verdon, CS 90 046, 13067 St. Paul Lez Durance Cedex, France
| | - I Duran
- Institute of Plasma Physics of the CAS, Za Slovankou 3, 182 00 Prague, Czech Republic
| | - S Entler
- Institute of Plasma Physics of the CAS, Za Slovankou 3, 182 00 Prague, Czech Republic
| | - G Vayakis
- ITER Organization, Route de Vinon-sur-Verdon, CS 90 046, 13067 St. Paul Lez Durance Cedex, France
| | - P Agostinetti
- Consorzio RFX, Corso Stati Uniti 4, 35137 Padova, Italy
| | - M Brombin
- Consorzio RFX, Corso Stati Uniti 4, 35137 Padova, Italy
| | - J M Carmona
- AVS, Pol. Ind. Sigma Xixilion Kalea 2, Bajo Pabellón 10, 20870 Elgoibar, Spain
| | - G Gambetta
- Consorzio RFX, Corso Stati Uniti 4, 35137 Padova, Italy
| | - T Jirman
- Department of Physics, Imperial College London, South Kensington Campus, London SW7 2AZ, United Kingdom
| | - N Marconato
- Consorzio RFX, Corso Stati Uniti 4, 35137 Padova, Italy
| | - P Moreau
- CEA, IRFM, F-13108 Saint-Paul-Lez-Durance, France
| | - S Peruzzo
- Consorzio RFX, Corso Stati Uniti 4, 35137 Padova, Italy
| | - P Spuig
- CEA, IRFM, F-13108 Saint-Paul-Lez-Durance, France
| | - M Walsh
- ITER Organization, Route de Vinon-sur-Verdon, CS 90 046, 13067 St. Paul Lez Durance Cedex, France
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