SU-8 inkjet patterning for microfabrication

Printable devices for neurotechnology

Printable electronics for neurotechnology is a rapidly emerging field that leverages various printing techniques to fabricate electronic devices, offering advantages in rapid prototyping, scalability, and cost-effectiveness. These devices have promising applications in neurobiology, enabling the recording of neuronal signals and controlled drug delivery. This review provides an overview of printing techniques, materials used in neural device fabrication, and their applications. The printing techniques discussed include inkjet, screen printing, flexographic printing, 3D printing, and more. Each method has its unique advantages and challenges, ranging from precise printing and high resolution to material compatibility and scalability. Selecting the right materials for printable devices is crucial, considering factors like biocompatibility, flexibility, electrical properties, and durability. Conductive materials such as metallic nanoparticles and conducting polymers are commonly used in neurotechnology. Dielectric materials, like polyimide and polycaprolactone, play a vital role in device fabrication. Applications of printable devices in neurotechnology encompass various neuroprobes, electrocorticography arrays, and microelectrode arrays. These devices offer flexibility, biocompatibility, and scalability, making them cost-effective and suitable for preclinical research. However, several challenges need to be addressed, including biocompatibility, precision, electrical performance, long-term stability, and regulatory hurdles. This review highlights the potential of printable electronics in advancing our understanding of the brain and treating neurological disorders while emphasizing the importance of overcoming these challenges.

Temperature Sensitivity Control of an Inkjet-Printed Optical Resonator on Pillar

We report a whispering gallery mode resonator on a pillar using inkjet printing combined with traditional microfabrication techniques. This approach enables several different polymers on the same chip for sensing applications. However, polymers inherently exhibit sensitivity to multiple stimuli. To mitigate temperature sensitivity, careful selection of design parameters is crucial. By precisely tuning the undercut-to-radius ratio of the resonator, a linear dependence in temperature sensitivity ranging from -41.5 pm/°C to 23.4 pm/°C, with a zero-crossing point at 47.6% is achieved. Consequently, it is feasible to fabricate sensing devices based on undercut microdroplets with minimal temperature sensitivity. The lowest measured temperature sensitivity obtained was 5.9 pm/°C, for a resonator with an undercut-to-radius ratio of 53%.

Single-Step Inkjet-Printed Dielectric Template for Large Area Flexible Signage and Low-Information Displays

In recent years, the proliferation of smart gadgets has increased the demand for information displays; fortunately, organic light-emitting diodes (OLEDs) show great promise for use in display, lighting, and signage contexts. This research demonstrates inkjet printing of dielectric materials to provide maskless emission area patterning and electrical isolation for large-area OLEDs on flexible/rigid indium tin oxide (ITO)-coated substrates, avoiding the need for typical photolithography steps, including etching and lift-off processes. We have studied the impact of impinged droplets' velocity fluctuations, which are measured in relation to their interaction with the substrate, allowing for the determination of the drop diameter and shape. The inkjet parameters, such as pulse waveform, pulse voltage, and pulse width, are controlled to provide consistently repeatable ejection of dielectric ink droplets. The single-step patterning of complex designs with a minimum opening of 18 μm features is successfully printed with high fidelity. The effect of substrate temperature on the printed template/structure size and shape is explored. We have successfully demonstrated an ultralarge-area (120 × 120 mm2) OLED signage application on inkjet-printed dielectric template (IJPDt). Standard small-area OLEDs (4 × 4 mm2) achieved a maximum brightness of 24480 cd m-2 at 10 V and a maximum current efficiency of 17 cd A-1 with a low turn-on voltage of 2.7 V.

Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers

In the last few years, the manufacturing of microelectromechanical systems (MEMS) by means of innovative tridimensional and bidimensional printing technologies has significantly catalyzed the attention of researchers. Inkjet material deposition, in particular, can become a key enabling technology for the production of polymer-based inertial sensors characterized by low cost, high manufacturing scalability and superior sensitivity. In this paper, a fully inkjet-printed polymeric accelerometer is proposed, and its manufacturing steps are described. The manufacturing challenges connected with the inkjet deposition of SU-8 as a structural material are identified and addressed, resulting in the production of a functional spring-mass sensor. A step-crosslinking process allows optimization of the final shape of the device and limits defects typical of inkjet printing. The resulting device is characterized from a morphological point of view, and its functionality is assessed in performing optical readout. The acceleration range of the optimized device is 0-0.7 g, its resolution is 2 × 10-3 g and its sensitivity is 6745 nm/g. In general, the work demonstrates the feasibility of polymeric accelerometer production via inkjet printing, and these characteristic parameters demonstrate their potential applicability in a broad range of uses requiring highly accurate acceleration measurements over small displacements.

Inkjet-Assisted Electroformation of Magnetically Guidable Water Striders for Interfacial Microfluidic Manipulation

Gerridae, colloquially called water striders, are a peculiar class of insects characterized by the extraordinary ability to walk on the surface of water bodies. Owing to this capacity, they constitute an ideal source of inspiration for designing untethered microdevices capable of navigating the interface between two fluids. Such steerable micrometric objects can be of great interest for various applications, ranging from the handling of floating objects to the remote control of microreactions and the manipulation of self-assembled monolayers. This paper describes the realization of artificial water striders via an inkjet-assisted electroforming approach. Inkjet deposition patterns the negative mask, which is subsequently filled with different layers of metals through electroforming. One of such layers is the magnetic alloy NiFe, which allows wireless propulsion of the striders by means of externally applied magnetic fields. The magnetic actuation tests prove good maneuverability at the water-air and silicone oil-air interfaces, with superior control over the speed and position of the devices. The surface of the devices is modified to tune its superficial energy in order to maximize buoyancy on these different combinations of fluids. A magnetic field-controlled strider manipulates a droplet and demonstrates collecting oil microdroplets and synthesizing platinum nanoparticles by chemical microreactions. Finally, the remotely operated microrobot could be employed in laboratories as a real avatar of chemists.

Aerosol Jet Printing of SU-8 as a Passivation Layer Against Ionic Solutions

To ensure stability for low-cost electronics used in direct contact with ionic solutions (such as electronic biosensors), electrodes are frequently passivated to protect against current leakage, which leads to corrosion. The epoxy-based polymer SU-8 yields favorable properties for passivation against ionic solutions. However, it is nearly universally patterned via cleanroom techniques, which increases device cost and fabrication complexity. Printing electronic components has been shown to be a viable approach for decreasing fabrication cost. Previous reports on SU-8 printing focus on the resultant printed structure, with little emphasis on its subsequent use as a passivation layer. Here, we demonstrate the printing of SU-8 with an aerosol jet printer using ultrasonic aerosolization. We show that SU-8 can be printed without reformulation, and that printed SU-8 is a viable passivation layer over conductive silver lines, when tested in ionic solutions. Extending the printed SU-8 film beyond the underlying conductive electrodes by 100 μm produced a six order of magnitude decrease in leakage current and resulted high stability over 20 voltage sweeps. Finally, we optimized post-printing cure time to 15 minutes at 160°C, which further minimized leakage current. While the development of low-cost, electronic biosensing devices has increasingly moved towards printing methods, the lack of a printed passivation strategy has hindered this transition. The advancements made in this study towards an aerosol jet printable SU-8 passivation layer provide useful progress towards a fully printed, stable electronic biosensing device.

Dynamic phase control with printing and fluidic materials' interaction by inkjet printing an RF sensor directly on a stereolithographic 3D printed microfluidic structure

Stereolithographic (SL) three-dimensional (3D) printing of microfluidic channels and inkjet printing of radio frequency (RF) electronics are promising lab-on-a-chip technologies. However, the effective integration of the two techniques has been challenging since the fabricated parts need to be combined via an additional bonding process, such as plasma bonding. This study proposes combining RF electronics with SL printed microfluidic structures by directly inkjet printing onto a 3D printed mould. This allows the inkjet printing of RF electronics with high conductivity (8 × 10⁶ S m^-1) and high resolution (50 μm) as a surface modification of the 3D printed mould. This process combines the three-dimensional printing of microfluidic parts and the inkjet printing of RF sensors into a single process. The proposed approach increases the interaction between a printed RF part and a fluid material by adjusting the distance between them, and it can be applied to various resins and 3D printing methods. Furthermore, the proposed fabrication process was applied to a dynamic phase advanced and delayed transmission line (TL) operating at 3.8 GHz as a fluidic sensor. Consequently, using the same pattern, a higher phase shift range per microliter of 10° was obtained than the 1° for conventional phase shift TLs.

Inkjet Printing of a Benzocyclobutene-Based Polymer as a Low-k Material for Electronic Applications

Polymeric materials with a low dielectric constant are widely used in the electronic industry due to their properties. In particular, polymer adhesives can be used in many applications such as wafer bonding and three-dimensional integration. Benzocyclobutene (BCB) is a very interesting material thanks to its excellent bonding behavior and dielectric properties. Usually, BCB is applied by spin-coating, although this technology does not allow the fabrication of complex patterns. To obtain complex patterns, it is necessary to use a printing technology, such as inkjet printing. However, inkjet printing of BCB-based inks has not yet been investigated. Here, we show the feasibility of printing complex patterns with a BCB-based ink, reaching a resolution of 130 μm. We demonstrate that with a proper dilution, BCB-based inks enter the printability window and drop ejection is achieved without the formation of satellite drops. In addition, we present the conditions in which there is an appearance of the coffee ring effect. Inks that feature a too high interaction with the substrate are more likely to show the coffee ring effect, deteriorating the printing quality. We also observe that it is possible to achieve a better film uniformity by increasing the number of printed layers, due to redissolution of the BCB-based polymer that helps to level possible inhomogeneities. Our work represents the starting point for an in-depth study of BCB-based polymer fabrication using jet printing technologies, as a comparison of the bonding quality obtained with different materials and different technologies could give more information and broaden the perspective regarding this field.

Inkjet Printed ZnO Sensors for Early Prostate Cancer Detection by Means of Urine Odor Analysis

In the second half of the 20th century, inkjet printing has rapidly evolved from a mere digital image reproduction technique into a highly versatile materials deposition technology. Recently, inkjet production of metal oxide-based gas sensors (MOS) has emerged, and inkjet sensors have been proposed for different applications. In this context, this paper proposes the adoption of inkjet MOS sensors for urine analysis for the purpose of developing an innovative tool for the early prostate cancer (KP) diagnosis. Based on the results reported in the scientific literature, proving the correlation between urine color and odor alterations and cancer, the study focuses on the analysis by means of MOS sensor array of odors emanated from urine samples from prostate cancer patients versus healthy donors. The results achieved in terms of diagnostic accuracy, sensitivity, and specificity (i.e., about 80%) proved the potentialities of inkjet MOS sensor for the challenging purpose of detection of prostate cancer in its early stages. Resulting significantly more powerful than current KP diagnostic protocol, the approach here presented might become, after validation, a rapid, non-invasive and low-cost screening tool, capable to provide a solution to the problems of patients’ overtreatment and high health spending associated to procedures currently adopted.