1
|
San Gabriel ML, Qiu C, Yu D, Yaguchi T, Howe JY. Simultaneous secondary electron microscopy in the scanning transmission electron microscope with applications for in situ studies. Microscopy (Oxf) 2024; 73:169-183. [PMID: 38334743 DOI: 10.1093/jmicro/dfae007] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/15/2023] [Revised: 12/09/2023] [Accepted: 02/05/2024] [Indexed: 02/10/2024] Open
Abstract
Scanning/transmission electron microscopy (STEM) is a powerful characterization tool for a wide range of materials. Over the years, STEMs have been extensively used for in situ studies of structural evolution and dynamic processes. A limited number of STEM instruments are equipped with a secondary electron (SE) detector in addition to the conventional transmitted electron detectors, i.e. the bright-field (BF) and annular dark-field (ADF) detectors. Such instruments are capable of simultaneous BF-STEM, ADF-STEM and SE-STEM imaging. These methods can reveal the 'bulk' information from BF and ADF signals and the surface information from SE signals for materials <200 nm thick. This review first summarizes the field of in situ STEM research, followed by the generation of SE signals, SE-STEM instrumentation and applications of SE-STEM analysis. Combining with various in situ heating, gas reaction and mechanical testing stages based on microelectromechanical systems (MEMS), we show that simultaneous SE-STEM imaging has found applications in studying the dynamics and transient phenomena of surface reconstructions, exsolution of catalysts, lunar and planetary materials and mechanical properties of 2D thin films. Finally, we provide an outlook on the potential advancements in SE-STEM from the perspective of sample-related factors, instrument-related factors and data acquisition and processing.
Collapse
Affiliation(s)
- Mia L San Gabriel
- Department of Materials Science and Engineering, University of Toronto, 184 College St, Toronto, ON M5S 3E4,Canada
| | - Chenyue Qiu
- Department of Materials Science and Engineering, University of Toronto, 184 College St, Toronto, ON M5S 3E4,Canada
| | - Dian Yu
- Department of Materials Science and Engineering, University of Toronto, 184 College St, Toronto, ON M5S 3E4,Canada
| | - Toshie Yaguchi
- Electron Microscope Systems Design Department, Hitachi High-Tech Corporation, 552-53 shinko-cho, Hitachinaka-shi, Ibaraki-ken 312-8504, Japan
| | - Jane Y Howe
- Department of Materials Science and Engineering, University of Toronto, 184 College St, Toronto, ON M5S 3E4,Canada
- Department of Chemical Engineering, University of Toronto, 200 College St, Toronto, ON M5T 3E5, Canada
| |
Collapse
|
2
|
Katsuno H, Kimura Y, Yamazaki T, Takigawa I. Machine Learning Refinement of In Situ Images Acquired by Low Electron Dose LC-TEM. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2024; 30:77-84. [PMID: 38285924 DOI: 10.1093/micmic/ozad142] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/10/2023] [Revised: 11/21/2023] [Accepted: 12/21/2023] [Indexed: 01/31/2024]
Abstract
We have studied a machine learning (ML) technique for refining images acquired during in situ observation using liquid-cell transmission electron microscopy. Our model is constructed using a U-Net architecture and a ResNet encoder. For training our ML model, we prepared an original image dataset that contained pairs of images of samples acquired with and without a solution present. The former images were used as noisy images, and the latter images were used as corresponding ground truth images. The number of pairs of image sets was 1,204, and the image sets included images acquired at several different magnifications and electron doses. The trained model converted a noisy image into a clear image. The time necessary for the conversion was on the order of 10 ms, and we applied the model to in situ observations using the software Gatan DigitalMicrograph (DM). Even if a nanoparticle was not visible in a view window in the DM software because of the low electron dose, it was visible in a successive refined image generated by our ML model.
Collapse
Affiliation(s)
- Hiroyasu Katsuno
- Emerging Media Initiative, Kanazawa University, Kakuma-machi, Kanazawa, 920-1192 Ishikawa, Japan
| | - Yuki Kimura
- Institute of Low Temperature Science, Hokkaido University, Kita-19, Nishi-8, Kita-ku, Sapporo, 060-0819 Hokkaido, Japan
| | - Tomoya Yamazaki
- Institute of Low Temperature Science, Hokkaido University, Kita-19, Nishi-8, Kita-ku, Sapporo, 060-0819 Hokkaido, Japan
| | - Ichigaku Takigawa
- Institute for Liberal Arts and Sciences, Kyoto University, 302 Konoe-kae, 69 Konoe-cho, Sakyo-ku, Kyoto, 606-8315 Kyoto, Japan
- Institute for Chemical Reaction Design and Discovery, Hokkaido University, N21 W10, Kita-ku, Sapporo, 001-0021 Hokkaido, Japan
| |
Collapse
|
3
|
Egerton R, Hayashida M, Malac M. Transmission electron microscopy of thick polymer and biological specimens. Micron 2023; 169:103449. [PMID: 37001476 DOI: 10.1016/j.micron.2023.103449] [Citation(s) in RCA: 5] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/14/2023] [Revised: 03/22/2023] [Accepted: 03/22/2023] [Indexed: 03/30/2023]
Abstract
We explore the properties of elastic and inelastic scattering in a thick organic specimen, together with the mechanisms that provide contrast in a transmission electron microscope (TEM) and scanning-transmission electron microscope (STEM). Experimental data recorded from amorphous carbon are used to predict the bright-field image intensity, mass-thickness contrast and dose-limited resolution as a function of thickness, objective-aperture size, and primary-electron energy E0. Combining this information with estimates of chromatic aberration, objective-aperture diffraction and beam broadening in the specimen, we calculate the achievable TEM and STEM resolution to be around 4 nm at E0 = 300 keV (or below 3 nm at MeV energies) for a 10 µm-diameter objective aperture and 1 - 2 µm thickness of hydrated biological tissue. The 3 MeV resolution for a 10-μm tissue sample is probably closer to 10 nm. We also comment on the error involved in quadrature addition of resolution factors, when one or more of the point-spread functions are non-Gaussian.
Collapse
|
4
|
Li M, Ling L. Visualizing Dynamic Environmental Processes in Liquid at Nanoscale via Liquid-Phase Electron Microscopy. ACS NANO 2022; 16:15503-15511. [PMID: 35969015 DOI: 10.1021/acsnano.2c04246] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Visualizing the structure and processes in liquids at the nanoscale is essential for understanding the fundamental mechanisms and underlying processes of environmental research. Cutting-edge progress of in situ liquid-phase (scanning) transmission electron microscopy (LP-S/TEM) and inferred possible applications are highlighted as a more and more indispensable tool for visualization of dynamic environmental processes in this Perspective. Advancements in nanofabrication technology, high-speed imaging, comprehensive detectors, and spectroscopy analysis have made it increasingly convenient to use LP S/TEM, thus providing an approach for visualization of direct and insightful scientific information with the exciting possibility of solving an increasing number of tricky environmental problems. This includes evaluating the transformation fate and path of contamination, assessing toxicology of nanomaterials, simulating solid surface corrosion processes in the environment, and observing water pollution control processes. Distinct nanoscale or even atomic understanding of the reaction would provide dependable and precise identification and quantification of contaminants in dynamic processes, thus facilitating trouble-tracing of environmental problems with amplifying complexity.
Collapse
Affiliation(s)
- Meirong Li
- State Key Laboratory for Pollution Control and Resource Reuse, College of Environmental Science and Engineering, Shanghai Institute of Pollution Control and Ecological Security, Tongji University, Shanghai 200092, China
| | - Lan Ling
- State Key Laboratory for Pollution Control and Resource Reuse, College of Environmental Science and Engineering, Shanghai Institute of Pollution Control and Ecological Security, Tongji University, Shanghai 200092, China
| |
Collapse
|
5
|
Sung J, Bae Y, Park H, Kang S, Choi BK, Kim J, Park J. Liquid-Phase Transmission Electron Microscopy for Reliable In Situ Imaging of Nanomaterials. Annu Rev Chem Biomol Eng 2022; 13:167-191. [PMID: 35700529 DOI: 10.1146/annurev-chembioeng-092120-034534] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
Abstract
Liquid-phase transmission electron microscopy (LPTEM) is a powerful in situ visualization technique for directly characterizing nanomaterials in the liquid state. Despite its successful application in many fields, several challenges remain in achieving more accurate and reliable observations. We present LPTEM in chemical and biological applications, including studies for the morphological transformation and dynamics of nanoparticles, battery systems, catalysis, biomolecules, and organic systems. We describe the possible interactions and effects of the electron beam on specimens during observation and present sample-specific approaches to mitigate and control these electron-beam effects. We provide recent advances in achieving atomic-level resolution for liquid-phase investigation of structures anddynamics. Moreover, we discuss the development of liquid cell platforms and the introduction of machine-learning data processing for quantitative and objective LPTEM analysis.
Collapse
Affiliation(s)
- Jongbaek Sung
- School of Chemical and Biological Engineering, and Institute of Chemical Processes, Seoul National University, Seoul, Republic of Korea; , , , , , , .,Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul, Republic of Korea
| | - Yuna Bae
- School of Chemical and Biological Engineering, and Institute of Chemical Processes, Seoul National University, Seoul, Republic of Korea; , , , , , , .,Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul, Republic of Korea
| | - Hayoung Park
- School of Chemical and Biological Engineering, and Institute of Chemical Processes, Seoul National University, Seoul, Republic of Korea; , , , , , , .,Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul, Republic of Korea
| | - Sungsu Kang
- School of Chemical and Biological Engineering, and Institute of Chemical Processes, Seoul National University, Seoul, Republic of Korea; , , , , , , .,Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul, Republic of Korea
| | - Back Kyu Choi
- School of Chemical and Biological Engineering, and Institute of Chemical Processes, Seoul National University, Seoul, Republic of Korea; , , , , , , .,Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul, Republic of Korea
| | - Joodeok Kim
- School of Chemical and Biological Engineering, and Institute of Chemical Processes, Seoul National University, Seoul, Republic of Korea; , , , , , , .,Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul, Republic of Korea
| | - Jungwon Park
- School of Chemical and Biological Engineering, and Institute of Chemical Processes, Seoul National University, Seoul, Republic of Korea; , , , , , , .,Center for Nanoparticle Research, Institute for Basic Science (IBS), Seoul, Republic of Korea.,Institute of Engineering Research, College of Engineering, Seoul National University, Seoul, Republic of Korea.,Advanced Institutes of Convergence Technology, Seoul National University, Gwanggyo-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
| |
Collapse
|
6
|
Zaluzec NJ. X-ray Spectrometry in the Era of Aberration-Corrected Electron Optical Beam Lines. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2022; 29:1-7. [PMID: 35535554 DOI: 10.1017/s143192762200068x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Aberration correction in the analytical transmission electron microscope is most closely associated with improvements in high-resolution imaging. In this paper, the combination of that technology with new system designs, which optimize both electron optics and x-ray detection, is shown to provide more than a tenfold increase in performance over the last 25 years.
Collapse
Affiliation(s)
- Nestor J Zaluzec
- Photon Sciences Directorate, Argonne National Laboratory, Lemont, IL, USA
| |
Collapse
|
7
|
Ortega E, Boothroyd C, de Jonge N. The influence of chromatic aberration on the dose-limited spatial resolution of transmission electron microscopy. Ultramicroscopy 2021; 230:113383. [PMID: 34450389 DOI: 10.1016/j.ultramic.2021.113383] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/28/2021] [Revised: 08/11/2021] [Accepted: 08/15/2021] [Indexed: 11/15/2022]
Abstract
The effect of chromatic aberration (CC) on the spatial resolution in transmission electron microscopy (TEM) was studied in thick specimens in which the sample becomes the limiting factor in the resolution. The sample influences the energy spread of the electron beam, allows only a limited electron dose, and modulates electron scattering events. The experimental set-up consisted of a thin silicon nitride membrane and a silicon wedge containing gold nanoparticles. The resolution was measured as a function of electron dose and sample thickness for different sample configurations and for different microscopy modalities including regular TEM, energy filtered TEM (EFTEM) and CC-corrected TEM. Comparison with an analytical model aided the understanding of the experimental data applied over varied conditions. The general trend for all microscopy modalities was a transition from a noise-limited resolution at low electron dose to a CC-limited resolution at high-dose in the absence of beam blurring. EFTEM required an accurate energy slit offset and an optimal energy spread to energy-slit width ratio to surpass regular TEM. The key advantage of CC correction appeared to be the best possible resolution for larger sample thickness at low electron dose outperforming EFTEM by about fifty percent. Several hypothetical sample configurations relevant to liquid phase electron microscopy were evaluated as well to demonstrate the capabilities of the analytical model and to determine the most optimal microscopy modality for this type of experiment. The analytical model included an automated optimization of the EFTEM settings and may aid in optimizing the sample-limited resolution for experimental analysis and planning.
Collapse
Affiliation(s)
- Eduardo Ortega
- INM-Leibniz Institute for New Materials, Saarbrücken 66123, Germany
| | - Chris Boothroyd
- Facility for Analysis Characterisation Testing and Simulation and School of Materials Science and Engineering, Nanyang Technological University, 639798 Singapore
| | - Niels de Jonge
- INM-Leibniz Institute for New Materials, Saarbrücken 66123, Germany; Department of Physics, Saarland University, Saarbrücken 66123, Germany.
| |
Collapse
|
8
|
Park J, Koo K, Noh N, Chang JH, Cheong JY, Dae KS, Park JS, Ji S, Kim ID, Yuk JM. Graphene Liquid Cell Electron Microscopy: Progress, Applications, and Perspectives. ACS NANO 2021; 15:288-308. [PMID: 33395264 DOI: 10.1021/acsnano.0c10229] [Citation(s) in RCA: 28] [Impact Index Per Article: 9.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Graphene liquid cell electron microscopy (GLC-EM), a cutting-edge liquid-phase EM technique, has become a powerful tool to directly visualize wet biological samples and the microstructural dynamics of nanomaterials in liquids. GLC uses graphene sheets with a one carbon atom thickness as a viewing window and a liquid container. As a result, GLC facilitates atomic-scale observation while sustaining intact liquids inside an ultra-high-vacuum transmission electron microscopy chamber. Using GLC-EM, diverse scientific results have been recently reported in the material, colloidal, environmental, and life science fields. Here, the developments of GLC fabrications, such as first-generation veil-type cells, second-generation well-type cells, and third-generation liquid-flowing cells, are summarized. Moreover, recent GLC-EM studies on colloidal nanoparticles, battery electrodes, mineralization, and wet biological samples are also highlighted. Finally, the considerations and future opportunities associated with GLC-EM are discussed to offer broad understanding and insight on atomic-resolution imaging in liquid-state dynamics.
Collapse
Affiliation(s)
- Jungjae Park
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Kunmo Koo
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Namgyu Noh
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Joon Ha Chang
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Jun Young Cheong
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Kyun Seong Dae
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Ji Su Park
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Sanghyeon Ji
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Il-Doo Kim
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| | - Jong Min Yuk
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
| |
Collapse
|
9
|
Wu H, Friedrich H, Patterson JP, Sommerdijk NAJM, de Jonge N. Liquid-Phase Electron Microscopy for Soft Matter Science and Biology. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2020; 32:e2001582. [PMID: 32419161 DOI: 10.1002/adma.202001582] [Citation(s) in RCA: 25] [Impact Index Per Article: 6.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/05/2020] [Revised: 04/05/2020] [Accepted: 04/06/2020] [Indexed: 05/20/2023]
Abstract
Innovations in liquid-phase electron microscopy (LP-EM) have made it possible to perform experiments at the optimized conditions needed to examine soft matter. The main obstacle is conducting experiments in such a way that electron beam radiation can be used to obtain answers for scientific questions without changing the structure and (bio)chemical processes in the sample due to the influence of the radiation. By overcoming these experimental difficulties at least partially, LP-EM has evolved into a new microscopy method with nanometer spatial resolution and sub-second temporal resolution for analysis of soft matter in materials science and biology. Both experimental design and applications of LP-EM for soft matter materials science and biological research are reviewed, and a perspective of possible future directions is given.
Collapse
Affiliation(s)
- Hanglong Wu
- Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Eindhoven, 5600 MB, The Netherlands
| | - Heiner Friedrich
- Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Eindhoven, 5600 MB, The Netherlands
- Institute for Complex Molecular Systems, Eindhoven University of Technology, Eindhoven, 5600 MB, The Netherlands
| | - Joseph P Patterson
- Department of Chemistry, University of California, Irvine, CA, 92697, USA
| | - Nico A J M Sommerdijk
- Department of Biochemistry, Radboud University Medical Center, Nijmegen, 6500 HB, The Netherlands
| | - Niels de Jonge
- INM - Leibniz Institute for New Materials, Saarbrücken, 66123, Germany
- Department of Physics, Saarland University, Saarbrücken, 66123, Germany
| |
Collapse
|
10
|
The scientific careers of Robert Sinclair and Nestor Zaluzec - A brief sketch. Ultramicroscopy 2017; 176:2-4. [DOI: 10.1016/j.ultramic.2016.12.010] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/04/2016] [Revised: 12/05/2016] [Accepted: 12/08/2016] [Indexed: 11/18/2022]
|
11
|
Zaluzec NJ. Theoretical and Experimental X-Ray Peak/Background Ratios and Implications for Energy-Dispersive Spectrometry in the Next-Generation Analytical Electron Microscope. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2016; 22:230-236. [PMID: 26794345 DOI: 10.1017/s1431927615015755] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
Modern analytical electron microscopes equipped with silicon drift detectors now allow for a wide range of geometrical configurations capable of performing quantitative X-ray spectrometry. Recent work has improved the collection solid angles of these detectors, however, the impact of increasing the solid angle on detection sensitivity as measured by the peak/background ratio has not been addressed. This work compares theoretical and experimental peak/background ratios for incident electron energies in the range of 20-200 keV, with X-ray detectors in both conventional orientations (on the electron entrance surface) as well as new geometries (the electron exit surface). The implications of these parameters on detectability limits for the next generations of "Lab-in-the-Gap" analytical microscope are also considered. It was found that theoretical calculations of the angular distribution of bremsstrahlung and their effects on the peak/background ratio match well with experimental measurements, and indicate that new geometries which can result in large solid angles provided an added benefit in addition to increased characteristic signal, namely increased sensitivity for the analyst.
Collapse
Affiliation(s)
- Nestor J Zaluzec
- Argonne National Laboratory,Electron Microscopy Center,Center for Nanoscale Materials, Argonne,60439 Illinois,USA
| |
Collapse
|